JP5724091B2 - Gate valve and substrate processing apparatus using the same - Google Patents

Description

  The present invention relates to a gate valve for opening and closing a substrate loading / unloading port and a substrate processing apparatus using the gate valve.

  In a substrate processing apparatus that performs predetermined processing such as etching and film formation on a substrate such as a semiconductor wafer and an FPD (Flat Panel Display) substrate such as a liquid crystal substrate, a substrate carry-in / out port for transferring the substrate is provided. A plurality of chambers are provided in which the inside of the substrate carry-in / out port is closed to make a vacuum atmosphere. Such chambers include, for example, a process chamber (including a reaction vessel) that processes substrates in a vacuum atmosphere, a transfer chamber that transports substrates in a vacuum atmosphere, and a substrate between a vacuum atmosphere and an atmospheric pressure atmosphere. The load lock room etc. which exchanges are mentioned.

  In general, a gate valve is a vacuum valve that shuts off a chamber that is in a vacuum atmosphere when closed as described above in an airtight state and enables substrate transfer when the chamber is opened. , Used to partition adjacent chambers.

  Specifically, the gate valve is provided with an elongated plate-like valve body formed horizontally so as to close the substrate loading / unloading port for loading and unloading the substrate in a horizontal posture, and an actuator such as an air cylinder or a hydraulic cylinder. Then, the valve body is driven to open and close the substrate carry-in / out port. In this case, the valve body is moved from a position (for example, a position below the substrate carry-in / out entrance) that does not interfere with the substrate transfer to the substrate carry-in / out entrance, and the valve body is moved with a predetermined pressing force to seal the substrate carry-in / out entrance. The substrate loading / unloading port is closed by closing it while pressing it against the substrate loading / unloading port.

  As such a gate valve, for example, in Patent Document 1, a plate-like gate base that is moved up and down by a hydraulic cylinder is provided in a housing provided on a side wall of a chamber, and both ends of the gate base and the valve body are rotated by links. There is a description of what constitutes a parallel crank mechanism by being movably connected. According to this, when the hydraulic cylinder is driven to raise the valve body together with the gate base, the valve body comes into contact with the ceiling of the housing and is regulated by the ceiling and pushed forward. As a result, it is possible to close the substrate carry-in / out entrance by simply driving the lifting / lowering hydraulic cylinder.

  However, in the configuration as disclosed in Patent Document 1, since the gate base having the same size as the valve body must be lifted and lowered in addition to the valve body, it is necessary to increase the operating force of the hydraulic cylinder accordingly. In addition to the lifting and lowering operation of the valve body using only the lifting and lowering hydraulic cylinder, the operation of closing the substrate carry-in / out port while pressing the valve body is also performed. In order to ensure this, a hydraulic cylinder with a larger operating force is required.

  In this regard, for example, as shown in Patent Documents 2 and 3, the valve body itself is provided so as to be able to move up and down. Some of them close while pressing. According to this, after raising and lowering the valve body by driving the lifting and lowering air cylinder, only the opening and closing air cylinder is driven and the valve body can be pressed against the substrate loading / unloading port to close the valve body. The burden on the air cylinder can be reduced.

JP 05-196150 A JP 2004-316916 A Japanese Patent Laying-Open No. 2005-077685

  However, in the case where the valve body is pressed against the substrate carry-in / out port by driving an open / close air cylinder provided separately from the ascending / descending air cylinder as described above, the opening / closing is also performed to hold the valve body in that state. The operating force of the air cylinder is required. For this reason, in order to hold the valve body against the substrate carry-in / out port and keep it closed, it is necessary to continue to operate the air cylinder for opening and closing. This is the same as that described in Patent Document 1. In order to hold the valve element while pressing it against the substrate carry-in / out port, it is necessary to continue operating the hydraulic cylinder.

  In this case, for example, actuators such as hydraulic cylinders and air cylinders break down or a power failure occurs, causing the actuator to lose operating force, or leakage of working medium (working gas, working oil, etc.). If the operating force decreases, the valve element may open due to the pressure difference between the inside and outside of the chamber.

  Therefore, the present invention has been made in view of such problems, and an object of the present invention is to provide the valve body at the substrate loading / unloading port without the operating force of a driving means such as an actuator for driving the valve body. It is an object of the present invention to provide a gate valve that can be held in a pressed state and a substrate processing apparatus using the gate valve.

  In order to solve the above problems, according to an aspect of the present invention, there is provided a gate valve for opening and closing a substrate carry-in / out opening provided on a side wall of a chamber, and surrounding the substrate carry-in / out port on the side wall of the chamber. And a valve body that opens and closes within the housing and opens and closes the substrate carry-in / out port, and a position facing the substrate carry-in / out port and a position retracted from the substrate carry-in / out port Elevating drive means for elevating and lowering the valve body; and opening / closing drive means configured by a cam mechanism for moving the valve body forward and backward between a position facing the substrate carry-in / out opening and a position closing the substrate carry-in / out opening. The cam mechanism is disposed on the back side of the valve body in the longitudinal direction of the valve body and is movably supported by the housing; and in accordance with the operation of the long member Pushing the valve body And a cam for pressing and holding the valve body in the closed position by receiving the force with which the valve body is pushed back from the substrate carry-in / out side by the elongate member. Is done. In this case, the cam may be, for example, a plate-like cam or a rotary cam.

  In order to solve the above-described problems, according to another aspect of the present invention, there is provided a substrate processing apparatus that performs a predetermined process on a substrate while transferring the substrate to a plurality of chambers, each chamber having a side wall thereof. A gate valve for opening and closing a substrate carry-in / out port provided in the chamber, the gate valve being provided on a side wall of the chamber so as to surround the substrate carry-in / out port, and being movable up and down in the housing A valve body that opens and closes the substrate carry-in / out entrance, an elevating drive means for raising and lowering the valve body between a position facing the substrate carry-in / out entrance and a position retracted from the substrate carry-in / out entrance, and a substrate carry-in / out entrance An opening / closing drive means configured by a cam mechanism for moving the valve body forward and backward between an opposing position and a position where the substrate carrying-in / out opening is closed, and the cam mechanism is disposed on the back side of the valve body. Driven by a long member that is arranged in the longitudinal direction of the body and supported by the housing, the valve body is pressed and driven from the long member, and the valve body is pushed from the substrate carry-in / out side. There is provided a substrate processing apparatus having a cam that holds the valve body in the closed position by receiving a returning force by the long member. The chamber is, for example, a processing chamber for processing a substrate, a transfer chamber connected to the processing chamber, and a load lock chamber connected to the transfer chamber.

  According to the present invention, when closing the substrate carry-in / out port with the valve body, the elevating drive means raises the valve body to a position facing the substrate carry-in / out entrance, and then the long member is moved by the opening / closing drive means. By moving, the valve body is pressed and driven by the cam of the cam mechanism as the long member moves. As a result, the valve body moves forward and closes while pressing the substrate carry-in / out entrance, and the valve body can be held in this closed position by receiving the force that the valve body is pushed back from the substrate carry-in / out entrance side. it can. Thus, for example, even if there is no operating force of an actuator that drives the long member, the valve body can be held in a state of being pressed against the substrate carry-in / out port, so that the valve body does not open as in the prior art. .

  The cam is constituted by a plate-like cam, for example, and the cam mechanism is a drive for sliding the long member slidably supported by the casing in a direction orthogonal to the advancing / retreating direction of the valve body. Means, and a valve body driving roller that contacts the cam surface of the plate-like cam provided between the elongate member and the valve body to drive the valve body, and slides the elongate member The movement operation may be converted into the advance / retreat operation of the valve body. In this case, the plate-shaped cam slides the elongate member in one direction so as to contact the valve body driving roller and advance the valve body driving roller in the direction of closing the valve body, A first cam surface that moves to a position where the substrate loading / unloading port is closed while pressing, and the valve member is blocked by receiving a force that the valve body is pushed back from the substrate loading / unloading side. It is preferable to have a second cam surface that is held in position.

  According to the present invention, when closing the substrate carry-in / out port with the valve body, the elevating drive means lifts the valve body to a position facing the substrate carry-in / out port, and then slides the long member in one direction. By moving the valve body, the valve body driving roller advances the valve body while contacting the first cam surface, and closes the substrate carry-in / out port while pressing. Then, by further sliding the long member, the valve body is held closed while pressing the substrate loading / unloading port by the valve body driving roller on the second cam surface. In this case, for example, even if there is no operating force of the actuator that drives the long member, the valve body can be held by receiving the force pushed back from the substrate carry-in / out side by the long member.

  The plate-like cam is provided on the valve body side of the long member, and the valve body driving roller is arranged to face the long member when the valve body is in a position facing the substrate carry-in / out port. You may make it provide in the said valve body. The plate-like cam is provided on the long member side of the valve body, and the valve body driving roller faces the valve body when the valve body is in a position facing the substrate carry-in / out port. Thus, the long member may be provided. By disposing the plate-like cam and the valve body driving roller in this manner, the valve body can be driven to press by sliding the long member.

  A plurality of the valve body driving rollers are arranged along the longitudinal direction of the valve body, and the plate-like cams are provided in a number corresponding to the valve body driving rollers to slide the long member. As a result, the valve body driving rollers are all driven simultaneously to advance and retract the valve body, and the valve body driving rollers can be held in the closed position while being pressed by all the valve body driving rollers. It is preferable to configure. According to this, since the number of valve body driving rollers can be changed according to the size of the valve body in the longitudinal direction, even if the size of the valve body is large, the pressing force is sufficient to seal it. The valve body can be held as it is.

  Further, a support member for supporting the long member from the back side thereof is provided so as to receive a force that the long member receives from the valve body (a force by which the valve body is pushed back from the substrate carry-in / out entrance side). May be. In this way, by supporting the long member from the back side, it is supported from the side opposite to the direction of the force received from the valve element, so that the long member can receive the force received from the valve element more strongly. it can. Thereby, a valve body can be hold | maintained, pressing a valve body more strongly.

  In this case, the support member may be constituted by a support roller provided on a back plate of the casing or a side wall of another chamber, or may be constituted by a support roller provided on the long member. Further, when the support member is constituted by a support roller, when the valve body is in a position where the valve body is closed while pressing the substrate carry-in / out port, the plate-shaped cam and the valve body driving roller and the long roller It is preferable to arrange the members so that they are arranged in a straight line with the members in between. According to this, the force received from the valve element is transmitted to the elongate member via the valve element driving roller and the plate cam, and this force is transmitted via the elongate member by the support roller located on the opposite side of the straight line. Since it can be directly received, the long member can receive the force received from the valve body even more strongly. Thereby, a valve body can be hold | maintained, pressing a valve body still more strongly.

  The elevating drive means comprises an actuator that vertically elevates the valve body by extending and contracting the piston rod, and the tip of the piston rod is slidable in the forward / backward direction with respect to the piston rod. It is preferable to support the valve body from below through a valve body slide mechanism. By such an action of the valve body slide mechanism, the valve body can be driven to open and close in the forward / backward direction independently of the lift drive by the actuator. For this reason, since it is sufficient to fix the raising / lowering actuator at a predetermined position, the mechanism can be made extremely simple.

  In order to solve the above problems, according to another aspect of the present invention, there is provided a gate valve for opening and closing a substrate loading / unloading port provided on a side wall of a chamber, and surrounding the substrate loading / unloading port on the side wall of the chamber. And a valve body that opens and closes within the housing, opens and closes the substrate carry-in / out port, and a position facing the substrate carry-in / out port and a position retracted from the substrate carry-in / out port Elevating drive means for raising and lowering the valve body, and an opening / closing drive means constituted by a cam mechanism for moving the valve body forward and backward between a position facing the substrate carry-in / out opening and a position closing the substrate carry-in / out opening. The cam mechanism is disposed on the back side of the valve body in the longitudinal direction of the valve body and is movably supported by the housing; Press the valve The valve body is slidably supported by the casing and a cam that presses and holds the valve body in the closed position by receiving the force that the valve body is pushed back from the substrate carry-in / out side by the long member. And a driving means for sliding the long member in a direction perpendicular to the advancing and retreating direction of the valve body, and a cam surface of the plate-like cam provided between the long member and the valve body. A valve body driving roller for driving the valve body; and a frame provided so as to surround the valve body driving roller and the plate-like cam, and the sliding movement of the long member is made to advance and retract the valve body. A gate valve is provided that is characterized by converting to operation.

  In this case, the frame is attached to the back plate of the housing or the side wall of another chamber with a gap from the back side of the valve body, and the valve body driving roller is a support provided in the frame. The support body has a protrusion protruding on the back side of the valve body, and the protrusion is formed in the frame according to the movement of the valve body driving roller. It is preferable that the valve body is configured to be slidable so as to project and retract, and the protrusion is driven to open and close the valve body from the back side of the valve body.

  According to the present invention, when closing the substrate carry-in / out port with the valve body, the elevating drive means raises the valve body to a position facing the substrate carry-in / out entrance, and then the long member is moved by the opening / closing drive means. By moving, the valve body driving roller comes into contact with the cam surface of the plate-like cam in accordance with the operation of the long member, and the valve body is pressed and driven. As a result, the valve body moves forward and closes while pressing the substrate carry-in / out entrance, and the valve body can be held in this closed position by receiving the force that the valve body is pushed back from the substrate carry-in / out entrance side. it can. Thus, for example, even if there is no operating force of an actuator that drives the long member, the valve body can be held in a state of being pressed against the substrate carry-in / out port, so that the valve body does not open as in the prior art. . Further, since the frame surrounding the valve body driving roller and the plate cam is provided, the contact between the valve body driving roller and the plate cam is performed within the frame. Even if particles are generated due to contact with, the particles can be prevented from scattering out of the frame.

  Further, a support member for supporting the long member from the back side may be provided in the frame so as to receive the force received by the long member from the valve body. This support member is comprised from the support roller provided in the said flame | frame, for example. According to this, since the contact between the long member and the supporting member that supports it from the back is also performed within the frame, even if particles are generated by this, it is possible to prevent the particles from scattering outside the frame.

  According to the present invention, a gate valve capable of holding a valve body in a state of being pressed against a substrate carry-in / out port even without an operating force of a driving means such as an actuator for driving the valve body, and a substrate processing apparatus using the gate valve Can be provided.

It is a cross-sectional view showing a schematic configuration of a gate valve according to an embodiment of the present invention, and is a view when a valve body is at a position facing a substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of the gate valve according to the embodiment, and is a view when the valve body is in a position where it is closed while pressing the substrate carry-in / out port. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out port. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out opening. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in a retracted position. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out port. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out opening. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in a retracted position. It is a perspective view which shows operation | movement of the principal part of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out port. It is a perspective view which shows operation | movement of the principal part of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out port. It is a perspective view which shows operation | movement of the principal part of the gate valve concerning the embodiment, Comprising: It is a figure when a valve body exists in a retracted position. It is a longitudinal cross-sectional view which shows the structural example of the valve body slide mechanism in the embodiment, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out opening. It is a longitudinal cross-sectional view which shows the structural example of the valve body slide mechanism in the same embodiment, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out port. It is a cross-sectional view for explaining the operation of the cam mechanism according to the embodiment, and is a view when the valve body is at a position facing the substrate carry-in / out port. It is a cross-sectional view for explaining the operation of the cam mechanism according to the embodiment, and is a view when the valve body is in a position where it starts to move toward the substrate carry-in / out opening. It is a cross-sectional view for demonstrating operation | movement of the cam mechanism concerning the embodiment, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out opening. It is a cross-sectional view showing a schematic configuration of a first modification of the gate valve according to the embodiment of the present invention, and is a view when the valve body is at a position facing the substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of a gate valve according to a first modification, and is a view when the valve body is in a position where it is closed while pressing the substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of a second modification of the gate valve according to the embodiment of the present invention, and is a view when the valve body is at a position facing the substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of a gate valve according to a second modification, and is a view when the valve body is in a position where it is closed while pressing the substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of a third modification of the gate valve according to the embodiment of the present invention, and is a view when the valve body is at a position facing the substrate carry-in / out port. It is a cross-sectional view showing a schematic configuration of a gate valve according to a third modification, and is a view when the valve body is in a position where it is closed while pressing the substrate carry-in / out port. It is the elements on larger scale which show schematic structure of the 4th modification of the gate valve concerning embodiment of this invention, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out opening. It is the elements on larger scale which show the schematic structure of the gate valve concerning a 4th modification, Comprising: It is a figure when it exists in the position which a valve body begins to move toward a board | substrate carrying in / out port. It is the elements on larger scale which show schematic structure of the gate valve concerning a 4th modification, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out opening. It is a cross-sectional view showing a schematic configuration of a gate valve according to a fourth modification, and is a view when the valve body is at a position facing the substrate carry-in / out opening. It is a cross-sectional view showing a schematic configuration of a gate valve according to a fourth modification, and is a view when the valve body is in a position where it is closed while pressing the substrate carry-in / out port. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning a 4th modification, Comprising: It is a figure when a valve body exists in the position which opposes a board | substrate carrying in / out opening. It is a longitudinal cross-sectional view which shows schematic structure of the gate valve concerning a 4th modification, Comprising: It is a figure when a valve body exists in the position which obstruct | occludes, pressing a board | substrate carrying in / out opening. It is a figure for demonstrating schematic structure of the substrate processing apparatus to which the gate valve in the embodiment is applied. It is sectional drawing for demonstrating the 1st application example of the gate valve in the embodiment. It is sectional drawing for demonstrating the 2nd application example of the gate valve in the embodiment. It is sectional drawing for demonstrating the 3rd application example of the gate valve in the embodiment.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

(Gate valve)
First, a gate valve according to an embodiment of the present invention will be described with reference to the drawings. 1A, 1B, 2A to 2C, 3A to 3C, and 4A to 4C are diagrams for explaining the configuration of the gate valve of the present embodiment. In this embodiment, as shown in FIGS. 1A and 1B, a valve body 210 having a size capable of opening and closing the substrate carry-in / out port 112 of the chamber 100 is provided, and the valve body 210 is driven up and down and moved forward and backward to drive the substrate carry-in / out port 112. An example is a gate valve 200 that opens and closes.

  1A and 1B are cross-sectional views of the gate valve as viewed from above when cut along a horizontal plane passing through the vicinity of the center of the substrate carry-in / out entrance. 2A, 2B, and 2C are cross-sectional views of the gate valve as viewed from the back when the gate valve is cut along a vertical plane parallel to the side wall of the chamber, and is a cross-sectional view taken along line AA shown in FIG. 1A. 3A, 3B, and 3C are cross-sectional views of the gate valve as viewed from the side when the gate valve is cut along a vertical plane perpendicular to the side wall of the chamber, and is a cross-sectional view taken along line BB shown in FIG. 2B. 4A, 4B, and 4C are perspective views for explaining the operation of the main part of the gate valve.

  1A, FIG. 2A, FIG. 3A, and FIG. 4A show a state in which the valve body is in a position facing the substrate carry-in / out port, and FIGS. 1B, 2B, 3B, and 4B show the valve body in the substrate carry-in / out port 112. The state which exists in the position closed while pressing is shown. 2C, FIG. 3C, and FIG. 4C show a state in which the valve body is in a position to retract from the substrate carry-in / out opening.

  The chamber 100 in which the gate valve 200 according to the present embodiment is provided is an arbitrary chamber (including a container) that can be sealed in a vacuum pressure atmosphere. For example, a substrate that performs predetermined processing such as etching and film formation on an FPD substrate or the like. Examples include a processing chamber, a transfer chamber, and a load lock chamber in the processing apparatus.

  For example, as shown in FIG. 2C, FIG. 3C, and FIG. 4C, the chamber 100 has a substrate carry-in / out port 112 extending horizontally in the horizontal direction near the upper side of the side wall 110. This substrate can be carried in and out by a transfer arm (not shown).

  Here, an edge frame 114 surrounding the periphery of the substrate loading / unloading port 112 is attached to the side wall 110 of the chamber 100. Thus, for example, even when a substrate such as a glass substrate is carried in / out of the substrate carry-in / out entrance 112, even if the substrate is broken or displaced, the side wall 110 can be protected from being damaged. If the edge frame 114 is not provided and the side wall 110 in the vicinity of the substrate carry-in / out port 112 is damaged, even if the substrate carry-in / out port 112 is closed by the valve body 210, the flaw remains as a gap to maintain a sealed state. It may not be possible. In this case, the container itself that constitutes the side wall 110 of the chamber 100 must be replaced.

  On the other hand, in the case where the edge frame 114 is provided on the side wall 110, even if the edge frame 114 is damaged when a substrate crack or the like occurs, the side wall 110 can be prevented from being directly damaged. In this case, even if the edge frame 114 is damaged, it is only necessary to replace the edge frame 114, so that it is not necessary to replace the container itself of the chamber 100. Lifespan can be extended.

  The gate valve 200 is provided on the side wall 110 of the chamber 100 where the substrate loading / unloading port 112 is formed, and opens and closes the substrate loading / unloading port 112 by moving the valve body 210 up and down. The valve body 210 is formed in a size that can close the substrate carry-in / out port 112. When closing the substrate carry-in / out port 112, the substrate carry-in / out port 112 is closed while being pressed. Specifically, the substrate loading / unloading port 112 is closed and sealed while the valve body 210 is pressed against the wall surface around the substrate loading / unloading port 112.

  For example, when the edge frame 114 is provided on the side wall 110, the valve body 210 is pressed against the surface (valve element contact surface) of the edge frame 114 to close the substrate carry-in / out port 112. In this case, in order to enhance the sealing effect, it is preferable that a seal member (not shown) such as an O-ring is provided on the surface of the edge frame 114 in contact with the valve body 210 so as to surround the substrate carry-in / out port 112.

  Note that the edge frame 114 is not necessarily provided. When the edge frame 114 is not provided, the valve body 210 is directly pressed against the surface (valve body contact surface) of the side wall 110 to close the substrate carry-in / out port 112. In this case, a sealing member such as an O-ring is preferably provided on the surface of the side wall 110 that contacts the valve body 210 so as to surround the substrate carry-in / out port 112. Instead of providing the sealing member on the wall surface around the substrate loading / unloading port 112 (the surface of the side wall 110 or the surface of the edge frame 114), the sealing member surrounds the substrate loading / unloading port 112 on the surface of the valve body 210 that contacts the wall surface. It may be provided.

(Specific configuration example of gate valve)
Next, a specific configuration example of the gate valve 200 will be described. As shown in FIGS. 1A, 2A, and 3A, the gate valve 200 includes a substantially box-shaped housing (casing) 202 provided on the side wall 110 of the chamber 100 so as to surround at least the substrate carry-in / out port 112. The housing 202 has a back plate 202a facing in parallel with the side wall 110, side plates 202b and 202c, a ceiling plate 202d, and a bottom plate 202e, and these cover the side wall 110. In the back plate 202a of the housing 202, an opening 203 having the same shape as the substrate carry-in / out entrance 112 is formed at a position facing the substrate carry-in / out entrance 112 in order to pass the substrate to be taken in / out through the substrate carry-in / out entrance 112. Yes.

  The valve body 210 is supported so as to be movable up and down along a lifting guide described later with respect to the substrate loading / unloading port 112 in the housing 202, and can be moved back and forth along the opening / closing guide described later. It is supported by. The gate valve 200 moves up and down the valve body 210 between a position facing the substrate carry-in / out entrance 112 (predetermined ascending position) and a position retracting from the substrate carry-in / out entrance 112 (predetermined descending position) along the elevating guide. Means 230 and an opening / closing drive means 250 for moving the valve body 210 forward and backward by a cam mechanism 260 between a position facing the substrate carry-in / out port 112 and a position closing the substrate carry-in / out port 112 while pressing.

  The raising / lowering guide and the opening / closing guide of the valve body 210 are configured as follows, for example. The raising / lowering guide here guides the valve body 210 to move up and down vertically, and the opening / closing guide guides the valve body 210 to open and close horizontally. Specifically, for example, as shown in FIGS. 1A and 2A, a pair of guide rails 220 are provided on the side wall 110 of the chamber 100, which are disposed on the left and right sides of the substrate loading / unloading port 112 and extend vertically. The guide rails 220 are each provided with a slider 222 that can slide along these. Each slider 222 is provided with a guide bar (support bar) 224 that protrudes from the back of the slider 222 in the horizontal direction of the valve body 210. Each guide rod 224 is loosely slidably fitted in an insertion hole 212a of a valve body support plate 212 provided on the left and right sides of the valve body 210 so as to protrude outward from the end portion.

  According to such a configuration, the valve body 210 can be vertically moved as the slider 222 moves along the guide rail 220. Further, the valve body 210 can be advanced and retracted horizontally along the guide rod 224 in the direction of opening and closing the substrate carry-in / out port 112. The structure of such an elevating guide and an opening / closing guide is not limited to the above.

  Incidentally, a biasing member (for example, a coil spring) 226 is interposed between the valve body support plate 212 and the slider 222 in the above-described guide rod 224. The urging member 226 urges the valve body 210 in a direction (opening direction) opposite to the direction in which the valve body 210 is pressed against the substrate carry-in / out port 112. Further, the guide rod 224 is provided with a stop member 224a at the tip thereof so that the valve body support plate 212 does not fall off from the guide rod 224. Note that the stopper member 224a may be configured, for example, with the tip end of the guide rod 224 having a diameter larger than that of the insertion hole 212a, or may be configured with another member such as a retaining ring.

  Further, the stop member 224a restricts the valve body 210 from being separated from the substrate carry-in / out port 112 by a predetermined distance or more. That is, the valve body 210 is supported at a position where it is stopped by the stop member 224a (the position farthest from the substrate carry-in / out port 112) by the urging force of the urging member 226, so that it is always separated from the substrate carry-in / out port 112 by a predetermined interval. Can be moved up and down. According to this, the valve body 210 can be always raised to the same position between the substrate carry-in / out port 112 and the cam mechanism 260.

  The urging member 226 described above is configured such that when the valve body driving roller 280 is driven while abutting against the cam surface (slope 272, plane 274) by the action of a cam mechanism 260 described later, There is also an action of urging the cam surface (slope 272, plane 274) so as not to leave. As a result, the valve element driving roller 280 can be driven along the cam surface (slope 272, plane 274), so that the operation of the valve element 210 can be stabilized and the valve element 210 can be driven to open and close reliably. Can be made.

(Elevation drive means)
Next, a specific configuration example of the lifting drive unit 230 will be described with reference to the drawings. The raising / lowering driving means 230 is located between a position facing the substrate carry-in / out entrance 112 (for example, the position shown in FIG. 2A and FIG. 3A) and a position retracting from the substrate carry-in / out entrance 112 (for example, the position shown in FIG. 2C and FIG. 3C). The valve body 210 is moved up and down along the guide rail 220.

  Specifically, as shown in FIG. 2A and FIG. 2C (or FIG. 3A and FIG. 3C), the elevation drive means 230 is configured by an actuator 232 capable of linear motion. Examples of the actuator 232 include, but are not limited to, an air cylinder and a hydraulic cylinder that can move linearly by extending and contracting the piston rod 234. Here, a case where the actuator 232 is formed of an air cylinder is taken as an example.

  Specifically, the actuator 232 is formed on the bottom plate 202e, and is attached to the bottom plate 202e of the housing 202 so that the piston rod 234 is inserted into the housing 202 through a hermetic through hole 204a. The valve element 210 is supported along the guide rail 220 by supporting the valve element 210 from below at the tip of the piston rod 234 and causing the actuator 232 to extend and retract (vertically drive) the piston rod 234 by a predetermined stroke. It can be moved up and down in the vertical direction. When the piston rod 234 is expanded and contracted while maintaining the airtightness in the housing 202, the piston rod 234 is inserted into the through hole 204a via a bush (not shown).

  The tip of the piston rod 234 supports the valve element 210 via a valve element slide mechanism 240 provided at the central portion of the lower surface of the valve element 210. The valve body slide mechanism 240 is for supporting the valve body 210 so as to be movable in the forward / backward direction (opening / closing direction) with respect to the piston rod 234.

  A configuration example of such a valve body slide mechanism 240 is shown in FIGS. 5A and 5B. As shown in FIG. 5A, the valve body slide mechanism 240 has a frame portion 242 attached to the lower surface of the valve body 210 by a fastening member 243 such as a bolt. An insertion hole 242a for inserting the tip of the piston rod 234 is formed at the bottom of the frame portion 242.

  A guide body 244 that allows the valve body 210 to move in the forward / backward direction relative to the tip of the piston rod 234 is provided in the frame portion 242. Specifically, a plurality of rolling members 245 provided on the upper surface of the guide body 244 come into contact with the lower surface of the valve body 210 so as to support the valve body 210 in a freely rollable manner. Note that the rolling member 245 may be a spherical member or a cylindrical member.

  A concave portion 246 such as a counterbore is formed on the lower surface of the guide body 244, and the tip of the piston rod 234 comes into contact with the concave portion 246. Specifically, at the tip of the piston rod 234, a head 236 having a curved upper surface is connected via a reduced diameter portion 235, and the head 236 enters the recess 246 of the guide body 244. Yes. As a result, the guide body 244 is supported at the tip of the piston rod 234.

  With this configuration, the valve body 210 is supported at the tip of the piston rod 234 via the guide body 244, and the valve body 210 is advanced and retracted (opening / closing direction) via the guide body 244 at the tip of the piston rod 234. It becomes movable. For example, when the valve body 210 is at a position facing the substrate loading / unloading port 112, the valve body 210 is supported by the piston rod 234 on the guide body 244 even if the valve body 210 is advanced from the position shown in FIG. 5A to the position shown in FIG. Therefore, only the valve body 210 can be moved in the horizontal direction without moving the piston rod 234 and the guide body 244 forward and backward.

  By such an action of the valve body slide mechanism 240, the valve body 210 can be driven to open and close in the forward / backward direction independently of the up / down drive by the actuator 232. For this reason, since it is sufficient to fix the lifting actuator 232 at a predetermined position, the mechanism can be made extremely simple. That is, when the valve body 210 is driven forward / backward, a complicated configuration such as a mechanism that can also drive the actuator 232 forward / backward can be eliminated.

  The size of each part constituting the valve body slide mechanism 240 (for example, the size of the frame part 242 and the insertion hole 242a, the size of the guide body 244 and the rolling member 245, etc.) depends on the amount of movement of the valve body 210 in the horizontal direction. It is preferable to decide according to. 5A and 5B illustrate the case where the reduced diameter portion 235 is formed on the piston rod 234, the reduced diameter portion 235 may not be formed. As shown in FIGS. 5A and 5B, the reduced diameter portion 235 is formed, and the piston rod 234 is disposed so that the position of the reduced diameter portion 235 matches the position of the insertion hole 242a, whereby the inner edge portion of the insertion hole 242a. Since the valve body 210 can be moved until it enters the reduced diameter portion 235, the insertion hole 242a can be reduced by that amount, and the stroke of the valve body 210 can be lengthened.

(Opening / closing drive means)
Next, the opening / closing drive means 250 will be described with reference to the drawings. The opening / closing drive means 250 has a position facing the substrate carry-in / out entrance 112 (position shown in FIGS. 1A, 2A, and 3A) and a position that closes the substrate carry-in / out entrance 112 while pressing (FIGS. 1B, 2B, and 3B). A cam mechanism 260 that moves the valve body 210 back and forth in the opening / closing direction along the guide rod 224. The case where the cam mechanism 260 according to the present embodiment is constituted by a so-called straight cam mechanism is taken as an example. Here, the long member 261 to which the plate-like cam 270 is attached is slid along the valve body 210 in a direction perpendicular to the forward / backward direction, and the valve body 210 is moved in the forward / backward direction by the inclined surface 272 of the plate-like cam 270. At the same time, the flat plate 274 of the plate-like cam 270 is configured so that the valve element 210 can be held while being pressed against the substrate carry-in / out port 112.

  The driving means for driving the long member 261 is configured by an actuator 252 such as an air cylinder or a hydraulic cylinder capable of linear movement that slides the long member 261. Here, a case where the actuator 252 is formed of an air cylinder capable of linear motion that expands and contracts the piston rod 254 will be described as an example. Note that the actuator 252 is not limited to these.

  The configuration of the cam mechanism 260 will be described in detail. For example, as shown in FIGS. 1A and 1B, the long member 261 is configured to be at least longer than the length in the longitudinal direction of the valve body, and in the longitudinal direction of the valve body 210 near the back plate 202a of the housing 202. Arrange along. The long member 261 and the substrate carry-in / out port 112 are spaced apart to such an extent that they can be inserted without interfering when the valve body 210 moves up and down.

  In the present embodiment, the long member 261 is configured to be slidable integrally with a bar-like member 262 that is arranged one above each of the upper side and the lower side of the opening 203 of the housing 202. Accordingly, it is possible to prevent the substrate and the transfer arm from interfering with the cam mechanism 260 when the substrate is transferred, and to be horizontal with respect to the substrate loading / unloading port 112 without the valve body 210 being inclined when the valve body 210 is opened and closed. You can move forward and backward.

  Specifically, the end portions of the rod-like members 262 protrude from the side plates 202b and 202c, respectively, and bushes 263 made of, for example, resin are attached to the contact portions of the side plates 202b and 202c with the rod-like members 262, respectively. Can be slid. Further, the end portions of the respective rod-like members 262, for example, the end portions protruding from the side plates 202c are fixed and integrated by plate-like connecting members 264, respectively. The tip of the piston rod 254 of the actuator 252 is attached to the connecting member 264. Accordingly, the rod-like members 262 can be integrally and simultaneously slid by simply extending and contracting the piston rod 254 with one actuator 252. In this case, the actuator 252 is attached to the outside of the side plate 202c via the support member 256, for example.

  Each rod-like member 262 of the long member 261 is supported from the back plate 202a of the housing 202 so as to roll freely by a plurality of support rollers 290 provided so as to protrude from the inner surface of the back plate 202a of the housing 202. In FIG. 1A and FIG. 1B, an example has been given in which four support rollers 290 are provided on each rod-like member 262 at regular intervals. However, the number and arrangement positions of the support rollers 290 are not necessarily limited thereto. It may be one by one or five or more (for example, eight). In addition, when the long member 261 is configured by one bar-like member, one or a plurality of support rollers 290 may be provided. The number and position of the support rollers 290 may be adjusted according to the length and weight of the valve body 210 in the longitudinal direction. For example, the number of support rollers 290 may be increased as the length of the valve body 210 in the longitudinal direction is longer, and the number of support rollers 290 may be decreased as the length is shorter. In addition, each rod-like member 262 here is exemplified by a case where it is formed in a plate shape, but is not necessarily limited thereto, and may be, for example, a rectangular tube shape. Further, it may be columnar or cylindrical.

  The support roller 290 is configured by a roller 294 that can roll while being in contact with the back surface of each bar-shaped member 262, and a support body 292 that is attached to the inner surface of the back plate 202a and supports the roller 294 so that it can roll. Further, a back plate 276 is provided on the back surface of each bar-shaped member 262 at a contact portion with the roller 294 so as to protect the surface of each bar-shaped member 262, and the roller 294 rolls on the surface of the back plate 276. By configuring, the movement of the long member 261 is made smoother. The long member 261, the contact plate 276, and the roller 294 including the respective rod-like members 262 may be made of the same material or different materials. For example, the long member 261 is made of stainless steel (registered trademark), and the contact plate 276 and the roller 294 are made of resin.

  On the other hand, as shown in FIGS. 1A, 1B, 2C, and 4C, the valve body 210 is provided with a plurality of valve body driving rollers 280 on the upper surface and the lower surface thereof. Each valve body driving roller 280 protrudes from the back surface of the valve body 210 toward the long member 261 so as to come into contact with each plate-like cam 270 when the long member 261 slides. The same number of valve body driving rollers 280 as the supporting rollers 290 are provided. When the valve body 210 is at a position facing the substrate carry-in / out port 112, each valve body driving roller 280 is positioned so as to face each support roller 290 with each rod-shaped member 262 of the long member 261 interposed therebetween. It is arranged on the body 210. The valve body driving roller 280 is configured by a roller 284 that can roll while abutting on the plate-like cam 270, and a support body 282 that is attached to the valve body 210 and supports the roller 280 so as to be able to roll.

  Each rod-shaped member 262 of the long member 261 is provided with a plurality of plate-like cams 270 for contacting and driving the plurality of valve-body driving rollers 280 on the valve body 210 side. The plate-like cam 270 slides the elongate member 261 in one direction, abuts on the valve body driving roller 280, advances the valve body driving roller 280 in the direction to close the valve body 210, and carries out the substrate unloading. A slope 272 as a first cam surface that moves to the position where the inlet 112 is closed while pressing and the force that the valve element 210 is pushed back from the substrate carry-in / out inlet 112 side via the valve element driving roller 280 and the support roller 290. And a flat surface 274 as a second cam surface for holding the valve body 210 in the closed position by being received by the back plate 202a of the housing 202.

  The inclined surface 272 of the plate-like cam 270 is inclined so that the thickness from the long member 261 increases along the sliding direction of the long member 261 (so that the valve body driving roller 280 gradually moves forward or backward). The flat surface 274 of the plate-like cam 270 is a portion where the thickness of the first cam surface is the largest (at a position where the valve body 210 closes while pressing the substrate carry-in / out port 112), and continues as it is. It consists of a plane.

  The inclined surface 272 of the plate-like cam 270 is an inclined surface that can drive the valve element driving roller 280 so that the valve element 210 gradually advances and presses the substrate loading / unloading port 112 when sliding in the pulling direction of the long member 261. To. In this case, for example, as shown in FIG. 1A, the slope 272 of the plate-like cam 270 becomes a slope whose height gradually decreases from the flat surface 274 of the plate-like cam 270 toward the actuator 252 side.

  The inclined surface 272 of the plate-like cam 270 is not limited to the one described above, and the valve body 210 gradually moves forward and presses the substrate carry-in / out port 112 when sliding in the direction in which the long member 261 is pushed out. Alternatively, the valve body driving roller 280 may be inclined. In this case, although not shown, the inclined surface 272 of the plate-like cam 270 becomes an inclined surface whose height gradually decreases from the flat surface 274 of the plate-like cam 270 toward the side opposite to the actuator 252. In this case, when the long member 261 is slid in the pushing direction, the valve body driving roller 280 moves in contact with the inclined surface 272. At that time, the valve body driving roller 280 moves from the inclined surface 272 through the inclined surface 272. The force received by the long member 261 works as a compression force. For this reason, depending on the magnitude of the force received by the long member 261, the long member 261 may be buckled. Therefore, it is necessary to design the shape and material of the long member 261 so that the long member 261 does not buckle. There is.

  On the other hand, in the case of the inclined surface 272 as shown in FIG. 1A, the valve body driving roller 280 moves in contact with the inclined surface 272 when sliding in the pulling direction of the long member 261. Since the force received by the valve element driving roller 280 from the inclined surface 272 acts as a tensile force of the long member 261 and does not act as a compressive force, the possibility that the long member 261 buckles can be eliminated.

  According to such a cam mechanism 260, when the valve body 210 is at a position facing the substrate carry-in / out port 112 as shown in FIGS. 1A and 3A, the actuator 252 is driven to contract the piston rod 254. The long member 261 is slid in the pulling direction (the arrow direction shown in FIG. 1A). Then, the valve body driving rollers 280 are simultaneously brought into contact with the inclined surfaces 272 of the plate-like cams 270, and the direction perpendicular to the sliding direction of the long member 261 along the inclined surfaces 272 (the valve body 210 is the substrate carry-in / out port 112). In the direction of moving forward). As a result, the valve body 210 moves forward in the direction of closing the substrate carry-in / out entrance 112 through these valve body drive rollers 280 and is gradually pressed against the periphery of the substrate carry-in / out entrance 112.

  Thereafter, when the long member 261 is further pulled, the valve element driving rollers 280 ride on the flat surfaces 274 of the plate cams 270 all at once. Thereby, as shown in FIG. 1B and FIG. 3B, the valve element 210 is held while being pressed against the substrate carry-in / out port 112.

  Thus, when the valve body 210 presses the substrate carry-in / out port 112, the force (force caused by the reaction) that the valve body 210 is pushed back from the substrate carry-in / out port side of the housing 202 through the valve body driving roller 280 and the support roller 290. It can be received by the back plate 202a. Thereby, the valve body 210 can be held at the closed position. Therefore, when each valve element driving roller 280 rides on the flat surface 274, the valve element 210 is firmly held in the closed position while being pressed against the substrate loading / unloading port 112 even if the operating force of the actuator 252 is not maintained. can do.

  The movement of the cam mechanism 260 and the valve body 210 when the valve body 210 is held in the closed position will be described in detail with reference to the drawings. 6A to 6C are enlarged views for explaining the movement of the cam mechanism 260 and the valve body 210 while paying attention to one plate-like cam 270. First, when the valve body 210 rises along the guide rail 220 from a lower retracted position to a position facing the substrate carry-in / out port 112, the state becomes as shown in FIG. 6A. At this time, the long member 261 is in the initial position, and the valve element driving roller 280 has not yet contacted the inclined surface 272 of the plate-like cam 270.

  Subsequently, when the elongate member 261 is pulled in the direction of the arrow by the operating force of the actuator 252, the valve element driving roller 280 comes into contact with the inclined surface 272 of the plate-like cam 270 as shown in FIG. Move along. At this time, the valve element driving roller 280 is urged by the urging member 226 in a direction to contact the inclined surface 272, and thus moves reliably along the inclined surface 272 without leaving the inclined surface 272. As a result, the valve body 210 moves in a direction to close the substrate carry-in / out entrance 112, and when it contacts the wall surface around the substrate carry-in / out entrance 112 (here, the wall surface of the edge frame 114), the substrate carry-in / out entrance is further pressed while pressing the wall surface. 112 is closed.

  When the elongated member 261 is further pulled from this state, the valve element driving roller 280 rides on the flat surface 274 of the plate-like cam 270 as shown in FIG. 6C. Thereby, the valve body 210 is held in a state in which the substrate carry-in / out entrance 112 is closed while pressing the wall surface around the substrate carry-in / out entrance 112.

  Thus, according to this embodiment, when the valve body 210 presses the valve body 210 against the wall surface around the substrate carry-in / out entrance 112 by the wedge action of the plate-like cam 270, the force pushed back from the wall surface is obtained. By receiving by the back plate 202a of the housing 202 through the valve body driving roller 280 and the support roller 290, the valve body 210 presses the substrate carry-in / out port 112 and the back plate of the substrate carry-in / out port 112 and the housing 202. 202a is held mechanically. In this case, as shown in FIG. 6C, each support roller 290 moves the flat member 274 of each plate-like cam 270, each valve body driving roller 280, and the long member 261 when the valve body 210 is in the closed position. It is arranged so that it is arranged on a straight line across. In this way, the force received from the valve body 210 is transmitted to the long member 261 via each valve body driving roller 280 and each plate-like cam 270, and this force is applied to each support roller 290 located on the opposite side of the straight line. Therefore, the elongate member 261 can receive the force received from the valve body 210 even more strongly. Thereby, the valve body 210 can be held at the closed position while the valve body 210 is pressed more strongly. For this reason, even if the operating force of the actuator 252 is not held, the valve body 210 can be firmly held at the closed position while being pressed against the substrate carry-in / out port 112.

  Thus, according to the gate valve concerning this embodiment, it is not necessary to hold down valve body 210 by the actuating force of actuator 252, unlike the past. Further, since the valve body 210 can apply a frictional force that overcomes the gravity of the valve body 210 according to the force received from the back plate 202a of the housing 202 and the magnitude of the force received from the substrate carry-in / out port 112. The valve body 210 can be supported so as not to fall without operating the lifting / lowering actuator 232.

  Therefore, for example, even if the actuators 232 and 252 do not operate due to the failure of the actuators 232 and 252 or the interruption of the supply power, the valve body 210 does not open. Also, the actuators 232 and 252 do not need to be large enough to hold the valve element 210 sufficiently as in the conventional case. For example, the actuator 252 may be small enough to move the valve element driving roller 280 from at least the slope 272 of the plate-like cam 270 to the flat surface 274. As the actuator 232, it is sufficient that the actuator 232 is small enough to raise and lower the valve body 210 against the gravity. For this reason, the whole gate valve can be reduced in size. As a result, the manufacturing cost can be greatly reduced.

  Further, since the valve body 210 itself can be reduced in size and weight, the actuators 232 and 252 can be made even smaller. As shown in FIG. 6A, when the valve body 210 is moved up and down, the valve body 210 and the valve body driving roller 280 are moved away from the substrate loading / unloading port 112 and the plate-like cam 270 by a predetermined distance, respectively. Therefore, it is possible to prevent the substrate body entrance / exit 112 and the plate-like cam 270 from colliding with each other when the valve body 210 is raised or lowered. Further, since the operating force of the actuators 232 and 252 is not required to hold the valve body 210 in the closed state, when the actuators 232 and 252 are constituted by, for example, an air cylinder, the consumption of air as the working medium is greatly increased. Can be reduced.

(Gate valve operation)
Next, a series of operations of the gate valve according to the present embodiment will be described with reference to the drawings. Here, the original position of the valve body 210 is when the valve body 210 is in the retracted position below the substrate loading / unloading port 112 shown in FIGS. 3C and 4C.

  First, a series of operations when the valve body 210 is driven to the closing position while pressing the substrate carry-in / out port 112 from when the valve body 210 is in the retracted position will be described. By operating the actuator 232 and extending the piston rod 234 from the lower retracted position shown in FIGS. 3C and 4C to the position facing the upper substrate loading / unloading port 112 shown in FIGS. 3A and 4A, the valve element 210 is expanded. Raise along the guide rail 220.

  Subsequently, the actuator 252 is operated to shorten the piston rod 254, thereby sliding the long member 261 in the pulling direction, and the valve body 210 is advanced in the direction of closing the substrate carry-in / out port 112. As a result, as shown in FIGS. 3B and 4B, the valve body 210 closes the substrate carry-in / out port 112, closes it while pressing the substrate carry-in / out port 112 with a constant pressing force, and holds it in that state. In this way, the substrate loading / unloading port 112 is closed and sealed by the valve body 210, and thereafter, the substrate processing can be executed while reducing the chamber 100 to a predetermined vacuum pressure, for example. At this time, as described above, the valve body 210 is mechanically held between the back plate 202 a of the housing 202 and the substrate carry-in / out port 112 by the wedge action of the cam mechanism 260.

  Next, a series of operations when opening the substrate loading / unloading port 112 will be described. The actuator 252 is operated from the position shown in FIGS. 3B and 4B to elongate the piston rod 254, thereby sliding the elongate member 261 in the pushing direction, and retracting the valve body 210 in the direction to open the substrate carry-in / out port 112. . This returns to the position shown in FIGS. 3A and 4A.

  Subsequently, the actuator 232 is operated to shorten the piston rod 234 from the position facing the upper substrate carry-in / out port 112 shown in FIGS. 3A and 4A to the lower retracted position shown in FIGS. The body 210 is lowered along the guide rail 220. As a result, the substrate loading / unloading port 112 is opened and the valve body 210 returns to the initial position, so that the substrate can be loaded into and unloaded from the chamber 100.

  By the way, in the above embodiment, the long member 261 is slidably supported by the side plates 202b and 202c of the housing 202, and the long member 261 is long by the support roller 290 so as to receive the force received from the valve body 210. The scale member 261 is configured to be supported from the back side. As described above, the long member 261 is supported not only from the side plates 202b and 202c of the housing 202 but also from the back side by the support roller 290, so that the long member 261 is supported from the opposite side to the direction of the force received from the valve body 210. Therefore, the long member 261 can more strongly receive the force received from the valve body 210 (the force by which the valve body 210 is pushed back from the substrate carry-in / out port 112 side). Thereby, the valve body 210 can be held at the closed position while the valve body 210 is pressed more strongly. Note that the support roller 290 is not necessarily provided, and the long member 261 may be slidably supported only by the side plates 202b and 202c of the housing 202.

  The arrangement of the support roller 290 is not limited to that shown in FIGS. 1A and 1B. That is, in the cam mechanism 260 shown in FIGS. 1A and 1B, the case where the support roller 290 is provided on the back plate 202 a of the housing 202 has been described. However, the present invention is not limited to this, and the support roller 290 is a long member 261. You may make it provide in.

  Specifically, for example, as in the first modification shown in FIGS. 7A and 7B, the support roller 290 protrudes from the long member 261 to the back plate 202a of the housing 202 and can be rolled by the back plate 202a. You may make it provide so that it may become. Further, the contact plate 276 may be provided at a contact portion of the back plate 202a with the support roller 290. Even in this arrangement, the support roller 290 can support the long member 261 from the back side so as to receive the force received by the long member 261 from the valve body 210. In this case, when the valve body 210 is in the closed position, each support roller 290 is aligned with the flat surface 274 of each plate-like cam 270 and each valve body driving roller 280 with the long member 261 therebetween. It is preferable to arrange.

  According to such a configuration, as shown in FIG. 7A, the valve body 210 moves forward by pulling the long member 261 in the direction of the arrow in the state where the valve body 210 is at a position facing the substrate carry-in / out port 112. Further, by pulling the long member 261 in the direction of the arrow shown in the figure, the valve element driving roller 280 rides on the flat surface 274 of the plate-like cam 270 as shown in FIG. 7B. Thereby, the valve body 210 is held in a state in which the substrate carry-in / out entrance 112 is closed while pressing the wall surface around the substrate carry-in / out entrance 112.

  At this time, as shown in FIG. 7B, each support roller 290 is aligned with the flat surface 274 of each plate-like cam 270 and each valve body driving roller 280 with the long member 261 interposed therebetween. By disposing each support roller 290 in this manner, the valve body 210 can be held at the closed position while pressing the valve body 210 even more strongly as in the case shown in FIG. 1B.

  In the above-described embodiment, the case where the support roller 290 is applied as a support member that supports the long member 261 from the back side thereof is described. However, if the long member 261 can be slidably supported, the support roller 290 is limited. It is not something that can be done.

  Further, in the above embodiment, as shown in FIGS. 1A and 1B, each plate-like cam 270 is provided on the valve body 210 side of the long member 261, and each valve body driving roller 280 has the valve body 210 carried out of the substrate. The case where the valve body 120 is provided so as to face the long member 261 when located at the position facing the inlet 112 has been described as an example, but is not limited thereto.

  For example, as in the second modification shown in FIGS. 8A and 8B, a plate-like cam 270 is provided on the long member 261 side of the valve body 210, and the valve body driving roller 280 has the valve body 210 facing the substrate carry-in / out port 112. The long member 261 may be provided so as to face the valve body 120 when it is in the position. In this case, when the valve body 210 is in the closed position, each support roller 290 is aligned with the flat surface 274 of each plate-like cam 270 and each valve body driving roller 280 with the long member 261 therebetween. It is preferable to arrange.

  According to such a configuration, as shown in FIG. 8A, the valve body 210 moves forward by pulling the long member 261 in the direction of the arrow in the state where the valve body 210 is at a position facing the substrate carry-in / out port 112. Further, by pulling the long member 261 in the direction of the arrow shown in the figure, the valve element driving roller 280 rides on the flat surface 274 of the plate-like cam 270 as shown in FIG. 8B. Thereby, the valve body 210 is held in a state in which the substrate carry-in / out entrance 112 is closed while pressing the wall surface around the substrate carry-in / out entrance 112.

  At this time, as shown in FIG. 8B, each support roller 290 is aligned with the flat surface 274 of each plate-like cam 270 and each valve body driving roller 280 with the long member 261 interposed therebetween. By disposing each support roller 290 in this manner, the valve body 210 can be held at the closed position while pressing the valve body 210 even more strongly as in the case shown in FIG. 1B. Further, in this case, for example, as shown in the third modification shown in FIGS. 9A and 9B, not only the valve body driving rollers 280 but also the support rollers 290 may be provided on the long member 261. . In this case, it is preferable that the support rollers 290 are arranged in a straight line with the valve body driving rollers 280 with the long member 261 interposed therebetween.

  According to such a configuration, as shown in FIG. 9A, the valve body 210 moves forward by pulling the long member 261 in the direction of the arrow in the state where the valve body 210 is at a position facing the substrate loading / unloading port 112. Further, by pulling the long member 261 in the direction of the arrow shown in the figure, the valve element driving roller 280 rides on the flat surface 274 of the plate-like cam 270 as shown in FIG. 9B. Thereby, the valve body 210 is held in a state in which the substrate carry-in / out entrance 112 is closed while pressing the wall surface around the substrate carry-in / out entrance 112.

  At this time, as shown in FIG. 9B, the respective support rollers 290 are arranged in a straight line with the flat member 274 of each plate-like cam 270 and each valve body driving roller 280 with the long member 261 interposed therebetween. By disposing each support roller 290 in this manner, the valve body 210 can be held at the closed position while pressing the valve body 210 even more strongly as in the case shown in FIG. 1B.

  By the way, in the above embodiment, when the long member 261 is driven to open and close the valve body 210, the valve body driving roller 280 and the plate-like cam 270 are in contact with each other while receiving the force from the valve body 210. Depending on the size and the material of the valve body driving roller 280 and the plate-like cam 270, they may come into contact with each other to generate particles and scatter around the periphery. Similarly, particles may be generated between the support roller 290 and the contact plate 276 in contact therewith. Therefore, for example, as in the fourth modification shown in FIGS. 10A, 11A, and 12A, each valve body driving roller 280 and each supporting roller 290 are respectively connected to the long member 261 together with the plate-like cam 270 and the contact plate 276. You may make it surround with the flame | frame 300 comprised so that insertion was possible.

  The gate valve according to the fourth modification will be described more specifically with reference to FIGS. 10A to 10C, FIGS. 11A, 11B, 12A, and 12B. 10A to 10C are enlarged views for explaining the movement of the cam mechanism 260 and the valve body 210 while paying attention to one plate-like cam 270. 11A and 11B are cross-sectional views showing a schematic configuration of the entire gate valve according to the fourth modification, and FIGS. 12A and 12B are vertical cross-sectional views thereof. 11A and 12A are views when the valve body 210 is at a position facing the substrate carry-in / out port 112. FIGS. 11B and 12B are positions at which the valve body 210 closes while pressing the substrate carry-in / out port 112. FIG.

  As shown in FIG. 10A, the valve body driving roller 280 and the support roller 290 of the fourth modified example are provided in a substantially box-shaped frame 300. The frame 300 is attached to the back plate 202 a so that a gap is left between the frame 300 and the valve body 210. The long member 261 is inserted into the holes 303 and 304 formed at both ends of the frame 300 together with the plate-like cam 270 and the contact plate 276 so as to slide between the valve body driving roller 280 and the support roller 290. It has become.

  The support roller 290 is configured by rotatably attaching a roller 294 to a support body 292 fixed to the back plate 202 a side in the frame 300. On the other hand, the valve body driving roller 280 is configured by rotatably attaching a roller 284 to a support body 282 slidably attached to the valve body 210 side in the frame 300.

  That is, the support body 282 in the fourth modification is slidably supported by a pair of guide bars 302 attached to the valve body 210 side in the frame 300. The support body 282 here has a protrusion 282a that protrudes toward the valve body 210 (opposite side of the roller 284), and the protrusion 282a is formed on the frame 300 by sliding the support body 282 back and forth. It protrudes from the hole 306.

  According to this, when the roller 284 contacts and rolls on the plate-like cam 270, the support body 282 advances toward the valve body 210 side. As a result, the state shown in FIGS. 10A, 11A, and 12A where the protrusion 282a does not protrude from the frame 300 is changed to the state shown in FIGS. 10C, 11B, and 12B where the protrusion 282a protrudes from the frame 300. The body 210 can be pressed and closed. Thus, in the fourth modification, the protrusion 282a contacts the valve body 210 and is driven to open and close in the forward / backward direction. The support 282 may be urged toward the back plate 202a by an urging member such as a coil spring or a leaf spring (not shown) provided in the frame 300. According to this, the support body 282 can be retracted by the biasing force of the biasing member.

  The operation of the fourth modified example having such a configuration will be described in more detail with reference to FIGS. 10A to 10C. First, when the valve body 210 rises along the guide rail 220 from a lower retracted position to a position facing the substrate carry-in / out port 112, the state becomes as shown in FIG. 10A. At this time, the long member 261 is in the initial position, the valve body driving roller 280 is not yet in contact with the inclined surface 272 of the plate-like cam 270, and the protruding portion 282 a does not protrude from the frame 300.

  Subsequently, when the elongate member 261 is pulled in the direction of the arrow by the operating force of the actuator 252, the valve body driving roller 280 comes into contact with the inclined surface 272 of the plate-like cam 270 as shown in FIG. Move along. As a result, the protrusion 282a also protrudes from the frame 300 and comes into contact with the valve body 210, and further presses the valve body 210 and moves in a direction to close the substrate carry-in / out port 112. When the valve body 210 comes into contact with the wall surface around the substrate carry-in / out port 112 (here, the wall surface of the edge frame 114), the substrate carry-in / out port 112 is closed while further pressing the wall surface.

  When the elongated member 261 is further pulled from this state, the valve element driving roller 280 rides on the flat surface 274 of the plate-like cam 270 as shown in FIG. 10C. Thereby, the valve body 210 is held in a state in which the substrate carry-in / out entrance 112 is closed while pressing the wall surface around the substrate carry-in / out entrance 112.

  As described above, also in the fourth modified example, as in the above-described embodiment and other modified examples, when the valve body 210 presses the substrate carry-in / out port 112, the force (the force with which the valve body 210 is pushed back from the substrate carry-in / out port side ( The reaction force can be received by the back plate 202a of the housing 202 via the protrusion 282a, the valve body driving roller 280, and the support roller 290. Thereby, the valve body 210 can be held at the closed position. Therefore, when each valve element driving roller 280 rides on the flat surface 274, the valve element 210 is firmly held in the closed position while being pressed against the substrate loading / unloading port 112 even if the operating force of the actuator 252 is not maintained. can do.

  Further, according to the fourth modification, the contact between the valve body driving roller 280 and the plate-like cam 270 and the contact between the support roller 290 and the contact plate 276 are performed in the respective frames 300. Even if particles are generated by the above, it is possible to prevent the particles from being scattered outside the frame 300.

(Application example of gate valve)
Next, specific application examples of the gate valve according to each embodiment of the present invention described above will be described with reference to the drawings. Here, a specific example when applied to a multi-chamber type FPD substrate processing apparatus will be described. FIG. 13 is a block diagram showing a schematic configuration of the FPD substrate processing apparatus. An FPD substrate processing apparatus 400 shown in FIG. 13 includes a common transfer chamber 410 that houses a transfer robot (not shown) having a transfer arm for transferring a substrate, and a plurality of process chambers 420A, 420B, 420C, and A load lock chamber 430 is installed. The common transfer chamber 410, each of the processing chambers 420A, 420B, 420C, and the load lock chamber 430 constitute a sealable chamber having a vacuum pressure atmosphere as described above.

  In the FPD substrate processing apparatus 400 shown in FIG. 13, the common transfer chamber 410 and the surrounding processing chambers 420 </ b> A, 420 </ b> B, 420 </ b> C and the load lock chamber 430 are connected via the gate valve 200 according to the present embodiment. Note that the gate valve 200 may be provided also at the substrate loading / unloading port for loading / unloading the substrate from the transfer arm on the atmospheric pressure side of the load lock chamber 430.

  Note that the gate valve 200 is provided between two chambers in a vacuum atmosphere, such as between each processing chamber 420A, 420B, 420C and the common transfer chamber 410, between the load lock chamber 430 and the common transfer chamber 410, or the like. In the case of providing, for example, as shown in FIG. 14, the side wall 110 of the other chamber 100 is connected to the gate valve 200 so that the opening 203 of the gate valve 200 is disposed at the position of the substrate carry-in / out port 112 of the other chamber 100. You may make it attach to the backplate 202a of the housing | casing 202. FIG.

  Further, when the gate valve 200 is provided between the two chambers 100, for example, as shown in FIG. 15, the casing 202 omits the back plate 202a, and the side plates 202b and 202c, the ceiling plate 202d, and the bottom plate shown in FIG. 202e may be enclosed between the chambers 100. In this case, each support roller 290 may be provided on the side wall 110 of another chamber 100 as shown in FIG. 15, and although not shown, each support roller 290 is provided on the long member 261. , An address plate may be provided on the side wall 110 of another chamber 100.

  Further, for example, as shown in FIG. 16, gate valves 200 are provided on the side walls 110 of the respective chambers 100, and the opening 203 of the other gate valve 200 is disposed at the position of the opening 203 of the one gate valve 200. As described above, the back plate 202a of each casing 202 may be attached.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in the above-described embodiment, the case where the cam that presses or holds the valve body is configured by a plate-like cam, but is not limited thereto, and may be configured by a rotating cam. In this case, for example, the long member is rotatably supported by the casing, and the rotating cam is fixed to the long member. Then, the rotary cam may be driven by rotating the long member, and the valve body may be pressed or held by the cam surface of the rotary cam.

  The present invention is applicable to a gate valve that opens and closes a substrate carry-in / out port of a chamber and a substrate processing apparatus using the gate valve.

100 Chamber 110 Side wall 112 Substrate carry-in / out port 114 Edge frame 200 Gate valve 202 Case 202a Back plate 202b, 202c Side plate 202d Ceiling plate 202e Bottom plate 203 Opening 204a Through hole 210 Valve body 212 Valve body support plate 212a Insert hole 220 Guide rail 222 Slider 224 Guide rod 224a Stopping member 226 Energizing member 230 Lifting drive means 232 Lifting actuator 252 Opening / closing actuator 234 Piston rod 235 Reduced diameter portion 236 Head 240 Valve body slide mechanism 242 Frame 242a Insertion hole 243 Fastening member 244 Guide body 245 Rolling member 246 Concave portion 250 Opening / closing drive means 252 Actuator 254 Piston rod 256 Support member 260 Cam mechanism 261 Long member 262 Rod member 263 Bush 264 Connecting portion 270 Plate cam 272 Slope 274 Flat surface 276 Contact plate 280 Valve body driving roller 282 Support body 282a Protruding portion 284 Roller 290 Support roller 292 Support body 294 Roller 300 Frame 302 Guide rod 303, 304, 306 Hole 400 FPD substrate processing apparatus 410 Common transfer chamber 420A, 420B, 420C, processing chamber 430 load lock chamber

Claims (16)

A gate valve for opening and closing a substrate loading / unloading port provided on a side wall of the chamber,
A housing provided on a side wall of the chamber so as to surround the substrate loading / unloading port;
A valve body provided in the casing so as to be movable up and down, and opening and closing the substrate carry-in / out port;
Elevating drive means for elevating and lowering the valve body between a position facing the substrate carry-in / out entrance and a position retracted from the substrate carry-in / out entrance;
An opening / closing drive means configured by a cam mechanism for moving the valve body forward and backward between a position facing the substrate carry-in / out opening and a position closing the substrate carry-in / out opening while pressing,
Each of the cam mechanisms is a rod- like member disposed on the back side of the valve body in the longitudinal direction of the valve body so as to be longer than the length of the longitudinal direction of the valve body. A long member configured to be integrally slid and supported by the operation of the long member, the valve body is pressed and driven from the substrate carry-in / out side. A plate-like cam that presses and holds the valve body at the closed position by receiving the force generated by the long member; and a drive means that slides the long member in a direction perpendicular to the advancing and retreating direction of the valve body; A valve body driving roller that contacts the cam surface of the plate cam provided between the elongate member and the valve body and drives the valve body, and the sliding operation of the elongate member Is converted into advancing and retracting the valve body,
A plurality of the valve body driving rollers are arranged along the longitudinal direction of the valve body, and the plate-like cams are provided in a number corresponding to the valve body driving rollers to slide the long member. The valve body driving rollers are all driven at the same time to move the valve body forward and backward, and the valve body driving rollers can be held in the closed position while pressing the valve body with all the valve body driving rollers. A gate valve characterized by that. The plate-shaped cam slides the elongated member in one direction, abuts on the valve body driving roller, advances the valve body driving roller in the direction of closing the valve body, and carries out the substrate unloading. The valve body is held in the closed position by receiving a first cam surface that moves to a position where the inlet is closed while pressing the inlet, and a force that the valve body is pushed back from the substrate carry-out inlet side by the elongate member. The gate valve according to claim 1, further comprising a second cam surface. The plate cam is provided on the valve body side of the long member,
The valve body driving roller is provided on the valve body so as to face the elongated member when the valve body is in a position facing the substrate carry-in / out port. Gate valve. The plate cam is provided on the long member side of the valve body,
The said valve body drive roller is provided in the said elongate member so that the said valve body may be opposed when the said valve body exists in the position which opposes the said board | substrate carrying in / out opening. Gate valve. 2. The gate valve according to claim 1, further comprising a support member that supports the elongate member from the back side so as to receive a force received by the elongate member from the valve body. The gate valve according to claim 5, wherein the support member includes a support roller provided on a back plate of the housing or a side wall of another chamber. The gate valve according to claim 5, wherein the support member is a support roller provided on the long member. The support member comprises a support roller;
The support roller is arranged in a straight line with the plate-shaped cam and the valve body driving roller and the long member interposed between the valve body when the valve body is in a position to be closed while pressing the substrate carry-in / out port. The gate valve according to claim 5, wherein the gate valve is arranged. The elevating drive means comprises an actuator that elevates and lowers the valve body vertically by extending and contracting a piston rod,
The front end of the piston rod supports the valve body from below through a valve body slide mechanism that can slide the valve body in the forward / backward direction with respect to the piston rod. The gate valve according to any one of 8. A substrate processing apparatus for performing predetermined processing on a substrate while transferring the substrate to a plurality of chambers,
Each chamber includes a gate valve for opening and closing a substrate loading / unloading port provided on a side wall of the chamber,
The gate valve includes a housing provided on a side wall of the chamber so as to surround the substrate carry-in / out port, a valve body provided in the case so as to be movable up and down, and opening and closing the substrate carry-in / out port, and the substrate carry-in / out port An elevating drive means for raising and lowering the valve body between a position facing the substrate and a position retracted from the substrate carry-in / out entrance, and a position facing the substrate carry-in / out entrance and a position closing the substrate carry-in / out entrance while pressing And an opening / closing drive means constituted by a cam mechanism for moving the valve body forward and backward.
Each of the cam mechanisms is a rod- like member disposed on the back side of the valve body in the longitudinal direction of the valve body so as to be longer than the length of the longitudinal direction of the valve body. It is driven by a long member constituted by a member and supported so as to slide integrally, and the valve body is pressed and driven from the long member, and the valve body is pushed back from the substrate carry-in / out side. A plate-like cam that holds the valve body in the closed position by receiving a force generated by the long member; drive means for sliding the long member in a direction perpendicular to the advancing and retreating direction of the valve body; A valve body driving roller that contacts the cam surface of the plate cam provided between the elongate member and the valve body and drives the valve body, and performs sliding operation of the elongate member Converted into the forward and backward movement of the valve body,
A plurality of the valve body driving rollers are arranged along the longitudinal direction of the valve body, and the plate-like cams are provided in a number corresponding to the valve body driving rollers to slide the long member. The valve body driving rollers are all driven at the same time to move the valve body forward and backward, and the valve body driving rollers can be held in the closed position while pressing the valve body with all the valve body driving rollers. A substrate processing apparatus. The substrate processing apparatus according to claim 10, wherein the chamber is a processing chamber for processing a substrate, a transfer chamber connected to the processing chamber, and a load lock chamber connected to the transfer chamber. A gate valve for opening and closing a substrate loading / unloading port provided on a side wall of the chamber,
A housing provided on a side wall of the chamber so as to surround the substrate loading / unloading port;
A valve body provided in the casing so as to be movable up and down, and opening and closing the substrate carry-in / out port;
Elevating drive means for elevating and lowering the valve body between a position facing the substrate carry-in / out entrance and a position retracted from the substrate carry-in / out entrance;
An opening / closing drive means configured by a cam mechanism for moving the valve body forward and backward between a position facing the substrate carry-in / out opening and a position closing the substrate carry-in / out opening while pressing,
Each of the cam mechanisms is a rod- like member disposed on the back side of the valve body in the longitudinal direction of the valve body so as to be longer than the length of the longitudinal direction of the valve body. A long member configured to be integrally slid and supported by the operation of the long member, the valve body is pressed and driven from the substrate carry-in / out side. A plate-like cam that presses and holds the valve body at the closed position by receiving the force generated by the long member; and a drive means that slides the long member in a direction perpendicular to the advancing and retreating direction of the valve body; Surrounding the valve body driving roller that contacts the cam surface of the cam provided between the elongate member and the valve body and drives the valve body, and the valve body driving roller and the cam A frame provided in the Converted into forward and backward movement of the valve body,
A plurality of the valve body driving rollers are arranged along the longitudinal direction of the valve body, and the plate-like cams are provided in a number corresponding to the valve body driving rollers to slide the long member. The valve body driving rollers are all driven at the same time to move the valve body forward and backward, and the valve body driving rollers can be held in the closed position while pressing the valve body with all the valve body driving rollers. A gate valve characterized by that. The frame is attached to the back plate of the housing or the side wall of another chamber with a gap from the back side of the valve body,
The valve element driving roller is rotatably attached to a support provided in the frame,
The support has a protrusion protruding on the back side of the valve body, and can slide so that the protrusion protrudes and retracts from a hole formed in the frame according to the movement of the valve element driving roller. To
The gate valve according to claim 12, wherein the valve body is configured to be opened and closed by the protrusion from the back side of the valve body. The gate valve according to claim 13, wherein a support member that supports the long member from the back side thereof is provided in the frame so as to receive a force received by the long member from the valve body. The gate valve according to claim 14, wherein the support member includes a support roller provided in the frame. A gate valve provided between two chambers for opening and closing a substrate carry-in / out port,
A valve body provided so as to be movable up and down between the two chambers, and opening and closing the substrate carry-in / out port;
Elevating drive means for elevating and lowering the valve body between a position facing the substrate carry-in / out entrance and a position retracted from the substrate carry-in / out entrance;
An opening / closing drive means configured by a cam mechanism for moving the valve body forward and backward between a position facing the substrate carry-in / out opening and a position closing the substrate carry-in / out opening while pressing,
Each of the cam mechanisms is a rod- like member disposed on the back side of the valve body in the longitudinal direction of the valve body so as to be longer than the length of the longitudinal direction of the valve body. A long member that is supported by the two chambers so as to slide integrally between the two chambers, and presses and drives the valve body in accordance with the operation of the long member. A plate-like cam that presses and holds the valve body in the closed position by receiving a force pushed back from the carry-in / out entrance side, and the long member is slid in a direction perpendicular to the advancing / retreating direction of the valve body. Drive means for moving, and a valve body driving roller that contacts the cam surface of the plate-like cam provided between the elongate member and the valve body to drive the valve body, The sliding movement of the scale member is converted into the forward / backward movement of the valve body,
A plurality of the valve body driving rollers are arranged along the longitudinal direction of the valve body, and the plate-like cams are provided in a number corresponding to the valve body driving rollers to slide the long member. The valve body driving rollers are all driven at the same time to move the valve body forward and backward, and the valve body driving rollers can be held in the closed position while pressing the valve body with all the valve body driving rollers. A gate valve characterized by that.

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