TWM528296U - Latch mechanism and wafer cassette having the same - Google Patents

Description

Latch mechanism and wafer cassette having the same

The present invention relates to a wafer cassette, and more particularly to a latch mechanism and a wafer cassette having the same.

The existing wafer cassette comprises a box body, a door body covering the box body, and a latching mechanism disposed on the door body, and the latching mechanism is used for locking the door body to the box body. By rotating a latch of the latch mechanism, a latch member is slid and snapped into the slot of the casing, whereby the door body can be locked to the casing.

However, since the components in the conventional latching mechanism are likely to generate dust due to friction between each other during the operation, it is easy to cause contamination of the wafer placed in the casing; in addition, each component Moreover, a gap is formed due to factors such as tolerances in design or manufacturing and wear caused by use, and the latch member may not be completely and surely caught in the card slot during the locking operation. In addition to causing inconvenience in use, the operational reliability is further reduced.

Therefore, it is an object of the present invention to provide a latching mechanism that can reduce the friction generated by the latching member during sliding to reduce the dust generated by the friction and prevent the dust from contaminating the wafer in the wafer cassette.

Therefore, the latch mechanism of the present invention is disposed in a door body for locking the door body to a box body. The latch mechanism includes a top support member, a latch member, and a cam member.

The top support member is disposed in the door body, the latch member includes a plate body slidably coupled to the door body, and at least one contact portion, the plate body includes a rear side spaced apart from the front support member, and a top portion a plate portion, and a connecting plate portion opposite to the top plate portion, the contact portion is disposed on the rear side surface and adjacent to the top abutting plate portion, the contact portion is for contacting the top support member and can be the top portion The struts are forwardly supported, and one of the top struts and the contact portion is a roller and the other one is a protrusion. The protrusion has a slope for contacting the roller, and the cam member is rotatably pivoted The door member is coupled to the connecting plate portion, and the cam member is configured to drive the latch member to slide to a locking position in which the contact portion is forwardly supported by the top support member, so that the top abutting plate portion abuts On a front side edge of the casing.

The top support member is a roller and pivotally connected to the door body, and the latch member includes a plurality of contact portions disposed on the rear side surface and spaced apart from each other, each of the contact portions being the protrusion and protruding from the rear portion side.

The latching member further includes a first resilient arm disposed on the plate body, the first resilient arm being pressed against the door body for biasing the contact portions toward the top support member.

The plate body further includes a front side surface, the first elastic arm protrudes from the front side, and the first elastic arm includes a first pressing surface that is pressed against the door body.

The cam member is formed with at least one positioning groove, and the latching member further includes a positioning block protruding from the front side and located at the connecting plate portion, wherein the positioning block is configured to be engaged with the positioning groove to enable the cam The latch is positioned in the locked position.

The cam member includes a disk body spaced apart from the front of the connecting plate portion, and a pushing block protruding from a rear side of the disk body, the pushing block includes a spiral curved surface for pushing the positioning block, The spiral curved surface is formed with the positioning groove, and the pushing block is formed with at least one arcuate groove recessed by the spiral curved surface toward the disk body and communicating with the positioning groove, and the extending direction of the curved groove is The spiral surfaces extend in the same direction.

The latching member further includes a second resilient arm protruding from the rear side of the connecting plate portion, the second resilient arm for biasing the positioning block toward the cam member, the second resilient arm The second pressing surface that is pressed against the door body is included.

Another object of the present invention is to provide a wafer cassette with a latch mechanism, which can reduce the friction generated during the sliding process of the latch member, thereby reducing the dust generated by the friction and preventing the dust from contaminating the crystal in the wafer cassette. circle.

Thus, the present invention has a wafer cassette having a latch mechanism including a case and a door.

The box body is formed with at least one card slot, the box body includes a front side edge on the front side of the card slot, the door includes a door body and a latching mechanism, the door body forms an accommodating space, and at least one is connected to the accommodating space a through hole, the opening is in communication with the card slot, the latching mechanism is disposed in the receiving space and includes a top support member, a latch member, and a cam member disposed on the door And adjacent to the opening, the latching member comprises a plate body slidably coupled to the door body, and at least one contact portion, the plate body comprising a rear side spaced in front of the top support member, a wearing a top abutting plate portion disposed in the opening, and a connecting plate portion opposite to the abutting plate portion, the contact portion is disposed on the rear side and adjacent to the top abutting plate portion, the contact portion is for contacting the The top support member can be forwardly supported by the top support member, one of the top support members and the contact portion is a roller and the other of the contact portions is a convex block, and the convex block has a slope for contacting the roller The cam member is rotatably pivotally connected to the door body and connected to the connecting plate portion, and the cam member is used to drive the latch Sliding to the contact portion of the top support member is a forward support of a top locking position, so that the top plate contact portion through the slot and extending to the top of the front edge against the.

The door body comprises a front cover plate, the front cover plate comprises an elongated rib, the plate body further comprises a front side, the first elastic arm protrudes from the front side, and the first elastic arm comprises a pressing The first pressing surface of the elongated rib.

The door body comprises a pivoting unit, and the pivoting unit comprises a plurality of spaced apart pivoting pieces, each of the pivoting pieces forming a pivoting groove for pivoting the supporting piece.

The utility model has the advantages that the friction generated by the whole latch mechanism during the sliding process of the latch member can be reduced, so as to reduce the amount of dust generated by the friction, thereby preventing the dust from contaminating the wafer in the bearing space; and even if the latch member is even In the case that the cam member is not fully rotated, it can also be automatically reset to the unlocked position after leaving the locked position, or automatically reset to the locked position after leaving the unlocked position, thereby improving the convenience of use. And operational reliability.

Referring to FIGS. 1 and 2, an embodiment of a wafer cassette having a latch mechanism includes a case 10 and a door 20. The casing 10 is formed with a bearing space 11 and an opening 12 communicating with the front end of the carrying space 11 for receiving a plurality of wafers. The casing 10 includes a surrounding wall 13 defining an opening 12, and a shoulder 131 is formed around the inner wall surface of the wall 13. Two left and right spaced slots 132 are formed around the inner wall and the lower sides of the wall 13 and surround The wall 13 includes four front side edges 133 respectively located on the front side of the card slots 132, and each front side edge 133 is spaced apart in front of the shoulder 131.

Referring to Figures 2, 3 and 4, the door 20 of the present embodiment includes a door body 2 and two latching mechanisms 3. The door body 2 is assembled in the surrounding wall 13 of the casing 10 to close the opening 12. The door body 2 includes a shell member 21, a front cover 22, and a sealing member 23. The cover member 21 includes a back plate 211, a plurality of protrusions 212 protruding from the front side of the back plate 211, a peripheral wall 213 extending forwardly from the outer periphery of the back plate 211, and two pairs of pivotal portions disposed on the front side of the back plate 211. The unit 214, two bushings 215 disposed on the front side of the backboard 211, and a plurality of stopping protrusions 216 protruding from the front side of the backing plate 211. Two upper and lower spaced openings 217 are formed in each of the upper and lower sides of the peripheral wall 213, and each of the openings 217 is in communication with the corresponding card slot 132. The two pivoting units 214 of each pair are vertically spaced apart, and each of the pivoting units 214 is adjacent to the corresponding opening 217. Each of the pivoting units 214 includes a plurality of pivots protruding from the front side of the backboard 211 and spaced apart from each other. The tabs 218 each form a pivoting slot 219 with a notch facing forward. The two bushings 215 are spaced apart from each other, and each bushing 215 is located between the corresponding two pivoting units 214. A plurality of stop studs 216 surround the outer periphery of the two bushings 215, respectively.

The front cover 22 is coupled to the peripheral wall 213 of the case member 21 through the hook. The front cover 22 and the cover member 21 together form an accommodating space 24, and each of the openings 217 communicates with the accommodating space 24. The front cover 22 includes a plate portion 221 and two pairs of elongated ribs 222 protruding from the rear side of the plate portion 221 . The plate portion 221 is formed with two left and right spaced holes 223. The two elongate ribs 222 of each pair are spaced apart from each other and adjacent to the top end of the plate portion 221 and the bottom end of the plate portion 221, and the length extension direction of each elongate rib 222 extends along a longitudinal direction.

The sealing member 23 is made of, for example, a rubber material. The sealing member 23 has a ring shape and is sleeved on the outer periphery of the backing plate 211. The sealing member 23 is for abutting against the shoulder 131 of the casing 10.

Referring to FIGS. 3 , 4 , 5 , and 6 , the latch mechanism 3 is disposed in the accommodating space 24 of the door body 2 . The latch mechanism 3 includes a top support member 31, a latch member 32, and a cam member 34. In the present embodiment, each set of latch mechanisms 3 has two top stay members 31 and two latches. A member 32, and a cam member 34 are exemplified. The two top struts 31 of each pair are spaced apart from each other. The gussets 31 of the present embodiment are a roller, and the gussets 31 are rotatably pivotally connected to the pivoting slots 219 of the corresponding pivoting unit 214 and Adjacent to the corresponding opening 217. Each of the pivoting units 214 pivotally supports and supports the corresponding supporting members 31 by a plurality of spaced-apart pivoting pieces 218 to reduce the area of contact with the supporting members 31, thereby reducing the supporting members 31. The friction caused by the rotation.

The two latching members 32 of each pair are arranged upside down and oppositely disposed. Each latching member 32 includes a plate body 320, at least one contact portion 321, a first elastic arm 322, a positioning block 323, and a first Two elastic arms 324. The plate body 320 includes a sliding plate portion 325, a top abutting plate portion 326 formed at one end of the sliding plate portion 325, and a connecting plate portion formed at the opposite end of the sliding plate portion 325 opposite to the top abutting plate portion 326. 327. The sliding plate portion 325, the abutting plate portion 326 and the connecting plate portion 327 collectively define a front side 328 of the front cover 22 and a rear side 329 facing the back plate 211. The sliding plate portion 325 is formed with two elongated guiding grooves 330. Each of the elongated guiding grooves 330 extends through the front side surface 328 and the rear side surface 329. The length of each elongated guiding groove 330 extends along the parallel sliding plate portion 325. The long sides extend in the direction, and the elongated guide grooves 330 are used for the corresponding protrusions 212 to pass through. By engaging each of the elongated guide grooves 330 with the corresponding protrusions 212, the latch member 32 can slide relative to the case member 21 along the length extension direction of the elongated guide groove 330. The top abutting plate portion 326 extends through the opening 217 into the corresponding card slot 132 and abuts against the corresponding front side edge 133 (as shown in FIG. 2). The connecting plate portion 327 is formed with a recess 331 and a curved surface 332 adjacent to the recess 331.

In this embodiment, the plurality of contact portions 321 are disposed on the rear side surface 329 of the plate body 320 and are spaced apart from each other. In this embodiment, each of the contact portions 321 is protruded from the rear side surface 329 and adjacent to the top abutting plate. The bumps of the portion 326 have a slope 333 for contacting the corresponding top stay 31. The first elastic arm 322 is connected to the sliding plate portion 325 of the plate body 320 and protrudes from the front side surface 328. The first elastic arm 322 is inclined forward from the middle portion of the sliding plate portion 325 and obliquely toward the top plate portion 326. The first resilient arm 322 includes a first abutting surface 334 that abuts against the corresponding elongated rib 222 of the front cover 22.

The positioning block 323 protrudes from the front side 328 of the plate body 320 and is located on the connecting plate portion 327 adjacent to the end of the connecting plate portion 327. The second elastic arm 324 protrudes from the rear side 329 of the plate body 320 and is located on the connecting plate portion 327. The second elastic arm 324 extends rearward from the rear side 329 and away from the top abutting plate portion 326. The two elastic arms 324 include a second pressing surface 335 that is pressed against the back plate 211 of the shell member 21.

Each of the cam members 34 is rotatably pivotally connected to the door body 2 and includes a circular disk body 341, a sleeve 342 protruding from the rear side of the disk body 341, and two tops protruding from the rear side of the disk body 341. The push column 343 and the two push blocks 344 protruding from the rear side of the disk body 341. The disk body 341 is located at the rear side of the plate portion 221 of the front cover 22 and spaced apart in front of the connecting plate portion 327 corresponding to the two latch members 32. The disk body 341 is formed with a slot 345, the slot 345 and the front cover plate 22. Corresponding to the positional alignment of the perforations 223, the slot 345 has the same shape as the perforation 223, whereby a key can be inserted into the slot 345 via the through hole 223 to drive the cam member 34 to rotate. The disk body 341 includes a plurality of protrusions 346 disposed on the outer periphery, and the blocking protrusions 216 of the case member 21 are used to block the corresponding protrusions 346 to limit the rotation angle of the cam member 34. The sleeve 342 is rotatably sleeved on the corresponding bushing 215. The two push pins 343 are respectively connected to the two sides of the sleeve 342, and the push pins 343 are respectively inserted into the grooves 331 of the corresponding latch members 32. The push pins 343 are used to push the arc corresponding to the latch members 32. The surface 332 is configured to drive the latch member 32 to slide. The two pushing blocks 344 are located on the other side of the sleeve 342 and are respectively spaced apart from the sleeve 342. The connecting lines of the two pushing blocks 344 are perpendicular to the connecting positions of the two pushing columns 343. And each pushing block 344 is located between the connecting plate portions 327 of the two latch members 32. Each of the pushing blocks 344 includes a spiral curved surface 347 for pushing the positioning block 323 of the corresponding latching member 32. The spiral curved surface 347 is formed with at least one positioning groove 348 for engaging the positioning block 323 adjacent to the end. .

Each of the pushing blocks 344 is formed with at least one arcuate groove 349 which is recessed toward the disk body 341 by the spiral curved surface 341 and extends to the disk body 341. More specifically, in the present embodiment, each of the pushing blocks 344 is formed with a plurality of arcuate grooves 349 recessed toward the disk body 341 by the spiral curved surface 341 and extending to the disk body 341, and the plurality of curved grooves 349 are spaced apart from each other. Arranged and communicated with the positioning groove 348, each of the arcuate grooves 349 extends in the same direction as the spiral curved surface 347. By the design of the plurality of arcuate grooves 349, the area of contact between the pushing block 344 and the positioning block 323 can be reduced, thereby reducing the frictional force when the pushing block 344 pushes the positioning block 323. It should be noted that the number of the arcuate slots 349 may also be one, which is not limited to the number disclosed in this embodiment.

Referring to FIG. 5, FIG. 6, and FIG. 7, when the cam members 34 are in a first position as shown in FIG. 5, the two pushing posts 343 of the cam members 34 are respectively engaged with the two latch members 32. The recess 331 is configured to restrict the two latch members 32 to a release position, respectively. When the latching members 32 are in the unlocking position, the top abutting plate portion 326 is aligned with the corresponding card slot 132 but does not extend into the slot 132, and the inclined surface 333 of each contact portion 321 is spaced apart from the corresponding top support member 31. The positioning block 323 is spaced apart from the spiral curved surface 347 of the corresponding pushing block 344 by a distance, and the protrusions 212 of the shell member 21 are located at one end of the corresponding elongated guiding groove 330.

Referring to Figures 8, 9, and 10, when the door body 2 (shown in Figure 2) is to be locked to the casing 10, the cam members 34 are rotated by a key in a first rotational direction R1. During the rotation of the cam members 34 in the first rotational direction R1, the two push posts 343 are first moved away from the recesses 331 of the two latch members 32, respectively, and then the two push posts 343 push the two latch members respectively. The curved surface 332 of the 32 is slid to urge the two latch members 32 to slide along a first sliding direction D1 and a second sliding direction D2 opposite to the first sliding direction D1.

In the process of locking the door body 2 (shown in FIG. 2) to the casing 10, the two latching members 32 are slid in the first sliding direction D1 and the second sliding direction D2, respectively. The same, therefore, only the latch 32 that slides in the first sliding direction D1 to the locked position will be described below.

During the sliding of the latching member 32 in the first sliding direction D1, the inclined surface 333 of each contact portion 321 is subjected to pressure when it contacts the top strut member 31, and the pressure applied to the inclined surface 333 by the top strut member 31 is forward. The component force causes the latch member 32 to gradually tilt forward toward the end of the top abutting plate portion 326. While the latch member 32 is inclined forwardly adjacent to the end of the top abutting plate portion 326, the first resilient arm 322 is blocked and pressed by the elongated rib 222 such that the first resilient arm 322 faces the sliding plate portion 325. The direction is bent and deformed to accumulate the return spring force. On the other hand, when the cam member 34 is rotated in a first rotation direction R1, the pushing block 344 is also moved to move, and the positioning block 323 is caused by the bottom end of the spiral curved surface 347 of the pushing block 344 along the spiral curved surface 347. And sliding toward the top end of the spiral curved surface 347. When the positioning block 323 slides from the bottom end of the spiral curved surface 347 and gradually approaches the top end of the spiral curved surface 347, the rearward component force of the spiral curved surface 347 applied to the positioning block 323 causes the connecting plate portion 327 to gradually tilt backward, and the first The two elastic arms 324 are blocked and pressed by the back plate 211, thereby causing the second elastic arms 324 to be bent and deformed toward the connecting plate portion 327 and accumulating the return elastic force.

When the cam members 34 are rotated to a second position as shown in FIG. 8, the top abutting plate portion 326 extends into the corresponding slot 132 of the casing 10 and abuts against the corresponding front side edge 133, and the latching member 32 is positioned. The block 323 is engaged in the positioning groove 348 of the pushing block 344, and the protrusions 212 of the case member 21 are located at the other end of the corresponding elongated channel 330. The positioning block 323 is engaged in the positioning groove 348, and the inclined surface 333 of each contact portion 321 abuts against the top support member 31, so that the latch member 32 can be stably positioned at an inclination as shown in FIG. The locking position, whereby the door body 2 can be locked to the casing 10. Since the first elastic arm 322 biases the contact portion 321 toward the top support member 31 when the latch member 32 is in the locked position, the elastic force transmitted from the first elastic arm 322 to the top support member 31 through the contact portion 321 is forced. The sealing member 23 is tightly pressed against the shoulder 131 of the casing 10, and the reaction force of the supporting member 31 against the contact portion 321 forces the top abutting portion 326 to closely abut against the front side edge 133, whereby The door body 2 can be stably locked to the casing 10, and a good airtight effect can be achieved between the door body 2 and the casing 10.

When the locked state between the door body 2 and the casing 10 is to be released, the cam members 34 are rotated by the key in a second rotation direction R2 opposite to the first rotation direction R1. When the positioning groove 348 of the pushing block 344 is moved away from the positioning block 323, the thrust caused by the biasing of the connecting plate portion 327 and the positioning block 323 by the return elastic force of the second elastic arm 324, the connecting plate portion 327 Will gradually tilt forward and the positioning block 323 will slide against the helical curved surface 347 of the pushing block 344, thereby driving the cam member 34 to rotate in the second rotational direction R2, thereby causing the cam member 34 to continue even if the user does not continue It can also be automatically reset to the first position even if the output is rotated. On the other hand, the thrust caused by the biasing of the sliding plate portion 325 and the contact portion 321 by the elastic force of the first elastic arm 322 is restored, and the inclined surface 333 of the contact portion 321 slides against the top member 31, so that the latch is latched. One end of the abutting plate portion 326 of the member 32 is gradually inclined rearward, whereby the latch member 32 can be automatically slid and returned to the unlocking position in the second sliding direction D2 to move the top abutting plate portion 326 away from the front side edge 133. And the card slot 132. At this time, the door 20 (shown in FIG. 2) can be detached from the casing 10 so as to place the wafer in the bearing space 11 (shown in FIG. 2) of the casing 10 or the crystal in the bearing space 11. Take out the circle.

In particular, since the top support member 31 is a roller pivotally connected to the pivoting piece 218, the inclined surface 333 of the contact portion 321 simultaneously drives the top support member 31 to rotate along the top support member 31, thereby enabling Reduce the friction between the two. Furthermore, the latch member 32 can reduce the contact area between the contact portion 321 and the top support member 31 by the contact of the inclined surface 333 of the plurality of spaced-apart contact portions 321 with the top support member 31. On the other hand, during the sliding process of the latching member 32, the first pressing surface 334 of the first elastic arm 322 slides along the elongated rib 222, and the front cover 22 is formed by the elongated rib 222 and the first pressing surface. The contact of 334 can reduce the area in contact with the first abutting surface 334, whereby the friction generated when the first elastic arm 322 moves can be reduced. By the foregoing design, the friction between the contact portion 321 and the top support member 31 and between the first elastic arm 322 and the front cover plate 22 during the sliding process of the latch member 32 can be greatly reduced, thereby effectively reducing friction. The dust, in turn, prevents the dust from contaminating the wafer in the carrying space 11.

In other embodiments, the number of the contact portions 321 may also be one, which is not limited to the number disclosed in the embodiment. Again. The contact portion 321 can also be a roller pivotally connected to the plate body 320, and the top support member 31 can be a beveled bump, thereby achieving the same effect of reducing friction.

In summary, the latch mechanism 3 of the wafer cassette 100 of the present embodiment can be reduced by the matching of the contact portion 321 with the top support member 31 and the design of the first elastic arm 322 and the elongated rib 222. The friction during the sliding of the latch member 32 reduces the dust generated by the friction, thereby preventing the dust from contaminating the wafer in the bearing space 11. Moreover, the first elastic arm 322, the top support member 31 and the inclined surface 333 of the contact portion 321 cooperate with each other, and the second elastic arm 324, the positioning block 323 and the spiral curved surface 347 of the pushing block 344 cooperate with each other. It is also possible to enable the latch member 32 to automatically reset to the unlocked position after leaving the locked position even if the cam member 34 does not rotate completely, for example, if the user does not continue to output the rotating cam member 34, or It automatically resets to the locked position after leaving the release position, thus not only improving the convenience of use, but also improving the operational reliability. Therefore, the purpose of this new type can be achieved.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

100‧‧‧wafer box
10‧‧‧Box
11‧‧‧ Carrying space
12‧‧‧ openings
13‧‧‧ Around the wall
131‧‧‧ shoulder
132‧‧‧ card slot
133‧‧‧ front edge
20‧‧‧
2‧‧‧
21‧‧‧Shell
211‧‧‧ Backboard
212‧‧‧Bump
213‧‧‧The wall
214‧‧‧ pivot unit
215‧‧‧ Bushing
216‧‧‧Blocking studs
217‧‧‧ openings
218‧‧‧ pivoting piece
219‧‧‧ pivot slot
22‧‧‧ front cover
221‧‧‧ Board Department
222‧‧‧Long ribs
223‧‧‧Perforation
23‧‧‧Seal
24‧‧‧ accommodating space
3‧‧‧Latch mechanism
31‧‧‧Top support
32‧‧‧Latches
320‧‧‧ board
321‧‧‧Contacts
322‧‧‧First elastic arm
323‧‧‧ positioning block
324‧‧‧Second elastic arm
325‧‧‧Sliding plate section
326‧‧‧Top board
327‧‧‧Connecting plate
328‧‧‧ front side
329‧‧‧ rear side
330‧‧‧Long guide channel
331‧‧‧ Groove
332‧‧‧ curved surface
333‧‧‧Bevel
334‧‧‧First pressure surface
335‧‧‧second pressure surface
34‧‧‧ cam parts
341‧‧‧ dish
342‧‧‧ sleeve
343‧‧‧Pushing column
344‧‧‧Top push block
345‧‧‧ slots
346‧‧‧Protruding
347‧‧‧Spiral surface
348‧‧‧ positioning groove
349‧‧‧ arc slot
R1‧‧‧first direction of rotation
R2‧‧‧second direction of rotation
D1‧‧‧First sliding direction
D2‧‧‧second sliding direction

Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: Figure 1 is a perspective view of an embodiment of the present invention having a latch mechanism, the door being assembled to the housing And closing the opening of the box; FIG. 2 is an exploded perspective view of an embodiment of the wafer cassette with the latch mechanism, illustrating the assembly relationship between the door and the box; FIG. 3 is a novel latching mechanism of the present invention. An exploded perspective view of a door of an embodiment of the wafer cassette illustrating the assembly relationship between the door body and the latch mechanism; FIG. 4 is a partial perspective exploded view of the door of an embodiment of the present invention having a latch mechanism Figure 5 is a fragmentary partial front elevational view of an embodiment of the present invention having a latch mechanism, illustrating the cam member in a first position and the latch member in a release position; Figure 6 is a An incomplete partial rear view of the door of an embodiment of the wafer cassette of the latch mechanism, indicating that the cam member is in the first position and the latch member is in the unlocked position; FIG. 7 is a wafer having the latch mechanism of the present invention; Incomplete partial section of an embodiment of the cartridge The cam member is in the first position and the latch member is in the unlocked position; FIG. 8 is an incomplete partial front view of an embodiment of the present invention having a latch mechanism, illustrating the cam member in the second position Position, the latch member is in the locked position; FIG. 9 is a fragmentary partial rear view of the door of an embodiment of the present invention having a latch mechanism, illustrating the cam member in the second position, the latch member being located Locking position; and Figure 10 is a fragmentary partial cross-sectional view of an embodiment of the present invention having a latch mechanism, illustrating the cam member in the second position and the latch member in the locked position.

2‧‧‧

21‧‧‧Shell

211‧‧‧ Backboard

212‧‧‧Bump

213‧‧‧The wall

214‧‧‧ pivot unit

215‧‧‧ Bushing

216‧‧‧Blocking studs

217‧‧‧ openings

218‧‧‧ pivoting piece

219‧‧‧ pivot slot

22‧‧‧ front cover

221‧‧‧ Board Department

223‧‧‧Perforation

23‧‧‧Seal

24‧‧‧ accommodating space

3‧‧‧Latch mechanism

31‧‧‧Top support

32‧‧‧Latches

320‧‧‧ board

322‧‧‧First elastic arm

323‧‧‧ positioning block

324‧‧‧Second elastic arm

325‧‧‧Sliding plate section

326‧‧‧Top board

327‧‧‧Connecting plate

328‧‧‧ front side

330‧‧‧Long guide channel

331‧‧‧ Groove

334‧‧‧First pressure surface

34‧‧‧ cam parts

341‧‧‧ dish

345‧‧‧ slots

346‧‧‧Protruding

Claims (17)

A latching mechanism is disposed in a door body for locking the door body to a box body. The latching mechanism comprises: a top support member disposed in the door body, a latch member, the latch member including a latching member a plate slidably coupled to the door body, and at least one contact portion, the plate body including a rear side surface spaced apart in front of the top support member, a top abutting plate portion, and a top opposite plate portion a connecting portion disposed on the rear side and adjacent to the top abutting plate portion, the contact portion is for contacting the top support member and can be forwardly supported by the top support member, the top support member is in contact with the contact portion One of the parts is a roller and the other is a bump, the protrusion has a slope for contacting the roller, and a cam member is rotatably pivotally connected to the door and connected to the connecting plate The cam member is configured to drive the latch member to slide to a locking position in which the contact portion is forwardly supported by the top support member such that the top abutting plate portion abuts against a front side edge of the box body. The latching mechanism of claim 1, wherein the top support member is the roller and pivotally connected to the door body, the latch member includes a plurality of contact portions disposed on the rear side and spaced apart from each other, each The contact portion is the protrusion and protrudes from the rear side surface. The latching mechanism of claim 2, wherein the latching member further comprises a first resilient arm disposed on the plate body, the first resilient arm being pressed against the door body for facing the contact portion The top support is biased in the direction. The latching mechanism of claim 3, wherein the plate body further comprises a front side, the first elastic arm protruding from the front side, the first elastic arm comprising a first pressing against the door body Resist the surface. The latching mechanism of claim 4, wherein the cam member is formed with at least one positioning groove, the latching member further comprising a positioning block protruding from the front side and located at the connecting plate portion, the positioning The block is configured to be latched to the positioning groove to position the latch in the locked position. The latching mechanism of claim 5, wherein the cam member comprises a disk body spaced apart in front of the connecting plate portion, and a pushing block protruding from a rear side of the disk body, the pushing block comprising a a spiral curved surface for pushing the positioning block, the spiral curved surface is formed with the positioning groove, and the pushing block is formed with at least one concave surface which is recessed toward the disk body by the spiral curved surface and communicates with the positioning groove An arcuate groove extending in the same direction as the spiral curved surface. The latching mechanism of claim 6, wherein the latching member further comprises a second resilient arm protruding from the rear side and located at the connecting plate portion, wherein the second resilient arm is used for the positioning block And biased toward the cam member, the second resilient arm includes a second pressing surface that is pressed against the door body. The latching mechanism of claim 1, wherein the latching member further comprises a first resilient arm disposed on the plate body, the first resilient arm pressing against the door body for facing the contact portion The top support is biased in the direction. A wafer cassette having a latching mechanism, comprising: a box body formed with at least one card slot, the box body comprising a front side edge on a front side of the card slot, and a door comprising: a door body to form an accommodation space And at least one opening communicating with the accommodating space, the opening is in communication with the card slot, and at least one latching mechanism is disposed in the accommodating space, and the latching mechanism includes at least one struts At least one latch member and a cam member disposed on the door body adjacent to the opening, the latch member including a plate body slidably coupled to the door body, and at least one contact The plate body includes a rear side surface spaced apart from the front support member, a top abutting plate portion disposed in the opening, and a connecting plate portion opposite to the top abutting plate portion, the contact portion is disposed The contact portion is configured to contact the top support member and is forwardly supported by the top support member on the rear side surface and adjacent to the top abutting plate portion, wherein one of the top support member and the contact portion is a roller The other one is a bump, and the bump has a connection Touching the inclined surface of the roller, the cam member is rotatably pivotally connected to the door body and connected to the connecting plate portion, the cam member is configured to drive the latch member to slide to the contact portion being supported by the top support member a locking position such that the top abutting plate portion penetrates into the card slot and abuts against the front side edge. The wafer cassette with a latching mechanism according to claim 9, wherein the top support member is the roller and pivotally connected to the door body, and the latch member includes a plurality of the rear side surfaces disposed on the rear side and spaced apart from each other. The contact portion is each of the contact portions and protrudes from the rear side surface. The wafer cassette with a latching mechanism according to claim 10, wherein the latching member further comprises a first elastic arm disposed on the plate body, the first elastic arm pressing against the door body for The contacts are biased toward the top support. The wafer cassette with a latching mechanism according to claim 11, wherein the door body comprises a front cover, the front cover comprises an elongated rib, the plate further comprises a front side, the first elasticity The arm protrudes from the front side, and the first elastic arm includes a first pressing surface that is pressed against the elongated rib. The wafer cassette with a latching mechanism according to claim 10, wherein the door body comprises a pivoting unit, the pivoting unit comprises a plurality of spaced apart pivoting pieces, each of the pivoting pieces forming a The pivoting groove of the top support is pivoted. The wafer cassette with a latch mechanism according to claim 12, wherein the cam member forms at least one positioning groove, and the latch member further includes a positioning card protruding from the front side and located at the connecting plate portion. And a positioning block for clamping the positioning groove to position the latch in the locking position. The wafer cassette having a latching mechanism according to claim 14, wherein the cam member comprises a disk body spaced apart in front of the connecting plate portion, and a pushing block protruding from a rear side of the disk body, The pushing block includes a spiral curved surface for pushing the positioning block, the spiral curved surface is formed with the positioning groove, and the pushing block is formed with at least one recessed by the spiral curved surface toward the disc body and is positioned with the positioning An arcuate groove communicating with the groove, the arc groove extending in the same direction as the spiral curved surface. The wafer cassette with a latching mechanism according to claim 15, wherein the door body further comprises a backing plate, the latching member further comprising a second elasticity protruding from the rear side portion and located at the connecting plate portion. The second elastic arm is configured to bias the positioning block toward the cam member, and the second elastic arm includes a second pressing surface that is pressed against the back plate. The wafer cassette with a latching mechanism according to claim 9, wherein the latching member further comprises a first elastic arm disposed on the plate body, the first elastic arm pressing against the door body for The contacts are biased toward the top support.