JP2006016144A - トランスファロボット - Google Patents

トランスファロボット Download PDF

Info

Publication number
JP2006016144A
JP2006016144A JP2004195470A JP2004195470A JP2006016144A JP 2006016144 A JP2006016144 A JP 2006016144A JP 2004195470 A JP2004195470 A JP 2004195470A JP 2004195470 A JP2004195470 A JP 2004195470A JP 2006016144 A JP2006016144 A JP 2006016144A
Authority
JP
Japan
Prior art keywords
workpiece
transfer robot
stage
slide arm
air vent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004195470A
Other languages
English (en)
Japanese (ja)
Inventor
Kunio Fukuma
邦夫 福間
Kiyoko Takarabe
清子 寶邉
Mineji Mori
嶺治 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Daiichi Institution Industry Co Ltd
Original Assignee
Daihen Corp
Daiichi Institution Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp, Daiichi Institution Industry Co Ltd filed Critical Daihen Corp
Priority to JP2004195470A priority Critical patent/JP2006016144A/ja
Priority to TW094121400A priority patent/TW200603966A/zh
Priority to KR1020050057944A priority patent/KR20060049255A/ko
Publication of JP2006016144A publication Critical patent/JP2006016144A/ja
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/065—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with separating means for releasing the gripped object after suction
    • B25J15/0658—Pneumatic type, e.g. air blast or overpressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
JP2004195470A 2004-07-01 2004-07-01 トランスファロボット Withdrawn JP2006016144A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004195470A JP2006016144A (ja) 2004-07-01 2004-07-01 トランスファロボット
TW094121400A TW200603966A (en) 2004-07-01 2005-06-27 Transfer robot
KR1020050057944A KR20060049255A (ko) 2004-07-01 2005-06-30 트랜스퍼 로봇

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004195470A JP2006016144A (ja) 2004-07-01 2004-07-01 トランスファロボット

Publications (1)

Publication Number Publication Date
JP2006016144A true JP2006016144A (ja) 2006-01-19

Family

ID=35790735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004195470A Withdrawn JP2006016144A (ja) 2004-07-01 2004-07-01 トランスファロボット

Country Status (3)

Country Link
JP (1) JP2006016144A (enExample)
KR (1) KR20060049255A (enExample)
TW (1) TW200603966A (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100993453B1 (ko) 2007-06-22 2010-11-09 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 반송 장치
JP2012084725A (ja) * 2010-10-13 2012-04-26 Tokyo Electron Ltd 基板処理システム及び基板搬送方法
CN102922525A (zh) * 2012-10-24 2013-02-13 宁波江丰生物信息技术有限公司 机械手、玻片自动装卸系统和数字病理切片扫描仪
WO2013042185A1 (ja) * 2011-09-20 2013-03-28 株式会社安川電機 ハンドリングシステム
KR101250584B1 (ko) * 2009-12-01 2013-04-03 도쿄엘렉트론가부시키가이샤 기판 반송 장치 및 기판 처리 시스템
KR101321618B1 (ko) 2007-09-13 2013-10-23 가부시키가이샤 야스카와덴키 이송 로봇 및 이의 제어 방법
DE102014009122A1 (de) 2013-06-26 2014-12-31 Fanuc Corporation Roboterhand zum fördern eines gegenstandes, roboter und robotersystem mit einer roboterhand, und verfahren zum steuern einer roboterhand
KR101606259B1 (ko) 2014-02-18 2016-03-24 (주) 러스 트랜스퍼용 수평 운송 암 및 이 수평 운송 암이 적용된 트랜스퍼 로봇
CN109695363A (zh) * 2017-10-24 2019-04-30 刘思邦 塔式立体停车库
CN110997246A (zh) * 2017-07-28 2020-04-10 日本电产三协株式会社 工业用机器人
CN111017541A (zh) * 2019-11-19 2020-04-17 哈工大机器人南昌智能制造研究院 一种板类零件的转运装置及其转运方法
JP2020193056A (ja) * 2019-05-27 2020-12-03 株式会社メイキコウ 荷下ろし装置
WO2021095169A1 (ja) * 2019-11-13 2021-05-20 株式会社安川電機 バッテリー装着システム及びバッテリー装着方法
JP2022049332A (ja) * 2020-09-16 2022-03-29 芝浦メカトロニクス株式会社 基板搬送装置
CN115431584A (zh) * 2022-09-05 2022-12-06 格林美（天津）城市矿产循环产业发展有限公司 一种报废汽车压扁系统
TWI834061B (zh) * 2021-09-10 2024-03-01 鴻勁精密股份有限公司 載送機構及其應用之輸送裝置、作業機

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101386035B1 (ko) * 2012-03-16 2014-04-24 (주)동부로봇 다단 슬라이드형 기판이송장치
TW201507829A (zh) * 2013-08-23 2015-03-01 Chiuan Yan Technology Co Ltd 升降取送裝置
CN109407359A (zh) * 2018-10-29 2019-03-01 武汉华星光电技术有限公司 机械手
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100993453B1 (ko) 2007-06-22 2010-11-09 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 반송 장치
KR101321684B1 (ko) 2007-09-13 2013-10-23 가부시키가이샤 야스카와덴키 이송 로봇 및 이의 제어 방법
KR101321618B1 (ko) 2007-09-13 2013-10-23 가부시키가이샤 야스카와덴키 이송 로봇 및 이의 제어 방법
KR101250584B1 (ko) * 2009-12-01 2013-04-03 도쿄엘렉트론가부시키가이샤 기판 반송 장치 및 기판 처리 시스템
TWI549215B (zh) * 2010-10-13 2016-09-11 東京威力科創股份有限公司 Substrate processing system and substrate transfer method
CN102446792A (zh) * 2010-10-13 2012-05-09 东京毅力科创株式会社 基板处理系统和基板输送方法
CN102446792B (zh) * 2010-10-13 2014-09-17 东京毅力科创株式会社 基板处理系统和基板输送方法
JP2012084725A (ja) * 2010-10-13 2012-04-26 Tokyo Electron Ltd 基板処理システム及び基板搬送方法
WO2013042185A1 (ja) * 2011-09-20 2013-03-28 株式会社安川電機 ハンドリングシステム
CN103857497A (zh) * 2011-09-20 2014-06-11 株式会社安川电机 处理系统
JPWO2013042185A1 (ja) * 2011-09-20 2015-03-26 株式会社安川電機 ハンドリングシステム
CN103857497B (zh) * 2011-09-20 2015-09-09 株式会社安川电机 处理系统
CN102922525A (zh) * 2012-10-24 2013-02-13 宁波江丰生物信息技术有限公司 机械手、玻片自动装卸系统和数字病理切片扫描仪
DE102014009122A1 (de) 2013-06-26 2014-12-31 Fanuc Corporation Roboterhand zum fördern eines gegenstandes, roboter und robotersystem mit einer roboterhand, und verfahren zum steuern einer roboterhand
US9751217B2 (en) 2013-06-26 2017-09-05 Fanuc Corporation Robot hand for transporting article, robot and robot system provided with robot hand, and method for controlling robot hand
DE102014009122B4 (de) * 2013-06-26 2025-09-11 Fanuc Corporation Robotersystem und verfahren zum steuern einer roboterhand
KR101606259B1 (ko) 2014-02-18 2016-03-24 (주) 러스 트랜스퍼용 수평 운송 암 및 이 수평 운송 암이 적용된 트랜스퍼 로봇
CN110997246A (zh) * 2017-07-28 2020-04-10 日本电产三协株式会社 工业用机器人
CN109695363A (zh) * 2017-10-24 2019-04-30 刘思邦 塔式立体停车库
JP2020193056A (ja) * 2019-05-27 2020-12-03 株式会社メイキコウ 荷下ろし装置
JP7179680B2 (ja) 2019-05-27 2022-11-29 株式会社メイキコウ 荷下ろし装置
WO2021095169A1 (ja) * 2019-11-13 2021-05-20 株式会社安川電機 バッテリー装着システム及びバッテリー装着方法
JPWO2021095169A1 (enExample) * 2019-11-13 2021-05-20
JP7243855B2 (ja) 2019-11-13 2023-03-22 株式会社安川電機 バッテリー装着システム及びバッテリー装着方法
CN111017541A (zh) * 2019-11-19 2020-04-17 哈工大机器人南昌智能制造研究院 一种板类零件的转运装置及其转运方法
JP2022049332A (ja) * 2020-09-16 2022-03-29 芝浦メカトロニクス株式会社 基板搬送装置
JP7425701B2 (ja) 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
TWI834061B (zh) * 2021-09-10 2024-03-01 鴻勁精密股份有限公司 載送機構及其應用之輸送裝置、作業機
CN115431584A (zh) * 2022-09-05 2022-12-06 格林美（天津）城市矿产循环产业发展有限公司 一种报废汽车压扁系统

Also Published As

Publication number Publication date
TW200603966A (en) 2006-02-01
KR20060049255A (ko) 2006-05-18
TWI294336B (enExample) 2008-03-11

Similar Documents

Publication Publication Date Title
JP2006016144A (ja) トランスファロボット
JP4197129B2 (ja) ワーク搬送装置
JP4436689B2 (ja) ガラス基板の搬送システム
JP5610330B2 (ja) コンベアの搬送性能を強化するシステム
KR101149952B1 (ko) 트랜스퍼 로봇
WO2005002804A1 (ja) 搬送装置、薄板状物の搬送方法、及び薄板状物製造システム
JP2013000839A (ja) 搬送ロボット
JP2008272864A (ja) 産業用ロボット及び集合処理装置
WO2007150039A2 (en) Method and apparatus for transporting substrates
JP2003197713A (ja) 基板処理装置および基板処理方法
TWI484581B (zh) Substrate handling device
JP4904722B2 (ja) 基板搬送装置
TWI351370B (enExample)
JPH11188669A (ja) 搬送装置
WO2005004230A1 (ja) 薄板状基板の搬送装置、及びその搬送制御方法
KR20120026457A (ko) 기판 받아넘김 장치 및 기판 받아넘김 방법
TW201144195A (en) Transport device and transport method
JP2008066661A (ja) 基板搬送装置及び基板搬送方法
JP2005064431A (ja) 基板搬送装置及び基板搬送方法
JP2006327819A (ja) ガラス板の移載装置および移載方法
JP4715088B2 (ja) 基板搬送装置及び基板保管搬送装置
JP2008159784A (ja) ステージ装置
CN213111360U (zh) 一种柔性屏激光修复生产线
JP2003037145A (ja) ウエハ搬送装置
JP7219106B2 (ja) 基板搬送システムおよび基板搬送システムの制御方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070626

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20070703

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20070703

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20100114