JP2005136373A - 光学デバイスおよびその製造方法 - Google Patents
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Abstract
【解決手段】光学デバイスは、基台10と、基台10に取り付けられた光学素子チップ5及び透光性部材6とを備えている。基台10内には配線12が埋め込まれており、配線12の一方の端部は内部端子部12aとなり、配線12の他方の端部は外部端子部12bとなっている。基台10内には、周辺回路などを内蔵した半導体チップ51と、半導体チップ51のパッド電極と配線12とを接続するための金属細線52とが埋め込まれている。配線12と共に周辺回路等を内蔵する半導体チップ51や金属細線52がモールドされ、光学デバイスと周辺回路等を含む半導体チップ51とが1パッケージ化されている。
【選択図】 図2
Description
−光学デバイスの構造−
図1(a),(b)は、順に、第1の実施形態に係る光学デバイスのIA−IA線における断面図及び裏面図である。ただし、図1(a)と図1(b)とは、互いに異なる縮尺で描かれている。
図3(a)〜(f)は、本発明の実施形態に係る光学デバイスの製造工程を示す断面図である。ただし、図3(a)〜(c)に示す工程において、2個の光学デバイス形成領域のみが表示されているが、一般には、図3(a)〜(c)に示す工程においては、多数の光学デバイス形成領域を碁盤目状に有するリードフレームを用いて製造工程が進められる。
図5(a),(b)は、順に、第2の実施形態に係る光学デバイスのVA−VA線における断面図及び裏面図である。ただし、図5(a)と図5(b)とは、互いに異なる縮尺で描かれている。
5 撮像素子
5a 主面
5b パッド電極
6 窓部材
7 シール樹脂
8 バンプ
10 基台
10x 成形体
12 配線
12a 内部端子部
12b 外部端子部
13 半田ボール
15 シール樹脂
20 封止テープ
30 モールド金型
30a ダイキャビティ
30b 仕切部
40 ホログラム
40a 本体部
40b ホログラム領域
51 半導体チップ
52 金属細線
Claims (10)
- 開口部を囲み,配線をモールド樹脂によってモールドしてなる基台と、
上記基台の入光方向に対峙する第1の面に取り付けられた透光性部材と、
上記基台の上記第1の面に対向する第2の面に、その主面を上記透光性部材に向けて取り付けられた光学素子チップと、
上記基台を構成するモールド樹脂内に埋め込まれた半導体チップと、
上記基台を構成するモールド樹脂内に埋め込まれ、上記半導体チップと上記配線とを接続する接続部材と
を備えている光学デバイス。 - 請求項1記載の光学デバイスにおいて、
上記基台の上記第2の面側の上記開口部の周辺に位置する領域に、上記配線の一部である内部端子部が形成され、上記内部端子部と上記光学素子チップの一部とが電気的に接合されていて、
上記基台の上記第2の面側の外周の周辺に位置する領域に、上記配線の他の一部である外部端子部が形成されている,光学デバイス。 - 請求項2記載の光学デバイスにおいて、
上記基台の厚みが実質的に一定である,光学デバイス。 - 請求項1〜3のうちいずれか1つに記載の光学デバイスにおいて、
上記半導体チップは、上記配線上に搭載されている,光学デバイス。 - 請求項1〜4のうちいずれか1つに記載の光学デバイスにおいて、
上記光学素子チップは、撮像素子を搭載しており、
固体撮像装置である,光学デバイス。 - 請求項1〜4のうちいずれか1つに記載の光学デバイスにおいて、
上記光学素子チップは、受光素子を搭載しており、
光ピックアップ装置に組み込まれている,光学デバイス。 - 請求項1〜4のうちいずれか1つに記載の光学デバイスにおいて、
上記透光性部材は、ホログラムであり、
上記光学素子チップは、受光素子と発光素子とを搭載しており、
ホログラムユニットである,光学デバイス。 - 配線パターンを有するリードフレームと半導体チップと半導体チップ−リードフレーム間を接続する接続部材とをモールドして、各々開口部を囲む複数の光学デバイス形成領域を有する成形体を形成する工程(a)と、
上記工程(a)の後で、上記成形体を切断することにより、上記成形体から分離された分離体を形成する工程(b)と、
上記工程(a)の後で、上記開口部を挟んで光学素子チップ及び透光性部材を個別に上記成形体又は成形体の分離体に取り付ける工程(c)と
を含む光学デバイスの製造方法。 - 請求項8記載の光学デバイスの製造方法において、
上記工程(a)では、上記配線となるリードフレームを封止テープの上に載置した状態で両者のモールド金型に取り付けて、樹脂モールドを行なう,光学デバイスの製造方法。 - 請求項8又は9記載の光学デバイスの製造方法において、
上記工程(a)では、上記半導体チップを上記リードフレームに搭載した状態で樹脂モールドを行なう,光学デバイスの製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2004130300A JP4170950B2 (ja) | 2003-10-10 | 2004-04-26 | 光学デバイスおよびその製造方法 |
US10/958,296 US7485848B2 (en) | 2003-10-10 | 2004-10-06 | Optical device and production method thereof |
TW093130435A TWI254441B (en) | 2003-10-10 | 2004-10-07 | Optical device and production method thereof |
EP04024092A EP1523042A3 (en) | 2003-10-10 | 2004-10-08 | Optical device and production method thereof |
KR1020040080208A KR100583509B1 (ko) | 2003-10-10 | 2004-10-08 | 광학디바이스 및 그 제조방법 |
CNB2004100849861A CN100352056C (zh) | 2003-10-10 | 2004-10-09 | 光学器件及其制造方法 |
US12/240,635 US7755030B2 (en) | 2003-10-10 | 2008-09-29 | Optical device including a wiring having a reentrant cavity |
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JP2003352090 | 2003-10-10 | ||
JP2004130300A JP4170950B2 (ja) | 2003-10-10 | 2004-04-26 | 光学デバイスおよびその製造方法 |
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JP2005136373A true JP2005136373A (ja) | 2005-05-26 |
JP4170950B2 JP4170950B2 (ja) | 2008-10-22 |
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JP2004130300A Expired - Fee Related JP4170950B2 (ja) | 2003-10-10 | 2004-04-26 | 光学デバイスおよびその製造方法 |
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US (2) | US7485848B2 (ja) |
EP (1) | EP1523042A3 (ja) |
JP (1) | JP4170950B2 (ja) |
KR (1) | KR100583509B1 (ja) |
CN (1) | CN100352056C (ja) |
TW (1) | TWI254441B (ja) |
Cited By (4)
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JP2011023595A (ja) * | 2009-07-16 | 2011-02-03 | Renesas Electronics Corp | 固定撮像素子 |
JP2018050054A (ja) * | 2013-06-03 | 2018-03-29 | オプティツ インコーポレイテッド | パッケージ型センサアッセンブリ及びその製造方法 |
JP2019106496A (ja) * | 2017-12-14 | 2019-06-27 | 旭化成エレクトロニクス株式会社 | 光デバイス及び光デバイスの製造方法 |
WO2022118535A1 (ja) * | 2020-12-03 | 2022-06-09 | ソニーセミコンダクタソリューションズ株式会社 | 半導体モジュールおよびその製造方法 |
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- 2004-10-06 US US10/958,296 patent/US7485848B2/en not_active Expired - Fee Related
- 2004-10-07 TW TW093130435A patent/TWI254441B/zh not_active IP Right Cessation
- 2004-10-08 EP EP04024092A patent/EP1523042A3/en not_active Withdrawn
- 2004-10-08 KR KR1020040080208A patent/KR100583509B1/ko not_active IP Right Cessation
- 2004-10-09 CN CNB2004100849861A patent/CN100352056C/zh not_active Expired - Fee Related
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2008
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011023595A (ja) * | 2009-07-16 | 2011-02-03 | Renesas Electronics Corp | 固定撮像素子 |
JP2018050054A (ja) * | 2013-06-03 | 2018-03-29 | オプティツ インコーポレイテッド | パッケージ型センサアッセンブリ及びその製造方法 |
JP2019106496A (ja) * | 2017-12-14 | 2019-06-27 | 旭化成エレクトロニクス株式会社 | 光デバイス及び光デバイスの製造方法 |
JP7015686B2 (ja) | 2017-12-14 | 2022-02-03 | 旭化成エレクトロニクス株式会社 | 光デバイス及び光デバイスの製造方法 |
WO2022118535A1 (ja) * | 2020-12-03 | 2022-06-09 | ソニーセミコンダクタソリューションズ株式会社 | 半導体モジュールおよびその製造方法 |
Also Published As
Publication number | Publication date |
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TWI254441B (en) | 2006-05-01 |
TW200514228A (en) | 2005-04-16 |
CN1606159A (zh) | 2005-04-13 |
KR20050035091A (ko) | 2005-04-15 |
KR100583509B1 (ko) | 2006-05-25 |
US20050077451A1 (en) | 2005-04-14 |
JP4170950B2 (ja) | 2008-10-22 |
EP1523042A2 (en) | 2005-04-13 |
US7755030B2 (en) | 2010-07-13 |
CN100352056C (zh) | 2007-11-28 |
EP1523042A3 (en) | 2009-12-09 |
US7485848B2 (en) | 2009-02-03 |
US20090032684A1 (en) | 2009-02-05 |
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