JP2005076845A

JP2005076845A - Gate valve

Info

Publication number: JP2005076845A
Application number: JP2003311120A
Authority: JP
Inventors: Kenji Amano; 健次天野
Original assignee: Tokyo Electron Ltd
Current assignee: Tokyo Electron Ltd
Priority date: 2003-09-03
Filing date: 2003-09-03
Publication date: 2005-03-24
Anticipated expiration: 2023-09-03
Also published as: JP4381753B2

Abstract

PROBLEM TO BE SOLVED: To provide a gate valve realizing reduction of weight and costs, and reduction of a conveyance arm stroke by substantially reducing a thickness size. SOLUTION: The gate valve 14L has a long valve element 18L formed in a size capable of blocking a horizontally long substrate carry-in outlet 12L, a valve element support part 20 supporting the valve element 18L so it can move between a first valve element device for blocking the substrate carry-in outlet 12L, a second valve element device retreated below a forward movement position and the lower substrate carry-in outlet 12L, or an original position (a position shown in the figure), a valve element moving mechanism 22 moving the valve element 18L between the forward movement position and the original position via the valve element support part 20, and a valve element pressing part 24 contacting or connected to an outer side face of the valve element 18L positioned in the forward movement position to press the valve element 18L against a chamber side wall 10a. COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、ゲートバルブに係り、特に被処理基板用の搬入出口を開閉するためのゲートバルブに関する。 The present invention relates to a gate valve, and more particularly to a gate valve for opening and closing a loading / unloading port for a substrate to be processed.

ゲートバルブは、閉じたときに真空室を気密状態で遮断し、開いたときに真空室間で被処理基板の移送を可能とする真空バルブであり、半導体製造装置やＦＰＤ（Flat Panel Display）製造装置等では反応容器、搬送室、ロードロック室等の基板搬入出口を開閉したり、隣接する真空容器または真空室間を仕切るのによく用いられている。 The gate valve is a vacuum valve that shuts off the vacuum chamber in an airtight state when it is closed, and enables transfer of the substrate to be processed between the vacuum chambers when it is opened. It is used for semiconductor manufacturing equipment and FPD (Flat Panel Display) manufacturing. In an apparatus or the like, it is often used to open and close substrate loading / unloading ports such as a reaction vessel, a transfer chamber, and a load lock chamber, and to partition adjacent vacuum vessels or vacuum chambers.

図１１に、ＦＰＤ製造装置に用いられている従来のゲートバルブの構成を示す。このゲートバルブ１００は、特許文献１でも開示されているもので、たとえば真空可能な反応容器１０２と真空予備室またはロードロック室１０４との間に配置され、反応容器１０２の側壁１０２ａに設けられた基板搬入出口１０６をロードロック室１０４側から開閉するようになっている。 FIG. 11 shows a configuration of a conventional gate valve used in an FPD manufacturing apparatus. This gate valve 100 is also disclosed in Patent Document 1, and is disposed, for example, between a reaction vessel 102 that can be evacuated and a vacuum preparatory chamber or a load lock chamber 104, and is provided on a side wall 102a of the reaction vessel 102. The substrate loading / unloading port 106 is opened and closed from the load lock chamber 104 side.

このゲートバルブ１００は、被処理基板（図示せず）を水平姿勢で出入りさせるための基板搬入出口１０６を閉塞できるように横長に形成された長尺状の弁体１０８と、この弁体１０８を平行クランク１１０を介して支持する昇降移動可能な長尺状のバルブ本体１１２とを有している。バルブ本体１１２は、真下に配置されている１つまたは複数のエアシリンダ１１４のピストンロッド１１４ａに結合されるとともに、左右両側に配置されている垂直のガイドレール１１６に摺動可能に接続されている。エアシリンダ１１４がピストンロッド１１４ａを前進または後退させると、バルブ本体１１２がガイドレール１１６の案内で垂直方向に昇降移動するようになっている。平行クランク１１０は、バルブ本体１１２の左側面と弁体１０８の左側面との間、およびバルブ本体１１２の右側面と弁体１０８の右側面との間にそれぞれ架け渡されている。弁体１０８の上面にはローラ１１８が取り付けられている。 The gate valve 100 includes an elongated valve body 108 that is formed horizontally so that a substrate loading / unloading port 106 for allowing a substrate to be processed (not shown) to enter and exit in a horizontal position can be closed, and the valve body 108. It has an elongate valve body 112 that can be moved up and down and supported via a parallel crank 110. The valve body 112 is coupled to piston rods 114a of one or more air cylinders 114 disposed directly below, and is slidably connected to vertical guide rails 116 disposed on the left and right sides. . When the air cylinder 114 moves the piston rod 114 a forward or backward, the valve body 112 moves up and down in the vertical direction by the guide rail 116. The parallel crank 110 is spanned between the left side surface of the valve body 112 and the left side surface of the valve body 108, and between the right side surface of the valve body 112 and the right side surface of the valve body 108. A roller 118 is attached to the upper surface of the valve body 108.

このゲートバルブ１００が開いているときは、図１１の（Ａ）に示すように、弁体１０８は基板搬入出口１０６よりも低い原位置または復動位置で待機し、バルブ本体１１２は弁体１０８よりもさらに低い原位置で待機している。このゲートバルブ１００を閉じるときは、エアシリンダ１１４を作動させてピストンロッド１１４ａを所定のストロークだけ前進させる。そうすると、図１１の（Ｂ）に示すように、バルブ本体１１２と弁体１０８とがそれぞれの原位置から互いに平行かつ同一の高さ位置関係で垂直上方に移動（上昇）して、先に弁体１０８のローラ１１８が天井面１２０に当接し、次いでバルブ本体１１２が上限または往動ストッパ１２２に当接する。この時、平行クランク１１０が働いて、弁体１０８を前方つまり基板搬入出口１０６側に押し出して、基板搬入出口１０６の縁部（容器側壁１０２ａ）に押圧する。その際、ローラ１１８が天井面１２０で水平方向に転動することにより、弁体１０８は基板搬入出口１０６の縁部に水平に押し付けられる。なお、基板搬入出口１０６の縁部（容器側壁１０２ａ）にはＯリング等のシール部材（図示せず）が取り付けられている。このゲートバルブ１００を開けるときは、閉状態からエアシリンダ１１４を作動させてピストンロッド１１４ａを往動時と同一のストロークだけ後退させる。そうすると、上記の往動動作を時間的に巻き戻すような逆方向の動作つまり復動動作が行なわれてバルブ本体１１２および弁体１０８がそれぞれの原位置へ戻る。
特開平５−１９６１５０ When the gate valve 100 is open, as shown in FIG. 11A, the valve body 108 stands by in the original position or the backward movement position lower than the substrate loading / unloading port 106, and the valve body 112 is in the valve body 108. Waiting at a lower original position. When closing the gate valve 100, the air cylinder 114 is operated to advance the piston rod 114a by a predetermined stroke. Then, as shown in FIG. 11 (B), the valve body 112 and the valve body 108 move (rise) vertically upward from their original positions in parallel and at the same height positional relationship. The roller 118 of the body 108 contacts the ceiling surface 120, and then the valve body 112 contacts the upper limit or forward stopper 122. At this time, the parallel crank 110 works to push the valve body 108 forward, that is, toward the substrate loading / unloading port 106 side, and press the edge of the substrate loading / unloading port 106 (container side wall 102a). At that time, the roller 118 rolls in the horizontal direction on the ceiling surface 120, whereby the valve element 108 is pressed horizontally against the edge of the substrate loading / unloading port 106. A seal member (not shown) such as an O-ring is attached to the edge (container side wall 102a) of the substrate loading / unloading port 106. When opening the gate valve 100, the air cylinder 114 is operated from the closed state, and the piston rod 114a is retracted by the same stroke as in the forward movement. Then, a reverse operation that rewinds the above-described forward movement operation, that is, a backward movement operation is performed, and the valve body 112 and the valve body 108 return to their original positions.
JP-A-5-196150

上記のような従来のゲートバルブ１００においては、弁体１０８とバルブ本体１１２とが基板搬送方向Ｅ（バルブ厚み方向）と平行な垂直面内で延在ないし運動するリンクまたは平行クランク１１０を介して連結されるため、機構的にバルブ厚み方向サイズの大きい構造となっている。さらに、バルブ本体１１２が弁体１０８を左右両端でのみ平行クランク１１０で支持する構造であるため、弁体１０８の中間部に対して十分な支持力ないし押圧力を与えるのが難しいという問題がある。たとえば、ロードロック室１０４側を真空状態に維持したまま処理容器１０２内をメンテナンスのために大気開放する場合は、弁体１０８に対して処理容器１０２側から相当大きな圧力（逆圧）が加わる。この大きな逆圧に耐えてバルブ閉状態を維持するには、特に弁体１０８の中間部を撓まらせずに基板搬入出口１０６の縁部に密着させた状態を維持するには、弁体１０８を厚くして剛性を上げなければならない。しかし、このことによって、弁体１０８の厚みひいてはゲートバルブ１００全体の厚みサイズがさらに増し、重量やコストの増大も伴なう。加えて、ゲートバルブ１００の厚みサイズが大きいと、基板搬入出口１０６を基板搬送方向Ｅで出入りする搬送ロボット（図示せず）のアームストロークもそのぶん大きなものにしなければならず、搬送ロボットの重量やコストが増すだけでなく、搬送ロボットを設置するロードロック室１０４のスペースやフットプリントが増大する等の問題も派生する。上記のような問題は、被処理基板のサイズが大きくなるにつれて益々深刻化してくる。 In the conventional gate valve 100 as described above, the valve body 108 and the valve body 112 extend or move in a vertical plane parallel to the substrate transport direction E (valve thickness direction) via a link or parallel crank 110. Since they are connected, the structure is mechanically large in the valve thickness direction size. Furthermore, since the valve body 112 has a structure in which the valve body 108 is supported by the parallel crank 110 only at the left and right ends, there is a problem that it is difficult to give sufficient support force or pressing force to the intermediate portion of the valve body 108. . For example, when the inside of the processing container 102 is opened to the atmosphere for maintenance while maintaining the load lock chamber 104 in a vacuum state, a considerably large pressure (back pressure) is applied to the valve body 108 from the processing container 102 side. In order to withstand this large back pressure and maintain the valve closed state, in particular, in order to maintain the state in which the intermediate portion of the valve body 108 is brought into close contact with the edge of the substrate loading / unloading port 106, the valve body 108 must be thickened to increase rigidity. However, this further increases the thickness of the valve body 108 and thus the thickness size of the entire gate valve 100, which also increases the weight and cost. In addition, if the thickness of the gate valve 100 is large, the arm stroke of a transfer robot (not shown) that moves in and out of the substrate loading / unloading port 106 in the substrate transfer direction E must be increased to that extent. In addition to an increase in cost, problems such as an increase in the space and footprint of the load lock chamber 104 in which the transfer robot is installed also arise. The above problems become more serious as the size of the substrate to be processed increases.

本発明は、かかる従来技術の問題点に鑑みてなされたもので、厚みサイズを大幅に縮小し、重量およびコストの低減や搬送アームストロークの低減を実現するゲートバルブを提供することを目的とする。 The present invention has been made in view of the problems of the prior art, and an object of the present invention is to provide a gate valve that significantly reduces the thickness size and realizes a reduction in weight and cost and a transfer arm stroke. .

上記の目的を達成するために、本発明のゲートバルブは、チャンバの一側壁に設けられた被処理基板の搬入出用の基板搬入出口を開閉するためのゲートバルブにおいて、相対向する内側面と外側面とを有し、前記内側面を前記チャンバ側壁に当てた状態で前記搬入出口を閉塞できるように形成された板状の弁体と、前記弁体を前記基板搬入出口を閉塞するための第１の弁体位置と前記基板搬入出口より退避した第２の弁体位置との間で移動可能に支持する弁体支持部と、前記弁体支持部を介して前記弁体を前記第１の弁体位置と前記第２の弁体位置との間で移動させる弁体移動機構と、前記第１の弁体位置に位置する前記弁体の外側面に接触または接続して前記弁体を前記チャンバ側壁に押し付ける弁体押圧部とを有する。チャンバの側壁には、基板搬入出口の周囲で弁体と気密に接触するためのシール部材が設けられてよい。 In order to achieve the above object, a gate valve of the present invention is a gate valve for opening and closing a substrate loading / unloading port for loading and unloading a substrate to be processed provided on one side wall of a chamber. A plate-shaped valve body formed so as to be able to close the loading / unloading port in a state where the inner side surface is in contact with the chamber side wall, and the valve body for closing the substrate loading / unloading port A valve body support portion movably supported between a first valve body position and a second valve body position retracted from the substrate loading / unloading port; and the valve body through the valve body support portion. A valve body moving mechanism for moving between the valve body position and the second valve body position; and an outer surface of the valve body located at the first valve body position to contact or connect to the valve body. A valve body pressing portion that presses against the chamber side wall. A seal member for making airtight contact with the valve body around the substrate loading / unloading port may be provided on the side wall of the chamber.

本発明のゲートバルブでは、基板搬入出口を閉塞するために第１の弁体位置に位置する弁体に対して弁体押圧部が基板搬入出口とは反対側の弁体外側面に接触または接続して弁体をチャンバ側壁に押し付けるので、弁体を軽量薄型に構成しても、チャンバ側からの逆圧に対して弁体を撓まらせずに安定な密着または密閉状態を維持して、信頼性の高いバルブ機能を得ることができる。 In the gate valve of the present invention, the valve body pressing portion is in contact with or connected to the valve body outer surface opposite to the substrate carry-in / out port with respect to the valve body located at the first valve body position in order to close the substrate carry-in / out port. Since the valve body is pressed against the side wall of the chamber, even if the valve body is configured to be light and thin, a stable close contact or sealed state is maintained without bending the valve body against the counter pressure from the chamber side, A highly reliable valve function can be obtained.

本発明の好ましい一態様によれば、弁体支持部が、弁体を弁体押圧部の押圧方向と逆の方向に弾性的に付勢する第１のバネ部材を有する。かかる構成によれば、弁体押圧部が押圧力を解除した際に、第１のバネ部材のバネ力により弁体を基板搬入出口より速やかに離し、基板搬入出口を開けるための復動動作を迅速に行うことができる。 According to a preferred aspect of the present invention, the valve body support portion includes a first spring member that elastically biases the valve body in a direction opposite to the pressing direction of the valve body pressing portion. According to this configuration, when the valve body pressing part releases the pressing force, the valve body is quickly separated from the substrate loading / unloading port by the spring force of the first spring member, and the backward movement operation for opening the substrate loading / unloading port is performed. Can be done quickly.

また、好ましい一態様によれば、弁体支持部が、一端部が弁体の外側面に第１の回転軸を介して回転可能に接続されたレバー体と、このレバー体の他端部を第２の回転軸を介して回転可能に支持するベース部とを有し、弁体移動機構がレバー体を第２の回転軸を中心として旋回運動させるためのレバー旋回駆動部を有する。この場合、弁体支持部のレバー体と弁体移動機構のレバー旋回駆動部とを弁体の長手方向に所望の間隔を置いて複数組設けることで、平行クランクを構成することができる。バルブ厚み方向におけるレバーないし平行クランクの占有面積を小さくするために、好ましくはレバー体がチャンバ側壁とほぼ平行な面内で旋回運動するように構成してよい。 According to a preferred aspect, the valve body support portion includes a lever body whose one end is rotatably connected to the outer surface of the valve body via the first rotation shaft, and the other end of the lever body. And a base part that is rotatably supported via a second rotating shaft, and the valve body moving mechanism has a lever turning drive part for making the lever body turn about the second rotating shaft. In this case, a parallel crank can be configured by providing a plurality of sets of lever bodies of the valve body support section and lever turning drive sections of the valve body moving mechanism at a desired interval in the longitudinal direction of the valve body. In order to reduce the area occupied by the lever or the parallel crank in the valve thickness direction, the lever body may preferably be configured to pivot in a plane substantially parallel to the chamber side wall.

好ましい一形態によれば、レバー旋回駆動部が、チャンバ側壁とほぼ平行な面内に設定された第１の直線方向で移動可能な第１の直進移動体と、原節が第１の直進移動体に接続され、従節がレバー体に接続されたリンクとを有する。かかる構成では、第１の直進移動体を第１の直線方向で原位置から往動位置へ移動させると、リンクを介してレバー体がその往動位置へ向って回転運動し、レバー体の回転運動に伴なって弁体もその往動位置へ向って移動する。そして、第１の直進移動体を第１の直線方向で往動位置から原位置へ移動させると、リンクを介してレバー体がその原位置へ向って回転運動し、レバー体の回転運動に伴なって弁体もその原位置へ向って移動する。この場合、好ましは、レバー旋回駆動部が、弁体を第２の弁体位置から第１の弁体位置まで移動させるために第１の直進移動体を第１の直線方向で原位置から往動位置まで直進駆動する第１の直進駆動部を有してよく、あるいは弁体を第１の弁体位置から第２の弁体位置まで移動させるために第１の直進移動体を第１の直線方向で往動位置から原位置まで直進駆動する第２の直進駆動部を有してよい。 According to a preferred embodiment, the lever turning drive unit is movable in a first linear direction set in a plane substantially parallel to the chamber side wall, and the original clause is moved in the first straight movement. A link connected to the body and a follower connected to the lever body. In such a configuration, when the first rectilinearly moving body is moved from the original position to the forward movement position in the first linear direction, the lever body rotates through the link toward the forward movement position, and the lever body rotates. Along with the movement, the valve body also moves toward its forward movement position. Then, when the first rectilinear moving body is moved from the forward movement position to the original position in the first linear direction, the lever body rotates toward the original position via the link, and is accompanied by the rotation movement of the lever body. The valve body also moves toward its original position. In this case, it is preferable that the lever turning drive unit moves the first rectilinear moving body from the original position in the first linear direction in order to move the valve body from the second valve body position to the first valve body position. A first rectilinear drive unit that linearly drives to the forward movement position may be provided, or the first rectilinear moving body may be the first in order to move the valve body from the first valve body position to the second valve body position. A second straight drive unit that drives straight from the forward movement position to the original position in the linear direction may be provided.

本発明の好ましい一態様によれば、弁体の外側面に鋭角に突出する傾斜面を有する傾斜突部が形成される。この場合、弁体押圧部が、弁体の傾斜突部の傾斜面に接触するための接触部を有し、かつチャンバ側壁とほぼ平行な面内に設定された第２の直線方向で移動可能な第２の直進移動体と、第２の直線方向で第２の直進移動体を原位置と往動位置との間で直進駆動する第３の直進駆動部とを有する。そして、第１の弁体位置に位置する弁体に対して弁体押圧部の第３の直進駆動部が第２の直進移動体を往動位置へ直進駆動するときに、第２の直進移動体が往動位置に近づくにつれて接触部が弁体の傾斜突部の傾斜面に案内されながら弁体に対する押圧力を次第に増大させるようにする。 According to a preferred aspect of the present invention, an inclined protrusion having an inclined surface protruding at an acute angle is formed on the outer surface of the valve body. In this case, the valve body pressing portion has a contact portion for contacting the inclined surface of the inclined protrusion of the valve body, and is movable in the second linear direction set in a plane substantially parallel to the chamber side wall. And a third rectilinear drive unit for driving the second rectilinear moving body in a second linear direction between the original position and the forward movement position. Then, when the third rectilinear drive unit of the valve body pressing unit linearly drives the second rectilinear moving body to the forward movement position with respect to the valve body located at the first valve body position, the second rectilinear movement As the body approaches the forward movement position, the pressing portion is gradually increased while the contact portion is guided by the inclined surface of the inclined protrusion of the valve body.

かかる構成によれば、弁体に押圧力を加える第２の直進移動体のバルブ厚み方向のサイズを小さなもので済ますことができる。この構成においては、弁体の傾斜突部に対して押圧力を加える際の摩擦を小さくするために、第２の直進移動体の接触部が弁体の傾斜突部の傾斜面上で転動する第１の転動体を有するのが好ましい。また、弁体の長手方向において押圧力を分散化または均一化するために、第２の直進移動体の接触部が弁体の長手方向に所望の間隔を置いて複数個設けられるのが好ましい。さらに、弁体側からの反作用を安定強固に受け止められるように、弁体押圧部が、第２の直進移動体からみてチャンバ側壁と反対側で第２の直進移動体を案内し、かつ支持する案内支持部を有するのが好ましい。この場合、弁体押圧部が、案内支持部の案内面上で転動するように第２の直進移動体に取り付けられた第２の転動体を有してよく、これによって押圧力を増大させながら第２の直進移動体の往動運動を促進することができる。 According to such a configuration, it is possible to reduce the size in the valve thickness direction of the second rectilinearly moving body that applies a pressing force to the valve body. In this configuration, the contact portion of the second rectilinearly moving body rolls on the inclined surface of the inclined protrusion of the valve body in order to reduce friction when a pressing force is applied to the inclined protrusion of the valve body. It is preferable to have a first rolling element. In order to disperse or equalize the pressing force in the longitudinal direction of the valve body, it is preferable that a plurality of contact portions of the second rectilinearly moving body are provided at a desired interval in the longitudinal direction of the valve body. Further, the valve body pressing portion guides and supports the second rectilinear moving body on the side opposite to the chamber side wall as viewed from the second rectilinear moving body so that the reaction from the valve body side can be stably and firmly received. It is preferable to have a support part. In this case, the valve body pressing part may have a second rolling element attached to the second linearly moving body so as to roll on the guide surface of the guide support part, thereby increasing the pressing force. However, the forward movement of the second straight moving body can be promoted.

本発明の好適な一態様によれば、弁体移動機構の第１の直進駆動部と弁体押圧部の第３の直進駆動部とが第１の駆動源を共有し、第１の駆動源の駆動力に基づいた第１の直進駆動部による第１の直進移動体の原位置から往動位置までの移動と第１の駆動源の駆動力に基づいた第３の直進駆動部による第３の直進移動体の原位置から往動位置までの移動とが連動して行なわれる。この場合、第１の駆動源の共用化により駆動源の簡略化および小スペース化をはかることができる。もっとも、独立駆動方式も可能である。すなわち、別の態様として、弁体移動機構の第１の直進駆動部と弁体押圧部の第３の直進駆動部とが互いに独立した第２および第３の駆動源をそれぞれ有し、第２の駆動源の駆動力に基づいた第１の直進駆動部による第１の直進移動体の原位置から往動位置までの移動と第３の駆動源の駆動力に基づいた第３の直進駆動部による第３の直進移動体の原位置から往動位置までの移動とが連動して行なわれるようにしてもよい。 According to a preferred aspect of the present invention, the first rectilinear drive unit of the valve body moving mechanism and the third rectilinear drive unit of the valve body pressing unit share the first drive source, and the first drive source The third linear drive unit based on the movement from the original position to the forward movement position of the first rectilinear moving body by the first rectilinear driving unit based on the driving force of the first driving source and the driving force of the first driving source. The movement of the straight moving body from the original position to the forward movement position is performed in conjunction with each other. In this case, the drive source can be simplified and the space can be reduced by sharing the first drive source. However, an independent drive method is also possible. That is, as another aspect, the first rectilinear drive part of the valve body moving mechanism and the third rectilinear drive part of the valve body pressing part respectively have second and third drive sources that are independent of each other, The third rectilinear drive unit based on the movement from the original position to the forward movement position of the first rectilinear moving body by the first rectilinear drive unit based on the drive force of the third drive source and the drive force of the third drive source The movement from the original position to the forward movement position of the third rectilinear moving body may be performed in conjunction with the above.

別の好適な一態様によれば、第２の駆動源が第１の直進移動体を往動位置に向けて付勢する第２のバネ部材を有し、第１の直進駆動部が、第２のバネ部材をそのバネ力に抗して弾性変形した状態に保持するために第３の直進移動体に連結されたバネ保持部材を有する。あるいは第２のバネ部材を備えずに、弁体移動機構の第１の直進駆動部が第１の直進移動体を重力を利用して原位置から往動位置まで移動させる構成も可能である。 According to another preferable aspect, the second drive source includes a second spring member that urges the first rectilinear moving body toward the forward movement position, and the first rectilinear drive unit includes the first rectilinear drive unit. In order to hold the second spring member in an elastically deformed state against the spring force, the second spring member has a spring holding member coupled to the third rectilinearly moving body. Alternatively, a configuration in which the first rectilinear drive unit of the valve body moving mechanism moves the first rectilinear moving body from the original position to the forward movement position using gravity without providing the second spring member is also possible.

本発明の好適な一態様によれば、弁体移動機構の第２の直進駆動部と弁体押圧部の第３の直進駆動部とが第４の駆動源を共有し、第４の駆動源の駆動力に基づいた第２の直進駆動部による第１の直進移動体の往動位置から原位置までの移動と第４の駆動源の駆動力に基づいた第３の直進駆動部による第３の直進移動体の往動位置から原位置までの移動とが連動して行なわれる。この場合、第４の駆動源の共用化により駆動源の簡略化および小スペース化をはかることができる。もっとも、独立駆動方式も可能である。すなわち、別の態様として、弁体移動機構の第２の直進駆動部と弁体押圧部の第３の直進駆動部とが互いに独立した第５および第６の駆動源をそれぞれ有し、第５の駆動源の駆動力に基づいた第２の直進駆動部による第１の直進移動体の往動位置から原位置までの移動と第６の駆動源の駆動力に基づいた第３の直進駆動部による第３の直進移動体の往動位置から原位置までの移動とが連動して行なわれるようにしてもよい。 According to a preferred aspect of the present invention, the second rectilinear drive part of the valve body moving mechanism and the third rectilinear drive part of the valve body pressing part share the fourth drive source, and the fourth drive source The third rectilinear drive unit based on the movement of the first rectilinearly moving body from the forward movement position to the original position by the second rectilinear drive unit based on the driving force of the fourth driving source and the driving force of the fourth drive source. The movement of the straight moving body from the forward movement position to the original position is performed in conjunction with each other. In this case, the drive source can be simplified and the space can be reduced by sharing the fourth drive source. However, an independent drive method is also possible. That is, as another aspect, the second rectilinear drive unit of the valve body moving mechanism and the third rectilinear drive unit of the valve body pressing unit respectively have fifth and sixth drive sources that are independent from each other. The third rectilinear driving unit based on the movement of the first rectilinear moving body from the forward movement position to the original position by the second rectilinear driving unit based on the driving force of the sixth driving source and the driving force of the sixth driving source The movement from the forward movement position to the original position of the third rectilinear moving body may be performed in conjunction with each other.

本発明のゲートバルブによれば、上記のような構成および作用を有することにより、厚みサイズを大幅に縮小し、重量およびコストの低減や搬送アームストロークの低減を実現することができる。 According to the gate valve of the present invention, the thickness and size can be greatly reduced, and the weight and cost can be reduced, and the transfer arm stroke can be reduced by having the configuration and operation as described above.

以下、図１〜図１０を参照して本発明の好適な実施の形態を説明する。 Hereinafter, preferred embodiments of the present invention will be described with reference to FIGS.

図１〜図６に、本発明の第１の実施例によるゲートバルブの構成を示す。この実施例では、チャンバ１０の側壁１０ａに水平方向に延びるように形成された上下一対の基板搬入出口１２Ｕ，１２Ｌを個別または同時に開閉するための上下一対のゲートバルブ１４Ｕ，１４Ｌを併設する形態について説明する。ここで、チャンバ１０は、大気から独立した圧力またはガス雰囲気を形成できる密閉可能な任意の容器または室でよく、たとえばＦＰＤ製造装置における反応容器、搬送室、ロードロック室等であってよい。この実施例は、真空可能な反応容器をチャンバ１０とし、このチャンバ１０と隣接する真空室たとえばロードロック室１６側にゲートバルブ１４Ｕ，１４Ｌを配置する構成としている。チャンバ１０内には、上下一対の基板搬入出口１２Ｕ，１２Ｌに対応して室内を上下に二分するための水平な仕切り板（図示せず）が設けられてもよい。 1 to 6 show the configuration of a gate valve according to a first embodiment of the present invention. In this embodiment, a pair of upper and lower gate valves 14U and 14L for opening and closing a pair of upper and lower substrate loading / unloading ports 12U and 12L formed to extend in the horizontal direction on the side wall 10a of the chamber 10 are provided. explain. Here, the chamber 10 may be any sealable container or chamber capable of forming a pressure or gas atmosphere independent of the atmosphere, and may be, for example, a reaction container, a transfer chamber, a load lock chamber, or the like in an FPD manufacturing apparatus. In this embodiment, a reaction vessel capable of being vacuumed is a chamber 10, and gate valves 14U and 14L are arranged on the side of a vacuum chamber adjacent to the chamber 10, for example, the load lock chamber 16 side. A horizontal partition plate (not shown) may be provided in the chamber 10 to divide the room up and down in correspondence with the pair of upper and lower substrate loading / unloading ports 12U and 12L.

先ず、下部ゲートバルブ１４Ｌの構成を説明する。下部ゲートバルブ１４Ｌは、横長の基板搬入出口１２Ｌを閉塞できるサイズに形成された長尺状の弁体１８Ｌと、この弁体１８Ｌを基板搬入出口１２Ｌを閉塞するための第１の弁体位置または往動位置（図２に示す位置）と下部基板搬入出口１２Ｌより下方に退避した第２の弁体位置または原位置（図１に示す位置）との間で移動可能に支持する弁体支持部２０と、この弁体支持部２０を介して弁体１８Ｌを往動位置と原位置との間で移動させる弁体移動機構２２と、往動位置に位置する弁体１８Ｌの外側面に接触または接続して弁体１８Ｌをチャンバ側壁１０ａに押し付ける弁体押圧部２４とを有する。 First, the configuration of the lower gate valve 14L will be described. The lower gate valve 14L includes a long valve body 18L formed to have a size capable of closing the horizontally long substrate loading / unloading port 12L, and a first valve body position for blocking the substrate loading / unloading port 12L. A valve body support portion that supports the movable body between the forward movement position (position shown in FIG. 2) and the second valve body position or the original position (position shown in FIG. 1) retracted downward from the lower substrate loading / unloading port 12L. 20, a valve body moving mechanism 22 for moving the valve body 18L between the forward movement position and the original position via the valve body support portion 20, and an outer surface of the valve body 18L located at the forward movement position. And a valve body pressing portion 24 that connects and presses the valve body 18L against the chamber side wall 10a.

図１および図２に示すように、弁体支持部２０、弁体移動機構２２および弁体押圧部２４は、両基板搬入出口１２Ｕ，１２Ｌを取り囲むようにチャンバ側壁１０ａに接続された枠状フランジ１９の水平な下辺部分１９Ｌの上に水平支持板２１を介してそれぞれ上向きに取り付けられている。この実施例では、基板搬入出口１２Ｌの長手方向と平行な方向（水平方向）に３基の弁体押圧部２４が一定の間隔を置いて配置され、相隣接する２基の弁体押圧部２４の間に（真中の弁体押圧部２４の両側に）弁体支持部２０および弁体移動機構２２を一体化した組立体が配置されている。 As shown in FIGS. 1 and 2, the valve body support portion 20, the valve body moving mechanism 22, and the valve body pressing portion 24 are frame-shaped flanges connected to the chamber side wall 10 a so as to surround both substrate loading / unloading ports 12 U and 12 L. On the 19 horizontal lower side portions 19L, they are respectively attached upward via a horizontal support plate 21. In this embodiment, three valve element pressing portions 24 are arranged at a certain interval in a direction (horizontal direction) parallel to the longitudinal direction of the substrate loading / unloading port 12L, and two adjacent valve element pressing portions 24 are arranged. An assembly in which the valve body support portion 20 and the valve body moving mechanism 22 are integrated is disposed between the two sides (on both sides of the middle valve body pressing portion 24).

弁体押圧部２４は、図１、図２および図４に示すように、水平支持板２１に固定された垂直上方に延びる左右両側のサイドガイド２６および背面側のリアガイド２８と、これらのサイドガイド２６およびリアガイド２８の内側で昇降移動可能に配置された上向きコ字状のロックベース３０とを有している。両サイドガイド２６の対向面または内側面には垂直方向に延びるガイドレール３２がそれぞれ取り付けられており、ロックベース３０の左右外側面に取り付けられたガイドブロック３４がガイドレール３２に上下方向に摺動可能にそれぞれ接続されている。ロックベース３０の左右両側で垂直上方に延びるアーム部には、リアガイド２８、特にその上端ガイド部２８ａ（図４）の主面上で垂直方向に転動可能な背部のガイドローラ３６と、後述する下部弁体１８Ｌの傾斜突部８０の主面上で垂直方向に転動可能な頂上部のロック用ローラ３８とが取り付けられている。ロックベース３０の下面には、下部ベース１９Ｌの下で垂直上向きに配設されたエアシリンダ４０から下部ベース１９Ｌの貫通孔を通って上方に延びているピストンロッド４０ａの先端部が結合されている。エアシリンダ４０がピストンロッド４０ａを前進または後退させると、ロックベース３０が左右両側のガイドレール３２に案内されて垂直方向の直進移動つまり昇降運動を行うようになっている。 As shown in FIGS. 1, 2, and 4, the valve body pressing portion 24 includes left and right side guides 26 that are fixed to the horizontal support plate 21 and extend from the left and right sides, and rear guides 28 on the back side, and these sides. It has an upward U-shaped lock base 30 that is arranged to be movable up and down inside the guide 26 and the rear guide 28. Guide rails 32 extending in the vertical direction are respectively attached to the opposing surfaces or inner side surfaces of both side guides 26, and guide blocks 34 attached to the left and right outer surfaces of the lock base 30 slide vertically on the guide rails 32. Each connected as possible. The arm portion extending vertically upward on both the left and right sides of the lock base 30 includes a rear guide roller 36, particularly a back guide roller 36 that can roll in the vertical direction on the main surface of the upper end guide portion 28 a (FIG. 4). A locking roller 38 at the top that can roll in the vertical direction on the main surface of the inclined protrusion 80 of the lower valve body 18L is attached. The lower end of the lock base 30 is coupled to the tip of a piston rod 40a extending upward from an air cylinder 40 disposed vertically upward below the lower base 19L through a through hole in the lower base 19L. . When the air cylinder 40 moves the piston rod 40a forward or backward, the lock base 30 is guided by the guide rails 32 on both the left and right sides so as to move in the vertical direction, that is, move up and down.

図３に示すように、相隣接する２つのロックベース３０の間には水平に延びる押し下げプレート３９が所定の高さ位置（ロックベース３０の下端部の位置）で架け渡されており、この押し下げプレート３９の所定の部位に設定された連結部３９ａが後述する弁体移動機構２２の弁体駆動ベース６８の上面に当接または連結可能となっている。 As shown in FIG. 3, a horizontally extending push-down plate 39 is bridged between two adjacent lock bases 30 at a predetermined height position (the position of the lower end of the lock base 30). A connecting portion 39a set at a predetermined portion of the plate 39 can contact or connect to the upper surface of a valve body drive base 68 of a valve body moving mechanism 22 described later.

各々の弁体支持部２０は、図１、図２、図５および図６に示すように、弁体１８Ｌと平行な垂直面内で延在し、その先端部が弁体１８Ｌの外側面に回転軸４２を介して回転可能に接続されたほぼ真っ直ぐなレバー４４と、このレバー４４の基端部を回転軸４６を介して回転可能に支持するために水平支持板２１上に固定された弁体支持ベース４８とを有している。 As shown in FIGS. 1, 2, 5, and 6, each valve body support portion 20 extends in a vertical plane parallel to the valve body 18L, and the tip thereof is on the outer surface of the valve body 18L. A substantially straight lever 44 rotatably connected via a rotating shaft 42 and a valve fixed on the horizontal support plate 21 for rotatably supporting the base end of the lever 44 via a rotating shaft 46 And a body support base 48.

図６に明示するように、レバー４４の先端側において、回転軸４２は、滑り軸受５０を介してレバー４４の先端部に接続されるとともに、チャンバ側壁１０ａと対向する一方の端部にて転がり軸受５２を介して弁体１８Ｌに接続されている。これにより、レバー４４に対して回転軸４２と弁体１８Ｌとが回転軸４２の軸方向に摺動可能であり、弁体１８Ｌに対して回転軸４２とレバー４４とが回転軸４２の中心軸の回りに回転可能となっている。回転軸４２の他方の端面より軸方向に延びる細径部４２ａにコイルばね５４が伸縮自在に嵌められ、コイルばね５４の一端は細径部４２ａの先端に固定された太径のばね受け部５６に受けられ、コイルばね５４の他端は細径部４２ａの基端側でレバー４４に固定されたリング状のばね受け部５８に受けられている。回転軸４２の細径部４２ａとコイルばね５４は、レバー４４に固定されたカバー６０の中に収められている。 As clearly shown in FIG. 6, on the distal end side of the lever 44, the rotary shaft 42 is connected to the distal end portion of the lever 44 via the sliding bearing 50 and rolls at one end portion facing the chamber side wall 10a. It is connected to the valve body 18L via the bearing 52. Thereby, the rotating shaft 42 and the valve body 18L can slide in the axial direction of the rotating shaft 42 with respect to the lever 44, and the rotating shaft 42 and the lever 44 with respect to the valve body 18L are the central axis of the rotating shaft 42. It is possible to rotate around. A coil spring 54 is telescopically fitted to a small diameter portion 42a extending in the axial direction from the other end surface of the rotating shaft 42, and one end of the coil spring 54 is a large diameter spring receiving portion 56 fixed to the tip of the small diameter portion 42a. The other end of the coil spring 54 is received by a ring-shaped spring receiving portion 58 fixed to the lever 44 on the proximal end side of the small diameter portion 42a. The small diameter portion 42 a and the coil spring 54 of the rotating shaft 42 are housed in a cover 60 fixed to the lever 44.

弁体１８Ｌに外力が加わっていないときは、図６の（Ｂ）に示すように、コイルばね５４のバネ力で先端側のばね受け部５６がカバー６０に当接する位置まで弁体１８Ｌがレバー４４側に引き寄せられ、この状態では弁体１８Ｌがチャンバ側壁１０ａから一定の距離だけ離間するようになっている。しかし、チャンバ１０の基板搬入出口１２Ｌを閉塞するためのバルブ往動動作に際しては、図６の（Ａ）に示すように、弁体１８Ｌが基板搬入出口１２Ｌと対向する位置で弁体押圧部２４からの押圧力が弁体１８Ｌに加えられることにより、弁体１８Ｌがコイルばね５４に抗してチャンバ側壁１０ａに押し付けられるようになっている。なお、弁体１８Ｌが当たるチャンバ側壁１０ａの部分つまり基板搬入出口１２Ｌの周縁部付近にはたとえばＯリングからなるシール部材６２が取り付けられている。 When no external force is applied to the valve body 18L, as shown in FIG. 6B, the valve body 18L is moved to the position where the spring receiving portion 56 on the distal end side comes into contact with the cover 60 by the spring force of the coil spring 54. In this state, the valve element 18L is separated from the chamber side wall 10a by a certain distance. However, in the valve forward movement operation for closing the substrate loading / unloading port 12L of the chamber 10, as shown in FIG. 6A, the valve body pressing portion 24 is positioned at a position where the valve body 18L faces the substrate loading / unloading port 12L. As a result, the valve body 18L is pressed against the chamber side wall 10a against the coil spring 54. A seal member 62 made of, for example, an O-ring is attached to a portion of the chamber side wall 10a that the valve body 18L contacts, that is, in the vicinity of the peripheral edge of the substrate loading / unloading port 12L.

レバー４４の基端側では、図５の（Ａ）に示すように、回転軸４６がレバー４４に固着され、弁体支持ベース４８側の転がり軸受に回転可能に支持されている。 On the base end side of the lever 44, as shown in FIG. 5A, the rotary shaft 46 is fixed to the lever 44 and is rotatably supported by a rolling bearing on the valve body support base 48 side.

弁体移動機構２２は、図１、図２および図５に示すように、フレーム１９Ｌに固着された下部ストッパ部材６４と弁体支持ベース４８に固着された上部ストッパ部材６６との間で昇降可能に構成された弁体駆動ベース６８と、この弁体駆動ベース６８を垂直上方に付勢するコイルばね７０と、弁体駆動ベース６８と弁体支持部２０のレバー４４とを連結するリンク７２とを有している。より詳細には、下部ストッパ部材６４と上部ストッパ部材６６との間に垂直に立設された一対のガイド棒７４に、弁体駆動ベース６８側の一対の筒状ガイドブロック７６がそれぞれ摺動可能に遊嵌している。そして、各ガイド棒７４を軸として下部ストッパ部材６４の上面と弁体駆動ベース６８の下面との間にコイルばね７０が設けられている。弁体駆動ベース６８の上面中心部には垂直上方に延びる弁体駆動ロッド７５が立設され、この弁体駆動ロッド７５の先端部とレバー４４の基端部との間にリンク７２が取り付けられている。このリンク７２は、弁体駆動ロッド７５およびレバー４４にそれぞれ固定された回転支持軸と、両端部がそれらの回転支持軸に回転可能に取り付けらたレバー７７とによって構成されている。 The valve body moving mechanism 22 can be moved up and down between a lower stopper member 64 fixed to the frame 19L and an upper stopper member 66 fixed to the valve body support base 48, as shown in FIGS. A valve body drive base 68 configured as described above, a coil spring 70 that urges the valve body drive base 68 vertically upward, and a link 72 that connects the valve body drive base 68 and the lever 44 of the valve body support 20. have. More specifically, a pair of cylindrical guide blocks 76 on the valve element drive base 68 side can slide on a pair of guide rods 74 provided vertically between the lower stopper member 64 and the upper stopper member 66, respectively. Are loosely fitted. A coil spring 70 is provided between the upper surface of the lower stopper member 64 and the lower surface of the valve element drive base 68 with each guide rod 74 as an axis. A valve body drive rod 75 extending vertically upward is erected at the center of the upper surface of the valve body drive base 68, and a link 72 is attached between the distal end portion of the valve body drive rod 75 and the base end portion of the lever 44. ing. The link 72 includes a rotation support shaft fixed to the valve element drive rod 75 and the lever 44, and a lever 77 having both ends rotatably attached to the rotation support shaft.

この実施例では、上記したように、弁体移動機構２２の弁体駆動ベース６８が押し下げプレート３９（図３）を介して弁体押圧部２４のロックベース３０ひいてはエアシリンダ４０に連結可能となっている。より詳細には、エアシリンダ４０がピストンロッド４０ａを後退させてロックベース３０を原位置（図１および図４の(C）に示す位置）に保持しているときは、押し下げプレート３９の連結部３９ａが弁体移動機構２２の弁体駆動ベース６８の上面に当接または連結しており、コイルバネ７０に抗して弁体駆動ベース６８を原位置（図１および図５の(C）に示す位置）に保持している。しかし、エアシリンダ４０がピストンロッド４０ａを前進させてロックベース３０を往動位置（図２および図４の(A)に示す位置）へ上昇させると、弁体駆動ベース６８が押し下げプレート３９から開放されてコイルバネ７０のバネ力により往動位置（図２および図５の(A),(B)に示す位置）まで垂直上方に直進移動または上昇運動するようになっている。弁体駆動ベース６８が上昇すると、リンク７２を介して弁体支持部２０のレバー４４が弁体支持ベース４８側の回転支持軸４６を回転中心として図１において反時計方向に回転し、レバー４４の先端部に取り付けられている弁体１８Ｌが水平姿勢を維持したまま図１に示す原位置から図２に示す往動位置まで矢印Ｆの方向に移動するようになっている。ここで、弁体１８Ｌには弁体長手方向に所定の間隔を置いて２本のレバー４４が接続されており、これら２本のレバー４４によって平行クランクが構成されている。 In this embodiment, as described above, the valve body drive base 68 of the valve body moving mechanism 22 can be connected to the lock base 30 of the valve body pressing portion 24 and the air cylinder 40 via the push-down plate 39 (FIG. 3). ing. More specifically, when the air cylinder 40 retracts the piston rod 40a and holds the lock base 30 in the original position (the position shown in FIG. 1 and FIG. 4C), the connecting portion of the push-down plate 39 39a is in contact with or connected to the upper surface of the valve body drive base 68 of the valve body moving mechanism 22, and the valve body drive base 68 is in its original position (shown in FIG. 1C and FIG. 5C) against the coil spring 70. Position). However, when the air cylinder 40 advances the piston rod 40a to raise the lock base 30 to the forward movement position (position shown in FIGS. 2 and 4A), the valve body drive base 68 is released from the push-down plate 39. Accordingly, the coil spring 70 is caused to move linearly upward or move upward to the forward movement position (the positions shown in FIGS. 2 and 5 (A) and (B)) by the spring force of the coil spring 70. When the valve body drive base 68 rises, the lever 44 of the valve body support portion 20 rotates in the counterclockwise direction in FIG. 1 about the rotation support shaft 46 on the valve body support base 48 side via the link 72. The valve body 18L attached to the tip of the valve moves in the direction of arrow F from the original position shown in FIG. 1 to the forward movement position shown in FIG. 2 while maintaining a horizontal posture. Here, two levers 44 are connected to the valve body 18L at a predetermined interval in the longitudinal direction of the valve body, and a parallel crank is constituted by these two levers 44.

弁体１８Ｌの外側面には、所定の箇所つまり図２の往動位置にて弁体押圧部２４の頂上ローラ３８と対応する箇所（計６箇所）に鋭角に突出する下向きの傾斜面を有する傾斜突部８０が固着されている。弁体１８Ｌがチャンバ１０の基板搬入出口１２Ｌを塞ぐときは、図１および図５の（Ａ）に示すように、弁体押圧部２４の頂上ローラ３８が傾斜突部８０の傾斜面に加圧接触するようになっている。 The outer surface of the valve body 18L has a downward inclined surface protruding at an acute angle at a predetermined position, that is, a position corresponding to the top roller 38 of the valve body pressing portion 24 at a forward movement position in FIG. The inclined protrusion 80 is fixed. When the valve body 18L closes the substrate loading / unloading port 12L of the chamber 10, the top roller 38 of the valve body pressing portion 24 presses against the inclined surface of the inclined protrusion 80 as shown in FIG. 1 and FIG. It comes to contact.

次に、下部ゲートバルブ１４Ｌの動作を説明する。チャンバ１０の基板搬入出口１２Ｌを開いた状態とするときは、図１に示すように、各エアシリンダ４０のピストンロッド４０ａを原位置に後退させておく。この状態では、弁体１８Ｌ、弁体支持部２０、弁体移動機構２２および弁体押圧部２４がそれぞれの原位置に位置している。より詳細には、弁体押圧部２４においては、図１および図４の（Ｃ）に示すように、ピストンロッド４０ａに結合されているロックベース３０が最下位置の原位置に在り、頂上ローラ３８は基板搬入出口１２Ｌよりも低い位置に在る。弁体移動機構２２においては、図１および図５の（Ｃ）に示すように、ロックベース３０に結合されている押し下げプレート３９の連結部３９ａが弁体駆動ベース６８の上面に連結しており、コイルばね７０に抗して弁体駆動ベース６８が最下位置の原位置に保持されている。したがって、弁体駆動ベース６８にリンク７２を介して接続されている弁体支持部２０のレバー４４はほぼ水平に臥せた姿勢に保持され、レバー４４の先端部に接続されている弁体１８Ｌは基板搬入出口１２Ｌよりも低い原位置に置かれる。 Next, the operation of the lower gate valve 14L will be described. When the substrate loading / unloading port 12L of the chamber 10 is opened, the piston rod 40a of each air cylinder 40 is moved backward to the original position as shown in FIG. In this state, the valve body 18L, the valve body support portion 20, the valve body moving mechanism 22 and the valve body pressing portion 24 are located at their original positions. More specifically, in the valve body pressing portion 24, as shown in FIG. 1 and FIG. 4C, the lock base 30 coupled to the piston rod 40a is at the lowest position, and the top roller 38 is at a position lower than the substrate loading / unloading port 12L. In the valve body moving mechanism 22, as shown in FIG. 1 and FIG. 5C, the connecting portion 39 a of the push-down plate 39 connected to the lock base 30 is connected to the upper surface of the valve body driving base 68. The valve element drive base 68 is held at the lowermost original position against the coil spring 70. Therefore, the lever 44 of the valve body support portion 20 connected to the valve body drive base 68 via the link 72 is held in a substantially horizontally leaned posture, and the valve body 18L connected to the tip end portion of the lever 44 is It is placed at an original position lower than the substrate loading / unloading port 12L.

ゲートバルブ１４Ｌによりチャンバ１０の基板搬入出口１２Ｌを閉めるときは、図１の状態から各エアシリンダ４０が同時に作動して各々のピストンロッド４０ａを往動位置まで所定のストロークだけ前進させる。そうすると、ピストンロッド４０ａに結合されている弁体押圧部２４のロックベース３０が最下位置の原位置から最上位置の往動位置まで一気に上昇する。このロックベース３０の上昇運動と連動して弁体移動機構２２の弁体駆動ベース６８がコイルばね７０のバネ力によって最下位置の原位置から最上位置の往動位置へ向って上昇する。もっとも、弁体駆動ベース６８の上昇ストロークはロックベース３０の上昇ストロークよりも短いため、往動位置に達した弁体駆動ベース６８から押し下げプレート３９は上方へ離れていく（図５の(B)→(A)）。 When closing the substrate loading / unloading port 12L of the chamber 10 by the gate valve 14L, the air cylinders 40 are simultaneously operated from the state of FIG. 1 to advance the piston rods 40a to the forward movement positions by a predetermined stroke. If it does so, the lock base 30 of the valve body press part 24 couple | bonded with the piston rod 40a will raise at a stretch from the original position of the lowest position to the forward movement position of the uppermost position. In conjunction with the upward movement of the lock base 30, the valve body drive base 68 of the valve body moving mechanism 22 is raised from the lowermost position to the uppermost position by the spring force of the coil spring 70. However, since the upward stroke of the valve body drive base 68 is shorter than the upward stroke of the lock base 30, the push-down plate 39 moves away from the valve body drive base 68 that has reached the forward movement position (FIG. 5B). → (A)).

上記のようにして弁体移動機構２２の弁体駆動ベース６８が最下位置の原位置から垂直上方に上昇すると、リンク７２を介して弁体支持部２０のレバー４４が基端側の回転軸４６を回転中心として起立するように図１において反時計回りに回転運動し、このレバー４４の回転運動に伴なって弁体１８Ｌが水平姿勢を維持したまま原位置から図１において矢印Ｆの方向に一定の面内で移動する。そして、弁体駆動ベース６８が最上位置の往動位置まで上昇すると、弁体１８Ｌは往動位置に到達して基板搬入出口１２Ｌの正面に付ける。上記したように、基板搬入出口１２Ｌの長手方向に間隔を置いて配置された２基の弁体支持部２０のレバー４４によって平行クランクが構成されている。 When the valve body drive base 68 of the valve body moving mechanism 22 ascends vertically upward from the original position at the lowest position as described above, the lever 44 of the valve body support portion 20 is rotated through the link 72 to the rotation shaft on the proximal end side. 1 is rotated counterclockwise in FIG. 1 so as to stand up about the rotation center 46, and the valve body 18L is maintained in a horizontal posture in accordance with the rotational movement of the lever 44 from the original position in the direction of arrow F in FIG. Move in a certain plane. When the valve body drive base 68 is raised to the uppermost forward movement position, the valve body 18L reaches the forward movement position and is attached to the front surface of the substrate loading / unloading port 12L. As described above, the parallel crank is constituted by the levers 44 of the two valve body support portions 20 arranged at intervals in the longitudinal direction of the substrate loading / unloading port 12L.

弁体押圧部２４においては、押し下げプレート３９が弁体駆動ベース６８から離れた後もロックベース３０がさらに上昇し、最上位置の往動位置付近に近づくとロック用ローラ３８が一足先に往動位置つまり基板搬入出口１２Ｌの正面位置に着いている弁体１８Ｌの傾斜突部８０の傾斜面に下から乗り上げ、その傾斜面上で転動しながら往動位置まで上昇する（図４の(B)→(A)）。この際、ロックベース３０側から弁体１８Ｌに対して次第に増大する押圧力が加えられ、弁体１８Ｌの内側面はチャンバ側壁１０ａのシール部材６２に押し付けられる。同時に、ロックベース３０の背面側では背面ローラ３６がリアガイド２８の上端ガイド部２８ａの主面上を転動しながら上昇することにより、弁体１８Ｌ側からの反作用を円滑かつ強固に受け止めて、弁体１８Ｌに対するアーム部ないしロック用ローラ３８の押圧を背後から後押しする。上端ガイド部２８ａは、たとえばステンレス鋼等の硬度の高い材質からなり、弁体１８Ｌに対する後押しの押圧力を高めるために適度に突出した主面を有するのが好ましい。 In the valve body pressing portion 24, the lock base 30 is further raised even after the push-down plate 39 is separated from the valve body drive base 68, and when approaching the vicinity of the uppermost forward movement position, the locking roller 38 moves forward one foot. The position of the inclined surface 80 of the valve body 18L that is at the front position of the substrate loading / unloading port 12L is climbed from below, and ascends to the forward movement position while rolling on the inclined surface ((B in FIG. 4). ) → (A)). At this time, a gradually increasing pressing force is applied to the valve body 18L from the lock base 30 side, and the inner surface of the valve body 18L is pressed against the seal member 62 of the chamber side wall 10a. At the same time, on the back side of the lock base 30, the back roller 36 rises while rolling on the main surface of the upper end guide portion 28a of the rear guide 28, thereby smoothly and firmly receiving the reaction from the valve body 18L side, The arm portion or the locking roller 38 is pressed against the valve body 18L from behind. The upper end guide portion 28a is preferably made of a material having high hardness, such as stainless steel, and preferably has a main surface that protrudes moderately in order to increase the pressing force with respect to the valve body 18L.

こうして弁体押圧部２４より弁体１８Ｌに押圧力が加えられる時は、図６につき上述したように、弁体支持部２０の先端部側では、弁体１８Ｌがレバー４４側のコイルばね５４に抗してチャンバ側壁１０ａに押し付けられる（図６の(B)→(A)）。 Thus, when a pressing force is applied to the valve body 18L from the valve body pressing portion 24, the valve body 18L is applied to the coil spring 54 on the lever 44 side on the distal end side of the valve body support portion 20 as described above with reference to FIG. It opposes against the chamber side wall 10a ((B) → (A) in FIG. 6).

上記のようにしてゲートバルブ１４Ｌの往動動作が完了すると、図２、図４の（Ａ）、図５の（Ａ）および図６の（Ａ）に示すように、弁体１８Ｌがチャンバ１０ａの側壁（シール部６２）に加圧接触して基板搬入出口１２Ｌを気密に閉塞する状態となる。エアシリンダ４０のピストンロッド位置をロックしておくことで、このままバルブ閉状態を安定に保つことができる。 When the forward movement of the gate valve 14L is completed as described above, as shown in FIGS. 2, 4A, 5A, and 6A, the valve body 18L is moved into the chamber 10a. The side wall (seal part 62) is brought into pressure contact with the substrate loading / unloading port 12L in an airtight manner. By locking the piston rod position of the air cylinder 40, the valve closed state can be kept stable as it is.

バルブ閉状態からバルブ開状態に切り替えるときは、上記のバルブ往動動作を時間的に巻き戻すような逆方向の動作つまり復動動作が行なわれる。すなわち、同一のタイミングで各エアシリンダ４０のピストンロッド４０ａを往動時と同じストロークだけ後退させる。そうすると、最初にピストンロッド４０ａに結合されているロックベース３０が往動位置からの下降運動を開始し、ロック用ローラ３８が弁体１８Ｌの傾斜突部８０から下方に降りて弁体１８Ｌから離間する（図４の(A)→(B)）。そうすると、弁体支持部２０の先端部側では弁体１８Ｌに対する外部押圧力が解除されることにより、弁体１８Ｌがコイルばね５４のバネ力でレバー４４側に引き付けられ基板搬入出口１２Ｌから離される（図５の(A)→(B)，図６の(A)→(B)）。 When switching from the valve closed state to the valve open state, an operation in the reverse direction, i.e., a reverse operation, is performed so as to rewind the valve forward operation in terms of time. That is, at the same timing, the piston rod 40a of each air cylinder 40 is moved backward by the same stroke as that during forward movement. Then, first, the lock base 30 coupled to the piston rod 40a starts a downward movement from the forward movement position, and the locking roller 38 descends from the inclined protrusion 80 of the valve body 18L and separates from the valve body 18L. ((A) → (B) in FIG. 4). As a result, the external pressing force applied to the valve body 18L is released on the distal end side of the valve body support portion 20, so that the valve body 18L is attracted to the lever 44 side by the spring force of the coil spring 54 and separated from the substrate loading / unloading port 12L. ((A) → (B) in FIG. 5, (A) → (B) in FIG. 6).

しかる後、ロックベース３０に結合されている押し下げプレート３９の連結部３９ａが弁体移動機構２２の弁体駆動ベース６８の上面に上方から舞い降りるようにして当接または連結し、そのまま弁体駆動ベース６８を押し下げながら最下位置の原位置まで下降する。こうして、弁体移動機構２２の駆動ベース６８が下降するのに伴ない、リンク７２を介して弁体支持部２０のレバー４４が基端側の回転軸４６を回転中心として臥せるように図２において時計回りに回転運動し、このレバー４４の回転運動に伴なって弁体１８Ｌが水平姿勢を維持したまま往動位置から図２において矢印Ｂの方向に一定の垂直面内で移動する。そして、弁体駆動ベース６８が最下位置の原位置まで下降すると、弁体１８Ｌは基板搬入出口１２Ｌよりも低い原位置（図１）に戻る。 Thereafter, the connecting portion 39a of the push-down plate 39 coupled to the lock base 30 comes into contact with or is connected to the upper surface of the valve body driving base 68 of the valve body moving mechanism 22 from above, and the valve body driving base is left as it is. While lowering 68, the lowermost position is lowered to the original position. Thus, as the drive base 68 of the valve body moving mechanism 22 descends, the lever 44 of the valve body support portion 20 can be swung around the rotation shaft 46 on the base end side via the link 72 as shown in FIG. 2, the valve body 18L moves in a certain vertical plane in the direction of arrow B in FIG. 2 from the forward movement position while maintaining the horizontal posture in accordance with the rotational movement of the lever 44. And if the valve body drive base 68 descend | falls to the original position of the lowest position, the valve body 18L will return to the original position (FIG. 1) lower than the board | substrate carrying in / out port 12L.

上部ゲートバルブ１４Ｕは、２つの相違点を除いて上記した下部ゲートバルブ１４Ｌと同一の構成を有しており、下部ゲートバルブ１４Ｌとほぼ同様な往動動作および復動動作を行って上部基板搬入出口１２Ｕを開閉する。第１の相違点は、弁体移動機構２２において、コイルばね（７０）を省いている点である。すなわち、弁体駆動ベース６８を重力で往動（下降）させられるため、往動駆動用のコイルばね（７０）が不要となっている。第２の相違点は、図４および図５に示すように、上部ゲートバルブ１４Ｕを下から包囲するように断面Ｌ形のカバー８２を上部弁体１８Ｕの下面に取付固定している点である。上部ゲートバルブ１４Ｕの駆動系または運動系の各部から塵や埃等のゴミ類が発生してもカバー８２の底に落ちて周囲へ拡散しないようになっている。カバー８２の左右両端面は閉塞されてよい。 The upper gate valve 14U has the same configuration as the above-described lower gate valve 14L except for two differences, and performs the forward and backward movement operations similar to those of the lower gate valve 14L to carry in the upper substrate. Open and close the outlet 12U. The first difference is that the valve spring moving mechanism 22 omits the coil spring (70). That is, since the valve body drive base 68 is moved forward (lowered) by gravity, the coil spring (70) for forward drive is not necessary. The second difference is that, as shown in FIGS. 4 and 5, a cover 82 having an L-shaped cross section is attached and fixed to the lower surface of the upper valve body 18U so as to surround the upper gate valve 14U from below. . Even if dust such as dust is generated from each part of the drive system or the motion system of the upper gate valve 14U, it falls to the bottom of the cover 82 and does not diffuse to the surroundings. The left and right end surfaces of the cover 82 may be closed.

上記のように、この実施例のゲートバルブ１４（１４Ｌ，１４Ｕ）は、弁体１８（１８Ｌ，１８Ｕ）を支持するための弁体支持部２０のレバー４４を弁体１８の外側面に接続して、弁体１８と平行な垂直面内で回転運動させる。弁体１８の長手方向に適当な間隔を置いて複数の弁体支持部２０を配置し、それぞれのレバー４４を弁体１８の外側面に接続することで、弁体１８と平行な垂直面内で回転運動する平行クランクが構成される。バルブ厚み方向においてレバー４４ないし平行クランクの占める空間は僅かである。チャンバ１０の基板搬入出口１２を弁体１８で塞ぐときは、弁体押圧部２４が弁体１８の外側面に複数箇所（上記の例では６箇所）で接触または接続して長手方向で分散化または均一化された圧力で弁体１８をチャンバ側壁１０ａに押し付けるようにし、垂直方向で安定かつ強固な直進移動を行うロックベース３０のロック用ローラ３８を弁体１８側の傾斜突部８０に加圧接触させて弁体１８への押圧力を得るようにしている。これにより、バルブ本体側（弁体支持部２０、弁体移動機構２２、弁体押圧部２４）のバルブ厚み方向サイズが機構的に小さいだけでなく、弁体１８を軽量薄型に構成しても、チャンバ１０側からの逆圧、特に大気開放時の強い逆圧に対して弁体１８を撓まらせずに密閉状態を安定に維持し、信頼性の高いバルブ機能を得ることができる。実際、ＦＰＤ製造装置用のゲートバルブとして安定した機能を保証するうえで、図１１の従来のゲートバルブは約４００ｍｍの厚みを必要としたのに対して、この実施例のゲートバルブは厚みサイズを約１５０ｍｍ以内に抑えることができる。もちろん、ゲートバルブ全体の重量およびコストも大幅に低減できる。 As described above, the gate valve 14 (14L, 14U) of this embodiment connects the lever 44 of the valve body support portion 20 for supporting the valve body 18 (18L, 18U) to the outer surface of the valve body 18. Thus, it is rotated in a vertical plane parallel to the valve body 18. A plurality of valve body support portions 20 are arranged at appropriate intervals in the longitudinal direction of the valve body 18, and each lever 44 is connected to the outer surface of the valve body 18. A parallel crank that rotates is constructed. The space occupied by the lever 44 or the parallel crank in the valve thickness direction is very small. When the substrate loading / unloading port 12 of the chamber 10 is closed with the valve body 18, the valve body pressing portion 24 contacts or connects to the outer surface of the valve body 18 at a plurality of locations (six locations in the above example) and is dispersed in the longitudinal direction. Alternatively, the valve body 18 is pressed against the chamber side wall 10a with a uniform pressure, and the locking roller 38 of the lock base 30 that moves in a vertical direction stably and firmly is applied to the inclined protrusion 80 on the valve body 18 side. A pressure is applied to the valve body 18 by pressure contact. Thereby, not only the valve thickness direction size on the valve body side (the valve body support portion 20, the valve body moving mechanism 22, the valve body pressing portion 24) is mechanically small, but also the valve body 18 is configured to be lightweight and thin. The sealed state can be stably maintained without bending the valve body 18 against the reverse pressure from the chamber 10 side, particularly the strong reverse pressure when the atmosphere is opened, and a highly reliable valve function can be obtained. In fact, in order to guarantee a stable function as a gate valve for an FPD manufacturing apparatus, the conventional gate valve of FIG. 11 requires a thickness of about 400 mm, whereas the gate valve of this embodiment has a thickness size. It can be suppressed within about 150 mm. Of course, the overall weight and cost of the gate valve can also be greatly reduced.

また、上記実施例では、弁体押圧部２４のロックベース３０と弁体移動機構２２の弁体駆動ベース６８とを押し下げ（または押し上げ）プレート３９を介して連結可能とし、共通のエアシリンダ４０により弁体押圧部２４と弁体移動機構２２とを一緒に駆動できるようになっており、機構の効率化と簡素化も実現している。 Further, in the above embodiment, the lock base 30 of the valve body pressing portion 24 and the valve body drive base 68 of the valve body moving mechanism 22 can be connected via the push-down (or push-up) plate 39, and the common air cylinder 40 The valve body pressing part 24 and the valve body moving mechanism 22 can be driven together, and the efficiency and simplification of the mechanism are also realized.

なお、上記実施例はチャンバ１０の側壁に設けた上下一対の基板搬入出口１２Ｕ，１２Ｌに上下一対のゲートバルブ１４Ｕ，１４Ｌをそれぞれ充てる形態に係るものであったが、かかる形態は一例であり、１つの基板搬入出口１２について上部ゲートバルブ１４Ｕもしくは下部ゲートバルブ１４Ｌのいずれか一方を設ける形態も可能であることはいうまでもない。また、チャンバ側壁１０ａと平行な面内で弁体１８Ｌ，１８Ｕが往動位置と復動位置との間で回転運動する向きを上記実施例と反対にすることも可能である。たとえば下部弁体１８Ｌの場合、上記実施例では、復動位置（図１）から往動位置（図２）へ移動するときは反時計回りに回転運動し、往動位置（図２）から復動位置（図１）へ移動するときは時計回りに回転運動した。しかし、反対に、復動位置から往動位置へ移動するときは時計回りに回転運動し、往動位置から復動位置へ移動するときは反時計回りに回転運動するように構成することも可能である。 In the above embodiment, the pair of upper and lower substrate loading / unloading ports 12U and 12L provided on the side wall of the chamber 10 are respectively provided with a pair of upper and lower gate valves 14U and 14L. However, such a form is an example. It goes without saying that either one of the upper gate valve 14U and the lower gate valve 14L may be provided for one substrate loading / unloading port 12. In addition, the direction in which the valve bodies 18L and 18U rotate between the forward movement position and the backward movement position in a plane parallel to the chamber side wall 10a can be opposite to that of the above embodiment. For example, in the case of the lower valve body 18L, in the above embodiment, when moving from the backward movement position (FIG. 1) to the forward movement position (FIG. 2), the lower valve body 18L rotates counterclockwise and returns from the forward movement position (FIG. 2). When moving to the moving position (FIG. 1), it was rotated clockwise. However, on the contrary, it can be configured to rotate clockwise when moving from the backward movement position to the forward movement position, and to rotate counterclockwise when moving from the forward movement position to the backward movement position. It is.

図７に、この実施例によるゲートバルブ１４を適用したＦＰＤ製造装置のマルチチャンバシステムを示す。図示の例では、搬送ロボット（図示せず）を収容するトランスファチャンバ８６がシステム中心部に設置され、その周りに複数台のプロセスチャンバ８８，９０，９２と一台のロードロックチャンバ９４とが設置されている。トランスファチャンバ８６と周りの各チャンバ８８，９０，９２，９４とはこの実施例によるゲートバルブ１４を介して接続されており、カセットチャンバ９４のカセット出入口にも同様のゲートバルブ１４が設けられてよい。上記したように、この実施例によるゲートバルブ１４は薄型に構成できるため、トランスファチャンバ８６内の搬送ロボットから周囲の各チャンバ８８，９０へアクセスするために搬送アームを伸ばす距離つまり搬送アームストロークを短くすることができる。これにより、軽量小型の搬送ロボットを使用できるとともに、トランスファチャンバ８６の平面サイズも縮小できる。さらに、ゲートバルブ１４の薄型化が重なることで、システム全体のフットプリントも縮小できる。 FIG. 7 shows a multi-chamber system of an FPD manufacturing apparatus to which the gate valve 14 according to this embodiment is applied. In the illustrated example, a transfer chamber 86 that accommodates a transfer robot (not shown) is installed at the center of the system, and a plurality of process chambers 88, 90, and 92 and a load lock chamber 94 are installed around the transfer chamber 86. Has been. The transfer chamber 86 and the surrounding chambers 88, 90, 92, 94 are connected via the gate valve 14 according to this embodiment, and a similar gate valve 14 may be provided at the cassette inlet / outlet of the cassette chamber 94. . As described above, since the gate valve 14 according to this embodiment can be configured to be thin, the distance that the transfer arm is extended to access the surrounding chambers 88 and 90 from the transfer robot in the transfer chamber 86, that is, the transfer arm stroke, is shortened. can do. As a result, a lightweight and small transfer robot can be used, and the planar size of the transfer chamber 86 can be reduced. Furthermore, since the thinning of the gate valve 14 is overlapped, the footprint of the entire system can be reduced.

図８〜図１０に、第２の実施例によるゲートバルブの要部の構成を示す。図中、上記した第１の実施例と同様の構成または機能を有する部分には同一の符号を附してある。 8 to 10 show the configuration of the main part of the gate valve according to the second embodiment. In the figure, parts having the same configuration or function as those of the first embodiment are denoted by the same reference numerals.

この実施例では、弁体支持部２０、弁体移動機構２２および弁体押圧部２４を同一の固定ベース９６上に設ける構造としている。固定ベース９６は、上記第１の実施例における弁体支持部２０の弁体支持ベース４８の機能と、ガイドレール３２を図示省略しているが弁体押圧部２４のサイドガイド２６の機能と、弁体移動機構２２の下部ストッパ部材６４の機能とを兼ねている。弁体移動機構２２においては、弁体駆動ベース６８が省かれており、コイルばね７０の下端が固定ベース９６の上面に固定され、コイルばね７０の上端が弁体駆動ロッド７４の下端部に固定されている。弁体押圧部２４のロックベース３０は上記第１の実施例における押し下げプレート３９を兼ねている。弁体駆動ロッド７４の往動位置を規定するための適当なストッパ部材（図示せず）が設けられている。この実施例でも、弁体支持部２０、弁体移動機構２２および弁体押圧部２４が上記第１の実施例と同様に動作する。このことによって、バルブ厚みサイズの縮小、重量およびコストの低減、搬送アームストロークの低減を実現することができる。 In this embodiment, the valve body support part 20, the valve body moving mechanism 22 and the valve body pressing part 24 are provided on the same fixed base 96. The fixed base 96 has a function of the valve body support base 48 of the valve body support portion 20 in the first embodiment, and a function of the side guide 26 of the valve body pressing portion 24 although the guide rail 32 is omitted in the figure. This also serves as the function of the lower stopper member 64 of the valve body moving mechanism 22. In the valve body moving mechanism 22, the valve body drive base 68 is omitted, the lower end of the coil spring 70 is fixed to the upper surface of the fixed base 96, and the upper end of the coil spring 70 is fixed to the lower end portion of the valve body drive rod 74. Has been. The lock base 30 of the valve body pressing portion 24 also serves as the push-down plate 39 in the first embodiment. An appropriate stopper member (not shown) for defining the forward movement position of the valve element drive rod 74 is provided. Also in this embodiment, the valve body support portion 20, the valve body moving mechanism 22 and the valve body pressing portion 24 operate in the same manner as in the first embodiment. This makes it possible to reduce the valve thickness size, reduce the weight and cost, and reduce the transfer arm stroke.

本発明は上記した実施例に限定されるものではなく、その技術思想の範囲内で種々の変形が可能である。たとえば、上記実施例において、ロックベース３０に設ける頂上ローラ３８を、弁体１８の傾斜突部８０に対して滑性の高い材質からなる棒状体で代用することも可能である。同様に、ロックベース３０に背面に設ける背面ローラ３６を、リアガイド２８ないし上端ガイド部２８に対して滑性の高い材質からなるブロック体で代用することも可能である。上記実施例では弁体押圧部２４と弁体移動機構２２とを連結可能にして駆動源に共通のエアシリンダ４０を用いたが、別々のエアシリンダその他の駆動源を用いて弁体押圧部２４と弁体移動機構２２とを非連結で連動させる構成も可能である。 The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the technical idea. For example, in the above-described embodiment, the top roller 38 provided on the lock base 30 can be replaced with a rod-like body made of a material that is highly slidable with respect to the inclined protrusion 80 of the valve body 18. Similarly, the back roller 36 provided on the back surface of the lock base 30 can be replaced with a block body made of a material having high lubricity with respect to the rear guide 28 or the upper end guide portion 28. In the above embodiment, the valve body pressing portion 24 and the valve body moving mechanism 22 are connectable and the common air cylinder 40 is used as the driving source. However, the valve body pressing portion 24 is formed using a separate air cylinder or other driving source. The valve body moving mechanism 22 and the valve body moving mechanism 22 can be configured to be interlocked without being connected.

上記した実施例はＦＰＤ製造装置用のゲートバルブに係るものであったが、本発明のゲートバルブは半導体製造装置その他の各種加工装置、計測装置等にも適用可能である。 Although the above-described embodiment relates to a gate valve for an FPD manufacturing apparatus, the gate valve of the present invention can be applied to a semiconductor manufacturing apparatus, other various processing apparatuses, a measuring apparatus, and the like.

本発明の一実施例によるゲートバルブの構成（バルブ開状態）を示す略正面図である。It is a schematic front view which shows the structure (valve open state) of the gate valve by one Example of this invention. 実施例によるゲートバルブの構成（バルブ閉状態）を示す略正面図である。It is a schematic front view which shows the structure (valve closed state) of the gate valve by an Example. 実施例のゲートバルブにおける押し下げプレートの取付構造を示す略正面図である。It is a schematic front view which shows the attachment structure of the push-down plate in the gate valve of an Example. 実施例のゲートバルブにおける弁体押圧部の構成および作用を示す略側面図である。It is a schematic side view which shows the structure and effect | action of the valve body press part in the gate valve of an Example. 実施例のゲートバルブにおける弁体移動機構の構成および作用を示す略側面図である。It is a schematic side view which shows the structure and effect | action of the valve body moving mechanism in the gate valve of an Example. 実施例のゲートバルブにおける弁体支持部の先端部の構成を示す側面図である。It is a side view which shows the structure of the front-end | tip part of the valve body support part in the gate valve of an Example. 実施例のゲートバルブを適用したマルチチャンバシステムの構成例を模式的に示す平面図である。It is a top view which shows typically the structural example of the multi-chamber system to which the gate valve of an Example is applied. 本発明の別の実施例によるゲートバルブの構成（バルブ開状態）を示す略斜視図である。It is a schematic perspective view which shows the structure (valve open state) of the gate valve by another Example of this invention. 実施例によるゲートバルブの構成（バルブ開閉動作の途中の状態）を示す略斜視図である。It is a schematic perspective view which shows the structure (state in the middle of valve | bulb opening / closing operation | movement) of the gate valve by an Example. 実施例におけるゲートバルブの構成（バルブ閉状態）を示す略斜視図である。It is a schematic perspective view which shows the structure (valve closed state) of the gate valve in an Example. 従来のゲートバルブの構成を示す側面図である。It is a side view which shows the structure of the conventional gate valve.

Explanation of symbols

１０チャンバ
１０ａチャンバ側壁
１２，１２Ｌ，１２Ｕ基板搬入出口
１４，１４Ｌ，１４Ｕゲートバルブ
１６ロードロック室
１８，１８Ｌ，１８Ｕ弁体
２０弁体支持部
２２弁体移動機構
２４弁体押圧部
２６サイドガイド
２８リアガイド
３０ロックベース
３２ガイドレール
３４カイドブロック
３６背面ローラ
３８頂上ローラ
４０エアシリンダ
４２回転軸
４４レバー
４６回転軸
４８弁体支持ベース
５４コイルばね
６８弁体駆動ベース
７０コイルばね
７２リンク
８０傾斜突部 DESCRIPTION OF SYMBOLS 10 Chamber 10a Chamber side wall 12,12L, 12U Substrate carrying-in / out port 14,14L, 14U Gate valve 16 Load lock chamber 18,18L, 18U Valve body 20 Valve body support part 22 Valve body moving mechanism 24 Valve body press part 26 Side guide 28 Rear guide 30 Lock base 32 Guide rail 34 Guide block 36 Back roller 38 Top roller 40 Air cylinder 42 Rotating shaft 44 Lever 46 Rotating shaft 48 Valve body support base 54 Coil spring 68 Valve body drive base 70 Coil spring
72 links 80 inclined protrusions

Claims

In a gate valve for opening and closing a substrate loading / unloading port for loading / unloading a substrate to be processed provided on one side wall of the chamber,
A plate-like valve body that has an inner surface and an outer surface that face each other, and is formed so that the loading / unloading port can be closed in a state where the inner surface is in contact with the chamber side wall;
A valve body support portion that movably supports the valve body between a first valve body position for closing the substrate loading / unloading port and a second valve body position retracted from the substrate loading / unloading port;
A valve body moving mechanism for moving the valve body between the first valve body position and the second valve body position via the valve body support portion;
A gate valve having a valve body pressing portion that contacts or connects to an outer surface of the valve body located at the first valve body position and presses the valve body against the chamber side wall.

2. The gate valve according to claim 1, wherein the valve body support portion includes a first spring member that elastically biases the valve body in a direction opposite to a pressing direction of the valve body pressing portion.

The valve body support portion includes a lever body having one end portion rotatably connected to the outer surface of the valve body via a first rotation shaft, and the other end portion of the lever body via a second rotation shaft. And a base portion that is rotatably supported,
3. The gate valve according to claim 1, wherein the valve body moving mechanism includes a lever turning drive unit for turning the lever body about the second rotation axis.

4. The gate valve according to claim 3, wherein a plurality of sets of lever bodies of the valve body support portion and lever turning drive portions of the valve body moving mechanism are provided at a desired interval in the longitudinal direction of the valve body.

The gate valve according to claim 3 or 4, wherein the lever body pivots in a plane substantially parallel to the chamber side wall.

The lever turning drive unit is connected to the first rectilinear moving body, a first rectilinear moving body that is movable in a first linear direction set in a plane substantially parallel to the chamber side wall, and an original node is connected to the first rectilinear moving body. The gate valve according to any one of claims 3 to 5, wherein the follower has a link connected to the lever body.

The lever turning drive unit moves the first rectilinearly moving body from the original position in the first linear direction to move the valve body from the second valve body position to the first valve body position. The gate valve according to claim 6, further comprising a first rectilinear drive unit that linearly drives to a moving position.

The lever turning drive unit moves the first rectilinearly moving body from the forward movement position in the first linear direction to move the valve body from the first valve body position to the second valve body position. The gate valve according to claim 6 or 7, further comprising a second rectilinear drive unit that linearly drives to the original position.

An inclined protrusion having an inclined surface protruding at an acute angle is formed on the outer surface of the valve body,
The valve body pressing portion has a contact portion for contacting the inclined surface of the inclined protrusion portion of the valve body, and is movable in a second linear direction set in a plane substantially parallel to the chamber side wall. A second rectilinear moving body, and a third rectilinear drive unit that drives the second rectilinear moving body in a straight line between the original position and the forward movement position in the second linear direction,
When the third rectilinear drive unit of the valve body pressing unit drives the second rectilinearly moving body to the forward movement position with respect to the valve body located at the first valve body position, the second 9. The pressing force on the valve body is gradually increased while the contact portion is guided by the inclined surface of the inclined protrusion of the valve body as the linearly moving body approaches the forward movement position. The described gate valve.

The gate valve according to claim 9, wherein the contact portion of the second rectilinearly moving body includes a first rolling element that rolls on an inclined surface of the inclined protrusion of the valve element.

The gate valve according to claim 9 or 10, wherein a plurality of contact portions of the second rectilinearly moving body are provided at a desired interval in the longitudinal direction of the valve body.

The said valve body pressing part has a guide support part which guides and supports the said 2nd rectilinearly moving body on the opposite side to the said chamber side wall seeing from the said 2nd rectilinearly moving body. The gate valve according to one item.

The gate valve according to claim 12, wherein the valve body pressing portion includes a second rolling element attached to the second rectilinearly moving body so as to roll on a guide surface of the guide support portion.

The first rectilinear drive unit of the valve body moving mechanism and the third rectilinear drive unit of the valve body pressing unit share a first drive source, and the first drive source based on the drive force of the first drive source. Movement of the first rectilinear moving body from the original position to the forward movement position by one rectilinear drive unit and the third rectilinear movement by the third rectilinear drive unit based on the driving force of the first drive source The gate valve according to any one of claims 9 to 13, wherein the movement from the original position of the body to the forward movement position is performed in conjunction with each other.

The first rectilinear drive unit of the valve body moving mechanism and the third rectilinear drive unit of the valve body pressing unit respectively have second and third drive sources that are independent of each other, and the second drive source The third rectilinear drive unit based on the movement from the original position to the forward movement position of the first rectilinear moving body by the first rectilinear drive unit based on the driving force and the driving force of the third driving source. The gate valve according to any one of claims 9 to 13, wherein the movement of the third rectilinear moving body from the original position to the forward movement position is performed in conjunction with each other.

The second drive source has a second spring member that biases the first rectilinearly moving body toward the forward movement position;
The said 1st rectilinear drive part has a spring holding member connected with the said 3rd rectilinearly moving body in order to hold | maintain the 2nd spring member in the state elastically deformed against the spring force. 15. The gate valve according to 15.

The gate valve according to any one of claims 9 to 13, wherein the first rectilinear drive unit of the valve body moving mechanism moves the first rectilinear moving body from the original position to the forward movement position using gravity. .

The second rectilinear drive unit of the valve body moving mechanism and the third rectilinear drive unit of the valve body pressing unit share a fourth drive source, and the first drive unit based on the drive force of the fourth drive source. Movement of the first rectilinear moving body from the forward movement position to the original position by the second rectilinear driving section and the third rectilinear movement by the third rectilinear driving section based on the driving force of the fourth driving source The gate valve according to any one of claims 9 to 17, wherein the movement of the body from the forward movement position to the original position is performed in conjunction with each other.

The second rectilinear drive part of the valve body moving mechanism and the third rectilinear drive part of the valve body pressing part respectively have fifth and sixth drive sources independent of each other, and the fifth drive source The third rectilinear drive unit based on the movement of the first rectilinear moving body from the forward movement position to the original position by the second rectilinear drive unit based on the drive force and the drive force of the sixth drive source The gate valve according to any one of claims 9 to 17, wherein the movement of the third rectilinearly moving body from the forward movement position to the original position is performed in conjunction with each other.

The gate valve according to any one of claims 1 to 19, wherein a seal member for making airtight contact with the valve body is provided on the side wall of the chamber.