JP2005508097A5 - - Google Patents

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Publication number
JP2005508097A5
JP2005508097A5 JP2003541310A JP2003541310A JP2005508097A5 JP 2005508097 A5 JP2005508097 A5 JP 2005508097A5 JP 2003541310 A JP2003541310 A JP 2003541310A JP 2003541310 A JP2003541310 A JP 2003541310A JP 2005508097 A5 JP2005508097 A5 JP 2005508097A5
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JP
Japan
Prior art keywords
susceptor
processing chamber
platter
liner
article
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003541310A
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English (en)
Japanese (ja)
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JP2005508097A (ja
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Publication date
Priority claimed from US10/017,492 external-priority patent/US6896738B2/en
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Publication of JP2005508097A publication Critical patent/JP2005508097A/ja
Publication of JP2005508097A5 publication Critical patent/JP2005508097A5/ja
Pending legal-status Critical Current

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JP2003541310A 2001-10-30 2002-10-24 物品を制御可能に加熱するための加熱装置及びその加熱方法 Pending JP2005508097A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/017,492 US6896738B2 (en) 2001-10-30 2001-10-30 Induction heating devices and methods for controllably heating an article
PCT/US2002/034090 WO2003039195A2 (en) 2001-10-30 2002-10-24 Induction heating devices and methods for controllably heating an article

Publications (2)

Publication Number Publication Date
JP2005508097A JP2005508097A (ja) 2005-03-24
JP2005508097A5 true JP2005508097A5 (https=) 2006-01-05

Family

ID=21782889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003541310A Pending JP2005508097A (ja) 2001-10-30 2002-10-24 物品を制御可能に加熱するための加熱装置及びその加熱方法

Country Status (11)

Country Link
US (3) US6896738B2 (https=)
EP (1) EP1449407B1 (https=)
JP (1) JP2005508097A (https=)
KR (1) KR20050039709A (https=)
CN (1) CN1611095A (https=)
AT (1) ATE412331T1 (https=)
AU (1) AU2002348053A1 (https=)
CA (1) CA2464855A1 (https=)
DE (1) DE60229549D1 (https=)
TW (1) TWI274081B (https=)
WO (1) WO2003039195A2 (https=)

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CN103160810B (zh) * 2011-12-09 2016-04-20 北京北方微电子基地设备工艺研究中心有限责任公司 一种用于感应加热的托盘及等离子体加工设备
CN103422073A (zh) * 2012-05-24 2013-12-04 北京北方微电子基地设备工艺研究中心有限责任公司 用于感应加热的托盘及等离子体加工设备
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JP6635871B2 (ja) * 2016-05-11 2020-01-29 東京エレクトロン株式会社 成膜装置
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