JPS54147783A - Cvd device - Google Patents
Cvd deviceInfo
- Publication number
- JPS54147783A JPS54147783A JP5620978A JP5620978A JPS54147783A JP S54147783 A JPS54147783 A JP S54147783A JP 5620978 A JP5620978 A JP 5620978A JP 5620978 A JP5620978 A JP 5620978A JP S54147783 A JPS54147783 A JP S54147783A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inlet
- reaction tube
- inlets
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
PURPOSE:To perform CVD, by providing at least one gas inlet within a given distance and making constant the deposit speed of oxide film along gas flow. CONSTITUTION:The water 3 is heated to a given temperature in the reaction tube 1, and the reaction gas and the carrier gas are introduced from the inlets 4 and 41 to 43. The gas from the inlet 41 is moved to the outlet 5 and the oxide film is produced and deposited on the wafer. In this case, the inlets 42 and 43 are placed with a distance more than five times the diameter of the reaction tube from the gas supply inlet to the direction of outlet, to compensate the reduction in the deposition speed due to gas supply deficiency. Thus, by independently controlling the supply gas amount from the inlet holes 41 to 43, the production deposition speed in the reaction tube is made uniform and uniform CVD film can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5620978A JPS54147783A (en) | 1978-05-11 | 1978-05-11 | Cvd device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5620978A JPS54147783A (en) | 1978-05-11 | 1978-05-11 | Cvd device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54147783A true JPS54147783A (en) | 1979-11-19 |
Family
ID=13020711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5620978A Pending JPS54147783A (en) | 1978-05-11 | 1978-05-11 | Cvd device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54147783A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029554A (en) * | 1988-03-31 | 1991-07-09 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus including a temperature control mechanism |
US5198387A (en) * | 1989-12-01 | 1993-03-30 | Texas Instruments Incorporated | Method and apparatus for in-situ doping of deposited silicon |
USRE36328E (en) * | 1988-03-31 | 1999-10-05 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus including temperature control mechanism |
-
1978
- 1978-05-11 JP JP5620978A patent/JPS54147783A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5029554A (en) * | 1988-03-31 | 1991-07-09 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus including a temperature control mechanism |
USRE36328E (en) * | 1988-03-31 | 1999-10-05 | Kabushiki Kaisha Toshiba | Semiconductor manufacturing apparatus including temperature control mechanism |
US5198387A (en) * | 1989-12-01 | 1993-03-30 | Texas Instruments Incorporated | Method and apparatus for in-situ doping of deposited silicon |
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