JP2005183985A5 - - Google Patents

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Publication number
JP2005183985A5
JP2005183985A5 JP2004365869A JP2004365869A JP2005183985A5 JP 2005183985 A5 JP2005183985 A5 JP 2005183985A5 JP 2004365869 A JP2004365869 A JP 2004365869A JP 2004365869 A JP2004365869 A JP 2004365869A JP 2005183985 A5 JP2005183985 A5 JP 2005183985A5
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Japan
Prior art keywords
stamper
layer
approximately
patterned layer
range
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JP2004365869A
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Japanese (ja)
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JP2005183985A (ja
JP4712370B2 (ja
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Priority claimed from US10/741,316 external-priority patent/US7632087B2/en
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Publication of JP2005183985A5 publication Critical patent/JP2005183985A5/ja
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Publication of JP4712370B2 publication Critical patent/JP4712370B2/ja
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JP2004365869A 2003-12-19 2004-12-17 インプリント・リソグラフィのための複合スタンパ Expired - Fee Related JP4712370B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/741,316 US7632087B2 (en) 2003-12-19 2003-12-19 Composite stamper for imprint lithography
US10/741,316 2003-12-19

Publications (3)

Publication Number Publication Date
JP2005183985A JP2005183985A (ja) 2005-07-07
JP2005183985A5 true JP2005183985A5 (OSRAM) 2008-02-07
JP4712370B2 JP4712370B2 (ja) 2011-06-29

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JP2004365869A Expired - Fee Related JP4712370B2 (ja) 2003-12-19 2004-12-17 インプリント・リソグラフィのための複合スタンパ

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US (3) US7632087B2 (OSRAM)
JP (1) JP4712370B2 (OSRAM)
DE (1) DE102004055223A1 (OSRAM)
MY (1) MY144004A (OSRAM)

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