JP2005533907A5 - - Google Patents
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- Publication number
- JP2005533907A5 JP2005533907A5 JP2004524696A JP2004524696A JP2005533907A5 JP 2005533907 A5 JP2005533907 A5 JP 2005533907A5 JP 2004524696 A JP2004524696 A JP 2004524696A JP 2004524696 A JP2004524696 A JP 2004524696A JP 2005533907 A5 JP2005533907 A5 JP 2005533907A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- fluorine
- containing copolymer
- alkyl group
- repeating unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052731 fluorine Inorganic materials 0.000 claims description 37
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 29
- 229920001577 copolymer Polymers 0.000 claims description 29
- 239000011737 fluorine Substances 0.000 claims description 29
- 150000001875 compounds Chemical class 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 20
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 13
- 125000003367 polycyclic group Chemical group 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 125000000524 functional group Chemical group 0.000 claims description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 7
- 229910052717 sulfur Inorganic materials 0.000 claims description 7
- 125000006527 (C1-C5) alkyl group Chemical group 0.000 claims description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 6
- 125000004122 cyclic group Chemical group 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 125000006239 protecting group Chemical group 0.000 claims description 4
- 150000001721 carbon Chemical class 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- ZEFPSJCRLPUDJQ-UHFFFAOYSA-N (2-hydroxy-1-adamantyl) prop-2-enoate Chemical compound C1C(C2)CC3CC1C(O)C2(OC(=O)C=C)C3 ZEFPSJCRLPUDJQ-UHFFFAOYSA-N 0.000 claims description 2
- YRPLSAWATHBYFB-UHFFFAOYSA-N (2-methyl-2-adamantyl) prop-2-enoate Chemical compound C1C(C2)CC3CC1C(C)(OC(=O)C=C)C2C3 YRPLSAWATHBYFB-UHFFFAOYSA-N 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- 125000005599 alkyl carboxylate group Chemical group 0.000 claims description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 2
- 238000004090 dissolution Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 125000001153 fluoro group Chemical group F* 0.000 claims description 2
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims description 2
- 239000003112 inhibitor Substances 0.000 claims description 2
- SVBJTBWVTZLHIZ-UHFFFAOYSA-N tert-butyl 2-(hydroxymethyl)prop-2-enoate Chemical compound CC(C)(C)OC(=O)C(=C)CO SVBJTBWVTZLHIZ-UHFFFAOYSA-N 0.000 claims description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 241000630665 Hada Species 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- -1 chlorotrifluoroethylene, hexafluoropropylene, trifluoroethylene Chemical group 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 125000000008 (C1-C10) alkyl group Chemical group 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US39889902P | 2002-07-26 | 2002-07-26 | |
| PCT/US2003/022912 WO2004011509A1 (en) | 2002-07-26 | 2003-07-23 | Fluorinated polymers, photoresists and processes for microlithography |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005533907A JP2005533907A (ja) | 2005-11-10 |
| JP2005533907A5 true JP2005533907A5 (enExample) | 2006-08-24 |
| JP4303202B2 JP4303202B2 (ja) | 2009-07-29 |
Family
ID=31188514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004524696A Expired - Fee Related JP4303202B2 (ja) | 2002-07-26 | 2003-07-23 | 弗素化ポリマー、フォトレジストおよびミクロ平版印刷のための方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20050203262A1 (enExample) |
| EP (1) | EP1551887A4 (enExample) |
| JP (1) | JP4303202B2 (enExample) |
| KR (1) | KR20050030639A (enExample) |
| CN (1) | CN1678646A (enExample) |
| AU (1) | AU2003254112A1 (enExample) |
| CA (1) | CA2493926A1 (enExample) |
| TW (1) | TW200403262A (enExample) |
| WO (1) | WO2004011509A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4772288B2 (ja) * | 2003-06-05 | 2011-09-14 | 東京応化工業株式会社 | ホトレジスト組成物用樹脂、ホトレジスト組成物、およびレジストパターン形成方法 |
| JP4188265B2 (ja) | 2003-10-23 | 2008-11-26 | 東京応化工業株式会社 | レジスト組成物およびレジストパターン形成方法 |
| US7846637B2 (en) * | 2004-04-27 | 2010-12-07 | Tokyo Ohka Kogyo Co., Ltd. | Material for forming resist protective film for use in liquid immersion lithography process and method for forming resist pattern using the protective film |
| US7507522B2 (en) * | 2004-05-20 | 2009-03-24 | E. I. Dupont De Nemours And Company | Photoresists comprising polymers derived from fluoroalcohol-substituted polycyclic monomers |
| US7960087B2 (en) * | 2005-03-11 | 2011-06-14 | Fujifilm Corporation | Positive photosensitive composition and pattern-forming method using the same |
| US8530148B2 (en) | 2006-12-25 | 2013-09-10 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
| US8637229B2 (en) * | 2006-12-25 | 2014-01-28 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
| JP4554665B2 (ja) | 2006-12-25 | 2010-09-29 | 富士フイルム株式会社 | パターン形成方法、該パターン形成方法に用いられる多重現像用ポジ型レジスト組成物、該パターン形成方法に用いられるネガ現像用現像液及び該パターン形成方法に用いられるネガ現像用リンス液 |
| US8034547B2 (en) | 2007-04-13 | 2011-10-11 | Fujifilm Corporation | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method |
| US8603733B2 (en) | 2007-04-13 | 2013-12-10 | Fujifilm Corporation | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method |
| WO2008129964A1 (ja) | 2007-04-13 | 2008-10-30 | Fujifilm Corporation | パターン形成方法、該パターン形成方法に用いられるレジスト組成物、現像液及びリンス液 |
| JP4558064B2 (ja) | 2007-05-15 | 2010-10-06 | 富士フイルム株式会社 | パターン形成方法 |
| US8476001B2 (en) | 2007-05-15 | 2013-07-02 | Fujifilm Corporation | Pattern forming method |
| JP4617337B2 (ja) * | 2007-06-12 | 2011-01-26 | 富士フイルム株式会社 | パターン形成方法 |
| US8617794B2 (en) | 2007-06-12 | 2013-12-31 | Fujifilm Corporation | Method of forming patterns |
| KR101452229B1 (ko) | 2007-06-12 | 2014-10-22 | 후지필름 가부시키가이샤 | 네가티브 톤 현상용 레지스트 조성물 및 이것을 사용한 패턴형성방법 |
| US8632942B2 (en) | 2007-06-12 | 2014-01-21 | Fujifilm Corporation | Method of forming patterns |
| JP4590431B2 (ja) | 2007-06-12 | 2010-12-01 | 富士フイルム株式会社 | パターン形成方法 |
| KR101768929B1 (ko) * | 2010-09-30 | 2017-08-17 | 디아이씨 가부시끼가이샤 | 함불소 중합성 수지, 그것을 사용한 활성 에너지선 경화형 조성물 및 그 경화물 |
| CN102070755B (zh) * | 2010-11-09 | 2013-01-09 | 浙江理工大学 | 一种三嵌段氟化聚合物及制备方法 |
| JP6148112B2 (ja) * | 2013-04-02 | 2017-06-14 | リソテック ジャパン株式会社 | 光透過度測定方法 |
| DE102014118490B4 (de) | 2014-12-12 | 2022-03-24 | tooz technologies GmbH | Anzeigevorrichtungen |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3444148A (en) * | 1964-10-05 | 1969-05-13 | Du Pont | Copolymers of selected polyfluoroper-haloketone adducts with other selected ethylenic compounds |
| KR100263906B1 (ko) * | 1998-06-02 | 2000-09-01 | 윤종용 | 백본이 환상구조를 가지는 감광성 폴리머 및 이를 포함하는 레지스트 조성물 |
| KR20020012206A (ko) * | 1999-05-04 | 2002-02-15 | 메리 이. 보울러 | 플루오르화 중합체, 포토레지스트 및 마이크로리소그래피방법 |
| US20030022097A1 (en) * | 2000-05-05 | 2003-01-30 | Arch Specialty Chemicals, Inc | Tertiary-butyl acrylate polymers and their use in photoresist compositions |
| EP1278786B1 (en) * | 2000-05-05 | 2006-01-04 | E.I. Du Pont De Nemours And Company | Copolymers for photoresists and processes therefor |
| US6764809B2 (en) * | 2000-10-12 | 2004-07-20 | North Carolina State University | CO2-processes photoresists, polymers, and photoactive compounds for microlithography |
| US6838225B2 (en) * | 2001-01-18 | 2005-01-04 | Jsr Corporation | Radiation-sensitive resin composition |
-
2003
- 2003-07-23 US US10/521,412 patent/US20050203262A1/en not_active Abandoned
- 2003-07-23 CN CNA03817569XA patent/CN1678646A/zh active Pending
- 2003-07-23 EP EP03771715A patent/EP1551887A4/en not_active Withdrawn
- 2003-07-23 JP JP2004524696A patent/JP4303202B2/ja not_active Expired - Fee Related
- 2003-07-23 KR KR1020057001370A patent/KR20050030639A/ko not_active Withdrawn
- 2003-07-23 AU AU2003254112A patent/AU2003254112A1/en not_active Abandoned
- 2003-07-23 CA CA002493926A patent/CA2493926A1/en not_active Abandoned
- 2003-07-23 WO PCT/US2003/022912 patent/WO2004011509A1/en not_active Ceased
- 2003-07-25 TW TW092120427A patent/TW200403262A/zh unknown
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