JP2005512323A - 集積回路用途のためのランタン系列の層状超格子材料 - Google Patents

集積回路用途のためのランタン系列の層状超格子材料 Download PDF

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JP2005512323A
JP2005512323A JP2003550271A JP2003550271A JP2005512323A JP 2005512323 A JP2005512323 A JP 2005512323A JP 2003550271 A JP2003550271 A JP 2003550271A JP 2003550271 A JP2003550271 A JP 2003550271A JP 2005512323 A JP2005512323 A JP 2005512323A
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layer
precursor
substrate
layered superlattice
lan
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デ アラウジョ, カルロス エー. パズ
ラリー ディー. マクミラン,
ナラヤン ソラヤッパン,
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Symetrix Corp
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JP2003550271A 2001-11-29 2002-09-17 集積回路用途のためのランタン系列の層状超格子材料 Withdrawn JP2005512323A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/998,364 US20030152813A1 (en) 1992-10-23 2001-11-29 Lanthanide series layered superlattice materials for integrated circuit appalications
PCT/US2002/029325 WO2003049172A1 (en) 2001-11-29 2002-09-17 Lanthanide series layered superlattice materials for integrated circuit applications

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JP2005512323A true JP2005512323A (ja) 2005-04-28
JP2005512323A5 JP2005512323A5 (https=) 2005-12-22

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US9443736B2 (en) 2012-05-25 2016-09-13 Entegris, Inc. Silylene compositions and methods of use thereof
JP2020057663A (ja) * 2018-09-28 2020-04-09 株式会社リコー 酸化物絶縁膜形成用塗布液、酸化物絶縁膜の製造方法、及び電界効果型トランジスタの製造方法
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CN1618123A (zh) 2005-05-18

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