JP2005247516A - 浮上式基板搬送処理装置 - Google Patents

浮上式基板搬送処理装置 Download PDF

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Publication number
JP2005247516A
JP2005247516A JP2004061510A JP2004061510A JP2005247516A JP 2005247516 A JP2005247516 A JP 2005247516A JP 2004061510 A JP2004061510 A JP 2004061510A JP 2004061510 A JP2004061510 A JP 2004061510A JP 2005247516 A JP2005247516 A JP 2005247516A
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JP
Japan
Prior art keywords
substrate
roller
resist
floating
processing apparatus
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Pending
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JP2004061510A
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English (en)
Japanese (ja)
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JP2005247516A5 (enExample
Inventor
Takeshi Yamazaki
剛 山崎
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2004061510A priority Critical patent/JP2005247516A/ja
Publication of JP2005247516A publication Critical patent/JP2005247516A/ja
Publication of JP2005247516A5 publication Critical patent/JP2005247516A5/ja
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Materials For Photolithography (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2004061510A 2004-03-05 2004-03-05 浮上式基板搬送処理装置 Pending JP2005247516A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004061510A JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004061510A JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

Publications (2)

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JP2005247516A true JP2005247516A (ja) 2005-09-15
JP2005247516A5 JP2005247516A5 (enExample) 2006-02-02

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ID=35028385

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JP2004061510A Pending JP2005247516A (ja) 2004-03-05 2004-03-05 浮上式基板搬送処理装置

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100727001B1 (ko) 2006-05-04 2007-06-14 주식회사 디엠에스 인라인 타입 코팅장치
JP2007158005A (ja) * 2005-12-05 2007-06-21 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
JP2009061380A (ja) * 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd 塗布装置および塗布方法
JP2009061395A (ja) * 2007-09-06 2009-03-26 Tokyo Ohka Kogyo Co Ltd 塗布装置及び塗布方法
JP2009072650A (ja) * 2007-09-19 2009-04-09 Tokyo Ohka Kogyo Co Ltd 浮上搬送塗布装置
JP2010098126A (ja) * 2008-10-16 2010-04-30 Tokyo Electron Ltd 基板搬送処理装置
JP2011219250A (ja) * 2010-04-14 2011-11-04 Oiles Corp 非接触搬送装置
KR101133266B1 (ko) 2009-11-02 2012-04-05 주식회사 나래나노텍 코팅 영역의 기판 이송 장치 및 이를 구비한 코팅 장치, 및 기판 이송 방법
KR101202456B1 (ko) 2010-06-24 2012-11-16 주식회사 나래나노텍 코팅 영역에서 기판을 안정적으로 이송시키기 위한 리니어 모션 가이드 구조, 및 이를 구비한 기판 이송 장치 및 코팅 장치
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
KR20180027065A (ko) * 2016-09-06 2018-03-14 주식회사 케이씨텍 기판 처리 장치 및 기판 처리 시스템
CN113412535A (zh) * 2018-09-20 2021-09-17 株式会社Nsc 悬浮输送装置

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007158005A (ja) * 2005-12-05 2007-06-21 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
KR100727001B1 (ko) 2006-05-04 2007-06-14 주식회사 디엠에스 인라인 타입 코팅장치
JP2009061380A (ja) * 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd 塗布装置および塗布方法
JP2009061395A (ja) * 2007-09-06 2009-03-26 Tokyo Ohka Kogyo Co Ltd 塗布装置及び塗布方法
JP2009072650A (ja) * 2007-09-19 2009-04-09 Tokyo Ohka Kogyo Co Ltd 浮上搬送塗布装置
JP2010098126A (ja) * 2008-10-16 2010-04-30 Tokyo Electron Ltd 基板搬送処理装置
KR101133266B1 (ko) 2009-11-02 2012-04-05 주식회사 나래나노텍 코팅 영역의 기판 이송 장치 및 이를 구비한 코팅 장치, 및 기판 이송 방법
JP2011219250A (ja) * 2010-04-14 2011-11-04 Oiles Corp 非接触搬送装置
KR101202456B1 (ko) 2010-06-24 2012-11-16 주식회사 나래나노텍 코팅 영역에서 기판을 안정적으로 이송시키기 위한 리니어 모션 가이드 구조, 및 이를 구비한 기판 이송 장치 및 코팅 장치
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
KR20180027065A (ko) * 2016-09-06 2018-03-14 주식회사 케이씨텍 기판 처리 장치 및 기판 처리 시스템
KR101965571B1 (ko) * 2016-09-06 2019-04-04 주식회사 케이씨텍 기판 처리 장치 및 기판 처리 시스템
CN113412535A (zh) * 2018-09-20 2021-09-17 株式会社Nsc 悬浮输送装置
CN113412535B (zh) * 2018-09-20 2024-06-07 株式会社Nsc 悬浮输送装置

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