JP2005101564A5 - - Google Patents

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Publication number
JP2005101564A5
JP2005101564A5 JP2004239630A JP2004239630A JP2005101564A5 JP 2005101564 A5 JP2005101564 A5 JP 2005101564A5 JP 2004239630 A JP2004239630 A JP 2004239630A JP 2004239630 A JP2004239630 A JP 2004239630A JP 2005101564 A5 JP2005101564 A5 JP 2005101564A5
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JP
Japan
Prior art keywords
container
precursor
volume
fluid stream
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004239630A
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English (en)
Japanese (ja)
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JP2005101564A (ja
JP4012181B2 (ja
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Publication date
Priority claimed from US10/902,778 external-priority patent/US7261118B2/en
Application filed filed Critical
Publication of JP2005101564A publication Critical patent/JP2005101564A/ja
Publication of JP2005101564A5 publication Critical patent/JP2005101564A5/ja
Application granted granted Critical
Publication of JP4012181B2 publication Critical patent/JP4012181B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004239630A 2003-08-19 2004-08-19 前駆体物質送給方法及び容器 Expired - Fee Related JP4012181B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US49618703P 2003-08-19 2003-08-19
US58729504P 2004-07-12 2004-07-12
US10/902,778 US7261118B2 (en) 2003-08-19 2004-08-02 Method and vessel for the delivery of precursor materials

Publications (3)

Publication Number Publication Date
JP2005101564A JP2005101564A (ja) 2005-04-14
JP2005101564A5 true JP2005101564A5 (enExample) 2006-04-06
JP4012181B2 JP4012181B2 (ja) 2007-11-21

Family

ID=34069125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004239630A Expired - Fee Related JP4012181B2 (ja) 2003-08-19 2004-08-19 前駆体物質送給方法及び容器

Country Status (10)

Country Link
US (1) US7261118B2 (enExample)
EP (1) EP1508631B1 (enExample)
JP (1) JP4012181B2 (enExample)
KR (1) KR100590463B1 (enExample)
CN (1) CN100523289C (enExample)
AT (1) ATE466969T1 (enExample)
DE (1) DE602004026968D1 (enExample)
IL (1) IL163536A0 (enExample)
SG (2) SG109618A1 (enExample)
TW (1) TWI257436B (enExample)

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US10876205B2 (en) 2016-09-30 2020-12-29 Asm Ip Holding B.V. Reactant vaporizer and related systems and methods
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