JPS6427225A - Vapor growth system - Google Patents

Vapor growth system

Info

Publication number
JPS6427225A
JPS6427225A JP18431687A JP18431687A JPS6427225A JP S6427225 A JPS6427225 A JP S6427225A JP 18431687 A JP18431687 A JP 18431687A JP 18431687 A JP18431687 A JP 18431687A JP S6427225 A JPS6427225 A JP S6427225A
Authority
JP
Japan
Prior art keywords
susceptor
section
flowing
tube
flowing direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18431687A
Other languages
Japanese (ja)
Inventor
Akito Kuramata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18431687A priority Critical patent/JPS6427225A/en
Publication of JPS6427225A publication Critical patent/JPS6427225A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To uniformize the thickness distribution of a grown layer with a construction of easy manufacture by regulating the sectional areas of a guide and a susceptor to control the flowing velocity distribution of material gas. CONSTITUTION:The combination section of a liner tube 22 and a susceptor 24 perpendicular to a material gas flowing direction is gradually reduced in the section of the tube for passing the gas by gradually increasing the section of the susceptor 24 in the flowing direction, triangular guides are provided at both sides of the susceptor, and the section of the guide is gradually increased. The section of the guide is provided to uniformize the flowing speed distribution of the surface perpendicular to the flowing direction by approximately correcting the wall of the liner tube opposite to a wafer since the wall of the tube opposite to the wafer is curved in a predetermined curvature. The sectional area of the gas in the flowing direction is adjusted by altering the sectional shape of the susceptor 24 without varying the sectional shape of the tube to control the flowing speed distribution. Thus, the thickness distribution of a grown layer is uniformized with a structure of an easy manufacture.
JP18431687A 1987-07-22 1987-07-22 Vapor growth system Pending JPS6427225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18431687A JPS6427225A (en) 1987-07-22 1987-07-22 Vapor growth system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18431687A JPS6427225A (en) 1987-07-22 1987-07-22 Vapor growth system

Publications (1)

Publication Number Publication Date
JPS6427225A true JPS6427225A (en) 1989-01-30

Family

ID=16151202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18431687A Pending JPS6427225A (en) 1987-07-22 1987-07-22 Vapor growth system

Country Status (1)

Country Link
JP (1) JPS6427225A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7390367B1 (en) * 2001-10-30 2008-06-24 Cree, Inc. Housing assembly for an induction heating device including liner or susceptor coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7390367B1 (en) * 2001-10-30 2008-06-24 Cree, Inc. Housing assembly for an induction heating device including liner or susceptor coating

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