CN201696725U - Vacuum cavity valve plate driving device - Google Patents
Vacuum cavity valve plate driving device Download PDFInfo
- Publication number
- CN201696725U CN201696725U CN2010201887522U CN201020188752U CN201696725U CN 201696725 U CN201696725 U CN 201696725U CN 2010201887522 U CN2010201887522 U CN 2010201887522U CN 201020188752 U CN201020188752 U CN 201020188752U CN 201696725 U CN201696725 U CN 201696725U
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- valve plate
- drive unit
- vacuum cavity
- mounting plate
- cylinder
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Abstract
The utility model discloses a vacuum cavity valve plate driving device, which comprises a movable guide device, an installation plate, a first driving device, a connection device and a second driving device. The movable guide device is positioned below a transfer window of a sealed cavity and is fixedly connected with the outer side wall of the sealed cavity. The installation plate is longitudinally connected with the movable guide device in a sliding mode. The first driving device is fixedly connected with the installation plate. The connection device is respectively connected with a valve plate and the second driving device. The second driving device is respectively connected with the connection device and the installation plate. In the utility model, the first driving device of the vacuum cavity valve plate driving device drives the valve plate to take longitudinal linear reciprocating motion by the installation plate and the second driving device drives the valve plate to take transverse linear reciprocating motion, so that the vacuum cavity valve plate driving device realizes the process that the valve plate opens or closes the transfer window and has the advantages of simple and compact structure, flexible and light movement, simple parts processing, operation, maintenance and the like, easy implementation and lower equipment configuration cost.
Description
Technical field
The utility model relates to the seal chamber that is used to provide vacuum environment in the vacuum coating field, relates more specifically to a kind of valve plate driving mechanism that the transmission window of seal chamber is opened or closed.
Background technique
(English is: Organic Light Emitting Diode at Organic Light Emitting Diode, be called for short: need carry out plated film OLED) all in a large number in industry and the solar cell board industry substrate, and the seal chamber (also claiming vacuum cavity) that is used to provide plated film required is absolutely necessary.Export in seal chamber for the ease of substrate to be coated being input to from the external world in the seal chamber or the substrate that plated film is good, usually on seal chamber, offer substrate into and out of the transmission window, and realize the unlatching of above-mentioned transmission window or close by the valve plate that is connected with driving mechanism.
The general worm gear valve plate drive unit that adopts realizes that the sealing of described valve plate opens and close in the prior art.
Described worm gear valve plate drive unit is mainly interconnected by first transmission system and second transmission system and forms.Wherein said first transmission system mainly comprises first worm gear pair that is made of first worm screw and first worm gear and is used to drive the handwheel that described first worm screw is rotated, described second transmission system mainly comprises second worm gear pair that is made of second worm screw and second worm gear, be used to limit described second worm gear rotation angle range caging bolt and be connected with described second worm gear and by the valve rod of described second worm drive.Wherein, described first worm screw is meshed with described first worm gear, and described second worm screw is meshed with described second worm gear, and described first worm gear is connected by flat key with transmission between described second worm screw.When opening or closing described valve plate, the described handwheel of artificial rotation rotates to drive described first worm screw, thereby drive first worm gear rotation with described first worm meshing, described first worm drive is rotated by described second worm screw, and then second worm gear of drive and described second worm meshing rotates, the described valve rod of described second worm drive is realized opening or closing of described valve plate by described valve rod.In this process, control the angle of swing of described second worm gear by described caging bolt, with the standard-sized sheet of realizing described valve plate and the requirement of complete shut-down.
But, the structure more complicated of described worm gear valve plate drive unit, component processing, operation and maintenance etc. are relatively more complicated, be difficult for implementing, and equipment configuration cost are higher.
The model utility content
The purpose of this utility model provides a kind of vacuum cavity valve plate drive unit, and described vacuum cavity valve plate driving device structure is simple, compact, easy operating and maintenance, and equipment configuration cost is lower.
For achieving the above object, the utility model provides a kind of vacuum cavity valve plate drive unit, is used for drive valve plate opening or closing the transmission window of seal chamber.Described vacuum cavity valve plate drive unit comprises the mobile guide device, mounting plate, first drive unit, the connection set and second drive unit, described mobile guide device be positioned at described seal chamber the transmission window the below and fixedly connected with the outer side wall of described seal chamber, described mounting plate and described mobile guide device are longitudinally and are slidingly connected, described first drive unit is fixedlyed connected with described mounting plate, described first drive unit drives described mounting plate and does straight reciprocating motion longitudinally along described mobile guide device, one end of described connection set is connected with described valve plate, the other end of described connection set is fixedlyed connected with described second drive unit, described second drive unit is fixedlyed connected with described mounting plate, described second drive unit drives described valve plate and does horizontal straight reciprocating motion, and described first drive unit drives described valve plate by described mounting plate and does straight reciprocating motion longitudinally.
Particularly, described mounting plate comprises and is transverse part connected vertically and longitudinal part.
Particularly, described first drive unit comprises first cylinder and first piston bar, described first cylinder is installed on the outer side wall of described seal chamber, one end of described first piston bar is contained in the pedestal of described first cylinder slidably, and the other end of described first piston bar is the pedestal that stretches out described first cylinder hermetically and fixedlys connected with the transverse part of described mounting plate.
Particularly, described second drive unit comprises second cylinder and second piston rod, described second cylinder is fixedlyed connected with the longitudinal part of described mounting plate, one end of described second piston rod is contained in the pedestal of described second cylinder slidably, and the other end of described second piston rod is the pedestal that stretches out described second cylinder hermetically and is connected with described connection set.
Preferably, described connection set comprises connecting base and connecting rod, described connecting base is fixedlyed connected with described valve plate, described connecting base offers a spherical pore, one end of described connecting rod is spherical and inserts in the spherical pore of described connecting base, the other end of described connecting rod is provided with interior threaded hole, and the end that described second piston rod stretches out the pedestal of described second cylinder is provided with outside thread, and the interior threaded hole of described connecting rod matches with the outside thread of described second piston rod.Described connecting rod is a spherical end and inserts in the spherical pore of described connecting base to form spherical hinge, making described valve plate to have local freely swings with the nonparallelism between the sealing surface of the transmission window that compensates described valve plate and described seal chamber, can parallel contact thereby make when fitting between the sealing surface of described valve plate and described transmission window, improve sealing effect.
Preferably, described connection set also comprises locking nut and locking ring, and described locking nut passes described connecting rod and fixedlys connected with described connecting base, and described locking ring is inserted in described locking nut.
Particularly, described mobile guide device comprises guide rail, slide block and connecting struts, described guide rail is on the outer side wall that longitudinally is fixedly mounted on described seal chamber, described slide block is fixedlyed connected with an end of described connecting struts, the other end of described connecting struts is fixedlyed connected with the transverse part of described mounting plate, and described guide rail and described slide block be engagement connection slidably.
Preferably, the cross section of described guide rail and slide block all is the dovetail groove shape.
In the utility model one preferred embodiment, described guiding device also comprises upper sensor, lower sensor and catch, described upper sensor and lower sensor correspondence are installed in the upper and lower end of described guide rail and are positioned on the same ordinate, and described catch is installed on the described slide block and between described upper sensor and described lower sensor.
Preferably, described mobile guide device also comprises the buffering block, and described buffering block is the lower end that is installed on described guide rail highlightedly and over against described connecting struts.
Compared with prior art, because first drive unit of the utility model vacuum cavity valve plate drive unit drives described valve plate by described mounting plate and does straight reciprocating motion longitudinally, described second drive unit drives described valve plate and does horizontal straight reciprocating motion, thereby realized that described valve plate opens or closes the process of the transmission window of described seal chamber, simple in structure, compact, flexible movements are light, component processing, operation and maintenance etc. are relatively simpler, easy to implement, and equipment configuration cost is lower.
By following description also in conjunction with the accompanying drawings, it is more clear that the utility model will become, and these accompanying drawings are used to explain embodiment of the present utility model.
Description of drawings
Fig. 1 is applied to the structural representation in the seal chamber outside for the utility model vacuum cavity valve plate drive unit.
Fig. 2 is the enlarged view of I part shown in Figure 1.
Fig. 3 is the exploded view of Fig. 2 and the structural representation of seal chamber outer side wall.
Fig. 4 is the plan view of Fig. 2.
Fig. 5 is the sectional drawing along the A-A line of Fig. 4.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.As mentioned above, the utility model provides a kind of vacuum cavity valve plate drive unit, because first drive unit of the utility model vacuum cavity valve plate drive unit drives described valve plate by described mounting plate and does straight reciprocating motion longitudinally, described second drive unit drives described valve plate and does horizontal straight reciprocating motion, thereby realized that described valve plate opens or closes the process of the transmission window of described seal chamber, simple in structure, compact, flexible movements are light, component processing, operation and maintenance etc. are relatively simpler, easy to implement, and equipment configuration cost is lower.
Please refer to Fig. 1-3, vacuum cavity valve plate drive unit of the present utility model is used for the opening or closing of transmission window 12 of 14 pairs of seal chambers 10 of drive valve plate.As Fig. 1, Fig. 2 and shown in Figure 3, vacuum cavity valve plate drive unit of the present utility model comprises mobile guide device 20, mounting plate 22, first drive unit 24, connection set 26 and second drive unit 28.Described mobile guide device 20 be positioned at described seal chamber 10 transmission window 12 the below and fixedly connected with the outer side wall 101 of described seal chamber 10, described mounting plate 22 is vertical with described mobile guide device 20 and is dynamically connected slidingly, described first drive unit 24 is fixedlyed connected with described mounting plate 22, described first drive unit 24 drives described mounting plate 22 and does straight reciprocating motion longitudinally along described mobile guide device 20, one end of described connection set 26 is connected with described valve plate 14, the other end of described connection set 26 is fixedlyed connected with described second drive unit 28, described second drive unit 28 is fixedlyed connected with described mounting plate 22, described second drive unit 28 drives described valve plate 14 and does horizontal straight reciprocating motion, and described first drive unit 24 drives described valve plate 14 by described mounting plate 22 and does straight reciprocating motion longitudinally.Particularly, as shown in Figure 2, described mounting plate 22 comprises and is transverse part 221 connected vertically and longitudinal part 222.
Particularly, as shown in Figure 1, described mobile guide device 20 comprises guide rail 201, slide block 202, connecting struts 203, upper sensor 204, lower sensor 205, catch 206 and buffering block 207.Described guide rail 201 is on the outer side wall 101 that longitudinally is fixedly mounted on described seal chamber 10 and is positioned at the below of described transmission window 12, described slide block 202 is fixedlyed connected with an end of described connecting struts 203, the other end of described connecting struts 203 is fixedlyed connected with the transverse part 221 of described mounting plate 22, and described guide rail 201 and described slide block 202 be engagement connection slidably.Described upper sensor 204 and lower sensor 205 (in the present embodiment for photoelectric sensor) correspondence be installed in described guide rail 201 upper/lower terminal extreme position and be positioned on the same ordinate, described catch 206 is installed on the described slide block 202 and between described upper sensor 204 and described lower sensor 205, and described buffering block 207 is the lower end that is installed on described guide rail 201 highlightedly and over against described connecting struts 203.When described slide block 202 slided into the extreme position of upper/lower terminal of described guide rail 201, the printing opacity source that described catch 206 can shelter from described upper sensor 204 and lower sensor 205 was with the control of the stroke realizing described valve plate 14 is moved up and down.In addition, when described slide block 202 moved down into the bottom of described guide rail 201, being provided with of described buffering block 207 can be played certain buffer function.
Preferably, the cross section of described guide rail 201 and slide block 202 all is the dovetail groove shape.
Particularly, as shown in Figure 1, described first drive unit 24 comprises first cylinder 241 and first piston bar 242.Described first cylinder 241 is fixed on the substrate 30, and described substrate 30 is fixed on the supporting element 32, on the outer side wall 101 of described supporting element 32 fixing described seal chambers 10 and be positioned at the below of described transmission window 12.It is in the pedestal that one end of described first piston bar 242 is contained in described first cylinder 241 slidably, and the other end of described first piston bar 242 is the pedestal that stretches out described first cylinder 241 hermetically and fixedlys connected with the transverse part 221 of described mounting plate 22.
Particularly, shown in Fig. 2-5, described second drive unit 28 comprises second cylinder 281 and second piston rod 282, described second cylinder 281 is fixedlyed connected with the longitudinal part 222 of described mounting plate 22, one end of described second piston rod 282 is contained in the pedestal of described second cylinder 281 slidably, and the other end of described second piston rod 282 is the pedestal that stretches out described second cylinder 281 hermetically and is connected with described connection set 26.
Preferably, described connection set 26 comprises connecting base 261, connecting rod 262, locking nut 263 and locking ring 264.Described connecting base 261 is fixedlyed connected with described valve plate 14, described connecting base 261 offers a spherical pore (figure does not show) and a tapped hole 261a (as shown in Figure 3), one end of described connecting rod 262 is spherical and inserts in the described spherical pore, the other end of described connecting rod 262 is provided with interior threaded hole (figure does not show), the end that described second piston rod 282 stretches out the pedestal of described second cylinder 281 is provided with outside thread (as shown in Figure 3), the interior threaded hole of described connecting rod 262 matches with the outside thread of described second piston rod 282 and links into an integrated entity, make the fore and aft motion of described second piston rod 282 change into the axial motion of described valve plate 14, described locking nut 263 passes described connecting rod 262 and fixedlys connected with described connecting base 261, and described locking ring 264 is inserted in described locking nut 263.
Wherein, described connecting rod 262 is a spherical end and matches with the spherical pore of described connecting base 261 and form a spherical hinge, make described valve plate 14 that local freely swinging with the nonparallelism between the sealing surface that compensates described valve plate 14 and described transmission window 12 can be arranged, can parallel contact thereby make when fitting between the sealing surface of described valve plate 14 and described transmission window 12, and then improve sealing effect.
The external cylindrical surface of described locking nut 263 is an outside thread, match with the internal thread of the tapped hole 261a of described connecting base 261, can regulate the spacing between the adjacent end face of the end face of described locking nut 263 and described connecting rod 262, be limited in the scope that regulation allows thereby the part of described valve plate 14 freely swung.
The inner cylindrical surface of described locking ring 264 is an internal thread, and described locking ring 264 is inserted in described locking nut 263 and cooperates to carry out axial locking with the outside thread of the external cylindrical surface of described locking nut 263, makes described locking nut 263 be fixed on appropriate position.
It should be noted that in the present embodiment that described vacuum cavity valve plate drive unit comprises two groups of mobile guide devices 20 and two group of second drive unit 28.The connecting struts 203 of two assembly guidances 20 is fixedlyed connected with the two ends of the transverse part 221 of described mounting plate 22 respectively, second cylinder 281 of two group of second drive unit 28 is fixedlyed connected with the two ends of the longitudinal part 222 of described mounting plate 22 respectively, the annexation and the working principle thereof of the miscellaneous part of described two groups of mobile guide devices 20 and two group of second drive unit 28 are similar, do not repeat them here.The setting of two groups of mobile guide devices 20, moving down of described valve plate 14 played certain leading role, also shared simultaneously described first piston bar 242 horizontal shear force (when described valve plate 14 horizontal when mobile, described valve plate 14 can produce a horizontal shearing force to described first piston bar 242), avoid 242 distortion of described first piston bar, damaged, thereby influenced the axial kinematic accuracy of described first piston bar 242.
In conjunction with Fig. 1, Fig. 3 and Fig. 5, the rising of described valve plate 14 and close closed procedure and be specially: 241 air inlets of first cylinder promote described first piston bar 242 certain stroke that moves up.In this process, transverse part 221, longitudinal part 222, connecting rod 262 and valve plate 14 that described first piston bar 242 will promote described mounting plate 22 are moved upward to desired location together, being the transmission window 12 of described valve plate 14 over against described seal chamber 10, also is the central position that described transmission window 12 is positioned at the orthographic projection of valve plate 14 on seal chamber 10.So far, finished the uphill process of described valve plate 14.
Then, 281 air inlets of described second cylinder promote described second piston rod 282 and move certain stroke to the direction of the sealing surface of the transmission window 12 of close described seal chamber 10.In this process, described second piston rod 282 will drive described connecting rod 262, connecting base 261 and valve plate 14 and move to desired location to the direction near the sealing surface of described transmission window 12 together, promptly make the O RunddichtringO 141 in the seal groove that is installed on described valve plate 14 contact with the sealing surface of described transmission window 12.So far, finished the pass closed procedure of described valve plate 14.
After closing, described valve plate 14 just can vacuumize described seal chamber 10, pressure effect by the atm difference inside and outside the described seal chamber 10 forces described valve plate 14 close to the sealing surface of described transmission window 12, described O RunddichtringO is forced to compressive strain, reach the tight state of contact of sealing surface with described transmission window 12, thereby realize reliable and stable seal request.
Again in conjunction with Fig. 1, Fig. 3 and Fig. 5, described valve plate 14 open and the decline process is specially: described seal chamber 10 is charged into atmosphere to reduce the degree of vacuum in the described seal chamber 10, just stops when air pressure up to described seal chamber 10 in and barometric pressure balance inflating.
Then, 281 air inlets of described second cylinder promote described second piston rod 282 and move certain stroke to the direction away from the sealing surface of the transmission window 12 of described seal chamber 10.In this process, described second piston rod 282 will drive described connecting rod 262, connecting base 261 and valve plate 14 and move to original travel position, and described O RunddichtringO 141 breaks away to certain distance (as 5mm) fully with the sealing surface of described transmission window 12.So far, finished the opening process of described valve plate 14.
Afterwards, 241 air inlets of described first cylinder promote described first piston bar 242 and move down certain stroke.In this process, transverse part 221, longitudinal part 222, connecting rod 262 and valve plate 14 that described first piston bar 242 will drive described mounting plate 22 are moved downward to initial position, and the height of the upper edge horizontal plane of promptly described valve plate 14 is a little less than the lower edge horizontal plane of described transmission window 12.So far, finished the decline process of described valve plate 14.
Abovely the utility model is described, but the utility model is not limited to the embodiment of above announcement, and should contains various modification, equivalent combinations of carrying out according to essence of the present utility model in conjunction with most preferred embodiment.
Claims (10)
1. vacuum cavity valve plate drive unit, be used for drive valve plate opening or closing to the transmission window of seal chamber, it is characterized in that: described vacuum cavity valve plate drive unit comprises the mobile guide device, mounting plate, first drive unit, the connection set and second drive unit, described mobile guide device be positioned at described seal chamber the transmission window the below and fixedly connected with the outer side wall of described seal chamber, described mounting plate and described mobile guide device are longitudinally and are slidingly connected, described first drive unit is fixedlyed connected with described mounting plate, described first drive unit drives described mounting plate and does straight reciprocating motion longitudinally along described mobile guide device, one end of described connection set is connected with described valve plate, the other end of described connection set is fixedlyed connected with described second drive unit, described second drive unit is fixedlyed connected with described mounting plate, described second drive unit drives described valve plate and does horizontal straight reciprocating motion, and described first drive unit drives described valve plate by described mounting plate and does straight reciprocating motion longitudinally.
2. vacuum cavity valve plate drive unit as claimed in claim 1, described mounting plate comprise and are transverse part connected vertically and longitudinal part.
3. vacuum cavity valve plate drive unit as claimed in claim 2, it is characterized in that: described first drive unit comprises first cylinder and first piston bar, described first cylinder is installed on the outer side wall of described seal chamber, one end of described first piston bar is contained in the pedestal of described first cylinder slidably, and the other end of described first piston bar is the pedestal that stretches out described first cylinder hermetically and fixedlys connected with the transverse part of described mounting plate.
4. vacuum cavity valve plate drive unit as claimed in claim 2, it is characterized in that: described second drive unit comprises second cylinder and second piston rod, described second cylinder is fixedlyed connected with the longitudinal part of described mounting plate, one end of described second piston rod is contained in the pedestal of described second cylinder slidably, and the other end of described second piston rod is the pedestal that stretches out described second cylinder hermetically and is connected with described connection set.
5. vacuum cavity valve plate drive unit as claimed in claim 4, it is characterized in that: described connection set comprises connecting base and connecting rod, described connecting base is fixedlyed connected with described valve plate, described connecting base offers a spherical pore, one end of described connecting rod is spherical and inserts in the spherical pore of described connecting base, the other end of described connecting rod is provided with interior threaded hole, the end that described second piston rod stretches out the pedestal of described second cylinder is provided with outside thread, and the interior threaded hole of described connecting rod matches with the outside thread of described second piston rod.
6. vacuum cavity valve plate drive unit as claimed in claim 5, it is characterized in that: described connection set also comprises locking nut and locking ring, described locking nut passes described connecting rod and is connected with described connecting base, and described locking ring is inserted in described locking nut.
7. vacuum cavity valve plate drive unit as claimed in claim 2, it is characterized in that: described mobile guide device comprises guide rail, slide block and connecting struts, described guide rail is on the outer side wall that longitudinally is fixedly mounted on described seal chamber, described slide block is fixedlyed connected with an end of described connecting struts, the other end of described connecting struts is fixedlyed connected with the transverse part of described mounting plate, and described guide rail and described slide block be engagement connection slidably.
8. vacuum cavity valve plate drive unit as claimed in claim 7, it is characterized in that: the cross section of described guide rail and slide block all is the dovetail groove shape.
9. vacuum cavity valve plate drive unit as claimed in claim 7, it is characterized in that: described mobile guide device also comprises upper sensor, lower sensor and catch, described upper sensor and lower sensor correspondence are installed in the upper and lower end of described guide rail and are positioned on the same ordinate, and described catch is installed on the described slide block and between described upper sensor and described lower sensor.
10. vacuum cavity valve plate drive unit as claimed in claim 9 is characterized in that: described mobile guide device also comprises the buffering block, and described buffering block is the lower end that is installed on described guide rail highlightedly and over against described connecting struts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201887522U CN201696725U (en) | 2010-05-06 | 2010-05-06 | Vacuum cavity valve plate driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201887522U CN201696725U (en) | 2010-05-06 | 2010-05-06 | Vacuum cavity valve plate driving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201696725U true CN201696725U (en) | 2011-01-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201887522U Expired - Lifetime CN201696725U (en) | 2010-05-06 | 2010-05-06 | Vacuum cavity valve plate driving device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201696725U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956861A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Valve plate driving mechanism of sealing cavity |
| CN113187911A (en) * | 2020-01-29 | 2021-07-30 | Vat控股公司 | Connecting device for connecting a valve stem of a vacuum valve to a closure |
-
2010
- 2010-05-06 CN CN2010201887522U patent/CN201696725U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101956861A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Valve plate driving mechanism of sealing cavity |
| WO2011137691A1 (en) * | 2010-05-06 | 2011-11-10 | 东莞宏威数码机械有限公司 | Driving mechanism for valve plate of sealing chamber |
| CN101956861B (en) * | 2010-05-06 | 2012-02-29 | 东莞宏威数码机械有限公司 | Valve plate driving mechanism of sealing cavity |
| CN113187911A (en) * | 2020-01-29 | 2021-07-30 | Vat控股公司 | Connecting device for connecting a valve stem of a vacuum valve to a closure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110105 Effective date of abandoning: 20120229 |