JP2005286003A - 半導体ウエハの小片化方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/45—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the shape
- A61F13/47—Sanitary towels, incontinence pads or napkins
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/15203—Properties of the article, e.g. stiffness or absorbency
- A61F13/15268—Properties of the article, e.g. stiffness or absorbency reusable
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/15203—Properties of the article, e.g. stiffness or absorbency
- A61F2013/15276—Properties of the article, e.g. stiffness or absorbency washable
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/45—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the shape
- A61F13/47—Sanitary towels, incontinence pads or napkins
- A61F2013/4708—Panty-liner
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F13/00—Bandages or dressings; Absorbent pads
- A61F13/15—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators
- A61F13/53—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the absorbing medium
- A61F2013/530131—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the absorbing medium being made in fibre but being not pulp
- A61F2013/530343—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the absorbing medium being made in fibre but being not pulp being natural fibres
- A61F2013/53035—Absorbent pads, e.g. sanitary towels, swabs or tampons for external or internal application to the body; Supporting or fastening means therefor; Tampon applicators characterised by the absorbing medium being made in fibre but being not pulp being natural fibres of cotton
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
Abstract
【解決手段】 半導体ウエハ1を小片1aに分離する際に起点となる分断ラインLが形成された半導体ウエハ1を粘着テープ5に保持し、半導体ウエハ1の各小片1aが分離されていない状態で粘着テープ5を放射状に延伸することにより各小片1aを分離するとともに、小片1a間の間隙cを拡大する。
【選択図】 図2
Description
表面に保護テープが貼付けられ、裏面が研削された半導体ウエハに分断ラインを形成する工程と、前記分断ラインが形成された半導体ウエハの裏面に粘着テープを貼り付ける工程と、裏面への前記粘着テープの貼り付け後に前記保護テープを剥離する工程と、保護テープの剥離後に前記粘着テープを放射状に延伸する工程を備えることを特徴とする。
半導体ウエハの裏面でレーザーを走査させて前記分断ラインを形成することを特徴とする。
表面に保護テープが貼り付けられ、裏面が研削された半導体ウエハの裏面に粘着テープを貼り付けて補助リングで保持する工程と、補助リングで保持された半導体ウエハの表面から保護テープを剥離する工程と、保護テープが剥離された半導体ウエハに分断ラインを形成する工程と、分断ラインを形成した後に前記補助リング内の粘着テープを放射状に延伸させる工程と、補助リング内で延伸された粘着テープを別のダイシングリングを使って保持する工程とを備えることを特徴とする。
半導体ウエハの裏面でレーザーを走査させて前記分断ラインを形成することを特徴とする。
前記粘着テープが紫外線硬化型粘着テープであり、かつ、粘着テープを延伸した後に、粘着テープに紫外線を照射することを特徴とする。
前記粘着テープの延伸量を制御することを特徴とする。
前記粘着テープの延伸量の制御が、粘着テープの中央部位と周辺部位とで温度差をつけることを特徴とする。
前記粘着テープの延伸時に温風を吹き付けることにより、粘着テープの中央部位と周辺部位とで温度差をつけることを特徴とする。
図1および図2に、半導体ウエハの小片化方法の第1例の工程が示されている。
図5および図6に、半導体ウエハの小片化方法の第2例の工程が示されている。
(1)分断ラインLを形成する手段としては、上記のようにレーザーを用いることが発塵を抑制する上で好ましいが、ダイヤモンドカッタなどの機械的なカット手段を用いて分断ラインLを形成する形態で実施することもできる。
1a 小片
2 保護テープ
3 レーザー
5 粘着テープ
6 補助リング
10 ダイシングリング
c 間隙
L 分断ライン
Claims (9)
- 半導体ウエハを小片に分離する際に起点となる分断ラインが形成された半導体ウエハを粘着テープに保持し、半導体ウエハの各小片が分離されていない状態で粘着テープを放射状に延伸することにより各小片を分離するとともに、小片間の間隙を拡大することを特徴とする半導体ウエハの小片化方法。
- 請求項1に記載の半導体ウエハの小片化方法において、
表面に保護テープが貼付けられ、裏面が研削された半導体ウエハに分断ラインを形成する工程と、前記分断ラインが形成された半導体ウエハの裏面に粘着テープを貼り付ける工程と、裏面への前記粘着テープの貼り付け後に前記保護テープを剥離する工程と、保護テープの剥離後に前記粘着テープを放射状に延伸する工程を備えることを特徴とする半導体ウエハの小片化方法。 - 請求項2に記載の半導体ウエハの小片化方法において、
半導体ウエハの裏面でレーザーを走査させて前記分断ラインを形成することを特徴とする半導体ウエハの小片化方法。 - 請求項1に記載の半導体ウエハの小片化方法において、
表面に保護テープが貼り付けられ、裏面が研削された半導体ウエハの裏面に粘着テープを貼り付けて補助リングで保持する工程と、補助リングで保持された半導体ウエハの表面から保護テープを剥離する工程と、保護テープが剥離された半導体ウエハに分断ラインを形成する工程と、分断ラインを形成した後に前記補助リング内の粘着テープを放射状に延伸させる工程と、補助リング内で延伸された粘着テープを別のダイシングリングを使って保持する工程とを備えることを特徴とする半導体ウエハの小片化方法。 - 請求項4に記載の半導体ウエハの小片化方法において、
半導体ウエハの裏面でレーザーを走査させて前記分断ラインを形成することを特徴とする半導体ウエハの小片化方法。 - 請求項1〜5のいずれかに記載の半導体ウエハの小片化方法において、
前記粘着テープが紫外線硬化型粘着テープであり、かつ、粘着テープを延伸した後に、粘着テープに紫外線を照射することを特徴とする半導体ウエハの小片化方法。 - 請求項1〜6のいずれかに記載の半導体ウエハの小片化方法において、
前記粘着テープの延伸量を制御することを特徴とする半導体ウエハの小片化方法。 - 請求項7に記載の半導体ウエハの小片化方法において、
前記粘着テープの延伸量の制御が、粘着テープの中央部位と周辺部位とで温度差をつけることを特徴とする半導体ウエハの小片化方法。 - 請求項8に記載の半導体ウエハの小片化方法において、
前記粘着テープの延伸時に温風を吹き付けることにより、粘着テープの中央部位と周辺部位とで温度差をつけることを特徴とする半導体ウエハの小片化方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004096056A JP4514490B2 (ja) | 2004-03-29 | 2004-03-29 | 半導体ウエハの小片化方法 |
SG200502748A SG115851A1 (en) | 2004-03-29 | 2005-03-17 | Method of dicing semiconductor wafer into chips, and apparatus using this method |
US11/084,133 US7387951B2 (en) | 2004-03-29 | 2005-03-21 | Method of dicing semiconductor wafer into chips, and apparatus using this method |
TW094108899A TWI348186B (en) | 2004-03-29 | 2005-03-23 | Method of dicing semiconductor wafer into chips, and apparatus using this method |
KR1020050025229A KR101109256B1 (ko) | 2004-03-29 | 2005-03-26 | 반도체 웨이퍼의 소편화 방법 및 이를 이용한 장치 |
CNB2005100562688A CN100437919C (zh) | 2004-03-29 | 2005-03-29 | 将半导体晶片切割成小片的方法及使用这种方法的设备 |
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Application Number | Priority Date | Filing Date | Title |
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JP2004096056A JP4514490B2 (ja) | 2004-03-29 | 2004-03-29 | 半導体ウエハの小片化方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005286003A true JP2005286003A (ja) | 2005-10-13 |
JP4514490B2 JP4514490B2 (ja) | 2010-07-28 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004096056A Expired - Fee Related JP4514490B2 (ja) | 2004-03-29 | 2004-03-29 | 半導体ウエハの小片化方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7387951B2 (ja) |
JP (1) | JP4514490B2 (ja) |
KR (1) | KR101109256B1 (ja) |
CN (1) | CN100437919C (ja) |
SG (1) | SG115851A1 (ja) |
TW (1) | TWI348186B (ja) |
Cited By (12)
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JP2010232611A (ja) * | 2009-03-30 | 2010-10-14 | Furukawa Electric Co Ltd:The | ウエハ加工用テープ |
JP2012023231A (ja) * | 2010-07-15 | 2012-02-02 | Disco Abrasive Syst Ltd | 分割方法 |
JP2013041908A (ja) * | 2011-08-12 | 2013-02-28 | Disco Abrasive Syst Ltd | 光デバイスウェーハの分割方法 |
EP2680327A2 (en) | 2012-06-29 | 2014-01-01 | Nitto Denko Corporation | Reflecting layer-phosphor layer-covered LED, producing method thereof, LED device, and producing method thereof |
EP2680331A2 (en) | 2012-06-29 | 2014-01-01 | Nitto Denko Corporation | Encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device |
EP2680329A2 (en) | 2012-06-29 | 2014-01-01 | Nitto Denko Corporation | Phosphor layer-covered LED, producing method thereof, and LED device |
WO2014014007A1 (ja) | 2012-07-17 | 2014-01-23 | 日東電工株式会社 | 封止層被覆半導体素子および半導体装置の製造方法 |
EP2717333A2 (en) | 2012-10-03 | 2014-04-09 | Nitto Denko Corporation | Encapsulating sheet-covered semiconductor element, producing method thereof, semiconductor device, and producing method thereof |
EP2717334A2 (en) | 2012-10-03 | 2014-04-09 | Nitto Denko Corporation | Encapsulating sheet-covered semiconductor element, producing method thereof, semiconductor device, and producing method thereof |
EP2750211A2 (en) | 2012-12-28 | 2014-07-02 | Nitto Denko Corporation | Encapsulating layer-covered optical semiconductor element, producing method thereof, and optical semiconductor device |
JP2020155780A (ja) * | 2016-07-29 | 2020-09-24 | 株式会社東京精密 | 温度付与装置及び温度付与方法 |
JP2021176201A (ja) * | 2020-05-26 | 2021-11-04 | 株式会社東京精密 | 温度付与装置及び温度付与方法 |
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JP4769560B2 (ja) * | 2005-12-06 | 2011-09-07 | 株式会社ディスコ | ウエーハの分割方法 |
JP4833657B2 (ja) * | 2005-12-19 | 2011-12-07 | 株式会社ディスコ | ウエーハの分割方法 |
EP1884981A1 (en) * | 2006-08-03 | 2008-02-06 | STMicroelectronics Ltd (Malta) | Removable wafer expander for die bonding equipment. |
JP5669001B2 (ja) * | 2010-07-22 | 2015-02-12 | 日本電気硝子株式会社 | ガラスフィルムの割断方法、ガラスロールの製造方法、及びガラスフィルムの割断装置 |
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JP6054234B2 (ja) * | 2013-04-22 | 2016-12-27 | 株式会社ディスコ | ウエーハの加工方法 |
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JP6649308B2 (ja) * | 2017-03-22 | 2020-02-19 | キオクシア株式会社 | 半導体装置およびその製造方法 |
JP7080551B2 (ja) * | 2017-12-18 | 2022-06-06 | 株式会社ディスコ | 被加工物の加工方法 |
CN108288599A (zh) * | 2018-01-09 | 2018-07-17 | 河南仕佳光子科技股份有限公司 | 一种便于将晶圆片或巴条从黏性薄膜上取下的方法 |
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- 2005-03-21 US US11/084,133 patent/US7387951B2/en not_active Expired - Fee Related
- 2005-03-23 TW TW094108899A patent/TWI348186B/zh active
- 2005-03-26 KR KR1020050025229A patent/KR101109256B1/ko not_active IP Right Cessation
- 2005-03-29 CN CNB2005100562688A patent/CN100437919C/zh not_active Expired - Fee Related
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JP2010232611A (ja) * | 2009-03-30 | 2010-10-14 | Furukawa Electric Co Ltd:The | ウエハ加工用テープ |
JP2012023231A (ja) * | 2010-07-15 | 2012-02-02 | Disco Abrasive Syst Ltd | 分割方法 |
JP2013041908A (ja) * | 2011-08-12 | 2013-02-28 | Disco Abrasive Syst Ltd | 光デバイスウェーハの分割方法 |
US9082940B2 (en) | 2012-06-29 | 2015-07-14 | Nitto Denko Corporation | Encapsulating layer-covered semiconductor element, producing method thereof, and semiconductor device |
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WO2014014007A1 (ja) | 2012-07-17 | 2014-01-23 | 日東電工株式会社 | 封止層被覆半導体素子および半導体装置の製造方法 |
WO2014014008A1 (ja) | 2012-07-17 | 2014-01-23 | 日東電工株式会社 | 封止層被覆半導体素子および半導体装置の製造方法 |
EP2717333A2 (en) | 2012-10-03 | 2014-04-09 | Nitto Denko Corporation | Encapsulating sheet-covered semiconductor element, producing method thereof, semiconductor device, and producing method thereof |
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US9117984B2 (en) | 2012-12-28 | 2015-08-25 | Nitto Denko Corporation | Encapsulating layer-covered optical semiconductor element, producing method thereof, and optical semiconductor device |
JP2020155780A (ja) * | 2016-07-29 | 2020-09-24 | 株式会社東京精密 | 温度付与装置及び温度付与方法 |
JP2021176201A (ja) * | 2020-05-26 | 2021-11-04 | 株式会社東京精密 | 温度付与装置及び温度付与方法 |
JP7217408B2 (ja) | 2020-05-26 | 2023-02-03 | 株式会社東京精密 | 温度付与装置及び温度付与方法 |
Also Published As
Publication number | Publication date |
---|---|
SG115851A1 (en) | 2005-10-28 |
US7387951B2 (en) | 2008-06-17 |
KR20060044804A (ko) | 2006-05-16 |
TWI348186B (en) | 2011-09-01 |
TW200536009A (en) | 2005-11-01 |
CN100437919C (zh) | 2008-11-26 |
JP4514490B2 (ja) | 2010-07-28 |
US20050215033A1 (en) | 2005-09-29 |
CN1677622A (zh) | 2005-10-05 |
KR101109256B1 (ko) | 2012-01-30 |
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