JP2005197456A5 - - Google Patents

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Publication number
JP2005197456A5
JP2005197456A5 JP2004002142A JP2004002142A JP2005197456A5 JP 2005197456 A5 JP2005197456 A5 JP 2005197456A5 JP 2004002142 A JP2004002142 A JP 2004002142A JP 2004002142 A JP2004002142 A JP 2004002142A JP 2005197456 A5 JP2005197456 A5 JP 2005197456A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2004002142A
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Japanese (ja)
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JP4535732B2 (ja
JP2005197456A (ja
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Priority to JP2004002142A priority Critical patent/JP4535732B2/ja
Priority claimed from JP2004002142A external-priority patent/JP4535732B2/ja
Priority to US11/014,961 priority patent/US6987279B2/en
Publication of JP2005197456A publication Critical patent/JP2005197456A/ja
Publication of JP2005197456A5 publication Critical patent/JP2005197456A5/ja
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Publication of JP4535732B2 publication Critical patent/JP4535732B2/ja
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JP2004002142A 2004-01-07 2004-01-07 光源装置及びそれを用いた露光装置 Expired - Fee Related JP4535732B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004002142A JP4535732B2 (ja) 2004-01-07 2004-01-07 光源装置及びそれを用いた露光装置
US11/014,961 US6987279B2 (en) 2004-01-07 2004-12-20 Light source device and exposure equipment using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004002142A JP4535732B2 (ja) 2004-01-07 2004-01-07 光源装置及びそれを用いた露光装置

Publications (3)

Publication Number Publication Date
JP2005197456A JP2005197456A (ja) 2005-07-21
JP2005197456A5 true JP2005197456A5 (enExample) 2007-02-15
JP4535732B2 JP4535732B2 (ja) 2010-09-01

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JP2004002142A Expired - Fee Related JP4535732B2 (ja) 2004-01-07 2004-01-07 光源装置及びそれを用いた露光装置

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US (1) US6987279B2 (enExample)
JP (1) JP4535732B2 (enExample)

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IL234729B (en) 2013-09-20 2021-02-28 Asml Netherlands Bv A light source operated by a laser and a method using a mode mixer
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