JP2002206650A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gate valve coping with the case of receiving back pressure such that one side chamber of a valve casing is vacuum, and the other side chamber is at atmospheric pressure or under pressurization. SOLUTION: A gate valve is provided with two flat plate-like valve elements 32a, 32b, and a rectangular parallelopiped valve casing 34. The valve elements are stored in the interior of the valve casing. Two rectangular opening parts 34a and 34b are formed in positions opposite to each other of wall bodies constituting the valve casing. The peripheries of the opening parts of the inner wall surfaces of the valve casing are used as sealing surfaces. The gate valve is provided with a driving mechanism for driving both of the valve elements. The valve elements are caused to abut on the wall surface of the peripheries of the opening parts by the driving mechanism, thereby sealing the opening parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a gate valve used in a vacuum processing apparatus such as an in-line type liquid crystal injection apparatus and a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art Gate valves are used for vacuum isolation between a plurality of vacuum chambers. It is often used in semiconductor manufacturing equipment and the like, but recently it is also used in in-line type liquid crystal injection equipment.

[0003] The simplest type of in-line type liquid crystal injection apparatus includes a chamber called an exhaust chamber and a chamber called an injection chamber. The exhaust chamber and the injection chamber are connected via a gate valve.

[0004] An object to be processed is two glass substrates which are bonded in advance with an adhesive. The peripheral portion of the glass substrate serves as an adhesive portion, and a predetermined gap is formed between the glass substrates. A minute hole of about 5 μm is formed in the above-mentioned bonding portion. In the exhaust chamber, the gap between the glass substrates is evacuated through this hole. Subsequently, the glass substrate is transferred to an adjacent injection chamber via a gate valve.
A liquid crystal dish filled with liquid crystal is placed in the injection chamber in a vacuum (10 ⁻³ Pa) state. In the injection chamber, the hole of the bonding portion of the glass substrate is brought into contact with the liquid crystal, and the pressure in the injection chamber is set to a pressure higher than the atmospheric pressure of N ₂ gas or the maximum atmospheric pressure of 0.3 MPa. The liquid crystal is injected into the gap between the glass substrates by applying pressure from outside.

[0005] Not only one set of glass substrates to be processed at a time, but usually several to several tens of sets are transported in a state of being inserted into a cassette. In addition, the number of cassettes is not one, and a plurality of cassettes are transported simultaneously on a tray.

The liquid crystal is degassed by exposing it to vacuum in a chamber called a defoaming chamber, and then transported to the injection chamber from a different direction from the cassette.

Next, the structure of a conventional gate valve will be described with reference to FIGS. FIG. 16 is a cross-sectional view showing a configuration of a conventional gate valve in a state where the valve is closed. FIG. 17 is a cross-sectional view showing a configuration of a conventional gate valve in a state where the valve is open. In the following description, it is assumed that the vertical direction in the figure corresponds to the vertical direction.

[0008] The valve box 10 constituting the gate valve,
Usually, it is installed in a state of being connected between two chambers (not shown). Two openings 10a and 10b are formed at positions of the wall of the valve box 10 facing each other. The internal space of each chamber is in communication with the internal space of the valve box 10. A valve body 12 is housed inside the valve box 10. An O-ring 14 is provided on the surface of the valve body 12. The opening 10a is sealed by pressing the O-ring 14 against the sealing surface of the inner wall of the valve box 10.

Next, the opening / closing mechanism of the gate valve will be described. The surface of the valve body 12 opposite to the side on which the O-ring 14 is provided is attached to the valve body back plate 16. The valve body back plate 16 is connected to a link bar 20 via a plurality of links 18 each having a parallel shape. Valve back plate 16
Is rotatable in a state parallel to the link bar 20 by the action of the link 18. One end of the valve body back plate 16 is connected to the surface of the lift plate 22 via a compression spring 24. By the action of the compression spring 24, the valve body back plate 16 is urged in a direction away from the lift plate 22. One end of the link bar 20 is connected to a surface of the lift plate 22 on the side to which the valve body back plate 16 is coupled.

A lift bar 26 is connected to a surface of the lift plate 22 opposite to the link bar 20. The lift bar 26 and the link bar 20 are parallel.
The lift bar 26 is connected to a vertical cylinder 28 outside the valve box 10. Further, a link guide 30 is provided inside the valve box 10 on the upper side in the drawing. When the lift bar 26 is driven by the vertical cylinder 28, the lift plate 2
2. The link bar 20, the valve body back plate 16 and the valve body 12 can be moved toward the link guide 30.

Next, the closing operation of the gate valve will be described. From the state where the valve is opened, the lift bar 26 is raised by the vertical cylinder 28, and the upper part of the valve body back plate 16 is brought into contact with the link guide 30. Further lift bar 2
6, the valve body back plate 16 is pressed against the link guide 30, and the link 18 rotates in the horizontal direction from the obliquely inclined state, so that the valve body back plate 16 and the valve body 12 are rotated.
Is moved to the side of the sealing surface of the valve box 10. As a result, the valve body 12 is pressed against the valve box 10, the opening 10a is sealed, and the gate valve is closed (FIG. 16).

Next, the opening operation of the gate valve will be described. When the valve is closed, the lift bar 26 is lowered by the vertical cylinder 28 to separate the valve body back plate 16 from the link guide 30. Then, the valve body back plate 16 is lifted by the compression spring 24, and the link 18 is inclined upward and obliquely from the horizontal direction. As a result, the valve body 12 is
As it moves away from zero, it descends and the gate valve is opened (FIG. 17).

[0013]

However, in the conventional gate valve, the chamber on the left side of FIG.
In the case where the chamber on the right side in FIG. 16 receives a back pressure such that the pressure becomes the atmospheric pressure, the valve body needs to be reinforced. In some cases, it is necessary to devise a mechanism for separately attaching a mechanism for holding down the valve element 12.

Conventionally, an in-line type liquid crystal injecting device is 18.1 ″ (width 285.8 mm, height 377.8 m).
m), devices that support substrates of sizes less than or equal to the mainstream have been the mainstream, but recently, 20 ″ (width 314.8 mm, height 416.
An apparatus corresponding to a substrate having a size of 4 mm) or more is mainly used. The size of the transfer board is cut and pasted in advance to the size used for the final product,
It varies from 2 "(width 40.5 mm, height 50.6 mm) to 20" or more. However, when the internal mechanism is complicated due to differences in the equipment specifications such as the number of cassettes to be transferred at once or the number of substrates to be stored in one cassette, and special equipment specifications such as transfer of the transfer tray in two steps. For this reason, a large chamber having a width of about 1080 mm, a height of about 840 mm, and a length of about 1000 mm is used. In this large chamber, a large gate valve having a width of about 800 mm and a height of about 600 mm is used.

The force that the valve body receives from the chamber side increases according to the size of the opening 10a that receives pressure from the chamber. Therefore, the size, especially the thickness of the valve box 10 (the wall on which the opening 10a is formed and the opening 10b
The distance between the opening 10a and the wall formed with the hole becomes extra thick according to the size of the opening 10a that receives the pressure from the chamber.
For example, when the width and height of the opening are 630 mm and 575 mm, respectively, the thickness is 170 mm, but the width and height of the opening are 800 mm and 600 m, respectively.
m, the thickness becomes 195 mm. At this time,
The force that the valve body receives from the chamber side is 630 m wide
m, height 575 mm and about 36200 N (3620
kgf) and the opening is 800 mm wide and 600 mm high
About 48,000 N (4800 kgf).

In recent years, in order to reduce the injection time, the in-line type liquid crystal injection apparatus may employ a pressure injection method in which the pressure inside the injection chamber is set to 0.3 MPa in absolute pressure as described above. In this case, the force that the valve body receives from the chamber side is
Since the maximum value is three times the above, it is difficult to cope with the conventional gate valve.

The size of the liquid crystal substrate is increasing year by year, and the size of the conventional substrate was 18.1 inches, but nowadays the size is increased to 20 inches and is expected to increase to 25 inches or more in the future. You. Therefore, the substrate transfer chamber and the substrate processing chamber for producing a large-sized liquid crystal substrate also become large, and the gate valve used for them also increases in size, so that the opening of the gate valve becomes large. for that reason,
The valve body itself becomes larger accordingly. By the way, a 18.1 inch valve body has a width of 870 mm, a height of 570 mm, and a thickness of 30 mm. When the board size is 20 inches, the valve body has a width of 1032 mm and a height of 740.
mm, the thickness is increased to 30 mm, and the valve body shape when the substrate is expanded to 25 inches has a width of 1437 mm and a height of 1 mm.
It is expected that the thickness will be significantly increased to 165 mm and the thickness to 30 mm.

Also, the valve body weight is increased by increasing the valve body shape, and the valve body weight is 18.1 inches and the valve body weight is 50 kg, whereas when the substrate size is 20 inches, the valve body weight is 62 kg and the substrate size is Will increase to 125 kg at 25 inches.

In the vertical gate valve shown in FIGS. 16 and 17, due to its structure, when the gate valve opens and closes,
The valve is moved up and down including the parts attached to the valve together with the valve. Therefore, in addition to the force pressing the valve body against the valve box, a force for moving the valve body up and down is added to the vertical cylinder 28 that drives the valve body up and down. By the way, the ratio of the force is 10: 1.

When the valve body becomes large and heavy, the maintainability of the valve body deteriorates, and the operation of pulling out the valve body becomes difficult, and the risk increases. The maintenance procedure of the vertical gate valve will be described below. First, insert a special jig under the gate valve. Next, after supporting the valve body with the jig, the portion supporting the cylinder and the valve body is removed. Subsequently, the valve body is pulled out with a jig.

Since the above operation is performed under the gate valve, the operation is performed in a narrow space between the substrate transfer chamber and the substrate processing chamber, resulting in poor workability. Further, since it is necessary to remove a valve body of 62 kg or more in a state of poor workability, the danger is large.

[0022]

Therefore, according to the gate valve of the present invention, two valve bodies are housed inside the valve box, and the two valve bodies are located at opposite positions on the wall constituting the valve box.
One opening is formed, and a driving mechanism for driving both of the valve elements is provided. By the driving mechanism, the valve element is brought into contact with a wall surface around the opening to thereby seal each of the openings. The stop is performed.

According to this structure, the openings between the chambers on the left and right sides of the valve box are each sealed with a separate valve element. However, stable sealing can be performed.

Further, even when a large gate valve is required, the thickness of the valve box can be made smaller than before.

In the gate valve according to the present invention, preferably, the driving mechanism moves the valve body along the wall surface having the opening, and the valve mechanism is arranged such that the valve body faces the opening. Is moved toward the opening.

In the gate valve according to the present invention,
Preferably, both of the valve bodies are engaged in an opposed state, and are movable in an approaching direction or a separating direction, and both of the valve bodies are located between these valve bodies when the opening is open. It is preferable that the driving mechanism is configured to push the gap between the valve bodies when the valve body is located at a position facing the opening while maintaining the predetermined gap.

According to the first preferred embodiment of the gate valve of the present invention, the drive mechanism is connected to both of the valve bodies and extends along the wall surface on which the opening is formed. A movable lift bar, a roller provided on each of the opposed wall surfaces of the valve body and supported by an axis parallel to the wall surfaces and parallel to the extending direction of the lift bar, and a tapered tapered end. A member having a shape, which is inserted into and removed from the gap between the valve bodies when the valve body is located at a position facing the opening, and is brought into contact with the roller surface of the roller when inserted into the gap. And a taper member.

According to the second preferred embodiment of the gate valve of the present invention, the drive mechanism is connected to both the slide rail provided inside the valve box and the valve body interposed in the gap between the valve bodies. , A valve body frame supported on the slide rail and movable along the slide rail, and a tapered member provided on each of both facing wall surfaces of the valve body and having a surface inclined in a certain direction with respect to these wall surfaces. A lift bar interposed in the gap between the valve bodies, extending in a direction perpendicular to the moving direction of the valve body frame, and movable in the extending direction, and provided on the lift bar; A roller having a contacting roller surface, a support rod connected to one end of the lift bar and extending in the moving direction of the valve body frame, and a support rod when the valve body is located at a position facing the opening. Combined with the lift bar And a movable lift rail extending direction.

According to these preferred embodiments, the space between the two valve bodies is pushed and spread by the tapered member, so that a large uniform force can be applied to the entire valve body.

In the second preferred embodiment, the lift bar is preferably installed so that the extending direction of the lift bar is vertical.

With this configuration, the opening and closing operation of the valve can be performed by sliding the valve body in the horizontal direction. Since the valve element is supported by the slide rail, the load on the drive source that slides the valve element is reduced. Further, when removing the valve element, it is not necessary to perform a dangerous operation such as placing a jig dedicated to the valve element under a narrow device as in the related art, so that the maintenance operation can be performed safely.
Since the valve body itself is supported by the slide rail, there is no accident of accidentally dropping the valve body.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. It should be noted that the drawings merely schematically show the shapes, sizes, and arrangements so that the present invention can be understood. Therefore, the present invention is not limited to the illustrated example.

[First Embodiment] FIG. 1 and FIG.
It is a perspective view showing composition of a gate valve of a 1st embodiment. In the figure, some of the components, for example, the wall of the valve box 34 and one of the valve bodies 32b are cut off.
FIG. 1 shows a state where the gate valve is completely opened. FIG. 2 shows a state in which the gate valve is completely closed.

The gate valve of this embodiment includes two flat valve bodies 32a and 32b and a rectangular parallelepiped valve box 34. The two valve bodies 32 a and 32 b are housed inside a valve box 34. Further, two rectangular openings 34a and 34b are formed at positions facing each other on the wall constituting the valve box 34. Valve box 34
The inner wall surface around the openings 34a and 34b is used as a sealing surface. Further, the gate valve includes a driving mechanism for driving both the valve bodies 32a and 32b. With this driving mechanism, the valve bodies 32a and 3
2b is brought into contact with the wall surfaces around the openings 34a and 34b. As a result, the openings 34a and 34b
Are configured to be sealed.

In this embodiment, the drive mechanism described above connects the valve bodies 32a and 32b to the openings 34a and 34b.
b is moved along the wall surface formed. As shown in FIG. 1, when the valve is open, the valve body 32a
And 32b are both located below openings 34a and 34b. Then, as shown in FIG. 2, the valve bodies 32a and 32
Both 2b are moved (elevated) to positions facing the openings 34a and 34b. In the process, both the valve bodies 32a and 32b are opened
It slides along the wall where b is formed.

This drive mechanism operates with the valve bodies 32a and 32b facing the openings 34a and 34b.
The valve bodies 32a and 32b are moved toward the openings 34a and 34b. That is, the valve body 32a is moved toward the wall of the valve box 34 having the opening 34a, and the valve body 32b is moved toward the wall of the valve box 34 having the opening 34b. As a result, the openings 34a and 34b are respectively connected to the valve bodies 32a and 32b.
b.

It should be noted that both the valve bodies 32a and 32b
They are engaged facing each other so as to be movable in the approaching direction or the separating direction. Specifically, the valve bodies 32a and 32b are connected by an upper valve body guide 36 at two upper positions in FIGS. 1 and 2, and
The lower valve body guide 38 is provided at two lower positions in FIGS.
Are connected by With this configuration,
The valve bodies 32a and 32b can move in a direction perpendicular to each main surface in a state where they are parallel to each other and do not shift in the plane direction.

Further, both the valve bodies 32a and 32b
When the openings 34a and 34b are open, the valve bodies 32a and 32b are urged toward each other while maintaining a predetermined gap therebetween. The maintenance of the gap is realized by the valve body guides 36 and 38 described above. As specific urging means, two tension springs 40 for connecting one end of the valve body 32a and one end of the valve body 32b are used.

FIG. 3 is a side view of the internal structure of the gate valve excluding the valve box 34 as viewed from a direction parallel to the main surfaces of the valve bodies 32a and 32b. FIG. 4 is a top view showing the configuration of the gate valve as viewed from above in FIG. 3 and 4, illustration of some components shown in FIGS. 1 and 2 is omitted. In FIG. 4, the upper wall of the valve box 34 is removed.

As shown in FIGS. 3 and 4, the valve element 32a
And 32b are connected by an upper valve body guide 36 and a lower valve body guide 38. Upper valve body guide 36
Comprises a bearing 42 and a shaft 44 which can be inserted into and removed from the bearing 42. For example, the bearing 42 is connected and fixed to the surface of the valve body 32a, and the shaft 44
Is connected and fixed to the surface of the valve body 32b. Also,
The lower valve body guide 38 includes two bearings 46 and a shaft 48 that can be inserted into and removed from these bearings. Each bearing 46 is provided with a valve body back plate 50a and 5b.
Ob are attached to the valve bodies 32a and 32b, respectively. In FIGS. 3 and 4, pins 52a and 52b are provided at the upper ends of the valve bodies 32a and 32b, respectively.
Are respectively fixed. The ends of the tension spring 40 are connected to each of these pins 52a and 52b.

FIG. 5 shows a cross-sectional structure of the upper valve body guide 36 for reference. FIG. 5 is a diagram showing a cross section of a cut surface taken along a line II in FIG. 4. The shaft 44 is combined to slide along the bearing 42.

As shown in FIG. 5, a groove is formed in each of the valve bodies 32a and 32b in contact with the sealing surface of the valve box 34, and an O-ring 66 is fitted in this groove. The O-ring 66 protrudes several mm from the surface of the valve body. This ensures the required sealing function.

In addition to the above-described slide drive, when the valve bodies 32a and 32b are located at positions facing the openings 34a and 34b, the drive mechanism of the present embodiment is not limited to the slide drive described above. Driving to expand the gap is performed. According to the operation of this drive mechanism, the valve element 3
2a and 32b can be moved toward openings 34a and 34b against the bias of tension spring 40.

Next, the structure of the above-described drive mechanism will be described. This drive mechanism mainly includes a lift bar 54, a roller 56, and a taper block (taper member) 58.

The lift bar 54 is connected to the valve bodies 32a and 32
b, is a member that extends along the wall surface where the openings 34a and 34b are formed, and is movable in the extending direction. The lift bar 54 is connected to a lift plate 62 via a coupling member 60, and the lift plate 62 is connected to the valve bodies 32a and 32b via the lower valve body guide 38 and the valve body back plates 50a and 50b. . Specifically, the lift plate 62 is disposed so that its longitudinal direction is perpendicular to the extending direction of the lift bar 54, and in this state, the central portion of the lift plate 62 is fixed to one end of the lift bar 54 by the coupling member 60. You.
That is, the lift bar 54, the coupling member 60, and the lift plate 62 are integrated as a T-shaped structure. The shafts 48 constituting the lower valve body guide 38 are fixed to both ends of the lift plate 62 so that the shafts 48 are inserted therethrough.

The end of the lift bar 54 on the side opposite to the joint with the lift plate 62 is connected to the upper and lower cylinders 64.
Is joined to. The upper and lower cylinders 64 are solenoid valves such as air cylinders. Using the vertical cylinder 64 as a drive source, the lift bar 54 can be moved in the longitudinal direction. Therefore, the lift bar 54
The valve bodies 32a and 32b can be slid in a certain direction inside the valve box 34.

A side roller 70 is journaled on the side wall of each of the valve bodies 32a and 32b. The side roller 70 is supported by a shaft parallel to the main surfaces of the valve bodies 32a and 32b, and the diameter of the roller is larger than the thickness of the valve body. The side roller 70 rolls along the inner wall surface of the valve box 34 during the above-described sliding operation, thereby contributing to smooth sliding operation. FIG.
It is sectional drawing which shows the structure of a vicinity. FIG. 6A shows a state at the time of a sliding operation, and FIG. 6B shows a state when the valve bodies 32a and 32b are at positions facing the openings 34a and 34b. During the sliding operation, the roller surface of the side roller 70 is in contact with the inner wall surface of the valve box 34 (FIG. 6A). And the valve bodies 32a and 3
When 2b is located at a position facing openings 34a and 34b, side roller 70 is configured to be accommodated in groove 34c formed in valve box 34 (FIG. 6).
(B)).

Next, the above-mentioned roller 56 is provided on each of the opposed wall surfaces of the valve bodies 32a and 32b, and is supported by an axis parallel to these wall surfaces and parallel to the extending direction of the lift bar 54. ing. Four rollers 56 are provided for each of the valve bodies 32a and 32b. A roller 56 provided on the valve body 32a;
Are positioned so as to face each other.

Next, the above-mentioned tapered block 58 is a member having a tapered shape with a tapered tip. In this embodiment, a rod-shaped member having a substantially arrow shape is used as the tapered block 58. This taper block 58 is used for the valve box 3
Part of the valve case 34 is inserted through a hole formed in the side wall of the valve case 4. That is, the tapered portion is placed inside the valve box 34, and the rod-shaped portion is placed outside the outside. The tapered portion is placed such that its tip faces inside the valve box 34.

The taper block 58 operates so as to be inserted into and removed from the gap between the valve bodies 32a and 32b when the valve bodies 32a and 32b are at positions facing the openings 34a and 34b. . When the taper block 58 is inserted into the gap, the tapered surface of the tapered portion comes into contact with the roller surface of the roller 56. Further, the rod-shaped portion of the tapered block 58 is
Is connected to the side cylinder 68 on the outside. The above-described insertion / removal operation is performed using the side cylinder 68 as a drive source. In this configuration example, the insertion / removal direction of the taper block 58 is the horizontal direction on the paper surface of FIG. 4, that is, the direction perpendicular to the paper surface of FIG.

In this configuration example, four tapered blocks 5
8 are used, each connected to a separate side cylinder 68. The above-mentioned insertion / removal operation is performed by simultaneously inserting or pulling out the four tapered blocks 58.

In this embodiment described above, the valve bodies 32a and 32b are moved by the lift bar 54 so that the valve box 34 is moved.
Each drive source is controlled so that the tapered block 58 moves toward the inside of the valve box 34 when the taper block 58 is moved to face the openings 34a and 34b. When the taper block 58 is moved so that the tip portion is inserted between the valve bodies 32a and 32b, the taper surface of the taper block 58 becomes
The rollers come into contact with the roller surfaces of the rollers 56 provided on the valve bodies 32a and 32b, respectively. When the taper block 58 is further inserted, the taper block 58 pushes the roller 56 in a direction perpendicular to the main surfaces of the valve bodies 32a and 32b. As a result, the gap between the valve bodies 32a and 32b widens, and the valve bodies 32a and 32b move toward the openings 34a and 34b, respectively.

In this configuration example, four side cylinders 6
8 are arranged at four positions in the upper, lower, left and right directions with respect to the valve box 34, so that it is possible to generate a strongly averaged force. According to the configuration example of this embodiment, about 17
It is possible to generate a force of 0000N (17000 kgf). Therefore, even if the state of the chamber connected to the left and right sides of the valve box 34 is a combination of the atmosphere and the vacuum, or the combination of the pressurized state and the vacuum, the sealing function of the gate valve can be reliably maintained.

The valve bodies 32a and 32b are connected to the valve box 34.
Is further enhanced by lengthening the tapered portion of the tapered block 58.

Next, the opening and closing operation of the gate valve according to this embodiment will be described. First, the closing operation of the gate valve will be described. First, from the state where the valve shown in FIG. 1 is opened, the lift bar 54 is driven by the upper and lower cylinders 64 to open the valve bodies 32a and 32b with the openings 34a and
Slide to the position facing b. Next, the taper block 58 is driven by the side cylinder 68, and the taper block 58 is inserted into the gap between the valve bodies 32a and 32b to expand the gap between the valve bodies 32a and 32b. As a result, each of the valve bodies 32a and 32b is pressed against the sealing surface of the valve box 34, and the openings 34a and 34b are sealed. That is, the gate valve is closed (FIG. 2).

Next, the opening operation of the gate valve will be described. First, when the valve shown in FIG. 2 is closed, the taper block 58 is driven by the side cylinder 68, and the taper block 58 is pulled out from the gap between the valve bodies 32a and 32b. Then, the valve bodies 32a and 32b move toward each other by the action of the tension spring 40. As a result, the valve bodies 32a and 32b separate from the sealing surface of the valve box 34. Next, the lift bar 54 is driven by the vertical cylinder 64 to slide the valve bodies 32a and 32b away from the openings 34a and 34b. Finally, the lift bar 54 is driven until the openings 34a and 34b are completely opened. as a result,
The gate valve is opened (FIG. 1).

As described above, according to the gate valve of this embodiment, two valve elements are provided in the valve box, and when the valves are closed, the two valve elements are simultaneously pushed open by the tapered block. By stretching, it is possible to give a large force to the valve body on average. As a result, a stable seal can be realized regardless of the state of the chambers on the left and right sides of the valve box. Further, even when a large gate valve is required, the thickness of the valve box can be made smaller than before. For example, the size of the opening is 800 mm in width and 6 in height.
Conventionally, for a 00 mm gate valve, the thickness of the valve box is 19
5 mm was required, but in this embodiment, 180 mm
Can be thinned.

In this embodiment, the roller is provided on the valve body and the taper block is inserted between the valve bodies. However, the configuration may be reversed. FIG. 7 is a diagram showing a main configuration of a modification of the gate valve.

In this modification, instead of the rollers, tapered wedges (tapered members) 72 are provided on the opposed wall surfaces of both the valve bodies 32a and 32b.
A taper wedge 72 provided on the valve body 32a;
The tapered wedge 72 provided in 2b is positioned so as to face each other. The surface of each tapered wedge 72 is inclined so that the interval between the tapered wedges 72 facing each other increases toward the edge of the valve body.

Further, a bar-shaped member 74 and a roller 76 are used instead of the tapered block. One end of the rod-shaped member 74 is connected to the side cylinder, and the other end extends into the valve box through a hole in the side wall of the valve box. The two rollers 76 described above are fixed to the end of the rod-shaped member 74 placed in the valve box. When the rod-shaped member 74 is driven by the side cylinder and inserted between the valve bodies 32a and 32b, each roller 76 is designed such that each roller surface comes into contact with the inclined surface of the opposing tapered wedge 72 in parallel. ing.

Therefore, according to this modification, the rod-shaped member 7
4 is moved so that the leading end thereof is inserted between the valve bodies 32a and 32b, the roller surface of the roller 76 is moved to the respective tapered wedges 7 provided on the valve bodies 32a and 32b.
Abut each of the two slopes. When the rod-shaped member 74 is further inserted, the roller 76 pushes the tapered wedge 72 in a direction perpendicular to the main surfaces of the valve bodies 32a and 32b.
As a result, the gap between the valve bodies 32a and 32b expands,
Each of the valve bodies 32a and 32b moves toward the opening.

As described above, the same function as that of the previous example is realized by the modification shown in FIG.

[Second Embodiment] FIG. 8 and FIG.
It is a perspective view showing the composition of the gate valve of a 2nd embodiment. In the figure, some of the components, for example, the wall of the valve box 80 and one of the valve bodies 78b are cut off.
FIG. 8 shows a state where the gate valve is completely opened. FIG. 9 shows a state where the gate valve is completely closed.

FIGS. 10 and 11 are plan views showing the structure of the gate valve according to the second embodiment. In the figure, some of the components are cut away. In addition, illustration of some of the components, for example, one of the valve bodies 78b is omitted. FIG. 10 shows a state where the gate valve is completely opened. FIG. 11 shows a state in which the gate valve is completely closed.

FIGS. 12 and 13 are sectional views showing the structure of the gate valve according to the second embodiment. These figures show a state in which the gate valve is completely opened. The cross section shown in FIG. 12 is a cross section corresponding to the position of the line II in FIG. 10, and the cross section shown in FIG. 13 is a cross section corresponding to the position of the line JJ in FIG. FIG.
Also, a wall portion partly cut away by, and a valve body omitted in FIG. 10 are also illustrated.

FIGS. 14 and 15 are sectional views showing the structure of the gate valve according to the second embodiment. These figures show a state in which the gate valve is completely closed. The cross section shown in FIG. 14 is a cross section corresponding to the position of line KK in FIG. 11, and the cross section shown in FIG. 15 is a cross section corresponding to the position of line LL in FIG. FIG.
Also, a wall portion part of which is cut away, a valve body omitted in FIG. 11, and the like are also illustrated.

The gate valve of this embodiment includes two flat valve bodies 78a and 78b and a rectangular parallelepiped valve box 80. The two valve bodies 78a and 78b are housed inside the valve box 80. Further, two rectangular openings 80a and 80b are formed at positions facing each other on the wall constituting the valve box 80. Valve box 80
The inner wall surface around the openings 80a and 80b is used as a sealing surface. The gate valve has a drive mechanism for driving both the valve bodies 78a and 78b. With this driving mechanism, the valve bodies 78a and 7
8b is brought into contact with the wall surfaces around openings 80a and 80b, and as a result, openings 80a and 80b
Are configured to be sealed.

In this embodiment, the above-described drive mechanism connects the valve bodies 78a and 78b to the openings 80a and 80b.
b is moved along the wall surface formed. As shown in FIGS. 8 and 10, when the valve is open, both the valve bodies 78a and 78b are located on the right side of the drawings with respect to the openings 34a and 34b. And
As shown in FIGS. 9 and 11, in order to close the valve, both the valve bodies 78a and 78b are moved to positions facing the openings 80a and 80b.
In the process, both the valve bodies 78a and 78b are slid along the wall in which the openings 80a and 80b are formed, respectively.

This drive mechanism operates in a state where the valve bodies 78a and 78b face the openings 80a and 80b.
The valve bodies 78a and 78b are moved toward the openings 80a and 80b. That is, the valve body 78a is moved toward the wall of the valve box 80 in which the opening 80a is formed, and the valve body 78b is moved toward the wall of the valve box 80 in which the opening 80b is formed. As a result, the openings 80a and 80b are respectively connected to the valve bodies 78a and 78b.
b.

Note that both the valve bodies 78a and 78b are
They are engaged facing each other so as to be movable in the approaching direction or the separating direction. Specifically, the configuration is as follows.

A valve body frame 82 is interposed between the valve bodies 78a and 78b. This valve body frame 82
Is formed by connecting four rod-shaped members so as to form an annular square shape, and when the valve bodies 78a and 78b are placed in parallel, the longitudinal direction of each rod-shaped member is the same as that of the valve bodies 78a and 78b. It is arranged so as to be parallel to the main surface. The valve body frame 82 is connected to the valve bodies 78a and 78b via a link 84 and a connecting body 86, respectively. In this example, two connecting bodies 86 are fixed to two mutually parallel rod-shaped members constituting the valve body frame 82, respectively. Then, the connecting body 86 and the valve body 78
a, and between the connecting body 86 and the valve body 78b are connected by individual links 84, respectively. Link 84
Are rotatably connected to the valve bodies 78a and 78b and the valve body frame 82 by link pins 88, respectively. With such a configuration, the valve bodies 78a and 78b are separated from the valve body frame 82 with respect to the valve body frame 82 and the direction away from the valve body frame 82.
2 can be moved in the direction approaching.

Further, both the valve bodies 78a and 78b are
When the openings 80a and 80b are open, the valve bodies 78a and 78b are urged toward each other while maintaining a predetermined gap. The maintenance of the gap is realized by the connecting body 86 and the link 84 described above. As specific urging means, two tension springs 90 for connecting one end of the valve body 78a and one end of the valve body 78b are used.

For example, as shown in FIG. 12, spring posts 92a and 92b are provided on respective side walls of the valve bodies 78a and 78b.
b are fixedly provided. These spring posts 92
The ends of the tension springs 90 are connected to each of a and 92b.

Further, for example, as shown in FIG.
A groove is formed in a portion of each of 8a and 78b that comes into contact with the sealing surface of the valve box 80, and an O-ring 94 is fitted into this groove. O-ring 94 is several mm from the surface of the valve
Sticking out. This ensures the required sealing function.

The drive mechanism of this embodiment is not limited to the above-described slide drive. When the valve bodies 78a and 78b are located at positions facing the openings 80a and 80b, the drive mechanism between the valve bodies 78a and 78b Driving to expand the gap is performed. According to the operation of this drive mechanism, the valve element 7
8a and 78b can be moved toward openings 80a and 80b against the bias of tension spring 90.

Next, the structure of the above-described drive mechanism will be described. This drive mechanism mainly includes a slide rail 96.
, Valve body frame 82, taper wedge (taper member) 98, lift bar 100, tension roller (roller) 102, lift bar support rods 104 a and 104
b and the lift rail 106.

The slide rail 96 is provided inside the valve box 80. That is, the opening 8 inside the valve box 80
Two slide rails 96 are fixed in parallel to the wall on which Oa is formed so as to face the opening 80a. Similarly, the opening 80 inside the valve box 80
Two slide rails 96 are fixed in parallel to the wall on which b is formed so as to face the opening 80b. A slide rail 96 on the side of the opening 80a;
The slide rail 96 on the side of the opening 80b is positioned so as to face each other.

The valve body frame 82 is interposed in the gap between the valve bodies 78a and 78b as described above.
a and 78b. The valve frame 82 is supported by a slide rail 96 and is movable along the slide rail 96.

In this configuration example, the valve body frame 82 is connected to the slide rail 96 via a plurality of slide rollers 108.
Supported by The valve body frame 82 is arranged such that two of the four rod-shaped members constituting the valve body frame 82, on which the above-described connecting body 86 and link 84 are provided, are orthogonal to the slide rail 96. In addition, the slide roller 108 is pivotally supported by two of the four rod-shaped members constituting the valve body frame 82, which are not provided with the above-described connecting body 86 and link 84. Each slide roller 108 is designed to roll along a slide rail 96. For example, as shown in FIG. 9, among the rod-shaped members constituting the valve body frame 82, the slide rollers 1
A gear 110 is formed on one of the shafts 08 on which it is pivotally supported. This gear 110
It is engaged with a drive gear 112 installed in the valve box 80. The drive gear 112 is driven by a drive motor 114 placed outside the valve box 80.

Therefore, when the drive motor 114 is operated, the drive gear 112 is driven to rotate, and the rotational force is transmitted to the gear 110.
The valve body frame 82 is slid along the slide rails 96 by being converted into a force for linear movement of the valve body frame 82. Since the valve body frame 82 is connected to the valve bodies 78a and 78b, both the valve bodies 78a and 78b slide together with the valve body frame 82. Therefore, according to this configuration, the valve bodies 78a and 78b
Can be slid in a certain direction inside the valve box 80.

Next, the above-described tapered wedge 98 is a member that is provided on each of the facing wall surfaces of the valve bodies 78a and 78b and has a surface inclined in a certain direction with respect to these wall surfaces. In this configuration example, each of the valve bodies 78a and 78b is provided with nine tapered wedges 98, respectively. The tapered wedges 98 are arranged on the main surface of each of the valve bodies 78a and 78b in a three-by-three matrix. For example, as shown in FIGS. 13 to 15, each tapered wedge 98 has a tapered surface that is inclined downward in the drawing.

The above-described lift bar 100 is interposed in the gap between the valve bodies 78a and 78b,
Extend in a direction perpendicular to the direction of movement of the moving member, and are movable in this extending direction. In this configuration example, three lift bars 100 are arranged between the valve bodies 78a and 78b in parallel with each other. The longitudinal direction of these lift bars 100 is perpendicular to the direction in which the slide rail 96 extends. Each lift bar 100 is combined with the valve body frame 82 so as to be movable in the longitudinal direction. Specifically, each lift bar 100 is supported in a state where it is inserted into a hole formed in the valve body frame 82. Further, each lift bar 100 is disposed so as to face a tapered wedge 98 provided on each of the valve bodies 78a and 78b. The longitudinal direction of the lift bar 100 matches the inclination direction of the tapered surface of the tapered wedge 98.

Next, the above-mentioned tension roller 102 is a roller provided on the lift bar 100 and having a roller surface that comes into contact with the tapered surface of the tapered wedge 98. The tension roller 102 is pivotally supported by a roller support block 116 fixed to the lift bar 100. Stretch roller 1
02 are prepared in the same number as the tapered wedges 98, and each lift bar 1 is provided so as to face the tapered wedge 98, respectively.
00 is provided. The rotation axis of each tension roller 102 is
It is parallel to the direction in which the slide rail 96 extends.

Next, the above-described lift bar support rod 104a
Is a rod-shaped member connected to one end of each lift bar 100 and extending in the moving direction of the valve body frame 82. That is, each end of the three lift bars 100 is connected to the lift bar support bar 104a. The longitudinal direction of the lift bar support bar 104 a is made to coincide with the extending direction of the slide rail 96. Therefore, lift bar support rod 1
The longitudinal direction of 04a and the longitudinal direction of each lift bar 100 are perpendicular.

The other lift bar support bar 104b is connected to the end of each lift bar 100 opposite to the side to which the lift bar support bar 104a is connected. These lift bar support bars 104a and 104b are arranged in parallel with each other. For example, as shown in FIG. 13, the lift bar 1
A recess for engaging with the valve body frame 82 is formed on the surface opposite to the surface connected to 00.

Next, the lift rail 106 is engaged with the lift bar support rod 104a when the valve bodies 78a and 78b are at positions facing the openings 80a and 80b, and is movable in the direction in which the lift bar 100 extends. It is a member of. The lift rail 106 is located near the openings 80a and 80b in the valve box 80 and
And the wall of the valve box 80 parallel to the slide rail 96. The longitudinal direction of the lift rail 106 matches the direction in which the slide rail 96 extends. Also,
The lift rail 106 is connected to the cylinder 11 outside the valve box 80.
8 is connected via a rod-shaped member 120. When the cylinder 118 is operated, the bar-shaped member 120 moves in the longitudinal direction, so that the lift rail 106 can be linearly moved between the slide rail 96 and the above-described wall surface.

The cross section perpendicular to the longitudinal direction of the lift rail 106 is substantially C-shaped. for that reason,
When the valve body frame 82 moves toward the openings 80a and 80b, the lift bar support bar 104a is fitted to the lift rail 106. When the cylinder 118 is operated in this state, the lift rail 106
It moves in the direction away from 6. Accordingly, the lift bar support bar 104a moves in the same direction as the lift rail 106 while being held by the lift rail 106.
As a result, since the lift bar 100 slides in the longitudinal direction, the roller surface of the tension roller 102 provided on the lift bar 100 comes into contact with the slope of each tapered wedge 98 provided on the valve bodies 78a and 78b. When the lift bar 100 is further slid, the tension roller 102 pushes the tapered wedge 98 in a direction perpendicular to the main surfaces of the valve bodies 78a and 78b. As a result, the gap between the valve bodies 78a and 78b expands, and each valve body 78a
And 78b move toward openings 80a and 80b, respectively.

In the above-described configuration example, when the valve body frame 82 is slid along the slide rail 96 and the valve bodies 78a and 78b are opposed to the openings 80a and 80b of the valve box 80, the lift bar 100 is subsequently moved. Each drive source is controlled to move in a direction perpendicular to the slide rail 96. As a result, as described above, the valve 78
a and 78b define openings 80a and 80a, respectively.
b is sealed.

Next, the opening and closing operation of the gate valve of this embodiment will be described. First, the closing operation of the gate valve will be described. First, from a state where the valve shown in FIG. 8 is opened, the drive gear 112 is driven by the drive motor 114 to open the valve bodies 78a and 78b with the openings 80a and 80b.
Slide to the position facing b. Next, the lift rail 106 is driven by the cylinder 118 to move the lift bar 100, and the tension roller 102 is inserted between the tapered wedges 98. Then, the valve bodies 78a and 78
As a result, the gap between b is widened, and as a result, each of the valve bodies 78a and 78b is pressed against the sealing surface of the valve box 80, and the respective openings 80a and 80b are sealed. That is, the gate valve is in a closed state (see FIGS. 9 and 1).
1, FIGS. 14 and 15).

Next, the opening operation of the gate valve will be described. First, from the state in which the valve shown in FIG. 9 is closed, the lift rail 106 is driven by the cylinder 118 to move the lift bar 100, and the tension roller 102 between the tapered wedges 98 is pulled out. Then, the valve bodies 78a and 78b
Move in directions approaching each other by the action of the tension spring 90. As a result, the valve bodies 78a and 78b move away from the sealing surface of the valve box 80. Next, the drive gear 112 is driven by the drive motor 114 so that the valve bodies 78a and 78
b is slid in a direction away from the openings 80a and 80b. The drive gear 112 is driven until the openings 80a and 80b are completely opened. As a result, the gate valve is opened (FIG. 8, FIG. 1).
0, FIGS. 12 and 13).

As described above, according to the gate valve of this embodiment, two valve elements are provided in the valve box, and when the valves are closed, the two valve elements are simultaneously pushed and spread by the tension rollers. By stretching, it is possible to give a large force to the valve body on average. As a result, a stable seal can be realized regardless of the state of the chambers on the left and right sides of the valve box. Further, even when a large gate valve is required, the thickness of the valve box can be made smaller than before.

The gate valve of this embodiment is
Preferably, the lift bar 100 is installed such that the extending direction of the lift bar 100 is vertical. At this time, the slide rail 96 extends in the horizontal direction. When installed in this manner, the valve bodies 78a and 78b are supported by the slide rails 96, so that the valve bodies need only be moved in the horizontal direction when the valve is opened and closed. In such a configuration of the horizontal gate valve, it is not necessary to move the valve body in the vertical direction unlike the conventional vertical gate valve. Therefore, the load on the driving source is reduced.

The maintenance procedure of this horizontal gate valve is as follows. First, a special jig is docked beside the gate valve. Next, pull out the valve sideways,
Put on the special jig.

Therefore, it is not necessary to put the jig dedicated to the valve body under the narrow device as in the prior art, and the maintenance work can be performed safely. Further, since the valve body itself is supported by the slide rail, an accident such as accidental dropping of the valve body is eliminated.

In this embodiment, the valve body is provided with a tapered wedge, and a tension roller is inserted between the valve bodies. However, the structure is reversed to be the same as in the first embodiment. Is also good.

The gate valve of each of the embodiments described above is particularly effective for an in-line type liquid crystal injection device, but is not limited thereto and can be applied to all vacuum processing devices such as a semiconductor manufacturing device.

[0097]

According to the gate valve of the present invention, the two valve bodies are housed in the valve box, and two openings are formed at opposing positions of the wall constituting the valve box. A drive mechanism for driving both of the valve bodies is provided, and the drive mechanism causes the valve body to abut against a wall surface around the opening to seal each of the openings. I have.

According to this configuration, the openings between the chambers on the left and right sides of the valve box are each sealed with a separate valve body. However, stable sealing can be performed.

Also, even when a large gate valve is required, the thickness of the valve box can be made smaller than before.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a configuration of a gate valve according to a first embodiment.

FIG. 2 is a perspective view illustrating a configuration of a gate valve according to the first embodiment.

FIG. 3 is a side view showing the internal configuration of the gate valve.

FIG. 4 is a top view showing the configuration of the gate valve.

FIG. 5 is a diagram showing a cross-sectional configuration of an upper valve body guide.

FIG. 6 is a cross-sectional view showing a configuration near a side roller.

FIG. 7 is a diagram showing a main configuration of a modification of the gate valve.

FIG. 8 is a perspective view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 9 is a perspective view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 10 is a plan view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 11 is a plan view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 12 is a cross-sectional view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 13 is a cross-sectional view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 14 is a cross-sectional view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 15 is a cross-sectional view illustrating a configuration of a gate valve according to a second embodiment.

FIG. 16 is a cross-sectional view showing a configuration of a conventional gate valve.

FIG. 17 is a sectional view showing a configuration of a conventional gate valve.

[Explanation of symbols]

10, 34, 80: Valve box 10a, 10b, 34a, 34b, 80a, 80b: Opening 12, 32a, 32b, 78a, 78b: Valve 14, 66, 94: O-ring 16, 50a, 50b: Valve Back plate 18, 84: Link 20: Link bar 22, 62: Lift plate 24: Compression spring 26, 54, 100: Lift bar 28, 64: Vertical cylinder 30: Link guide 34c: Groove 36: Upper valve body guide 38: Lower Side valve body guides 40, 90: Tension springs 42, 46: Bearings 44, 48: Shafts 52a, 52b: Pins 56, 76: Roller 58: Tapered block 60: Coupling member 68: Side cylinder 70: Side rollers 72, 98: Taper wedges 74, 120: rod-shaped member 82: valve body frame 86: connecting body 88: link pin 92a 92b: spring post 96: slide rail 102: Brace rollers 104a, 104b: lift bar support bar 106: Lift Rail 108: Slide rollers 110: gear 112: driving gear 114: drive motor 116: roller support block 118: Cylinder

Continuation of the front page (72) Inventor Iori Kishi 5-81-1, Yotsuya, Fuchu-shi, Tokyo Inside Anelva Co., Ltd. (72) Inventor Satoru 5-2-1, Yotsuya, Fuchu-shi, Tokyo Anelva Co., Ltd. (72) Inventor Nobuhiko Ueno 5-8-1, Yotsuya, Fuchu-shi, Tokyo Inside Anelva Co., Ltd. (72) Inventor Hidehiko 5-de 8-1-1 Yotsuya, Fuchu-shi, Tokyo Anelva Co., Ltd. (72) Invention Person Takashi Yamada 1-114 Shinjuku, Shinjuku-ku, Tokyo Asahi Techne Aeon Co., Ltd. (72) Inventor Katsuhiko Sugita 4084-2 Tana, Sagamihara-shi, Kanagawa F-term in Mitsuko-Sitex Corporation 3H053 AA03 AA25 AA35 BA12 BC03 BD03 CA06 DA09 3H063 AA04 BB18 BB22 BB32 CC02 DB18 GG15 3H066 AA03 BA17 BA38

Claims (5)

[Claims] 1. Two valve bodies are housed inside a valve box, and two openings are formed at positions opposing each other on a wall constituting the valve box. A drive mechanism for driving, wherein the drive mechanism causes the valve body to abut against a wall surface around the opening to seal each of the openings. A gate valve characterized by the following. 2. The gate valve according to claim 1, wherein the drive mechanism moves the valve body along a wall surface on which the opening is formed, and the valve body is moved to the opening. A gate valve, wherein the valve body is moved toward the opening in an opposed state. 3. The gate valve according to claim 2, wherein both of the valve bodies are engaged in an opposed state, and are movable in a direction of approaching or separating from each other. In a state where the opening is open, the valve bodies are urged to approach each other while maintaining a predetermined gap between the valve bodies, and the driving mechanism is configured such that the valve body faces the opening. A gate valve for expanding a gap between the valve bodies. 4. The gate valve according to claim 3, wherein the driving mechanism is coupled to both of the valve elements, extends along a wall surface on which the opening is formed, and extends in the extending direction. A movable lift bar, a roller provided on each of the opposed wall surfaces of the valve body, and supported by an axis parallel to the wall surfaces and parallel to the extending direction of the lift bar; A tapered member having a tapered shape, which is inserted into and removed from a gap between the valve bodies when the valve body is at a position facing the opening, and a roller surface of the roller when inserted into the gap. And a taper member brought into contact with the gate valve. 5. The gate valve according to claim 3, wherein the drive mechanism is provided on both a slide rail provided inside the valve box and a gap between the valve bodies and the valve body. Coupled, supported by the slide rail, movable along the slide rail, and provided on each of the opposed wall surfaces of the valve body,
A taper member having a surface inclined in a certain direction with respect to the wall surface, and a taper member interposed in a gap between the valve bodies, extending in a direction perpendicular to a moving direction of the valve body frame, and A lift bar movably in the existing direction, a roller provided on the lift bar and having a roller surface abutting against a surface of the tapered member, connected to one end of the lift bar, and extending in a moving direction of the valve body frame. A gate, comprising: a support rod having a shape; and a lift rail which is engaged with the support rod when the valve body is at a position facing the opening, and is movable in an extending direction of the lift bar. valve.