AU2002368430A1 - Method and system for fabricating nanoscale patterns in light curable compositions using an electric field - Google Patents

Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Info

Publication number
AU2002368430A1
AU2002368430A1 AU2002368430A AU2002368430A AU2002368430A1 AU 2002368430 A1 AU2002368430 A1 AU 2002368430A1 AU 2002368430 A AU2002368430 A AU 2002368430A AU 2002368430 A AU2002368430 A AU 2002368430A AU 2002368430 A1 AU2002368430 A1 AU 2002368430A1
Authority
AU
Australia
Prior art keywords
template
polymerizable composition
electric field
substrate
curable compositions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002368430A
Other languages
English (en)
Inventor
Roger T. Bonnecaze
S.V. Sreenivasan
C. Grant Willson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Texas System
Original Assignee
University of Texas System
University of Texas at Austin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Texas System, University of Texas at Austin filed Critical University of Texas System
Publication of AU2002368430A1 publication Critical patent/AU2002368430A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Polymerisation Methods In General (AREA)
  • Moulding By Coating Moulds (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AU2002368430A 2001-05-16 2002-05-16 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field Abandoned AU2002368430A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US29166401P 2001-05-16 2001-05-16
US60/291,664 2001-05-16
PCT/US2002/015551 WO2004063815A2 (en) 2001-05-16 2002-05-16 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Publications (1)

Publication Number Publication Date
AU2002368430A1 true AU2002368430A1 (en) 2004-08-10

Family

ID=32710708

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002368430A Abandoned AU2002368430A1 (en) 2001-05-16 2002-05-16 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Country Status (7)

Country Link
EP (1) EP1512048B1 (enExample)
JP (1) JP2005520220A (enExample)
CN (1) CN1729428A (enExample)
AT (1) ATE356374T1 (enExample)
AU (1) AU2002368430A1 (enExample)
DE (1) DE60218755T2 (enExample)
WO (1) WO2004063815A2 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY144124A (en) * 2002-07-11 2011-08-15 Molecular Imprints Inc Step and repeat imprint lithography systems
US7077992B2 (en) 2002-07-11 2006-07-18 Molecular Imprints, Inc. Step and repeat imprint lithography processes
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7654816B2 (en) * 2004-10-07 2010-02-02 Hewlett-Packard Development Company, L.P. Lithographic mask alignment
CN100395121C (zh) * 2004-11-19 2008-06-18 鸿富锦精密工业（深圳）有限公司 热压印方法
JP4736522B2 (ja) * 2005-04-28 2011-07-27 旭硝子株式会社 エッチング処理された処理基板の製造方法
JP4742665B2 (ja) * 2005-04-28 2011-08-10 旭硝子株式会社 エッチング処理された処理基板の製造方法
JP5002211B2 (ja) * 2005-08-12 2012-08-15 キヤノン株式会社 インプリント装置およびインプリント方法
JP5268239B2 (ja) * 2005-10-18 2013-08-21 キヤノン株式会社 パターン形成装置、パターン形成方法
DE102006007800B3 (de) 2006-02-20 2007-10-04 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Strukturierungsverfahren und Bauteil mit einer strukturierten Oberfläche
JP5084830B2 (ja) * 2006-07-28 2012-11-28 インターナショナル・ビジネス・マシーンズ・コーポレーション ポリマー層の表面をパターニングするための装置および方法
KR101322133B1 (ko) * 2006-11-24 2013-10-25 엘지디스플레이 주식회사 임프린트 리소그래피용 스탬프 및 이를 이용한 임프린트리소그래피 방법
CN101446762B (zh) * 2008-12-31 2011-07-27 西安交通大学 非接触式模板约束下的电场诱导微复型方法
CN102253435A (zh) * 2011-07-11 2011-11-23 西安交通大学 一种利用电场诱导制造聚合物柱面微透镜的微加工方法
JP5328869B2 (ja) * 2011-10-21 2013-10-30 東芝機械株式会社 転写用の型の製造方法
JP6273860B2 (ja) * 2014-01-27 2018-02-07 大日本印刷株式会社 インプリントモールド及び半導体デバイスの製造方法
JP6980478B2 (ja) * 2017-09-29 2021-12-15 キヤノン株式会社 インプリント装置、インプリント方法および物品の製造方法
NL2021092B1 (en) * 2018-06-08 2019-12-13 Qlayers Holding B V Application of a coating on a base structure
CN109188862A (zh) * 2018-10-11 2019-01-11 京东方科技集团股份有限公司 压印结构及其制造方法、压印模板

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1068535B (it) * 1975-11-03 1985-03-21 Ibm Apparecchio e processo elettrolito grafico
WO2000021689A1 (en) * 1998-10-09 2000-04-20 The Trustees Of Princeton University Microscale patterning and articles formed thereby
JP3774739B2 (ja) * 1999-12-23 2006-05-17 ウニヴェルジテート コンスタンツ フィルム上にサブミクロンパターンを形成するための方法及び装置

Also Published As

Publication number Publication date
WO2004063815A2 (en) 2004-07-29
DE60218755T2 (de) 2007-11-15
WO2004063815A3 (en) 2004-12-29
JP2005520220A (ja) 2005-07-07
ATE356374T1 (de) 2007-03-15
CN1729428A (zh) 2006-02-01
DE60218755D1 (de) 2007-04-19
EP1512048A2 (en) 2005-03-09
EP1512048B1 (en) 2007-03-07

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase