TWI834526B - Container door and substrate container having the same - Google Patents
Container door and substrate container having the same Download PDFInfo
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- TWI834526B TWI834526B TW112110058A TW112110058A TWI834526B TW I834526 B TWI834526 B TW I834526B TW 112110058 A TW112110058 A TW 112110058A TW 112110058 A TW112110058 A TW 112110058A TW I834526 B TWI834526 B TW I834526B
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- gasket
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- 239000000758 substrate Substances 0.000 title claims abstract description 36
- 239000002184 metal Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000007812 deficiency Effects 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
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Abstract
Description
本發明係有關於一種收納容器有關,尤指一種容器門板及具有該容器門板之基板容器。The present invention relates to a storage container, and in particular, to a container door panel and a base container having the container door panel.
按,在半導體或相關的產業製程中,往往需要將如晶圓晶片、或玻璃板等基材於各製程加工完成後,集中置放於容器內而運載至下一個製程等。其中所述容器往往稱之為晶圓框架匣(Frame Cassette)或晶舟彈匣(Boat Magzine)等,主要係於容器前端形成一開口,以供欲收納的基板由開口置入後,於容器內以垂直方向作間隔排列而收納。According to reports, in semiconductor or related industrial processes, it is often necessary to centrally place substrates such as wafers or glass plates in containers and transport them to the next process after each process is completed. The container is often called a wafer frame cassette or a boat magazine. It mainly forms an opening at the front end of the container so that the substrate to be accommodated is placed through the opening and placed in the container. They are arranged at intervals in the vertical direction for storage.
惟,為了避免上述容器在運送的過程中,因不慎撞擊或各種因素而造成基板掉落等意外事件,通常會將容器的開口封閉、或透過其它複雜的方式上鎖,以避免前述意外發生。但由於現今自動化及簡化人工作業等趨勢,過於繁雜的設計將難以於自動化中重現、或是人為操作上也較為不便,故有待加以改良及簡化其上鎖設計。However, in order to avoid accidents such as the substrate falling due to accidental impact or various factors during the transportation of the above-mentioned containers, the opening of the container is usually closed or locked in other complicated ways to avoid the above-mentioned accidents. . However, due to current trends in automation and simplification of manual work, overly complex designs will be difficult to reproduce in automation, or will be inconvenient for manual operation, so the locking design needs to be improved and simplified.
有鑑於此,本發明人係為改善並解決上述之缺失,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。In view of this, in order to improve and solve the above-mentioned deficiencies, the inventor of the present invention devoted himself to research and combined with the application of academic theory, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned deficiencies.
本發明之主要目的,在於可提供一種容器門板及具有該容器門板之基板容器,其係增加容器門板與其旋鈕開關間的耐磨耗及使用壽命等功效,並有助於加強與基板容器配合使用的結構強度。The main purpose of the present invention is to provide a container door panel and a substrate container with the container door panel, which can increase the wear resistance and service life between the container door panel and its knob switch, and help to strengthen the use with the substrate container. structural strength.
為了達成上述之目的,本發明係提供一種容器門板,包括一門體、與門體相互蓋合的一門蓋、以及設於門體與門蓋之間的至少一旋鈕開關,門體內面具有至少一樞鈕部、以及位於門體周緣的通孔,且門體於樞鈕部上更設有一定位環,門蓋設有至少一插孔,旋鈕開關包含一旋鈕、以及分別配置於旋鈕二相對方向的卡掣件,旋鈕上設有對應插孔的一嵌孔、以及二圍繞嵌孔的弧狀伸縮槽,而二卡掣件一端皆具有一分別於二伸縮槽內作移動的聯動部,並於二卡掣件另一端上設有卡掣部;其中,定位環具有一外徑較大的外環部、以及一外徑較小並由外環部一側突出的內環部,於內環部上設有複數凹凸結構,且樞鈕部包覆內環部,而外環部則外露於樞鈕部並與旋鈕作樞設。In order to achieve the above object, the present invention provides a container door panel, which includes a door body, a door cover that is mutually covered with the door body, and at least one knob switch located between the door body and the door cover. There is at least one knob switch inside the door body. The hinge part and the through hole located on the periphery of the door body, and the door body is further provided with a positioning ring on the hinge part, the door cover is provided with at least one socket, the rotary switch includes a knob, and clips respectively arranged in two opposite directions of the knob. The knob is provided with an embedded hole corresponding to the socket and two arc-shaped telescopic grooves surrounding the embedded hole, and one end of the two latch parts has a linkage part that moves in the two telescopic grooves respectively, and is provided on the two telescopic grooves. The other end of the latch member is provided with a latch portion; wherein, the positioning ring has an outer ring portion with a larger outer diameter, and an inner ring portion with a smaller outer diameter that protrudes from one side of the outer ring portion. There are multiple concave and convex structures on it, and the hinge part covers the inner ring part, while the outer ring part is exposed on the hinge part and is pivoted with the knob.
為了達成上述之目的,本發明係提供一種具有該容器門板之基板容器,包括一容器本體、以及一設於容器本體上的容器門板,容器本體內呈中空狀,並具有一開口以連通其內部,且容器本體內設有一豎立的立桿、以及複數沿著立桿的長度方向水平延伸而出的支撐桿,立桿被固定於容器本體內的後側中段處,而各支撐桿則朝向開口處延伸,並於容器本體內的二側處分別設有複數隔緣;容器門板包括一門體、與門體相互蓋合的一門蓋、以及設於門體與門蓋之間的至少一旋鈕開關,門體內面具有至少一樞鈕部、以及位於門體周緣的通孔,且門體於樞鈕部上更設有一定位環,門蓋設有至少一插孔,旋鈕開關包含一旋鈕、以及分別配置於旋鈕二相對方向的卡掣件,旋鈕上設有對應插孔的一嵌孔、以及二圍繞嵌孔的弧狀伸縮槽,而二卡掣件一端皆具有一分別於二伸縮槽內作移動的聯動部,並於二卡掣件另一端上設有卡掣部;其中,定位環具有一外徑較大的外環部、以及一外徑較小並由外環部一側突出的內環部,於內環部上設有複數凹凸結構,且樞鈕部包覆內環部,而外環部則外露於樞鈕部並與旋鈕作樞設。In order to achieve the above object, the present invention provides a substrate container with the container door panel, which includes a container body and a container door panel provided on the container body. The container body is hollow inside and has an opening to communicate with its interior. , and the container body is provided with an upright vertical pole and a plurality of support poles extending horizontally along the length of the pole. The vertical pole is fixed at the rear middle section of the container body, and each support pole faces the opening. Extending from 1 to 2, a plurality of partitions are respectively provided on both sides of the container body; the container door panel includes a door body, a door cover that is mutually covered with the door body, and at least one knob switch located between the door body and the door cover. The door body has at least one hinge part inside and a through hole located on the periphery of the door body. The door body is further provided with a positioning ring on the hinge part. The door cover is provided with at least one socket. The rotary switch includes a knob and a separately configured There are two latch parts in opposite directions of the knob. The knob is provided with an insert hole corresponding to the socket and two arc-shaped telescopic grooves surrounding the insert hole. The two latch parts have one end that moves in the two telescopic grooves respectively. The linkage part is provided with a catch part on the other end of the two catch parts; wherein, the positioning ring has an outer ring part with a larger outer diameter, and an inner ring part with a smaller outer diameter and protrudes from one side of the outer ring part. The ring portion is provided with a plurality of concave and convex structures on the inner ring portion, and the hinge portion covers the inner ring portion, while the outer ring portion is exposed at the hinge portion and is pivoted with the knob.
為了使 貴審查委員能更進一步瞭解本發明之特徵及技術內容,請參閱以下有關本發明之詳細說明與附圖,然而所附圖式僅提供參考與說明用,並非用來對本發明加以限制者。In order to enable the examining committee to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the attached drawings are only for reference and illustration and are not intended to limit the present invention. .
請參閱圖1、圖2及圖3,係分別為本發明基板容器之立體圖、另一視角之立體圖、以及基板容器與容器門板之立體分解圖。本發明係提供一種容器門板及具有該容器門板之基板容器,該基板容器包括一容器本體1、以及一蓋設於該容器本體1開口處的容器門板2;其中:Please refer to Figures 1, 2 and 3, which are respectively a perspective view of the substrate container of the present invention, a perspective view from another perspective, and an exploded perspective view of the substrate container and the container door panel. The invention provides a container door panel and a substrate container having the container door panel. The substrate container includes a container body 1 and a container door panel 2 covering the opening of the container body 1; wherein:
該容器本體1係可用於供一或複數如應用於半導體產業之基材3作容置或收納,以便於集中後一併作搬運或運載至下一個製程等;而所述基材3可為如晶圓、晶片或玻璃板等呈片狀的半導體材料,並以間隔疊置的方式容置於該容器本體1內。請一併參閱圖4所示,該容器本體1內呈中空狀,並具有一開口10以連通其內部,於近該開口10處上可突設有一卡緣11,以供上述容器門板2得以置於該卡緣11內並予以卡掣於該卡緣11上。而該容器本體1內則設有一豎立的立桿12、以及複數沿著該立桿12的長度方向水平延伸而出的支撐桿120,該立桿12被固定於容器本體1內的後側中段處,而各支撐桿120則朝向該開口10處延伸,並於該容器本體1內的二側處分別設有複數隔緣13,且該等隔緣13的配置係分別對應各支撐桿120,藉以即可如圖3所示,供所述基材3以間隔疊置的方式,收納並容置於該容器本體1內部。The container body 1 can be used to house or store one or a plurality of substrates 3 such as those used in the semiconductor industry, so that they can be collected and transported together or carried to the next process, etc.; and the substrate 3 can be Semiconductor materials in the form of sheets, such as wafers, wafers or glass plates, are placed in the container body 1 in a spaced and stacked manner. Please refer to Figure 4 as well. The container body 1 is hollow inside and has an opening 10 to communicate with the inside. A clamping edge 11 can be protrudingly provided near the opening 10 to allow the container door panel 2 to pass through. It is placed in the card edge 11 and locked on the card edge 11 . The container body 1 is provided with an upright vertical pole 12 and a plurality of support poles 120 extending horizontally along the length direction of the vertical pole 12. The vertical pole 12 is fixed at the rear middle section of the container body 1. , and each support rod 120 extends toward the opening 10, and is provided with a plurality of partitions 13 on both sides of the container body 1, and the configuration of the partitions 13 corresponds to each support rod 120, Thereby, as shown in FIG. 3 , the base materials 3 can be stored and accommodated inside the container body 1 in a stacked manner.
再請一併參閱圖1至圖3所示,上容器本體1外係可進一步設有一框座4,該框座4包含一設於該容器本體1底部的底框40、由該底框40向上延伸而分別位於該容器本體1二側外的複數豎桿41、以及位於該容器本體1頂面且分別連接於各豎桿41間的複數橫桿42,且各豎桿41超出該容器本體1側面的高度而分別於該容器本體1二側設有一提把43,如此,一方面可補強該容器本體1的結構強度,另一方面可以透過該框座4增設所述提把43而便搬運該容器本體1。此外,各豎桿41間亦可進一步增設一或複數第一斜桿410,而各橫桿42間亦可進一步增設一或複數第二斜桿420,以增加各豎桿41與各橫桿42間的結構強度。Please refer to Figures 1 to 3 together. The upper container body 1 can be further provided with a frame base 4 on the outside. The frame base 4 includes a bottom frame 40 located at the bottom of the container body 1. The bottom frame 40 A plurality of vertical rods 41 extending upward and located outside the two sides of the container body 1, and a plurality of horizontal rods 42 located on the top surface of the container body 1 and respectively connected between the vertical rods 41, and each vertical rod 41 exceeds the container body. 1 side height, a handle 43 is provided on both sides of the container body 1. In this way, on the one hand, the structural strength of the container body 1 can be strengthened, and on the other hand, the handles 43 can be added through the frame base 4 for convenience. The container body 1 is transported. In addition, one or more first inclined bars 410 can be further added between each vertical bar 41, and one or more second inclined bars 420 can be further added between each horizontal bar 42 to increase the number of each vertical bar 41 and each horizontal bar 42. the structural strength between them.
如圖5所示,上述容器門板2係包含一門體20、以及一與該門體20相互蓋合的門蓋21,並於該容器門板2內設有至少一旋鈕開關22,所述旋鈕開關22即設於該門體20與門蓋21之間。其中,所述旋鈕開關22係包含一旋鈕220、以及分別配置於該旋鈕二相對方向的卡掣件221,該旋鈕220上係設有一嵌孔220a、以及二圍繞該嵌孔220a的弧狀伸縮槽220b,而該二卡掣件221一端皆具有一分別於二伸縮槽220b內作移動的聯動部221a,以供旋鈕220被扭轉時,可透過伸縮槽220b帶動聯動部221a而使卡掣件221朝其對應方向作伸縮,並於該二卡掣件221另一端上設有卡掣部221b,從而於卡掣件221伸出時(即如圖10所示),能透過卡掣部221b突出於容器門板2外而卡扣於上述容器本體1的卡緣11上,以供容器門板2得以被固定於容器本體1的開口10處(即如圖1所示),達到防塵及防止收容的基板3掉出之目的。As shown in Figure 5, the container door panel 2 includes a door body 20 and a door cover 21 that covers the door body 20, and is provided with at least one knob switch 22 in the container door panel 2. The knob switch 22 is disposed between the door body 20 and the door cover 21 . Among them, the rotary switch 22 includes a knob 220 and detents 221 respectively arranged in two opposite directions of the knob. The knob 220 is provided with an embedded hole 220a and two arc-shaped telescopic buttons surrounding the embedded hole 220a. slot 220b, and one end of the two latch members 221 each has a linkage part 221a that moves in the two telescopic slots 220b respectively, so that when the knob 220 is twisted, the linkage part 221a can be driven through the telescopic slot 220b to make the latch member 221 expands and contracts in its corresponding direction, and a latch portion 221b is provided on the other end of the two latch members 221, so that when the latch member 221 is extended (as shown in Figure 10), the latch portion 221b can be passed through. It protrudes outside the container door panel 2 and is buckled on the card edge 11 of the container body 1, so that the container door panel 2 can be fixed at the opening 10 of the container body 1 (as shown in Figure 1) to achieve dustproof and prevent containment. The purpose of the substrate 3 falling out.
再請一併參閱圖5、圖6及圖7所示,本發明主要係增加該容器門板2與其旋鈕開關22間的耐磨耗及使用壽命等功效。如圖6所示,該容器門板2之門蓋21外緣係可設有複數卡扣210,以便於與門體20作卡合而組成所述容器門板2,且該門蓋21上設有供鑰匙5插入的至少一插孔211、以及於容器門板2內面可設有複數突肋212作為補強,而該門蓋21內面對應該插孔211處更設有一墊片213,該墊片213可為金屬材質製成,並具有對應該插孔211的穿孔213a、以及形成於該墊片213周緣的複數凹緣213b,以供該門蓋21於塑料射出成型時,可於各凹緣213b上形成有包膠部214而將該墊片213予以固定於門蓋21上,進而能加強門蓋21的插孔211強度。Please refer to Figures 5, 6 and 7 together. The main purpose of the present invention is to increase the wear resistance and service life between the container door panel 2 and its knob switch 22. As shown in Figure 6, the outer edge of the door cover 21 of the container door panel 2 can be provided with a plurality of buckles 210 to facilitate engagement with the door body 20 to form the container door panel 2, and the door cover 21 is provided with a plurality of buckles 210. At least one socket 211 for the key 5 to be inserted, and a plurality of protruding ribs 212 can be provided on the inner surface of the container door panel 2 as reinforcement, and a gasket 213 is provided on the inner surface of the door cover 21 corresponding to the socket 211. The sheet 213 can be made of metal, and has a through hole 213a corresponding to the socket 211, and a plurality of concave edges 213b formed on the periphery of the gasket 213, so that the door cover 21 can be inserted into each concave during plastic injection molding. A rubber covering portion 214 is formed on the edge 213b to fix the gasket 213 on the door cover 21, thereby enhancing the strength of the insertion hole 211 of the door cover 21.
再者,如圖7所示,該容器門板2之門體20內面係具有供旋鈕開關22之旋鈕220作樞設的樞鈕部200、以及位於門體20周緣而供卡掣件221之卡掣部221b突出的通孔201,並於門體20內面亦可設有複數突肋202作為補強,而該門體20於樞鈕部200上更設有一定位環203。如圖8所示,所述定位環203亦可為金屬材質製成,並具有一外徑較大的外環部203a、以及一外徑較小並由該外環部203a一側突出的內環部203b,且於內環部203b上設有複數凹凸結構203c,所述凹凸結構203c可呈凹狀或凸狀者;在本發明所舉之實施例中,所述凹凸結構203c係呈凸狀。Furthermore, as shown in Figure 7, the inner surface of the door body 20 of the container door panel 2 has a hinge part 200 for the knob 220 of the rotary switch 22 to be pivoted, and a latch 221 located on the periphery of the door body 20 for the latch member 221. The protruding through hole 201 of the latch portion 221b can also be provided with a plurality of protruding ribs 202 as reinforcement on the inner surface of the door body 20, and the door body 20 is further provided with a positioning ring 203 on the hinge portion 200. As shown in Figure 8, the positioning ring 203 can also be made of metal and has an outer ring part 203a with a larger outer diameter, and an inner ring with a smaller outer diameter protruding from one side of the outer ring part 203a. The ring portion 203b is provided with a plurality of concave and convex structures 203c on the inner ring portion 203b. The concave and convex structures 203c can be concave or convex; in the embodiment of the present invention, the concave and convex structures 203c are convex. status.
承上所述,再請一併參閱圖9所示,當上述容器門板2之門體20於塑料射出成型時,可透過樞鈕部200包覆上述定位環203之內環部203b,以供外環部203a外露於該樞鈕部200上,同時透過所述凹凸結構203c加強樞鈕部200與定位環203間的結合強度,進而使該樞鈕部200可透過所述定位環203而供旋鈕開關22之旋鈕220作樞設。如此,如圖10所示,當鑰匙5插入而轉動該旋鈕開關22以作開鎖或解鎖的動作時,旋鈕開關22之旋鈕220可透過與定位環203間作樞接,以使其轉動的磨擦過程中不易因磨耗而產生塑料被磨損的粉塵,進而增加其耐磨耗性與使用壽命,同時也有助於強化門板2與旋鈕開關22間的結合強度。另,該容器門板2之門蓋21亦可由透明材質所製成,如此亦有助於觀視該容器門板2內部的狀況,例如該旋鈕開關的作動是否正常、或如上述其旋鈕220與樞鈕部200間的磨耗狀況等,以便於瞭解容器門板2的使用狀況。Following the above, please refer to Figure 9 as well. When the door body 20 of the container door panel 2 is injection molded by plastic, the inner ring portion 203b of the positioning ring 203 can be covered by the hinge portion 200 for external use. The ring portion 203a is exposed on the hinge portion 200, and at the same time, the concave-convex structure 203c strengthens the bonding strength between the hinge portion 200 and the positioning ring 203, so that the hinge portion 200 can be used for the knob switch 22 through the positioning ring 203. The knob 220 is pivoted. In this way, as shown in FIG. 10 , when the key 5 is inserted and the rotary switch 22 is rotated for unlocking or unlocking, the knob 220 of the rotary switch 22 can be pivotally connected to the positioning ring 203 to cause friction in its rotation. During the process, it is difficult to generate dust caused by the plastic being worn due to wear, thus increasing its wear resistance and service life, and also helping to strengthen the bonding strength between the door panel 2 and the knob switch 22 . In addition, the door cover 21 of the container door panel 2 can also be made of transparent material, which also helps to observe the internal conditions of the container door panel 2, such as whether the operation of the knob switch is normal, or whether the knob 220 and the hinge are as mentioned above. The wear status between the parts 200, etc., so as to understand the usage status of the container door panel 2.
此外,如圖1所示,本發明亦可進一步於上述容器本體1的二側分別設有一鑰匙座50,以供用以開啟旋鈕開關22的鑰匙5作置放。In addition, as shown in FIG. 1 , the present invention can further provide a key holder 50 on both sides of the container body 1 for placing the key 5 used to open the knob switch 22 .
是以,藉由上述之構造組成,即可得到本發明容器門板及具有該容器門板之基板容器。Therefore, through the above structural composition, the container door panel of the present invention and the substrate container having the container door panel can be obtained.
綜上所述,本發明確可達到預期之使用目的,而解決習知之缺失,又因極具新穎性及進步性,完全符合發明專利申請要件,爰依專利法提出申請,敬請詳查並賜准本案專利,以保障發明人之權利。To sum up, it is clear that the present invention can achieve the expected purpose of use and solve the deficiencies of conventional knowledge, and because it is extremely novel and progressive, it fully meets the requirements for application for an invention patent. Please file an application in accordance with the patent law. Please check carefully and The patent in this case is granted to protect the rights of the inventor.
惟以上所述僅為本發明之較佳可行實施例,非因此即拘限本發明之專利範圍,故舉凡運用本發明說明書及圖式內容所為之等效技術、手段等變化,均同理皆包含於本發明之範圍內,合予陳明。However, the above descriptions are only the best possible embodiments of the present invention, and they do not limit the patent scope of the present invention. Therefore, all changes in equivalent technologies, means, etc. that are made by using the contents of the description and drawings of the present invention are equally applicable. Included within the scope of the present invention, it is stated here.
<本發明> 1:容器本體 10:開口 11:卡緣 12:立桿 120:支撐桿 13:隔緣 2:容器門板 20:門體 200:樞鈕部 201:通孔 202:突肋 203:定位環 203a:外環部 203b:內環部 203c凹凸結構 21:門蓋 210:卡扣 211:插孔 212:突肋 213:墊片 213a:穿孔 213b:凹緣 214:包膠部 22:旋鈕開關 220:旋鈕 220a:嵌孔 220b:伸縮槽 221:卡掣件 221a:聯動部 221b:卡掣部 3:基材 4:框座 40:底框 41:豎桿 410:第一斜桿 42:橫桿 420:第二斜桿 43:提把 5:鑰匙 50:鑰匙座<The present invention> 1: Container body 10: Open your mouth 11:Kayuan 12:Pole 120:Support rod 13: The edge 2: Container door panel 20: Door body 200:hub department 201:Through hole 202:Protruding ribs 203: Positioning ring 203a: Outer ring part 203b: Inner ring part 203c concave and convex structure 21: Door cover 210: buckle 211:jack 212:Protruding ribs 213:Gasket 213a: perforation 213b: Concave edge 214: Rubber encapsulation department 22: Knob switch 220: Knob 220a: embedded hole 220b:Telescopic slot 221:Latching parts 221a: Liaison Department 221b:Catch Department 3:Substrate 4:Frame base 40: Bottom frame 41:Vertical pole 410:First diagonal rod 42: Crossbar 420:Second inclined rod 43: handle 5:Key 50:Key holder
圖1係本發明基板容器之立體圖。Figure 1 is a perspective view of the substrate container of the present invention.
圖2係本發明基板容器另一視角之立體圖。Figure 2 is a perspective view of the substrate container of the present invention from another perspective.
圖3係本發明基板容器與容器門板之立體分解圖。Figure 3 is an exploded perspective view of the substrate container and container door panel of the present invention.
圖4係本發明基板容器之內部示意圖。Figure 4 is an internal schematic diagram of the substrate container of the present invention.
圖5係本發明容器門板之立體分解圖。Figure 5 is an exploded perspective view of the container door panel of the present invention.
圖6係本發明容器門板之門蓋的立體示意圖。Figure 6 is a schematic three-dimensional view of the door cover of the container door panel of the present invention.
圖7係本發明容器門板之門體的立體示意圖。Figure 7 is a schematic three-dimensional view of the door body of the container door panel of the present invention.
圖8係本發明容器門板之定位環的立體圖。Figure 8 is a perspective view of the positioning ring of the container door panel of the present invention.
圖9係本發明容器門板之局部剖視放大圖。Figure 9 is a partial cross-sectional enlarged view of the container door panel of the present invention.
圖10係本發明容器門板呈上鎖狀態之立體示意圖。Figure 10 is a schematic three-dimensional view of the door panel of the container in a locked state according to the present invention.
2:容器門板 2:Container door panel
20:門體 20: Door body
200:樞鈕部 200:hub department
201:通孔 201:Through hole
202:突肋 202:Protruding ribs
21:門蓋 21: Door cover
211:插孔 211: Jack
22:旋鈕開關 22: Knob switch
220:旋鈕 220: Knob
220a:嵌孔 220a: embedded hole
220b:伸縮槽 220b:Telescopic slot
221:卡掣件 221:Latching parts
221a:聯動部 221a: Liaison Department
221b:卡掣部 221b:Catch Department
Claims (24)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW112110058A TWI834526B (en) | 2023-03-17 | 2023-03-17 | Container door and substrate container having the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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TW112110058A TWI834526B (en) | 2023-03-17 | 2023-03-17 | Container door and substrate container having the same |
Publications (1)
Publication Number | Publication Date |
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TWI834526B true TWI834526B (en) | 2024-03-01 |
Family
ID=91269666
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TW112110058A TWI834526B (en) | 2023-03-17 | 2023-03-17 | Container door and substrate container having the same |
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TW (1) | TWI834526B (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090245981A1 (en) * | 2008-03-27 | 2009-10-01 | Tdk Corporation | Closed container, lid opening and closing system for closed container, wafer transfer system, and lid closing method for closed container |
TWM528296U (en) * | 2016-05-02 | 2016-09-11 | Chung King Entpr Co Ltd | Latch mechanism and wafer cassette having the same |
CN105993067A (en) * | 2013-04-26 | 2016-10-05 | 安格斯公司 | Wafer container with latching mechanism for large diameter wafers |
TWI649490B (en) * | 2016-12-16 | 2019-02-01 | 美商恩特葛瑞斯股份有限公司 | Substrate container equipped with a latch mechanism with two cam profiles |
-
2023
- 2023-03-17 TW TW112110058A patent/TWI834526B/en active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090245981A1 (en) * | 2008-03-27 | 2009-10-01 | Tdk Corporation | Closed container, lid opening and closing system for closed container, wafer transfer system, and lid closing method for closed container |
CN105993067A (en) * | 2013-04-26 | 2016-10-05 | 安格斯公司 | Wafer container with latching mechanism for large diameter wafers |
TWM528296U (en) * | 2016-05-02 | 2016-09-11 | Chung King Entpr Co Ltd | Latch mechanism and wafer cassette having the same |
TWI649490B (en) * | 2016-12-16 | 2019-02-01 | 美商恩特葛瑞斯股份有限公司 | Substrate container equipped with a latch mechanism with two cam profiles |
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