MY141538A - Method and system for fabricating nanoscale patterns in light curable compositions using an electric field - Google Patents

Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Info

Publication number
MY141538A
MY141538A MYPI20034238A MY141538A MY 141538 A MY141538 A MY 141538A MY PI20034238 A MYPI20034238 A MY PI20034238A MY 141538 A MY141538 A MY 141538A
Authority
MY
Malaysia
Prior art keywords
template
polymerizable composition
substrate
electric field
curable compositions
Prior art date
Application number
Inventor
Carlton G Willson
Sidlgata V Sreenivasan
Roger T Bonnecaze
Original Assignee
Univ Texas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Texas filed Critical Univ Texas
Priority to MYPI20034238 priority Critical patent/MY141538A/en
Publication of MY141538A publication Critical patent/MY141538A/en

Links

Abstract

A HIGH-THROUGHPUT LITOGRAPHY PROCESS FOR CREATING HIGH-RESOLUTION PATTERNS INA POLYMERIZABLE COMPOSITION USING CAREFULLY CONTROLLED ELECTRIC FIELDS FOLLOWED BY CURING OF THE POLYMERIZABLE COMPOSITION IS DESCRIBED. THE PROCESS INVOLVES THE USE OF A TEMPLATE THAT INCLUDES THE DESIRED PATTERNS. THIS TEMPLATE IS BROUGHT INTO CLOSE PROXIMITY TO THE POLYMERIZABLE COMPOSITION ON THE SUBSTRATE. AN EXTERNAL ELECTRIC FILED IS APPLIED TO THE TEMPLATE-SUBSTRATE INTERFACE WHILE MAINTAINING A UNIFORM, CAREFULLY CONTROLLED GAP BETWEEN THE TEMPLATE AND SUBSTRATE. THIS CAUSES THE POLYMERIZABLE COMPOSITION TO BE ATTRACTED TO THE RAISED PORTIONS OF THE TEMPLATE. BY APPROPRIATELY CHOOSING THE VARIOUS PROCESS PARAMETERS SUCH AS THE VISCOSITY OF THE POLYMERIZABLE COMPOSITION, THE MAGNITUDE OF THE ELECTRIC FIELD, AND THE DISTANCE BETWEEN THE TEMPLATE AND SUBSTRATE, THE RESOLUTION OF THE STRUCTURES FORMED IN THE LIQUID MAY BE CONTROLLED TO CONFORM TO THAT OF THE TEMPLATE.
MYPI20034238 2003-11-05 2003-11-05 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field MY141538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20034238 MY141538A (en) 2003-11-05 2003-11-05 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20034238 MY141538A (en) 2003-11-05 2003-11-05 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Publications (1)

Publication Number Publication Date
MY141538A true MY141538A (en) 2010-05-14

Family

ID=47320771

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20034238 MY141538A (en) 2003-11-05 2003-11-05 Method and system for fabricating nanoscale patterns in light curable compositions using an electric field

Country Status (1)

Country Link
MY (1) MY141538A (en)

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