CN1618123A - 用于集成电路应用的镧系分层超晶格材料 - Google Patents

用于集成电路应用的镧系分层超晶格材料 Download PDF

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CN1618123A
CN1618123A CNA028276884A CN02827688A CN1618123A CN 1618123 A CN1618123 A CN 1618123A CN A028276884 A CNA028276884 A CN A028276884A CN 02827688 A CN02827688 A CN 02827688A CN 1618123 A CN1618123 A CN 1618123A
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integrated circuit
layered superlattice
lan
substrate
film
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卡洛斯·A·帕斯·德阿劳约
拉里·D·麦克米伦
纳拉杨·索拉亚鹏
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Symetrix Corp
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Symetrix Corp
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  • Chemical & Material Sciences (AREA)
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  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
CNA028276884A 2001-11-29 2002-09-17 用于集成电路应用的镧系分层超晶格材料 Pending CN1618123A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/998,364 US20030152813A1 (en) 1992-10-23 2001-11-29 Lanthanide series layered superlattice materials for integrated circuit appalications
US09/998,364 2001-11-29

Publications (1)

Publication Number Publication Date
CN1618123A true CN1618123A (zh) 2005-05-18

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