JP2006066590A - 縦型熱処理装置及びその処理容器急速降温方法 - Google Patents
縦型熱処理装置及びその処理容器急速降温方法 Download PDFInfo
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- JP2006066590A JP2006066590A JP2004246578A JP2004246578A JP2006066590A JP 2006066590 A JP2006066590 A JP 2006066590A JP 2004246578 A JP2004246578 A JP 2004246578A JP 2004246578 A JP2004246578 A JP 2004246578A JP 2006066590 A JP2006066590 A JP 2006066590A
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- exhaust
- exhaust port
- auxiliary heater
- heater
- processing container
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 9
- 238000001816 cooling Methods 0.000 claims abstract description 32
- 238000012545 processing Methods 0.000 claims description 71
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000005108 dry cleaning Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 239000000498 cooling water Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Abstract
【解決手段】 被処理体wを収容して熱処理する処理容器2と、該処理容器2の周囲を囲んで加熱する急速冷却機能を有する主ヒータ7と、処理容器2の上部に排気管5を接続するために屈曲形成された排気口部6と、該排気口部6を加熱するために設けられた補助ヒータ20とを備えた縦型熱処理装置1であって、前記補助ヒータ20に主ヒータ7の急速冷却時に該補助ヒータ20を排気口部6から退避させるための移動機構21を設けると共に、排気口部6周辺の雰囲気を強制排気するための強制排気機構22を設けている。
【選択図】 図1
Description
1 縦型熱処理装置
2 処理容器
5 排気管
6 排気口部
7 主ヒータ
20 補助ヒータ
21 移動機構
22 強制排気機構
23 遮熱カバー
24 排気用配管
Claims (5)
- 被処理体を収容して熱処理する処理容器と、該処理容器の周囲を囲んで加熱する急速冷却機能を有する主ヒータと、処理容器の上部に排気管を接続するために屈曲形成された排気口部と、該排気口部を加熱するために設けられた補助ヒータとを備えた縦型熱処理装置であって、前記補助ヒータに主ヒータの急速冷却時に該補助ヒータを排気口部から退避させるための移動機構を設けると共に、排気口部周辺の雰囲気を強制排気するための強制排気機構を設けたことを特徴とする縦型熱処理装置。
- 前記強制排気機構は、補助ヒータが退避した時の排気口部を覆うと共に退避した補助ヒータの内部と連通する遮熱カバーと、該遮熱カバーに接続されて遮熱カバー内を強制排気する排気用配管とを備えていることを特徴とする請求項1記載の縦型熱処理装置。
- 前記遮熱カバーは、水冷構造とされていることを特徴とする請求項2記載の縦型熱処理装置。
- 主ヒータには該主ヒータ内を強制排気するための排気ダクトが接続され、該排気ダクトに前記補助ヒータの強制排気機構の排気用配管が接続されていることを特徴とする請求項1又は2記載の縦型熱処理装置。
- 被処理体を収容して熱処理する処理容器と、該処理容器の周囲を囲んで加熱する急速冷却機能を有する主ヒータと、処理容器の上部に排気管を接続するために屈曲形成された排気口部と、該排気口部を加熱するために設けられた補助ヒータと、主ヒータの急速冷却時に補助ヒータを排気口部から退避させるための移動機構と、排気口部周辺の雰囲気を強制排気するための強制排気機構とを備えた縦型熱処理装置の処理容器内をドライクリーニングするに際して、前記主ヒータ内を急速冷却すると共に、前記補助ヒータの退避及び排気口部周辺の強制排気を行い、処理容器及び排気口部を急速降温させることを特徴とする縦型熱処理装置の処理容器急速降温方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004246578A JP4503397B2 (ja) | 2004-08-26 | 2004-08-26 | 縦型熱処理装置及びその処理容器急速降温方法 |
EP05775200A EP1801862A4 (en) | 2004-08-26 | 2005-08-24 | VERTICAL HEAT TREATMENT DEVICE AND METHOD FOR THEIR USE |
PCT/JP2005/015367 WO2006022303A1 (ja) | 2004-08-26 | 2005-08-24 | 縦型熱処理装置及びその使用方法 |
US11/660,898 US7935188B2 (en) | 2004-08-26 | 2005-08-24 | Vertical thermal processing apparatus and method of using the same |
KR1020067014057A KR100958766B1 (ko) | 2004-08-26 | 2005-08-24 | 종형 열처리 장치 및 그 사용 방법과, 컴퓨터 판독 가능한 기록 매체 |
CNB200580000806XA CN100474525C (zh) | 2004-08-26 | 2005-08-24 | 立式热处理装置及其使用方法 |
TW094129403A TW200623262A (en) | 2004-08-26 | 2005-08-26 | Vertical heat treatment apparatus and method of rapid heat reduction of its treatment container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004246578A JP4503397B2 (ja) | 2004-08-26 | 2004-08-26 | 縦型熱処理装置及びその処理容器急速降温方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006066590A true JP2006066590A (ja) | 2006-03-09 |
JP4503397B2 JP4503397B2 (ja) | 2010-07-14 |
Family
ID=35967511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004246578A Expired - Fee Related JP4503397B2 (ja) | 2004-08-26 | 2004-08-26 | 縦型熱処理装置及びその処理容器急速降温方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7935188B2 (ja) |
EP (1) | EP1801862A4 (ja) |
JP (1) | JP4503397B2 (ja) |
KR (1) | KR100958766B1 (ja) |
CN (1) | CN100474525C (ja) |
TW (1) | TW200623262A (ja) |
WO (1) | WO2006022303A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008078196A (ja) * | 2006-09-19 | 2008-04-03 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4335908B2 (ja) * | 2006-12-22 | 2009-09-30 | 東京エレクトロン株式会社 | 縦型熱処理装置及び縦型熱処理方法 |
KR101387817B1 (ko) * | 2007-02-19 | 2014-04-21 | 닛폰 하츠죠 가부시키가이샤 | 열교환기 및 종형 열처리장치 |
JP5504793B2 (ja) * | 2009-09-26 | 2014-05-28 | 東京エレクトロン株式会社 | 熱処理装置及び冷却方法 |
KR101094279B1 (ko) * | 2009-11-06 | 2011-12-19 | 삼성모바일디스플레이주식회사 | 가열 수단 및 이를 포함하는 기판 가공 장치 |
CN102925873A (zh) * | 2011-08-09 | 2013-02-13 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 反应腔室控温装置及应用该控温装置的半导体处理设备 |
TWI442013B (zh) * | 2011-10-04 | 2014-06-21 | Kern Energy Entpr Co Ltd | 熱處理爐結構 |
JP6616265B2 (ja) * | 2015-10-16 | 2019-12-04 | 株式会社Kokusai Electric | 加熱部、基板処理装置、及び半導体装置の製造方法 |
TWI805287B (zh) * | 2021-04-14 | 2023-06-11 | 大陸商北京北方華創微電子裝備有限公司 | 半導體熱處理設備 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01273311A (ja) * | 1988-02-11 | 1989-11-01 | Soehlbrand Heinrich | 半導体材料の熱処理方法とその装置 |
JP2001280848A (ja) * | 2000-03-31 | 2001-10-10 | Hitachi Kokusai Electric Inc | 熱処理装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4753192A (en) * | 1987-01-08 | 1988-06-28 | Btu Engineering Corporation | Movable core fast cool-down furnace |
JPH0645335A (ja) | 1992-07-24 | 1994-02-18 | Nec Corp | 半導体装置の配線修正装置 |
JP2586600Y2 (ja) * | 1992-11-19 | 1998-12-09 | 大日本スクリーン製造株式会社 | 基板加熱処理装置 |
JP3218164B2 (ja) * | 1995-05-31 | 2001-10-15 | 東京エレクトロン株式会社 | 被処理体の支持ボート、熱処理装置及び熱処理方法 |
JPH0997787A (ja) * | 1995-09-30 | 1997-04-08 | Tokyo Electron Ltd | 処理装置 |
US20030164225A1 (en) * | 1998-04-20 | 2003-09-04 | Tadashi Sawayama | Processing apparatus, exhaust processing process and plasma processing |
JP2003209063A (ja) * | 2001-11-08 | 2003-07-25 | Tokyo Electron Ltd | 熱処理装置および熱処理方法 |
US7256370B2 (en) * | 2002-03-15 | 2007-08-14 | Steed Technology, Inc. | Vacuum thermal annealer |
-
2004
- 2004-08-26 JP JP2004246578A patent/JP4503397B2/ja not_active Expired - Fee Related
-
2005
- 2005-08-24 KR KR1020067014057A patent/KR100958766B1/ko not_active IP Right Cessation
- 2005-08-24 WO PCT/JP2005/015367 patent/WO2006022303A1/ja active Application Filing
- 2005-08-24 CN CNB200580000806XA patent/CN100474525C/zh not_active Expired - Fee Related
- 2005-08-24 EP EP05775200A patent/EP1801862A4/en not_active Withdrawn
- 2005-08-24 US US11/660,898 patent/US7935188B2/en not_active Expired - Fee Related
- 2005-08-26 TW TW094129403A patent/TW200623262A/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01273311A (ja) * | 1988-02-11 | 1989-11-01 | Soehlbrand Heinrich | 半導体材料の熱処理方法とその装置 |
JP2001280848A (ja) * | 2000-03-31 | 2001-10-10 | Hitachi Kokusai Electric Inc | 熱処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008078196A (ja) * | 2006-09-19 | 2008-04-03 | Hitachi Kokusai Electric Inc | 基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
EP1801862A4 (en) | 2009-03-11 |
KR20070044798A (ko) | 2007-04-30 |
EP1801862A1 (en) | 2007-06-27 |
TW200623262A (en) | 2006-07-01 |
JP4503397B2 (ja) | 2010-07-14 |
CN1842898A (zh) | 2006-10-04 |
CN100474525C (zh) | 2009-04-01 |
WO2006022303A1 (ja) | 2006-03-02 |
US7935188B2 (en) | 2011-05-03 |
TWI361463B (ja) | 2012-04-01 |
US20080187652A1 (en) | 2008-08-07 |
KR100958766B1 (ko) | 2010-05-18 |
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