JP2018515727A - Switching valve - Google Patents

Abstract

The present invention relates to a switching valve (80) for opening and closing an opening (23) of a clean gas cabin (10), in particular an air lock, and the opening (23) of the switching valve (80) in a closed position. It is closed by a closing member (30) and is open in the open position. In this case, at least a first actuator and a second actuator are coupled to the closing member (30) indirectly or directly, and the first actuator is connected to the closing member (30). An actuator is coupled to lift the closure member (30) from the opening (23) to open the opening (23) and / or to abut against the opening (23) to close the opening, the second The actuator is coupled to the closure member (30) such that the second actuator slides the closure member (30) laterally relative to the opening. This switching valve (80) allows opening and closing of the clean gas cabin opening in a small required space.

Description

  The present invention is a switching valve for opening and closing an opening of a clean gas cabin, particularly an air lock, the opening being closed by a closing member of the switching valve in the closed position and opened in the open position. About.

  Many manufacturing processes and work steps in manufacturing and research and development cannot be performed under normal environmental conditions and require a separate atmosphere. Such a manufacturing process can be, for example, a coating process in semiconductor manufacturing, a sealing step in LCD or OLED manufacturing, or a manufacturing process of high purity raw materials, for example in medical and pharmaceutical technology. These processes may require, for example, clean room conditions, low humidity, inert gas atmosphere, or a combination of these various conditions with other conditions.

  It is well known to carry out such manufacturing processes or work steps in a closed space in which an atmosphere can be generated depending on the requirements. This closed space has an air lock, and a required material can be introduced into the closed space via the air lock and a product can be taken out. In this case, the airlock may be directed to the outside, or the airlock may connect two enclosed spaces where material or product needs to be exchanged.

  Known are hood-designed clean gas cabins (eg inert gas casings). The hood forms an enclosed space together with the bottom plate, and a desired atmosphere can be generated therein. The pre-assembled hood is installed on the bottom plate from above and sealed. The required ports, airlocks, chambers connected upstream, and other required units and components are preferably already attached to the hood and have been tested. Therefore, the clean gas cabin can be quickly installed in a work or production planned space. The hood-designed mounting member provides a means to operate any facility or facility part in a closed space that can generate an atmosphere on demand. For this purpose, the size of the hood is adapted to the equipment at the moment. The material used for forming the clean gas cabin is set so as not to change the atmosphere therein due to, for example, contamination or outgassing. Further, this casing is formed so that gas exchange is not performed between the internal space of the clean gas cabin and the surrounding environment. Known are clean steel cabins made of special steel or aluminum.

  The opening through which material can be introduced into or removed from the clean gas cabin can be opened and closed via a switching valve. In this case, the airlock may be arranged between the two clean gas cabins or may form a connection of the clean gas cabin to the outside. The airlock can also be used as a connection between a clean gas cabin and a vacuum chamber, another airlock or another process machine. Known switching valves have a sealed door that is pivoted into the interior space of the clean gas cabin about a corresponding hinge and opened. This may be done manually or preferably via an actuator. The disadvantage in this case is that a large required space must be provided in the interior space of the clean gas cabin in order to be able to open the switching valve door. Another disadvantage arises based on the well-known configuration of doors and switching valves. The door and switching valve are preferably made of metal, such as special steel or aluminum. Such a metal can provide an airtight and highly mechanically stable door that is inert to the atmosphere in the interior space of the clean gas cabin. The disadvantage of this is that the high weight of the doors and switching valves produced in this way is in addition to the weight of clean gas cabins, which are usually also made of metal, in particular aluminum or special steel. Therefore, the load demand on the building will increase as a result. In addition, the high weight of the clean gas cabin increases the effort during assembly or use of the clean gas cabin. This is because a crane or lift device that can withstand the corresponding load must be used.

  Accordingly, an object of the present invention is to provide a hermetic chain switching valve for a clean gas cabin having a small required space for opening and a small weight.

  The subject of the present invention is that at least the first actuator and the second actuator are indirectly or directly coupled to the closing member, the first actuator being connected to the closing member, and the first actuator being connected to the opening from the opening. The second actuator is coupled to lift to open and / or apply to the opening and close the opening, the second actuator sliding the closure member and the second actuator sliding the closure member laterally relative to the opening. It is solved by being connected. In this case, the second actuator may preferably be arranged such that the second actuator slides the closure member at least substantially perpendicular to the direction of movement of the first actuator. The sliding generated by the second actuator may be performed, for example, in a horizontal direction, a vertical direction, or a diagonal direction with respect to the opening. By combining the stroke movement and the sliding movement, the switching valve can be opened in a space-saving manner. There is no need to leave a space in the interior space of the clean gas cabin where the door can be swung for opening. As a result, a significantly large work area is provided in the clean gas cabin. Alternatively, the clean gas cabin can be configured more compactly for the occasional device in the same floor area. As a result, the required gas of the clean gas cabin and thus the operating cost can be greatly reduced. Based on an independent stroke movement, the closing member is pressed uniformly against the opening, in particular against the opening. Thereby, the airtight closing of the opening can be reliably achieved.

  The first actuator has at least one spring coupled indirectly or directly to the closure member, which can be formed simply, lightly and inexpensively by pressing or pulling the closure member to the closed position. . In this way, the first actuator causes the stroke movement of the closure member against the spring force, while the spring moves the closure member in the opposite direction again after the first actuator is no longer controlled. Let That is, the first actuator need only act in one direction. Correspondingly, the first actuator can be simply configured to be driven by, for example, negative pressure, compressed air or hydraulic fluid. The first actuator may be configured to be driven electrically, magnetically, or mechanically. In this case, the use of negative pressure has the advantage that no impurities, such as air or hydraulic fluid, can be accidentally introduced into the clean gas cabin. Preferably, the at least one spring is designed to press or pull the closure member to the closed position. As a result, the switching valve is closed and thus moved to a safe position and held whenever a failure occurs, for example, when the energy for controlling the first actuator runs out. In one alternative configuration, the first actuator acts in two directions, i.e. against the spring force, and can act with the spring force. This additionally allows the first actuator to assist the closing process in the direction of the spring force.

  A simple and inexpensive seal of the switching valve can be achieved by the seal being arranged to surround the opening and the closure member being applied to the seal in the closed position.

  Each of the movements that can be controlled and carried out separately, i.e. the stroke movement and the sliding movement of the closure member, is that the first actuator and the closure member are arranged in the movement unit, and the second actuator It can be achieved by moving laterally with respect to the opening together with the first actuator and the closure member arranged in the moving unit. The use of linear actuators preferably results in a simpler, mechanically more stable structure. To close the opening, the second actuator moves the moving unit to bring the closing member to a position facing the opening and then the first actuator moves the closing member to close the opening. . To open the opening, the first actuator lifts the closure member from the opening. Thereafter, the second actuator slides the moving unit along with the closing member laterally relative to the opening.

  The moving unit is supported for linear movement on at least one guide rail, and the moving unit is assumed to be movable along the guide rail by a second actuator. A reliable support of the mobile unit can be guaranteed. As a result, the lateral force caused by the pressing of the closing member can be received, so that the opening can be reliably and airtightly closed. Instead of or in addition to the guide rail, a counter holder may be provided to receive the lateral force.

  In one preferable configuration of the present invention, the second actuator is formed of at least a guide tube and a carriage supported on the guide tube so as to be linearly movable, and a linearly movable magnet is provided in the guide tube. It can be assumed that the magnet is arranged and the magnet is magnetically coupled to the carriage. In this case, the guide tube may have a circular or square cross section, but it can also have any other cross section. Preferably, the guide tube forms a closed cylinder, and a piston movably supported is arranged in the inner space of this cylinder. The piston divides the cylinder into two cylinder chambers. A compressed air connection portion is disposed corresponding to each cylinder chamber. The compressed air allows the piston in the cylinder to move along the longitudinal extension of the guide tube. A magnet is attached to the piston, or the piston itself is magnetic, so that it can be magnetically coupled to the carriage. Based on magnetic force transmission, it can be reliably avoided that impurities such as lubricants, hydraulic oil or compressed air are introduced into the clean gas cabin. The carriage is preferably coupled to the moving unit. Based on the movement of the linearly movable magnet in the guide tube, the carriage and thus the moving unit can be moved to its desired position. The piston and / or magnet can also be driven by an electric spindle drive, a gas spring, a cable with a balance weight, or a pneumatic cylinder with a piston rod.

  In another preferred configuration of the present invention, the switching valve is correspondingly arranged with a connection member provided with a connection plate, and the opening is formed as a through-opening provided in the connection plate. It may be assumed that the actuators and / or guide rails are attached to the connecting member indirectly or directly. That is, the switching valve forms a configuration group that can be attached as a unit in a through opening formed in the side wall of the clean gas cabin. For this purpose, the connecting plate is joined with the side wall. Based on the pre-assembled switching valve, the assembly time of the clean gas cabin can be greatly reduced. A standardized switching valve may be envisaged that can be used for various types and configurations of clean gas cabins.

  The weight of the switching valve and thus the entire clean gas cabin can be reduced by the closure member and / or the connecting plate and / or the moving unit being at least partly formed from a structural core plate, in particular an aluminum honeycomb core plate. A component made of a structural core plate has a much lower weight than a solidly formed component having a comparable mechanical load capacity. Based on the construction of the structural core plate having two covering plates that are spaced apart and joined together via the structural core, a very high bending stiffness of each component is produced. Thereby, for example, a closing member made from a structural core plate can be bent at all or only slightly when pressed against the opening. This allows a hermetic closure of the opening along the entire length of the seal. The structural core plate is airtight in the direction of the surface normal of the structural core plate, based on the covering plates arranged on both sides, corresponding to the transmission characteristics of the covering plate used. The structural core may advantageously be formed such that no gas can flow in the structural core plate transversely to its surface normal. As a result, no gas can flow into the clean gas cabin through the closing member or the closing plate, for example, through the edge of the structural core plate or through the opening formed by shifting to each covering plate. It is guaranteed that there is no. Preferably, an aluminum honeycomb core plate can be used as the structural core plate.

  In the present invention, a support body movably supported by the moving unit is arranged correspondingly, and the support body has at least one strip material and a web coupled to the strip material at a predetermined angle. It may be envisaged that the closure member is connected to a strip or web. Based on the shape of the support, even if the closing member is pressed against the opening, it can be bent at all or very little, so that a secure seal is guaranteed. In order to reduce the weight, the support may preferably be manufactured from a structural core plate.

In accordance with a particularly preferred variant of the invention, the mass of the closure member and the mobile unit has a combined mass of less than 80 kg and / or the area of the closure member covering the opening is 0.2 m ^2. through 10m ^2, preferably in the range of 0.2m ² ~5m ^2, it may have been supposed that. The relatively small mass can be achieved by using a structural core plate. A small mass provides several advantages. For example, the load resistance of the closing member and the mounting portion of the moving unit can be reduced and the cost can be reduced. The total mass of the clean gas cabin can be reduced with the following advantages. Since only a relatively small mass needs to be moved for the opening and closing process, the opening and closing process can be performed more quickly and with a smaller force. By adapting the area of the opening, the clean gas cabin can be used for a wide variety of applications. An opening, for example covered by 10 m ² , enables the introduction of an aircraft turbine, for example for carrying out welding operations. In contrast, the opening covered by 5 m ² is adapted to the current dimensions in display manufacturing.

  In the following, the present invention will be described in more detail based on one illustrated embodiment.

It is a perspective appearance figure of a clean gas cabin. It is an external view of the connection member of the switching valve of a clean gas cabin. It is the perspective view which looked at the switching valve shown in FIG. 2 from the back. It is a perspective exploded view showing a part of change-over valve. It is a figure which expands and shows a part of figure shown in FIG. 4 with the closure unit. It is a sectional side view of a switching valve.

  FIG. 1 shows a clean gas cabin 10 in a perspective external view.

  The clean gas cabin 10 has a polygonal outline. In the illustrated embodiment, the contour is a hexagon. Correspondingly, a plurality of side walls 12 are provided on the bottom 11 of the hexagon. The upper side of the clean gas cabin 10 is covered by a cabin lid 15 surrounded by a fence 16.

  Two circulation conduits 14.1, 14.2 are attached to the side of the clean gas cabin 10 in the form of rectangular passages. The circulation conduits 14.1, 14.2 are connected to the internal space of the clean gas cabin 10 through the supply section and the take-out location. For this purpose, corresponding openings are provided in each side wall 12.

  The front side wall 12.1 is provided with a cutout 13 closed by a switching valve 80, as shown in more detail in FIG. The opening 23 is a component part of the switching valve 80.

  The clean gas cabin 10 forms a casing sealed with respect to the surrounding environment. Manufacturing equipment, laboratory equipment, or the like can be arranged in the clean gas cabin 10. Further, a predetermined atmosphere can be adjusted in the clean gas cabin 10. For this reason, a specific gas or gas mixture having a predetermined composition may exist in the internal space of the clean gas cabin 10. Said gas or gas mixture may be an inert gas. Furthermore, the humidity of the gas or gas mixture can be adjusted. As an additional requirement, a clean room class required for the clean gas cabin 10 may be set in advance. Multiple requirements may apply individually or in combination. In addition, other atmospheric parameters, such as temperature, can be adjusted. It is understood that the clean gas corresponding to the present invention has an atmosphere corresponding to the required requirements.

  Depending on the required atmosphere, the clean gas cabin 10 is equipped with corresponding units for supplying or generating this atmosphere. In the present embodiment, the clean gas cabin 10 has two circulation conduits 14.1, 14.2. The gas is taken out from the clean gas cabin 10 through the circulation conduits 14.1 and 14.2 and supplied again to the clean gas cabin 10 through the supply unit. At this time, the gas is supplied to the gas preparation unit. The gas preparation unit is connected to the internal space of the clean gas cabin 10. The gas preparation includes generating an atmosphere required for the internal space of the clean gas cabin 10.

  In the illustrated embodiment, each side wall 12 is formed from a structural core plate. In this case, the side wall 12 may be formed as a honeycomb core plate, preferably as an aluminum honeycomb core plate. The structural core plate has a multilayer structure. In this case, at least two covering plates arranged at intervals are joined to the structural core in a planar shape. Each covering plate and the structural core are manufactured from aluminum in this embodiment. The structural core is formed as a honeycomb core. In this way, a plate having a low weight as well as a high bending stiffness is formed. That is, the clean gas cabin 10 has a significantly lower weight than a clean gas cabin manufactured using solid aluminum walls or special steel walls. Thereby, the bottom load generated based on the transferred equipment part and the weight of the clean gas cabin 10 is greatly reduced. Therefore, the clean gas cabin 10 can be used even in a building having a small bottom load capacity. Furthermore, the relatively low weight facilitates the installation of the clean gas cabin 10 at the point of use. This is because no lifting device is required for this purpose, or only a lifting device with a low load capacity is required.

  In order to further reduce the weight of the clean gas cabin 10, the lid plate and the bottom 11 of the cabin lid 15 are also formed from a structural core plate, in this embodiment from an aluminum honeycomb core plate.

  In one alternative embodiment, each side wall 12, cabin lid 15 and bottom 11 of the clean gas cabin 10 may be made from a solid material, such as aluminum or special steel.

  The clean gas cabin 10 enables the implementation of manufacturing processes or work steps that require a special atmosphere. Such a manufacturing step may be, for example, a high purity material coating process, sealing process, or treatment or manufacture in the pharmaceutical field. The required materials and substances are supplied through a plurality of provided air locks. For example, two or more clean gas cabins 10 can be connected to each other via such an airlock. Different atmospheres may exist in the connected clean gas cabins 10, or when the atmospheres are the same, different work processes in the atmospheres may be established. Furthermore, the clean gas cabin 10 may be connected to the external environment via one or more air locks. Therefore, the clean gas cabin 10 may be incorporated in a production line, for example.

  In order to maintain a desired atmosphere in the clean gas cabin 10, it is necessary to close the airlock after the clean gas cabin 10 is inserted or removed. For this purpose, a switching valve 80 for appropriately closing the opening 23 of each air lock is provided.

  FIG. 2 shows an external view of the connecting member 20 of the switching valve 80 for the clean gas cabin 10. The connection plate 21 is surrounded by the connection frame 22. The opening 23 is closed by a closing member 30. As shown in more detail in FIGS. 4 and 5, a plurality of plugs 33 are shifted from the closing member 30. Two guide pipes 76 and two guide rails 77 each provided with a second attachment connecting pipe piece 71.2 are arranged so as to be partially covered by the connecting plate 21. The guide tube 76 is a part of the pneumatic cylinder, and is arranged corresponding to the two sliding actuators 70 shown in FIGS. 3 and 4. Two energy chains 75 are used to supply energy to the switching valve 80. Furthermore, energy, that is, compressed air in this embodiment, is supplied to the switching valve 80 via the energy supply unit 81.

  The connecting plate 21 and the closing member 30 are manufactured from a structural core plate, preferably an aluminum honeycomb core plate, in the illustrated embodiment. The use of the structural core plate can greatly reduce the weight of the switching valve 80 compared to a solid material. The structural core plate may preferably be constructed airtight for use in the present invention. In this way, the dense switching valve 80 is formed despite being lightweight.

  The connection member 20 may be attached to the cutout portion 13 (shown in FIG. 1) provided on the side walls 12 and 12.1 of the clean gas cabin 10 with the connection frame 22, whereby the cutout portion 13 is switched. The valve 80 is hermetically closed. The opening 23 can be opened and closed based on a combination of stroke movement and sliding movement of the closing member 30. The energy required for this is supplied to the switching valve 80 via the energy supply unit 81 and the energy chain 75.

  The switching valve 80 may be assembled in advance as a component group. This group of components can then be attached to the clean gas cabin 10. For this purpose, the connection frame 22, the protruding region of the guide rail 77 and the second mounting connection pipe piece 71.2 are coupled to the side walls 12, 12.1 of the clean gas cabin 10. By using the pre-assembled switching valve 80, the assembly time of the clean gas cabin 10 can be greatly shortened. Further, the sealing performance of the switching valve 80 can be inspected before being attached to the clean gas cabin 10.

  FIG. 3 shows a perspective view of the switching valve 80 shown in FIG.

  The guide rail 77 is screwed to the connection plate 21 of the switching valve 80, and one side protrudes from the connection plate 21 and the connection frame 22 of the connection plate 21. The guide tube 76 of the sliding actuator 70 is also attached to the connection plate 21 on one side. For this purpose, a first mounting connecting pipe piece 71.1 is attached to each of two lateral regions of the connecting plate 21 located on opposite sides, and the first mounting connecting pipe is provided. A single first tube holder 72.1 is attached to each piece 71.1. The second attachment pipe piece 71.2 attached to the side walls 12, 12.1 is also provided with a second pipe holding body 72.2. The guide tube 76 is held by tube holders 72.1 and 72.2 at each end thereof. A single carriage 73 is supported on the guide tube 76 so as to be linearly movable along the guide tube 76.

  Each guide tube 76 is a part of a pneumatic cylinder and is hermetically closed. In the guide tube 76, a movable piston is disposed along the guide tube 76 so as to be covered with the magnet. The magnet is preferably a permanent magnet and may be attached to the piston or the piston itself may be made magnetic. The carriage 73 is also provided with a magnet, preferably a permanent magnet. The magnets in the guide tube 76 are magnetically coupled to the magnets of the carriage 73 that are arranged correspondingly. Therefore, the carriage 73 can move linearly along the guide tube 76 based on the movement of the piston and the magnet in the guide tube 76. The piston divides the pneumatic cylinder into two cylinder chambers. One of these cylinder chambers is connected to an energy supply unit 81 formed as a compressed air supply unit. The piston in the cylinder can be moved along the guide tube 76 by appropriately controlling the compressed air. By forming the magnet as a permanent magnet, the magnetic coupling between the magnet in the guide tube 76 and the magnet of the carriage 73 continues to be maintained even when the power supply fails.

  A moving unit 50 is disposed between the guide tubes 76. The moving unit 50 has a support 51 as a base. In the illustrated embodiment, a U-shaped member comprising two strips 51.1, 51.2 and a web 51.3 connecting these strips 51.1, 51.2 is a support 51. It is provided as. A plurality of lateral struts 52 are arranged at intervals between the strips 51.1 and 51.2, and these lateral struts 52 are connected to the strip 51 through an attachment angle member 53. 1,51.2 and web 51.3. A plurality of through openings 52.1 pass through the horizontal column 52.

  The support 51, in particular the strips 51.1, 51.2 and the web 51.3, are also produced from a structural core plate, preferably an aluminum honeycomb core plate, in the illustrated embodiment. Thereby, the weight of the support body 51 and the switching valve 80 can be kept low.

  The support 51 is coupled to the carriage 73 via an angle member 74 attached to the side. Furthermore, the support body 51 is supported by the guide rail 77 through the sliding members 78.1 and 78.2 so as to be linearly movable. The working distance of the support 51 is limited by the end position of the sliding actuator 70. The light barrier 79 monitors the opening / closing process of the opening 23.

  Four stroke actuators 60 are attached to the web 51.3 of the support 51 in this embodiment. Each stroke actuator 60 is associated with a connection 62 for supplying the required energy in the form of compressed air in the illustrated embodiment. Cover caps 45 of the closing unit 40 (shown in FIGS. 4 and 5) are disposed on both sides of the stroke actuator 60. The stroke actuator 60 is operatively connected to the closure member 30.

  The closing member 30 is applied to the connecting plate 21 indirectly or directly in the closed position. Thereby, the opening 23 is airtightly closed. For this purpose, a seal 26 (shown in FIG. 4) is preferably arranged between the connecting plate 21 and the closing member 30 so as to surround the opening 23. In order to open the opening 23, the closing member 30 may be lifted from the connection plate 21 by the stroke actuator 60. Next, the entire moving unit 50 is slid laterally with respect to the opening 23 by the sliding actuator 70. As a result, the closing member 30 opens the opening 23. Based on the combination of stroke movement and sliding movement, the opening 23 can be completely opened without having to pivot the valve member, for example an air lock door, into the interior space of the clean gas cabin 10. Thus, more space for manufacturing or experimental equipment will be provided in the clean gas cabin 10, or the clean gas cabin 10 having a smaller outer dimension can be used in the same floor area.

  Based on the sliding actuator 70 having a magnetic force transmission means for the carriage 73 to be used, impurities such as lubricant, compressed air or hydraulic oil, which are required in the case of another actuator, are clean gas. Inflow into the cabin 10 can be reliably avoided. By using the support body 51 made of a structural core plate and the closing member 30, a very light moving unit 50 is achieved, which can be easily moved by the sliding actuator 70. The moving unit 50 is guided on the guide rail 77 when moving. Since the guide rail 77 and the guide tube 76 of the sliding actuator 70 protrude beyond the connecting plate 21, the closing member 30 can be greatly slid so that the opening 23 is completely opened. ing.

  By using a support 51 comprising a web 51.3 and strips 51.1, 51.2 arranged at an angle relative to this web 51.3, a mobile unit 50 having bending stiffness. Is obtained. This and the support on both sides of the support 51 can prevent the moving unit 50 from being bent when the closing member 30 is pressed against the connection plate 21. This ensures a secure and airtight closure of the opening 23.

  If the mounting angle member 53 is used, the support body 51 can be easily constructed from a structural core plate. In this case, the lateral struts 52 provide further reinforcement of the support 51. For example, a supply conduit (not shown) for supplying the required energy, which leads to the stroke actuator 60, can be guided through the through opening 52.1 of the lateral column 52.

  This achieves a compact switching valve 80 that can be incorporated as a constituent unit in the corresponding cutout 13 provided on the side walls 12, 12.1 of the clean gas cabin 10.

  FIG. 4 is an exploded perspective view in which a part of the switching valve 80 is cut.

  Using a connection screw 22.1, the connection plate 21 is cleaned with a clean gas through a plurality of holes provided through the connection frame 22 and the connection plate 21 with which the connection frame 22 is engaged. It can be screwed to the side walls 12, 12.1 of the cabin 10. An adjustment rail 27 is attached to the inside of the connection plate 21, and a guide rail 77 is placed on the adjustment rail 27 and coupled to the connection plate 21, preferably screwed. The adjustment rail 27 is used for height adjustment and can guide the guide rail 77 beyond the connection frame 22 while at the same time allowing a secure and rigid connection of the guide rail 77 based on the corresponding screw fastening. A seal 26, preferably a round cord seal, is disposed so as to extend in the circumferential direction of the opening 23. The seal 26 is held between two seal frames 25.1, 25.2. These seal frames 25.1, 25.2 are screwed to the connection plate 21 in the mounting holes 24.

  A closing member 30 is arranged facing the opening 23. The closure member 30 is manufactured from a structural core plate, preferably an aluminum honeycomb core plate, and has two mounting holes 31 and one other hole 32. The mounting hole 31 is only guided through one of the structural core plates and the structural core, and does not penetrate the coating plate on the side facing the opening 23. Thereby, the closing member 30 maintains airtightness even in the region of the mounting hole 31. Since the hole 32 completely penetrates the closing member 30 and extends toward the cover plate facing the moving unit 50, the plug 33 is connected to the opening 23 side as shown in FIG. Can be inserted into the hole 32. The plug 33 hermetically closes the hole 32 and is also used for screwing the coupling member 56. The stopper surface of the plug 33 can transmit a high force in a shape connection (constraint by shape, for example, engagement).

  A closing unit 40 is disposed between the closing member 30 and the support body 51 of the moving unit 50. The closure unit 40 is shown partially exploded and partially assembled, as shown enlarged in FIG. One holding bush 41, a spring 42, a guide pin 43, a guide bush 44 and a cover cap 45 are assigned to each component unit of the closing unit 40 disposed on the closing member 30.

  As shown in FIG. 5, the holding bush 41 is formed of a holding portion 41.2 and a flange 41.1. A screw receiving part 41.3 is inserted axially in the holding part 41.2, the screw receiving part 41.3 being surrounded by a spring receiving part 41.4 on the flange 41.1 side. The holding bush 41 may be inserted into the mounting hole 31 of the closing member 30 where it may be fixed, in particular glued, with the holding part 41.2. Preferably, the holding bush 41 is manufactured from metal, in particular from special steel.

  The spring 42 is formed as a compression spring. The guide pin 43 has a thread 43.1 on the end side facing the holding bush 41 of the guide part 43.2. The side of the guide part 43.2 opposite to the thread 43.1 ends with a head plate 43.3.

  The guide bush 44 is formed of a second stopper 44.1 through which the guide hole 44.3 passes and a second holding portion 44.2. The guide bushing 44 is also preferably made from metal, in particular from special steel.

  Such a guide bush 44 can be attached and fixed to the bush receiving portion 54 formed on the web 51.3 of the support 51 with the second holding portion 44.2 thereof. The guide pin 43 is guided through the guide hole 44.3 of the guide bush 44. In this case, the head plate 43.3 of the guide pin 43 protrudes into a region between the two strips 51.1 and 51.2 of the support 51, and is covered by the cover cap 45 (shown in FIG. 3). ). On the opposite side of the web 51.3, a guide pin 43 is guided through the spring 42, which is arranged between the guide bush 44 and the holding bush 41 and in the spring receiving part 41.4. Is held in.

  The guide pin 43 can be screwed into the screw receiving part 41.3 of the holding bush 41 with its thread 43.1. As a result, the closing member 30 is coupled to the support body 51 and the moving unit 50 so as to be movable in accordance with the displacement distance of the guide pin 43 into the guide bushing 44. The spring 42 is held between the support 51 and the closing member 30 in a compressed and preloaded state, and pushes the support 51 and the closing member 30 apart from each other.

  An insert 55 is inserted in a corresponding recess provided in the web 51.3 of the support 51 and is connected to the web 51.3. The insert 55 is preferably made from metal. The insert 55 is provided with a notch 55.1 and a hole 55.2.

  The stroke actuator 60 formed as a short stroke pneumatic cylinder is connected to the web 51.3 of the support 51 in the area of the insert 55. Inside the stroke actuator 60, a free volume 61 is formed in the cylinder of the short stroke pneumatic cylinder. A mounting portion 63 formed as an additional portion of the stroke actuator 60 is inserted into the hole 55.2 of the insert 55. A threaded hole is disposed in the attachment portion 63.

  The coupling member 56 is disposed between the support body 51 and the closing member 30. A screw 56.1 is guided through the coupling member 56. A through-hole 56.2 is formed in the blade of the coupling member 56. The coupling member 56 is formed mirror-symmetrically with respect to the cross-section of the selected view and is inserted into the notch 55.1 of the insert 55 for assembly and is attached to the stroke actuator 60 with a screw 56.1. 63. In this case, the penetrating part 56.2 of the coupling member 56 is aligned with the hole 32 of the closing member 30. The free volume 61 of the stroke actuator 60 is connected to the plug 33 through an opening, a penetrating portion 56.2, and a hole 32.

  As shown in FIG. 4, the support 51 is covered with a back wall 57 on the side opposite to the web 51.3.

  In FIG. 6, the switching valve 80 is shown in a side sectional view. In this case, the closing member 30 of the switching valve 80 occupies an intermediate position between the open position and the closed position.

  The support body 51 and the closing member 30 are moved to the closed position by the sliding actuators 70 arranged on both sides. As a result, the closing member 30 covers the opening 23. The stroke actuator 60 is operated using compressed air. The compressed air is supplied to the stroke actuator 60 via the connection 62 (shown in FIG. 3). In the first compressed air supply position, the closing member 30 is lifted by the stroke actuator 60 from the opening 23 and the seal 26 surrounding the opening 23 against the spring force of the spring 42. Correspondingly, the spring 42 is compressed and the guide pin 43 enters the cover cap 45. In the second compressed air supply position, the spring 42 presses the closing member 30 toward the connecting plate 21 or the seal 26, whereby the opening 23 is hermetically closed. When the stroke actuator 60 is appropriately formed as a pneumatic cylinder acting in two directions, the closing process at the second compressed air supply position is supported by the stroke actuator 60. Advantageously, the closure member 30 is pressed into the closed position by a spring 42. Thereby, the intrinsic safety of the switching valve 80 is achieved. This is because the switching valve 80 returns to its closed position when the compressed air supply unit fails.

  After the closing member 30 is lifted by the stroke actuator 60, the support body 51 can be slid along the guide rail 77 by controlling the sliding actuator 70. Thereby, the opening 23 is opened. To close the switching valve 80, the support 51 is slid along the guide rail 77 again until the closing member 30 is positioned facing the opening 23. The closure member 30 is then pressed against the opening 23 or the seal 26 surrounding the opening 23 by the stroke actuator 60 and with the aid of the spring 42.

  The opening 23 can be opened and closed by combining the stroke movement and the sliding movement. For this purpose, only a small required space in the clean gas cabin 10 is required. By applying a structural core plate to the configuration of the switching valve 80, the weight of the switching valve 80 can be kept low.

Claims (10)

An opening (23) of the clean gas cabin (10), particularly a switching valve (80) for opening and closing an air lock, wherein the opening (23) is a closing member (30) of the switching valve (80) in the closed position. ) And closed in the open position,
At least a first actuator and a second actuator are indirectly or directly coupled to the closure member (30), the first actuator connected to the closure member (30), and the first actuator connected to the closure member (30). The closure member (30) is lifted from the opening (23) to open the opening (23) and / or is applied to the opening (23) to close the opening (23); The actuator is connected to the closing member (30), and the second actuator is coupled so as to slide the closing member (30) laterally with respect to the opening. 80).   At least one spring (42) is indirectly or directly coupled to the closure member (30), the spring (42) pressing or pulling the closure member (30) to the closed position. The switching valve (80) according to claim 1, wherein:   The seal (26) is arranged so as to surround the opening (23), and the closure member (30) is applied to the seal (26) in the closed position. Switch valve (80).   The first actuator and the closing member (30) are arranged in a moving unit (50), and the second actuator is arranged in the moving unit (50). The switching valve (80) according to any one of claims 1 to 3, wherein the switching valve (80) is moved laterally with respect to the opening (23) together with the first actuator and the closing member (30).   The moving unit (50) is supported so as to linearly move on at least one guide rail (77), and the moving unit (50) is moved to the guide rail (77) by the second actuator. 5. A switching valve (80) according to claim 4, which is movable along.   The second actuator is formed of at least a guide tube (76) and a carriage (73) supported by the guide tube (76) so as to be linearly movable, and the guide tube (76) has a straight line. 6. The switching valve (80) according to any one of claims 1 to 5, wherein a movable magnet is arranged, the magnet being magnetically coupled to the carriage (73).   A connection member (20) having a connection plate (21) is disposed corresponding to the switching valve (80), and the opening (23) is formed as a through opening provided in the connection plate (21). The switching valve (80) according to claim 5 or 6, wherein the first actuator and / or the guide rail (77) is attached to the connecting member (20) indirectly or directly.   The closure member (30) and / or the connecting plate (21) and / or the moving unit (50) are at least partly formed from a structural core plate, in particular an aluminum honeycomb core plate. The switching valve (80) according to any one of the preceding items.   The moving unit (50) is movably supported by a support (51), and the support (51) includes at least one strip (51.1, 51.2), The belt member (51.1, 51.2) and a web (51.3) bonded at a predetermined angle are included, and the closing member (30) is formed of the belt member (51.1, 51). .2) or the diverter valve (80) according to any one of claims 4 to 8, connected to the web (51.3). The total mass of the closing member (30) and the moving unit (50) is less than 80 kg, and / or the area of the closing member (30) covering the opening (23) is 0. .2m ² ~10m ^2, preferably in the range of 0.2m ² ~5m ^2, switching valve according to any one of up to claim 9 (80).

Images