AU1444800A - Microscale patterning and articles formed thereby - Google Patents

Microscale patterning and articles formed thereby

Info

Publication number
AU1444800A
AU1444800A AU14448/00A AU1444800A AU1444800A AU 1444800 A AU1444800 A AU 1444800A AU 14448/00 A AU14448/00 A AU 14448/00A AU 1444800 A AU1444800 A AU 1444800A AU 1444800 A AU1444800 A AU 1444800A
Authority
AU
Australia
Prior art keywords
articles formed
microscale
patterning
microscale patterning
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU14448/00A
Inventor
Stephen Y. Chou
Lei Zhuang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Princeton University
Original Assignee
Princeton University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Princeton University filed Critical Princeton University
Publication of AU1444800A publication Critical patent/AU1444800A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
AU14448/00A 1998-10-09 1999-10-08 Microscale patterning and articles formed thereby Abandoned AU1444800A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10379098P 1998-10-09 1998-10-09
US60103790 1998-10-09
PCT/US1999/023717 WO2000021689A1 (en) 1998-10-09 1999-10-08 Microscale patterning and articles formed thereby

Publications (1)

Publication Number Publication Date
AU1444800A true AU1444800A (en) 2000-05-01

Family

ID=22297049

Family Applications (1)

Application Number Title Priority Date Filing Date
AU14448/00A Abandoned AU1444800A (en) 1998-10-09 1999-10-08 Microscale patterning and articles formed thereby

Country Status (2)

Country Link
AU (1) AU1444800A (en)
WO (1) WO2000021689A1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2880100A (en) 1999-02-12 2000-08-29 General Electric Company Data storage media
EP2264523A3 (en) 2000-07-16 2011-11-30 Board Of Regents, The University Of Texas System A method of forming a pattern on a substrate in imprint lithographic processes
EP1303793B1 (en) 2000-07-17 2015-01-28 Board Of Regents, The University Of Texas System Method and system of automatic fluid dispensing for imprint lithography processes
ATE356374T1 (en) * 2001-05-16 2007-03-15 Univ Texas METHOD FOR PRODUCING NANOM SCALE STRUCTURES IN LIGHT-CURING COMPOSITIONS USING AN ELECTRICAL FIELD
JP2005527974A (en) * 2002-05-24 2005-09-15 ワイ． チョウ，スティーヴン， Method and apparatus for field induced pressure imprint lithography
US6926929B2 (en) 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7365103B2 (en) 2002-12-12 2008-04-29 Board Of Regents, The University Of Texas System Compositions for dark-field polymerization and method of using the same for imprint lithography processes
US6951173B1 (en) 2003-05-14 2005-10-04 Molecular Imprints, Inc. Assembly and method for transferring imprint lithography templates
US7090716B2 (en) 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7261830B2 (en) 2003-10-16 2007-08-28 Molecular Imprints, Inc. Applying imprinting material to substrates employing electromagnetic fields
US7019835B2 (en) 2004-02-19 2006-03-28 Molecular Imprints, Inc. Method and system to measure characteristics of a film disposed on a substrate
US7504268B2 (en) 2004-05-28 2009-03-17 Board Of Regents, The University Of Texas System Adaptive shape substrate support method
TWI243796B (en) * 2004-06-08 2005-11-21 Ind Tech Res Inst Device of nano-structure imprint for pattern transfer and method of the same
US7105452B2 (en) 2004-08-13 2006-09-12 Molecular Imprints, Inc. Method of planarizing a semiconductor substrate with an etching chemistry
US7282550B2 (en) 2004-08-16 2007-10-16 Molecular Imprints, Inc. Composition to provide a layer with uniform etch characteristics
US7041604B2 (en) 2004-09-21 2006-05-09 Molecular Imprints, Inc. Method of patterning surfaces while providing greater control of recess anisotropy
US7252777B2 (en) 2004-09-21 2007-08-07 Molecular Imprints, Inc. Method of forming an in-situ recessed structure
US7241395B2 (en) 2004-09-21 2007-07-10 Molecular Imprints, Inc. Reverse tone patterning on surfaces having planarity perturbations
US7244386B2 (en) 2004-09-27 2007-07-17 Molecular Imprints, Inc. Method of compensating for a volumetric shrinkage of a material disposed upon a substrate to form a substantially planar structure therefrom
WO2007046110A1 (en) * 2005-10-19 2007-04-26 Indian Institute Of Technology, Kanpur A method and apparatus for the formation of patterns on surfaces and an assembly and alignment of the structure thereof
US8850980B2 (en) 2006-04-03 2014-10-07 Canon Nanotechnologies, Inc. Tessellated patterns in imprint lithography
FR2957715B1 (en) 2010-03-18 2012-04-20 Centre Nat Rech Scient METHOD OF FORMING A PATTERN ON A SURFACE OF A SUPPORT
CN103159164B (en) * 2013-03-01 2015-08-05 西安交通大学 A kind of electric field induce method for stamping of high-depth-to-width-microcolumn microcolumn array
KR102284072B1 (en) * 2015-01-14 2021-08-02 한국과학기술원 Method of Preparing Vertical Cylinder or Lamella Structure of Organic Molecule Arranged in Large Area Single Domain

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031268A (en) * 1976-01-05 1977-06-21 Sirius Corporation Process for spraying metallic patterns on a substrate
US4545610A (en) * 1983-11-25 1985-10-08 International Business Machines Corporation Method for forming elongated solder connections between a semiconductor device and a supporting substrate
US5395740A (en) * 1993-01-27 1995-03-07 Motorola, Inc. Method for fabricating electrode patterns
US5772905A (en) * 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography

Also Published As

Publication number Publication date
WO2000021689A1 (en) 2000-04-20

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase