KR20060049255A - 트랜스퍼 로봇 - Google Patents

트랜스퍼 로봇 Download PDF

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Publication number
KR20060049255A
KR20060049255A KR1020050057944A KR20050057944A KR20060049255A KR 20060049255 A KR20060049255 A KR 20060049255A KR 1020050057944 A KR1020050057944 A KR 1020050057944A KR 20050057944 A KR20050057944 A KR 20050057944A KR 20060049255 A KR20060049255 A KR 20060049255A
Authority
KR
South Korea
Prior art keywords
work
workpiece
stage
slide arm
transfer robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020050057944A
Other languages
English (en)
Korean (ko)
Inventor
쿠니오 후쿠마
키요코 호나베
료지 모리
Original Assignee
가부시키가이샤 다이헨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다이헨 filed Critical 가부시키가이샤 다이헨
Publication of KR20060049255A publication Critical patent/KR20060049255A/ko
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/065—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with separating means for releasing the gripped object after suction
    • B25J15/0658—Pneumatic type, e.g. air blast or overpressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1020050057944A 2004-07-01 2005-06-30 트랜스퍼 로봇 Withdrawn KR20060049255A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004195470A JP2006016144A (ja) 2004-07-01 2004-07-01 トランスファロボット
JPJP-P-2004-00195470 2004-07-01

Publications (1)

Publication Number Publication Date
KR20060049255A true KR20060049255A (ko) 2006-05-18

Family

ID=35790735

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050057944A Withdrawn KR20060049255A (ko) 2004-07-01 2005-06-30 트랜스퍼 로봇

Country Status (3)

Country Link
JP (1) JP2006016144A (enExample)
KR (1) KR20060049255A (enExample)
TW (1) TW200603966A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101386297B1 (ko) * 2010-10-13 2014-04-18 도쿄엘렉트론가부시키가이샤 기판 처리 시스템 및 기판 반송 방법
KR101386035B1 (ko) * 2012-03-16 2014-04-24 (주)동부로봇 다단 슬라이드형 기판이송장치
WO2020087606A1 (zh) * 2018-10-29 2020-05-07 武汉华星光电技术有限公司 机械手

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5013987B2 (ja) 2007-06-22 2012-08-29 東京エレクトロン株式会社 基板処理装置および基板搬送装置
KR101321618B1 (ko) 2007-09-13 2013-10-23 가부시키가이샤 야스카와덴키 이송 로봇 및 이의 제어 방법
JP5480605B2 (ja) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 基板搬送装置および基板処理システム
CN103857497B (zh) * 2011-09-20 2015-09-09 株式会社安川电机 处理系统
CN102922525B (zh) * 2012-10-24 2015-11-25 宁波江丰生物信息技术有限公司 机械手、玻片自动装卸系统和数字病理切片扫描仪
JP5717797B2 (ja) 2013-06-26 2015-05-13 ファナック株式会社 物品を搬送するためのロボットハンド、ロボットハンドを備えたロボットおよびロボットシステム、ならびにロボットハンドの制御方法
TW201507829A (zh) * 2013-08-23 2015-03-01 Chiuan Yan Technology Co Ltd 升降取送裝置
KR101606259B1 (ko) 2014-02-18 2016-03-24 (주) 러스 트랜스퍼용 수평 운송 암 및 이 수평 운송 암이 적용된 트랜스퍼 로봇
JP6869137B2 (ja) * 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
CN109695363A (zh) * 2017-10-24 2019-04-30 刘思邦 塔式立体停车库
JP7179680B2 (ja) * 2019-05-27 2022-11-29 株式会社メイキコウ 荷下ろし装置
CN110587635A (zh) * 2019-08-02 2019-12-20 湖南海纳赋能科技有限公司 一种用于寄存柜中的智能存储机械手
JP7243855B2 (ja) * 2019-11-13 2023-03-22 株式会社安川電機 バッテリー装着システム及びバッテリー装着方法
CN111017541A (zh) * 2019-11-19 2020-04-17 哈工大机器人南昌智能制造研究院 一种板类零件的转运装置及其转运方法
JP7425701B2 (ja) * 2020-09-16 2024-01-31 芝浦メカトロニクス株式会社 基板搬送装置
TWI834061B (zh) * 2021-09-10 2024-03-01 鴻勁精密股份有限公司 載送機構及其應用之輸送裝置、作業機
CN115431584A (zh) * 2022-09-05 2022-12-06 格林美（天津）城市矿产循环产业发展有限公司 一种报废汽车压扁系统

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101386297B1 (ko) * 2010-10-13 2014-04-18 도쿄엘렉트론가부시키가이샤 기판 처리 시스템 및 기판 반송 방법
KR101453222B1 (ko) * 2010-10-13 2014-10-22 도쿄엘렉트론가부시키가이샤 기판 처리 시스템
KR101386035B1 (ko) * 2012-03-16 2014-04-24 (주)동부로봇 다단 슬라이드형 기판이송장치
WO2020087606A1 (zh) * 2018-10-29 2020-05-07 武汉华星光电技术有限公司 机械手

Also Published As

Publication number Publication date
TW200603966A (en) 2006-02-01
JP2006016144A (ja) 2006-01-19
TWI294336B (enExample) 2008-03-11

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20050630

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid