JP2005520220A5 - - Google Patents

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Publication number
JP2005520220A5
JP2005520220A5 JP2004566379A JP2004566379A JP2005520220A5 JP 2005520220 A5 JP2005520220 A5 JP 2005520220A5 JP 2004566379 A JP2004566379 A JP 2004566379A JP 2004566379 A JP2004566379 A JP 2004566379A JP 2005520220 A5 JP2005520220 A5 JP 2005520220A5
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JP
Japan
Prior art keywords
substrate
template
polymerizable composition
applying
attracts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004566379A
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English (en)
Japanese (ja)
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JP2005520220A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/015551 external-priority patent/WO2004063815A2/en
Publication of JP2005520220A publication Critical patent/JP2005520220A/ja
Publication of JP2005520220A5 publication Critical patent/JP2005520220A5/ja
Pending legal-status Critical Current

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JP2004566379A 2001-05-16 2002-05-16 電界を使用して光硬化可能な組成物内にナノスケール・パターンを作製するための方法およびシステム Pending JP2005520220A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29166401P 2001-05-16 2001-05-16
PCT/US2002/015551 WO2004063815A2 (en) 2001-05-16 2002-05-16 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Publications (2)

Publication Number Publication Date
JP2005520220A JP2005520220A (ja) 2005-07-07
JP2005520220A5 true JP2005520220A5 (enExample) 2006-01-05

Family

ID=32710708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004566379A Pending JP2005520220A (ja) 2001-05-16 2002-05-16 電界を使用して光硬化可能な組成物内にナノスケール・パターンを作製するための方法およびシステム

Country Status (7)

Country Link
EP (1) EP1512048B1 (enExample)
JP (1) JP2005520220A (enExample)
CN (1) CN1729428A (enExample)
AT (1) ATE356374T1 (enExample)
AU (1) AU2002368430A1 (enExample)
DE (1) DE60218755T2 (enExample)
WO (1) WO2004063815A2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY144124A (en) * 2002-07-11 2011-08-15 Molecular Imprints Inc Step and repeat imprint lithography systems
US7077992B2 (en) 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7654816B2 (en) * 2004-10-07 2010-02-02 Hewlett-Packard Development Company, L.P. Lithographic mask alignment
CN100395121C (zh) * 2004-11-19 2008-06-18 鸿富锦精密工业（深圳）有限公司 热压印方法
JP4736522B2 (ja) * 2005-04-28 2011-07-27 旭硝子株式会社 エッチング処理された処理基板の製造方法
JP4742665B2 (ja) * 2005-04-28 2011-08-10 旭硝子株式会社 エッチング処理された処理基板の製造方法
JP5002211B2 (ja) * 2005-08-12 2012-08-15 キヤノン株式会社 インプリント装置およびインプリント方法
JP5268239B2 (ja) * 2005-10-18 2013-08-21 キヤノン株式会社 パターン形成装置、パターン形成方法
DE102006007800B3 (de) 2006-02-20 2007-10-04 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Strukturierungsverfahren und Bauteil mit einer strukturierten Oberfläche
JP5084830B2 (ja) * 2006-07-28 2012-11-28 インターナショナル・ビジネス・マシーンズ・コーポレーション ポリマー層の表面をパターニングするための装置および方法
KR101322133B1 (ko) * 2006-11-24 2013-10-25 엘지디스플레이 주식회사 임프린트 리소그래피용 스탬프 및 이를 이용한 임프린트리소그래피 방법
CN101446762B (zh) * 2008-12-31 2011-07-27 西安交通大学 非接触式模板约束下的电场诱导微复型方法
CN102253435A (zh) * 2011-07-11 2011-11-23 西安交通大学 一种利用电场诱导制造聚合物柱面微透镜的微加工方法
JP5328869B2 (ja) * 2011-10-21 2013-10-30 東芝機械株式会社 転写用の型の製造方法
JP6273860B2 (ja) * 2014-01-27 2018-02-07 大日本印刷株式会社 インプリントモールド及び半導体デバイスの製造方法
JP6980478B2 (ja) * 2017-09-29 2021-12-15 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法
NL2021092B1 (en) * 2018-06-08 2019-12-13 Qlayers Holding B V Application of a coating on a base structure
CN109188862A (zh) * 2018-10-11 2019-01-11 京东方科技集团股份有限公司 压印结构及其制造方法、压印模板

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1068535B (it) * 1975-11-03 1985-03-21 Ibm Apparecchio e processo elettrolito grafico
AU1444800A (en) * 1998-10-09 2000-05-01 Trustees Of Princeton University, The Microscale patterning and articles formed thereby
WO2001047003A2 (en) * 1999-12-23 2001-06-28 University Of Massachusetts Methods and apparatus for forming submicron patterns on films

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