JPH0262481A - Gate valve - Google Patents

Abstract

PURPOSE:To perfectly shield a vacuum vessel with simple operation by separating a valve plate from a pressing member trough the turning of a parallel link mechanism and pressure welding a stopper to a wall surface of the outer peripheral of an opening in a gate valve of a vacuum vessel. CONSTITUTION:Under the open condition of an opening 8 of a vacuum vessel 1 for housing an article under the vacuum condition and carrying it, when an pressing member 14 is moved up by the operation of a handle 24 of a straight line leading machine 16, each link 34 supporting a valve plate 36 which abuts to a stopper 38 turns in the horizontal direction. At this stage, since the pressing member 14 vertically moves with a guide roller 45 along a partition 46, the valve plate 36 resisting a coil spring 38 moves in close to the opening 8, and a shielding part 36b abuts to a sealing member 12 supported by an outer peripheral base 10 of the opening 8, and the opening 8 is perfectly shielded so as to maintain the vacuum condition. The ultra-high vacuum condition can be thus stably maintained.

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a gate valve capable of shielding two spaces, and is particularly suitable for application to a vacuum container for storing articles in a vacuum state. Regarding gate valves.

[Conventional technology]

The aforementioned gate valve is also called a gate valve, and is designed to block two spaces by moving the valve plate back and forth in a direction perpendicular to the flow direction to block the flow of fluid. It is applied to hydraulic machines, pneumatic machines, etc., and is used to control fluid pressure. Since this gate valve forms a large opening when the valve plate is retracted, it is considered to be applied to special equipment other than the hydraulic machinery and air machinery mentioned above. There are vacuum containers that have been developed in recent years.

Since this vacuum container has an opening through which articles can be inserted and removed, it is necessary to provide a valve to open this opening. However, when a conventional gate valve is used as this valve, there are problems in that the structure is complicated and heavy. In view of these points, in order to reduce the weight of the vacuum vessel, it has been considered that the wall of the vacuum container itself forms the valve seat, and the valve plate is moved along the wall surface to open the opening. .

Problem to be solved by the invention) However, if such a valve plate is placed in a position where the inside is subject to negative pressure, such as in a vacuum container, the valve plate will be curved due to this negative pressure, and complete shielding will not be possible. There is a risk.

In view of these points, an object of the present invention is to provide a gate valve that can completely shield two spaces with a simple operation even when applied to a place with a large differential pressure such as a vacuum container. do.

(Means for Solving the Problems) In order to achieve the above-mentioned object, the gate valve according to the present invention has an opening formed in a wall surface and a pressing force that can reciprocate in a direction perpendicular to the extending direction of the opening. a member, a driving means for reciprocating the pressing member, and the pressing member,
a parallel link mechanism consisting of a plurality of links rotatably connected by pins in directions perpendicular to the moving direction of the pressing member and the t-length direction of the opening; A valve plate that is closed and has a temple shape, and as the pressing member moves in one direction, the valve plate comes into contact with the valve plate to restrain movement of the valve plate in the same direction, and the pressing member moves in the same direction again. The present invention is characterized in that a stopper is provided for separating the valve plate from the pressing member through the rotation of each link of the parallel link mechanism and bringing it into pressure contact with the outer peripheral wall surface of the opening.

[For production]

According to the present invention having the above-described configuration, when the pressing member is moved while the opening formed in the wall surface is open, the valve plate supported by the parallel link mechanism is moved together with the pressing member. It moves in the direction of movement of the pressing member. When these pressing members and the valve plate move together a certain distance and the valve plate reaches the front of the opening, the valve plate contacts the stopper and is restrained from moving in the same direction. . Then, with the subsequent movement of the pressing member, each link of the parallel link mechanism that supports the valve plate that is in contact with the stopper and stopped at that position rotates, and the valve plate is aligned with the pressing member in a straight line. The valve plate is separated from the pressing member by a large distance, and as a result, the valve plate comes into pressure contact with the wall surface around the outer periphery of the opening, thereby completely shielding the opening.

In addition, in order to open the opening, the pressing member is moved in the opposite direction to that described above while the valve plate is blocking the opening. Then, regardless of the movement of the pressing member, the valve plate that is in contact with the stopper continues to be in contact with the stopper, and during this time each link of the parallel link mechanism rotates in the opposite direction to the above-mentioned direction, and the valve plate is in contact with the stopper. The valve plate is moved close to the pressing member so that the straight distance between the plate and the pressing member becomes small, and the valve plate is separated from the outer wall surface of the opening, and then the valve plate follows the movement of the pressing member and moves as one to close the opening. to open.

〔Example〕

The present invention will be explained below with reference to embodiments shown in the drawings.

1 to 4 show an embodiment of a vacuum container to which a gate valve according to the present invention is applied. In particular, in FIGS. 1 and 2, a vacuum container 1 has a container body in the shape of a rectangular parallelepiped. 2, and the main parts of this container body 2 are:
Each plate made of aluminum alloy 4A, 4E3I?
It is formed of a lightweight and strong honeycomb sandwich panel 3 in which a honeycomb structure (not shown) made of the same aluminum alloy as the il is interposed by vacuum brazing.

Pump attachment ports 5A and 5B are formed in the upper wall 2A and side wall 2B of the container body 2, respectively. A neg bomb 6 and an ion bomb 7 for maintaining a high vacuum state are installed in the neg bomb 6
The ion pump 7 is located inside the Hababo container body 2, and is airtightly attached so as to protrude outside the container body 2. These neg bomb 6 and ion pump 7 are always driven when maintaining the inside of the container body 2 in an ultra-high vacuum state.

An opening 8 for inserting and removing a sample of a semiconductor chip (not shown) as an example of an article into the container body 2 is airtightly inserted into a base mounting opening 9 formed in the other side wall 2B of the container body 2. It is formed within the attached base 10. The inner surface 10A of the base 10 has the opening 8
An annular groove 11 is formed to surround the outer periphery of the annular groove 11, and a seal member 12 made of gold R is fitted into the annular groove 11 so that a part of its cross section protrudes outward.

A gate valve 13 for opening and opening the opening 8 is disposed in the container body 2, and a pressing member 14 (described later) of the gate valve 13 is formed on the upper wall 2A of the container body 2. It is supported by a linear introduction machine 16 installed in the installation port 15. The linear introduction device 16 has an annular fixing member 17 installed in the linear introduction shaft attachment port 15, and inside the fixing member 17, the container body 2
The inwardly facing guide sleeve 18 has a flange 18 at its upper end.
A is attached by multiple ropes 19, 19... On the flange 18A of this guide sleeve 18, there is a bearing holder 20 coaxial with the guide sleeve 18.
Attach the flange 2OA at its lower end to several bolts 21.2.
1... is attached. This bearing holder 20
A plurality of bearings 22,22 are held inside the bearing 22, and inside the bearing 22, there is a large diameter portion 23A at the upper end of the screw shaft 23 that extends in the vertical direction and faces the inside and outside of the container body 2. It is rotatably supported. Small diameter portion 2 at the upper end of this screw shaft 23
A rotation handle 24 is attached to 3B, and by rotating this rotation handle 24, the screw shaft 23 is rotated together. Approximately 2/3 of the entire length of this screw shaft 23 from its lower end is a male threaded portion 23G, and a female threaded portion 25A formed on the inner periphery of the upper end of the movable sleeve 25 is threaded into this male threaded portion 23C. It matches. Further, a key groove 26 extending in the axial direction is formed on the outer peripheral surface of the movable sleeve 25.
6 is fitted with a key 27 attached to the guide sleeve 18 to restrict rotation of the movable sleeve 25. Therefore, the rotation of the screw shaft 23 causes the movable sleeve 25 to move linearly in its axial direction. Note that the screw shaft 23 may be rotated by a motor.

A seven flange 25B is formed at the lower end of the movable sleeve 25, and a fixed plate 28 made of a circular plate having a larger diameter than the flange 25B is attached to the flange 25B by a plurality of bolts (not shown). . This fixed plate 2
8 is formed to have approximately the same diameter as the fixing member 17, and a cylindrical bellows structure 29 is interposed between the fixing member 17 and the fixing plate 28 so as to airtightly partition the inside and outside of the bellows structure. There is. This bellows structure 29 includes a first bellows 30A whose upper end is connected to the lower surface of the fixing member 17, a second bellows 30B whose lower end is connected to the upper surface of the fixing plate 28, and a first bellows 30A. The reinforcing sleeve 31 is connected to the lower end of the reinforcing sleeve 308 and the upper end of the second sleeve 308, respectively. This reinforcing sleeve 31 is composed of a sleeve main body 31A whose inner surface can be in contact with the outer peripheral surface of the guide sleeve 18, and a flange 31B integrally provided around the outer peripheral surface of this sleeve main body 31A. The first bellows 30A and the second bellows 30B are connected to the upper and lower surfaces of the 7 langes 31B, respectively.

The pressing member 14 of the gate valve 13 is vertically disposed at the center of the lower surface of the fixing plate 28 via a fixing rod 32 . This pressing member 14 is formed into a vertically long rectangular plate shape, and the direction of this pressing member 14 is regulated so that its surface 14A faces the opening 8. Further, an opening 33 having the same shape as the opening 8 is formed at the center of the upper part of the pressing member 14 in the width direction. Fourth
As shown in the figure, both sides 148.1 of the pressing member 14
At the center and lower end of 4B in the vertical direction, one end of each of links 34, 34, etc., which are of equal length, is connected to a pin 35, respectively.
Each pin 35 is pivoted to the pressing member 1 in a direction perpendicular to the extending direction of the opening 8 and the up-down direction, which is the moving direction of the pressing member 14, in the three-dimensional direction.
4, and therefore each link 34 is pivotally mounted so as to be rotatable in the vertical direction.

The pressing member 1 is attached to the tip of each of the four links 34.
Rectangular valve plates 36 having the same width as 4 and located closer to the opening 8 than the pressing member 14 are rotatably attached by pins 37, respectively. The spacing between the pair of pins 37, 37 on one side of the valve plate 36 is equal to the spacing between the pair of pins 35, 35 on one side of the pressing member 14, so that the four links 34 are This constitutes a parallel link mechanism arranged in parallel to
The valve plate 36 can be moved relative to the pressing member 14 while maintaining a state parallel to the pressing member 14 while changing the linear distance from the pressing member 14 so that each point of the valve plate 36 draws a circular arc.

A coil spring 38 is interposed between the pressing member 14 and the valve plate 36, and urges the valve plate 36 in a direction approaching the pressing member 14, and the valve plate 36, in its free state, As shown in the figure, among the pins 35 and 37 that support both ends of each link 34 interposed between the pressing member 14 and the valve plate 36, the valve plate 36
The side pins 37 are positioned upward in the vertical direction so that the upper ends of the pressing member 14 are positioned in substantially the same horizontal plane. The valve plate 36 has the opening 8 and the opening 33 in this free state.
An opening 36A of the same shape is formed coaxially with both openings 8.33. Further, below the opening 36A of the valve plate 36, a sealing member 1 disposed around the outer periphery of the opening 8 is provided.
A shielding portion 36B with an area that can be joined to the entire circumference of the shielding portion 36B is formed on the surface 36 of the shielding portion 36B on the side facing the opening 8.
C is mirror-finished to improve sealing performance.

Inside the container body 2 directly above the valve plate 36, as the pressing member 14 rises, the shielding portion 36B of the valve plate 36 completely faces the opening 8 of the container body 2. Three stoppers are provided in a protruding manner to abut against each other and restrain the valve plate 36 from rising thereafter. therefore,
After the valve plate 36 contacts the stopper 39, the pressing member 1
Only 4 will be raised.

A rectangular support plate 40 is attached to the lower part of the surface 14C of the Moeki pressing member 14 so as to be joined to the pressing member 14, and on both side surfaces 40A of this support plate 40, there are provided grooves spaced apart in the vertical direction. A pair of guide rollers 41, 41 are each rotatably mounted. On the other hand, in the main body 2 near the support plate 40, there is a guide plate 42 parallel to the support plate 40.
is erected, and the upper end of the guide plate 42 is located on substantially the same horizontal plane as the upper end of the base 10. This guide plate 42 is formed with a large central opening 43 that includes the extended position of the opening 8, and the guide rollers 41 are movably contacted on both sides of the surface 42A of this guide plate 42.

Further, on both sides of the surface 40B of the support plate 40, fourth
As shown in the figure, a pair of brackets 44, 44 are protruded and inserted through the central opening 43 of the guide plate 42,
Each bracket 44 is provided with a protruding guide roller 45 that can roll on the back surface 42B of the guide plate 42 at an intermediate position in the vertical direction between the pair of guide rollers 4141 on one side of the support plate 40. Therefore, the pressing member 14
The guide rollers 41 and 45 roll the guide plate 42 so as to sandwich the guide plate 42, thereby accurately moving straight in the vertical direction.

The upper end of the guide plate 42 extends horizontally in the direction away from the opening 8 inside the container body 2, and extends toward the side of the container body 2! ! A partition plate 46 reaching 2B is connected, and an article holding section 47 is formed surrounded by the container body 2, the guide plate 42, and the partition plate 46. Note that the partition plate 4
6 has an opening 48 formed therein.

In the upper wall 2A of the container body 2 directly above the opening 48 of the partition plate 46, a linear introduction device mounting port 15 similar to that described above is formed. A linear introduction machine 16A is installed which is of the same type as the linear introduction machine 16 and faces into the container body 2. Note that the linear introduction machine 16A is designated by the same reference numerals in the drawings, and the explanation thereof will be omitted.

The fixed plate 28 of the linear introduction machine 16A includes the partition plate 4.
A support rod 49 is vertically provided so as to pass through the opening 48 of No. 6 and face the inside of the article holding section 47. On one side of this support rod 9, a plurality of support rods (in the embodiment) are provided at equal intervals in the vertical direction. In this case, six mounting plates 50, 50, . . . are provided in a protruding manner. Each mounting plate 50 is connected to the linear introduction machine 16.
By operating A to raise and lower the support rod 49, the support rod 49 can be positioned on an extension of the opening 8 of the container body 2.

On the other hand, the side wall 2B to which the ion pump 7 is attached
A linear introduction device mounting port 51 is formed below the ion pump 7, and this M-ray introduction hole is mounted on a fixing plate with a structure similar to that of the linear introduction device 16° 16A described above. A linear introduction device 16B for moving the container 28 in a straight line extends horizontally and is installed so as to face into the container body 2.

Regarding this linear introduction Ill 6B, the illustrated configuration is given the same reference numeral as the direct entry machines 16 and 16A, and the explanation thereof will be omitted.

A support rod 52 that faces into the article holding section 47 is protruded from the fixed plate 28 of the linear introduction machine 16B, and a support plate 53 extending in the vertical direction is attached to the tip of the support rod 52. It is being

On this support plate 53, plate springs 54, 54, . The leaf springs 54 are provided in a protruding manner so that each leaf spring 54 can take a position in which it abuts on the corresponding AI plate 50. Furthermore, each leaf spring 54 has a holding portion 55 having a downwardly arcuate protrusion at its tip.

Note that viewing windows 56 are formed on both end walls 2C of the container body 2, allowing the sample in the article holding section 47 to be viewed from the outside, and each viewing window 56 is shielded by a transparent glass plate 57. . Further, a motor 58 for driving the ion pump 7 is connected to the ion pump 7.

Next, the operation of this embodiment having the above-described configuration will be explained using an example in which a sample of a semiconductor chip manufactured in a vacuum atmosphere is transferred.

First, an intermediate sealed passage (not shown) is connected to a semiconductor manufacturing apparatus (not shown) in which a valve is installed, and the intermediate sealed passage is connected to the opening 8 of the container body 2 of the vacuum container 1.
Connect to. Then, by rotating the rotary handle 24 of the linear introduction machine 16A and rotating the screw shaft 23, the movable sleeve 25 screwed onto the screw shaft 23 is lowered together with the fixed plate 28 and the support rod 49, and the The mounting plate 50 located above is positioned on an extension of the opening 8. on the other hand,
By rotating the rotary handle 24 of the linear introduction 1116 and rotating the screw shaft 23, the valve plate 36 is pressed against the pressing member 1.
4, and connects the coil spring 38 of the valve plate 36 to the opening 8 of the container body 2 to open the opening 8, and then drives the neg bomb 6 and the ion pump 7 to drain the air in the intermediate sealed passage and the container body 2. Exhaust.

When the inside of the container body 2 is finished being evacuated by the neg bomb 6 and the ion pump 7 and the inside of the container main body 2 is in an ultra-high vacuum state, the neg bomb 6 and the ion pump 7 are continuously driven in the same way. An ultra-high vacuum state close to 10" Torr is maintained, and the gate of the semiconductor manufacturing equipment is opened to communicate the inside of the semiconductor manufacturing equipment with the inside of the container body 2 via the intermediate sealed passage. Thereafter, the vacuum of the semiconductor manufacturing equipment is reduced. A sample of a semiconductor chip manufactured in the atmosphere is transferred directly from the vacuum atmosphere into the container body 2 of the vacuum container 1 by a manipulator, through an intermediate sealed passage, an opening 8, and a valve plate 3.
6, the opening 33 of the pressing member 14, and the central opening 43 of the guide plate 42.
is placed on the uppermost mounting plate 50 of the. Once the sample is placed on this mounting plate 50, the manipulator will retreat and escape to the outside of the container body 2, so rotate the rotary handle 21 of the direct aS person R16A in the opposite direction and raise the movable sleeve 25 together with the fixed plate 28. By doing so, the second II plate 50 is positioned on the extension of the opening 8, and the next sample is placed thereon using the manipulator.

After the samples are placed on all the tI plates 50 in this manner, the rotation handle 24 of the linear introduction device 16 is rotated to raise the pressing member 14. Then, this pressing member 1
The valve plate 36, which is supported by a parallel link mechanism at 4 and is brought close to the pressing member 14 by a coil spring 38, rises together with the pressing member 14 in the direction of movement of the pressing member 14. At this time, the end of the same link 34 on the valve plate 36 side is located higher than the end on the pressing member 14 side. Then, the pressing member 14 and the valve plate 36 move together by a certain distance, and the valve plate 36
When the shielding portion 36B reaches the front of the opening 8, the upper end of the valve plate 36 comes into contact with three stoppers, and the valve plate 36 is restrained from moving in the same direction.

Then, as the pressing member 14 rises, the valve plate 3 comes into contact with the stopper 39 and stops at that position.
Each link 34 of the parallel link mechanism supporting the valve 6 rotates in a counterclockwise direction, that is, in a horizontal direction, about the end on the valve plate 36 side. However, since the pressing member 14 can be accurately moved only in the vertical direction by a plurality of guide rollers 45 arranged to sandwich the partition plate 46, the rotation of each link 34 pushes the valve plate 36 is the pressing member 1 against the elasticity of the coil spring 38.
The shielding portion 3 of the valve plate 36 is moved horizontally in the direction approaching the opening 8 so that the straight distance from the valve plate 36 is increased.
6B is pressed against the sealing member 12 supported by the base 10 on the outer periphery of the opening 8 to completely cover the opening 8.

On the other hand, in order to hold each sample on each mounting plate 50, first rotate the rotary handle 24 of the linear introduction machine 16A to lower the support rod 49, and then
Introducing the sample above 0 in a straight line in the vertical direction 1116B
Position it slightly below the corresponding leaf spring 54, and then straighten it! ! Rotate the rotation handle 24 of the introducer 16B to move the support rod 52 in a direction approaching the support rod 49, and stop the support rod 52 when each leaf spring 54 faces directly above the sample on the corresponding mounting plate 50. do. Furthermore, the rotary handle 24 of the linear introduction machine 16A is rotated in the opposite direction to raise the support rod 49 a little, and when the holding part 55 of each leaf spring 54 comes into pressure contact with the sample on each mounting plate 50, the support rod 49 is supported. Stop the rod 49. Then, the support rod 54 comes into pressure contact with the sample on each mounting plate 50, so that the sample placed on each mounting plate 50 is held so that it does not fall even if the container body 2 is tilted. be done. This state can be confirmed by visually observing the inside of the container body 2 through the viewing window 56.

In such a state, the sample is stored in an ultra-a vacuum atmosphere within the container body 2, so the vacuum container 1 may be separated from the central chamber sealing passage and the vacuum container 1 itself may be carried around. By transferring the sample, it is possible to transfer the sample to the analytical instrument without exposing it to the atmosphere.

Note that in order to separate the shielding part 36B of the valve plate 36 from the sealing member 12 on the outer periphery of the opening 8 of the container body 2 and open the opening 8, the linear introduction machine is used while the valve plate 36 is shielding the opening 8. 16 rotation handles 24 are rotated to lower the pressing member 14.

Then, regardless of the downward movement of the pressing member 14, the stopper 3
The valve plate 36 whose upper end is in contact with the stopper 39 continues to be in contact with the stopper 39 for a certain period of time due to the elasticity of the coil spring 38 interposed between it and the pressing member 14.
During this time, each link 34 of the parallel linkage is connected to the valve plate 36.
The valve plate 36 rotates clockwise around the side end.
The valve plate 36 is moved close to the pressing member 14 so that the straight distance from the pressing member 14 becomes small, and the valve plate 36 is separated from the sealing member 12 on the outer periphery of the opening 8. Thereafter, the valve plate 36 is lowered together with the pressing member 14 to close the opening 33 of the pressing member 14.
The opening 36'8 of the valve plate 36 faces the opening 8 of the container body 2.

As described above, according to this embodiment, the sample can be stored and transferred within the container main body 2, which is maintained in an ultra-high vacuum state by the Negubump 6, the ion pump 7, the gate valve 13, etc. It can be transported to an analytical instrument without being exposed to the atmosphere, and substances attached to the surface of a semiconductor chip can be analyzed without error.

Further, the valve plate 36 moves toward and away from the opening 8 as the pressing member 14 moves up and down in a direction perpendicular to the extending direction of the opening 8, thereby closing and opening the opening 8. At this time, each link 34 of the parallel link spacing mechanism is positioned in the horizontal direction, and the pressing member 14 presses the valve plate 36 in a direction to press against the sealing member 12, so that the gate valve 1
3 makes it possible to maintain an ultra-high vacuum state within the container body 2.

Furthermore, the bellows structure 29 that partitions the inside and outside of the linear introduction machine 16 in each linear introduction t1116.16A, 16B (hereinafter collectively referred to as 16)
Since the inner peripheral part of the reinforcing sleeve 31 interposed between A and the second bellows 30B slides on the outer peripheral surface of the guide sleeve 18, the bellows structure 29 is expanded and contracted.
In the normal use of bellows, the pressure is higher on the outside than on the inside, but on the contrary, even if the pressure on the inside is higher than on the outside as in this embodiment, each bellows 30△, 30B does not bend outwards and can move inside and outside. can be stably partitioned.

Furthermore, each sample placed on each mounting plate 50 supported by a support rod 49 that is raised and lowered by the linear introduction device 16A can be placed on each support rod 50 by operating both linear introduction devices 16A and 16B. Since the vacuum container 1 is held under pressure, it can be stably held even if the vacuum container 1 is tilted.

Note that the present invention is not limited to the embodiments described above, and various changes can be made as necessary. for example,
The gate valve of the present invention is not limited to vacuum vessels, but can be applied to various devices.

〔Effect of the invention〕

As explained above, according to the present invention, two spaces can be completely shielded with a simple operation. Therefore, by applying the gate valve of the present invention to a vacuum container, an ultra-high vacuum state can be stably maintained. Qin has an excellent effect of being able to maintain.

A...First bellows, 30B...Second bellows, 31.
... Reinforcement sleeve, 34... Link, 36... Valve plate, 39... Stopper, 41... Guide roller,
47... Article holding part, 49.52... Support rod,
54... Leaf spring, 56... Peep window.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional front view showing an embodiment of the gate valve according to the present invention, FIG. 2 is a partially vertical left side view of FIG. 1, FIG. 3 is a right side view of FIG. 1, and FIG. 2 is a cross-sectional view of the main part of FIG. 1. FIG.

Claims (1)

[Claims] an opening formed in a wall surface, a pressing member capable of reciprocating in a direction perpendicular to the extending direction of the opening, a drive means for reciprocating the pressing member, and a movement of the pressing member. a parallel link mechanism consisting of a plurality of links rotatably connected by pins in directions perpendicular to the direction and the extension direction of the opening; and a parallel link mechanism supported by the parallel link mechanism to close the opening. The valve plate is brought into contact with the valve plate as the pressing member moves in one direction, restraining the movement of the valve plate in the same direction, and the valve plate is moved by the subsequent movement of the pressing member in the same direction. A gate valve characterized in that a stopper is provided which is separated from the pressing member through rotation of each link of the parallel link mechanism and is brought into pressure contact with a wall surface on the outer periphery of the opening.