JP2005136403A5 - - Google Patents
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- Publication number
- JP2005136403A5 JP2005136403A5 JP2004297094A JP2004297094A JP2005136403A5 JP 2005136403 A5 JP2005136403 A5 JP 2005136403A5 JP 2004297094 A JP2004297094 A JP 2004297094A JP 2004297094 A JP2004297094 A JP 2004297094A JP 2005136403 A5 JP2005136403 A5 JP 2005136403A5
- Authority
- JP
- Japan
- Prior art keywords
- mask
- semiconductor layer
- conductive layer
- layer
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 43
- 238000000034 method Methods 0.000 claims 32
- 238000004519 manufacturing process Methods 0.000 claims 11
- 239000010409 thin film Substances 0.000 claims 11
- 238000005530 etching Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- 239000010949 copper Substances 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 3
- 239000010931 gold Substances 0.000 claims 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 239000011368 organic material Substances 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 229910052709 silver Inorganic materials 0.000 claims 3
- 239000004332 silver Substances 0.000 claims 3
- 238000004544 sputter deposition Methods 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004297094A JP4718818B2 (ja) | 2003-10-10 | 2004-10-12 | 薄膜トランジスタの作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003351974 | 2003-10-10 | ||
| JP2003351974 | 2003-10-10 | ||
| JP2004297094A JP4718818B2 (ja) | 2003-10-10 | 2004-10-12 | 薄膜トランジスタの作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005136403A JP2005136403A (ja) | 2005-05-26 |
| JP2005136403A5 true JP2005136403A5 (enExample) | 2007-08-30 |
| JP4718818B2 JP4718818B2 (ja) | 2011-07-06 |
Family
ID=34656092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004297094A Expired - Fee Related JP4718818B2 (ja) | 2003-10-10 | 2004-10-12 | 薄膜トランジスタの作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4718818B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008226993A (ja) * | 2007-03-09 | 2008-09-25 | Advanced Lcd Technologies Development Center Co Ltd | 半導体装置及びその製造方法 |
| CN104992962B (zh) | 2009-12-04 | 2018-12-25 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
| JP2012164876A (ja) * | 2011-02-08 | 2012-08-30 | Mitsubishi Chemicals Corp | 配線又は電極の形成方法、電子デバイス及びその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62140466A (ja) * | 1985-12-16 | 1987-06-24 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ回路の製造方法 |
| JPS62263676A (ja) * | 1986-05-09 | 1987-11-16 | Seiko Instr & Electronics Ltd | 薄膜トランジスタの製造方法 |
| JPH11340129A (ja) * | 1998-05-28 | 1999-12-10 | Seiko Epson Corp | パターン製造方法およびパターン製造装置 |
| JP2003179234A (ja) * | 2001-09-05 | 2003-06-27 | Konica Corp | 有機半導体素子およびその製造方法 |
-
2004
- 2004-10-12 JP JP2004297094A patent/JP4718818B2/ja not_active Expired - Fee Related
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