JP2001165350A - Gate valve and mounting mechanism of valve element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gate valve and a mounting mechanism of a valve element, wherein a locking of a valve member is possible at the time of its closure and an interior of valve cylinder or valve box is free from contamination by fine particles produced due to mechanical sliding motion. SOLUTION: A bearing 24 arranged at the bottom end of a valve shaft 22 and a bearing 34 arranged at the top end of a piston rod 32 are connected by a tiltably linked linkage 35 and the valve shaft 22 is supported at its bottom end by a tension spring 39 after the piston rod arrived at the highest position. A cam follower 47 which is a integral part of the valve shaft 22 is inserted into a guide groove 57 formed vertically on a frame 52 arranged on each side of the valve shaft 22 and is guided along the groove for its vertical movement together with the valve shaft 22. In addition, after the cam follower 47 is terminated at the upper most position of the guide groove 57, the linkage 35 is brought to a horizontal position by the piston rod 32 still continuing its upward movement, the valve shaft 22 is tilted by the cam follower 47 acting as a tilting shaft, then the valve member 21 is brought to a meeting contact with a valve seat 13 and the valve member is locked.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate valve, and more particularly, to a gate valve having no mechanical sliding portion for opening and closing a gate valve in a valve body or a valve box. The gate valve is kept closed even when pressurized air in the air cylinder is cut off. The present invention also relates to a valve body mounting mechanism capable of adjusting the degree of parallelism of the valve body surface with respect to the valve seat surface of the gate valve.

[0002]

2. Description of the Related Art A gate valve is a valve widely used in the industrial field, and is widely used especially in a semiconductor device manufacturing field. In order to perform various processes on semiconductor substrates,
In a semiconductor device manufacturing facility, a semiconductor substrate is moved in and out between a passage and a plurality of processing chambers. When a gate valve is provided therebetween, the pressure on the low vacuum side is high and the pressure on the high vacuum side is high. Since it is desired to obtain a sealed state not only when the pressure is a low positive pressure but also when the pressure is the opposite pressure, conventionally, there are many mechanisms that use a cam or a guide roller to press the valve body against a valve seat. In addition, if there is a mechanical sliding part with the opening and closing of the valve, fine particles will be generated and the inside of the manufacturing equipment will be contaminated, so there is no sliding part in the vacuum system that has no sliding part. Gate valves have been adopted.

[0003] Conventional non-sliding gate valves include:
A slight deviation in the parallelism between the surface of the valve body to be brought into contact and the surface of the valve seat is often compensated for by a seal ring interposed therebetween. Others have a mechanism for increasing the degree of parallelism between the surface of the valve seat and the surface of the valve body by the movement of the valve body itself during use in a manufacturing process.

(Conventional Example 1) For example, FIG.
14A and 14B are diagrams showing a configuration of a gate valve 100 according to an embodiment disclosed in Japanese Patent No. 42716, wherein FIG. 14A is a cutaway front view thereof, and FIG. 14B is [B] − in FIG.
It is sectional drawing of the [B] line direction. In the gate valve 100, a valve body 121 is provided in a valve box 110 having an opening 111, and a valve shaft 122 to which the valve body 121 is attached protrudes out of the upper valve box 110, and the valve shaft 122 and the valve box 1
A cylindrical bellows 129 is hermetically connected to the upper end surface of the valve case 10, and is connected to a piston rod 132 of a cylinder 131 provided at an upper portion of the valve box 110. Then, the valve shaft 122 is operated by the piston rod 132 to move the valve body 121 up and down, tilted, and pressed against the valve seat 113. That is, a pivot 127 is provided in the block 123 connected to the upper end of the valve shaft 122, and the pivot 127 is inserted into the guide groove 137 on the side surface of the cylinder 131. Then, the pivot 127 is connected to the guide groove 137.
, The valve shaft 122 is tilted about the pivot 127. The yoke 1 integrated with the block 123 of the valve shaft 122 and the piston rod 132
33 is coupled to the hanging portion 134 by a tension spring 139, and a plate-like cam 135 is inclined between the upper surface of the block 123 and the lower surface of the yoke 133.

[0005] When the yoke 133 is lowered by the cylinder 131, the block 123 connected by the tension spring 139 is lowered. When the pivot 127 reaches the lower end of the guide groove 137, the block 123 does not lower. The lowering of the plate-like cam 135 continues to be horizontal, the block 123 of the valve shaft 122 is tilted around the pivot 127 in the direction of arrow A against the tension spring 139, and the valve body 121 moves in the direction of arrow B. The valve seat 113 is pressed via the seal ring 120.

(Conventional example 2) FIG.
FIG. 16 is a view showing a configuration of a gate valve 200 according to an embodiment disclosed in Japanese Patent No. 28542, wherein FIG. 15A is a cutaway front view thereof, and FIG. 15B is [B] − in FIG.
It is sectional drawing of the [B] line direction. This gate valve 200
A valve body 221 is provided in a valve box 210 having an opening 211, and a valve shaft 222 to which the valve body 221 is attached is projected out of the upper valve box 210, and the valve shaft 22
2 and the upper end surface of the valve box 210 are airtightly connected by a cylindrical bellows 229, and the valve shaft 2 is connected by a piston rod 232 of a cylinder 231 provided on the top of the valve box 210.
22 is operated to raise and lower the valve body 221 to tilt the valve seat 2.
13, the valve shaft 122 is tilted via a plate-like cam 135, whereas the conventional example 2 is tilted by a guide roller 236. . That is, the valve shaft 2
A pivot 228 is attached to a block 223 fixed to the upper half of the
The pivot 228 is inserted into a guide groove 238 on the side surface of the cylinder 231. And the pivot 22
8 is at the lower end of the guide groove 238 when the valve shaft 222
Are tilted about a pivot 228.

The mechanism is as follows. Valve shaft 2
A guide roller 236 is pivotally supported by a pivot shaft 235 at a fork 224 provided at the upper end of the shaft 22. The guide roller 236 passes through a piston rod 232 inserted into the fork 224 from above. Formed inclined slot 237
Through the guide roller 236 of the fork 224, the piston rod 232 and the valve shaft 22 are inserted.
2 are connected. And the piston rod 232
An extension spring 239 is interposed between the valve shaft 222 and the valve shaft 222 to separate them from each other in the vertical direction.

When the piston rod 232 is lowered, the valve shaft 222 is lowered integrally via the extension spring 239, and the valve body 221 faces the valve seat 213, that is, the pivot 228 is positioned at the lower end of the guide groove 238. , The valve shaft 222 and the block 223 are stopped from descending, but the piston rod 232 compresses the extension spring 239 and descends, and the roller 236 moves along the oblong slot 237 of the valve shaft 222. By the valve shaft 2
The valve 22 is tilted about the pivot 228 in the direction indicated by the arrow C, and the valve body 221 is moved in the direction indicated by the arrow D to press the valve seat 213 via the seal ring 220.

(Conventional Example 3) FIG. 16 shows a valve body swinging mechanism often used for a gate valve, that is, FIG.
It is a figure which shows the adjustment mechanism of the direction by the valve body itself with respect to a valve seat. 16A shows the valve seat 313 of the valve seat member 312 attached to the valve body 310 and the valve shaft 3
22 is attached to the upper end 322t of the seal ring 32.
16 is a cross-sectional view showing the valve element 321 provided with a zero.
FIG. 17 is a sectional view taken along the line [B]-[B] in FIG. The rotation shaft 363 penetrates the upper end 322t of the valve shaft 322 inserted from below into the space 366 formed in the valve body 321. Both ends of the rotation shaft 363 are supported by bearings 364. It is configured to be rotated around the moving shaft 363 in the direction indicated by the arrow r. The bearing 364 is fixed to the inner surface side of the valve body 321 by a screw 365, and the space 366 is closed by a back cover 367. Then, at a position where the valve element 321 faces the valve seat 313, the valve shaft 322 is tilted and the valve element 321 is pressed against the valve seat 313.
63 around the valve seat 31 at the most appropriate angle.
Contact 3

[0010]

The gate valve 100 of the first conventional example (the same applies to the gate valve 200 of the second conventional example) is in a closed state in which the valve element 121 (221) is pressed against the valve seat 113 (213). In the cylinder 131 (231)
For example, when a power failure occurs, the pressurized air is cut off, the valve element 121 (221) is opened, and the processing state of all the semiconductor devices in the process is out of specification. Troubles that are subject to disposal. In the gate valve 100 (200) of the conventional example 1 (2), since the valve body 121 (221) is fixed to the valve shaft 122 (222), the valve seat 113 (213) and the valve body 121 (221) are fixed.
The displacement of the parallelism with (221) is compensated by the deformation of the seal ring 120 (220) to be interposed. However, when the displacement of the parallelism is large, the contact pressure needs to be increased, and the seal ring needs to be increased. The contact pressure of 120 (220) is uneven, so that the life is shortened, and frequent replacement is required, and the operation rate of the manufacturing equipment is reduced.

Further, the valve element 32 of the gate valve of the conventional example 3
As shown in FIG. 16A, the valve body 321 is connected to the valve seat 31.
3 is tilted around the tilt shaft 363 in the direction indicated by the arrow r so as to be in close contact with the valve body 32, as shown in FIG.
Since there is no mechanism for turning 1 in the direction indicated by the arrow s, a complete closed state cannot be obtained unless the assembling accuracy is good. The valve body 321 and the valve shaft 322
In addition to the complicated machining and assembly required, the cost increases,
Since the tilt shaft 363 and the bearing 364 slide, there is a problem that fine particles as impurities are easily generated with the sliding.

The present invention has been made in view of the above-mentioned problems, and in a non-sliding valve having no mechanical sliding portion for opening and closing a valve body in a valve body or a valve box, the valve body is locked when closed and the cylinder is closed. The gate valve does not open even if the pressurized air is cut off, and the parallelism between the valve body and the valve seat can be adjusted in advance, so that the seal ring does not hit one side, It is another object of the present invention to provide a mechanism for attaching a valve body to a valve shaft that does not generate fine particles by sliding between a seal ring and a valve seat when the valve body is opened and closed.

[0013]

The above-mentioned object is achieved by the features of claims 1 and 5. To explain the solution, the gate valve of claim 1 is provided with a valve body or valve box. A valve body that abuts and separates the valve seat of the internal opening to open and close the opening, the valve body is provided at the upper end, and the lower end is the valve body or In a gate valve that protrudes to the outside of the valve box and opens and closes an opening by vertically moving and tilting a valve body, and a piston rod that operates the valve shaft, a valve seat at the lower end of the valve shaft is provided. Is connected to a shaft bearing provided on the opposite side and a rod bearing provided on the valve seat side at the upper end of the piston rod or another member integral with the piston rod in an inclined posture, and the valve shaft is Is raised After the valve body is stopped at the position facing the valve seat, the link that is brought to a horizontal position and tilts the valve shaft is integrally formed with the valve shaft, and is fitted into a vertical guide groove parallel to the valve shaft. A cam follower that guides the vertical movement of the valve shaft and reaches the upper end position of the guide groove and serves as a tilt axis of the valve shaft, and a shaft portion locking tool having one end provided on the lower end portion of the valve shaft opposite to the valve seat. And a spring that supports the valve shaft, the other end of which is locked by a rod locking member provided at a position higher than the shaft locking member on the valve seat side at the upper end of the piston rod. is there.

In such a gate valve, the piston rod is raised, the cam follower of the valve shaft reaches the upper end of the guide groove, and the valve shaft is stopped. Then, the piston rod is further raised, and the link in the inclined position becomes horizontal. As a result, the force for opening the valve body becomes the force in the opposite direction due to the tilt axis of the valve shaft, the force for pushing the link in the horizontal posture in the horizontal direction, and does not become the force for lowering the piston rod, The closed state is maintained even when the pressurized air of the air cylinder is cut off. Further, since the valve shaft is supported by the spring, it is not tilted while the valve shaft is moving up and down.

The gate valve according to claim 2 is a valve in which a low elastic material is embedded as a stopper at the uppermost end of an upper end position of a guide groove to which a cam follower reaches. In such a gate valve, when the cam follower is moved to the upper end position of the guide groove when the gate valve is closed, the cam follower can avoid an impact by colliding with a stopper made of a material having a low elastic modulus. And guide grooves are not damaged.

According to a third aspect of the present invention, there is provided a gate valve having a valve body at an upper end thereof, the valve body being in contact with a valve seat of an opening inside a valve body or a valve box to open and close the opening and a valve body at an upper end. A valve shaft having a lower end protruding outside the valve body or valve box via a bellows between the box and a valve shaft for moving the valve body up and down and tilting to open and close the opening, and a piston rod for operating the valve shaft And a shaft portion bearing provided on the lower end of the valve shaft on the side opposite to the valve seat, and provided on the valve seat side of the upper end of the piston rod or another member integral with the piston rod. After the valve shaft is raised and the valve body is stopped at the position facing the valve seat,
A link that is in a horizontal position and tilts the valve shaft,
The valve shaft is formed integrally with the valve shaft, is fitted into a first guide groove in a vertical direction parallel to the valve shaft, guides the vertical movement of the valve shaft, and tilts the valve shaft at an upper end position of the first guide groove. A cam follower, which is provided adjacent to the cam follower, is inserted into the first guide groove or a second guide groove parallel to the first guide groove, and moves up and down simultaneously with the cam follower; When the valve shaft is tilted by reaching the upper end position of the first guide groove and acting as the tilt shaft, the valve is provided with a retracting portion of the sub cam follower that is simultaneously moved around the tilt axis. .

In such a gate valve, the piston rod is raised, the cam follower of the valve shaft reaches the upper end of the guide groove, and the valve shaft is stopped. Then, the piston rod is further raised, and the link in the inclined posture is brought into the horizontal posture. As a result, the force for opening the valve body becomes the force in the opposite direction due to the tilt axis of the valve shaft, the force for pushing the link in the horizontal posture in the horizontal direction, and does not become the force for lowering the piston rod. The closed state of the valve body is maintained even if the pressurized air of the cylinder is cut off. Further, the cam follower integrated with the valve shaft moves up and down the first guide groove, and the similar auxiliary cam follower moves up and down the first guide groove or the second guide groove parallel to the first guide groove at the same time. The sub cam follower is not tilted during the movement, but is tilted when the auxiliary cam follower falls into the retracting portion.

According to a third aspect of the present invention, there is provided a gate valve in which a material having a low elastic modulus is embedded as a stopper at an uppermost end of an upper end position of the first guide groove to which the cam follower reaches. In such a gate valve, when the gate follower is closed and the cam follower is moved to the upper end position of the first guide groove, the cam follower collides with a stopper made of a low elastic modulus material to avoid an impact. It does not damage the cam follower and the first guide groove.
The gate valve according to claim 5 is a valve in which the retracting portion of the sub-cam follower has a side wall of the first guide groove or the second guide groove cut out and a low elastic modulus material is embedded. Such a gate valve is not damaged by colliding with the first guide groove or the second guide groove when the auxiliary cam follower is retracted, and when closing the gate valve by lowering the valve shaft. In addition, the low elastic modulus material in the retracting section applies repulsive force to the auxiliary cam follower to separate the auxiliary cam follower.

According to a sixth aspect of the present invention, there is provided a valve body mounting mechanism comprising: a valve body which abuts on a valve seat of an opening inside a valve body or a valve box to open and close an opening; The lower end protrudes to the outside of the valve body or valve box via a bellows between the body and the valve box, and operates the valve shaft that moves the valve body up and down and tilts to open and close the opening, and the valve shaft In the mechanism for mounting the valve body to the valve shaft of the gate valve having the piston rod to be inserted, the upper end of the valve shaft inserted from the central part on the lower end side of the valve body holds the valve body rotatably. A projection that projects at the outer peripheral surface on the valve seat side so as to be able to freely change the direction of the valve element to be brought into contact with the valve seat, and that comes into contact with the inner wall surface of the valve element. A spherical surface portion is provided, and the rotation of the valve body around the cylindrical outer peripheral surface and the convex spherical portion And a mechanical fixing portion for fixing the valve body to the upper end of the valve shaft after adjusting the parallelism of the surface of the valve body to the surface of the valve seat by changing the direction of the valve body. . Such a valve body mounting mechanism rotates the valve body around the upper end of the valve shaft in a state where the fixing of the valve body to the valve shaft is loosened, and is protruded from the outer peripheral surface of the upper end of the valve shaft. The direction of the valve body is changed by the convex spherical part, the parallelism of the valve body surface to the valve seat surface is adjusted, and the valve body is mechanically fixed to the valve shaft. The pressure is evenly applied without contact and the life is extended, and the seal ring does not slide on the valve seat, so that no fine particles are generated during use.

According to a sixth aspect of the present invention, there is provided the valve body attachment mechanism according to the seventh aspect, wherein the convex spherical portion penetrates the upper end portion of the valve shaft from the side opposite to the valve seat and is screwed. It is formed at the tip. In such a valve body mounting mechanism, the convex spherical portion is easily formed, and the degree of protrusion can be easily adjusted. The gate valve according to claim 8 which is dependent on claim 1 or claim 3 is a valve in which the valve body is mounted on the valve shaft by the valve body mounting mechanism according to claim 6. In such a gate valve, a mechanism for vertically moving and tilting a valve shaft is provided outside a valve body or a valve box through a bellows, and a valve body is fixed to the valve shaft. Does not generate fine particles.
Further, since the valve element is locked when closed, the closed state is maintained even if the pressurized air of the air cylinder is cut off.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS As described above, one of the gate valves of the present invention has a valve body at an upper end for opening and closing an opening of a valve body or a valve box, and is provided between the valve body and the valve box. In a gate valve including a valve shaft having a lower end protruding to the outside of a valve body or a valve box via a bellows and moving a valve body up and down to tilt to open and close an opening, and a piston rod for operating the valve shaft, The rod and the valve shaft are connected in an inclined position, and after the valve shaft is raised to a predetermined position, the link is brought into a horizontal position to tilt the valve shaft, and the link for moving the valve shaft up and down along the guide groove. A cam follower that guides the vertical movement and serves as a tilt axis of the valve shaft that is tilted at the upper end position of the guide groove where the valve body faces the valve seat, and a split that supports the valve shaft so as not to tilt during the vertical movement. The other one is to move the cam follower and the sub cam follower up and down in parallel without using a spring, so that the ben shaft does not tilt in the middle of up and down, and the valve shaft is This is a valve provided with a retracting portion for a sub cam follower which is simultaneously moved around a tilt axis when tilted.

The link may directly connect the piston rod and the valve shaft, or may connect another member that moves up and down integrally with the piston rod, for example, two piston rods by means of a bar at right angles, The rod and the valve shaft, which stand vertically at the center of the connection bar, may be connected by a link. In addition, a cam follower formed integrally with the valve shaft is fitted into a guide groove parallel to the valve shaft and moved up and down to guide the up and down movement of the valve shaft, and the valve shaft is raised so that the valve body faces the valve seat. When the cam follower reaches the position where the cam follower is located at the upper end position of the guide groove, the valve body is positioned, but at that time, the cam follower collides with the upper end of the guide groove, so to avoid damage to the cam follower and the guide groove Preferably, a stopper is provided by embedding a flexible elastic material in the side wall at the uppermost end of the guide groove. As the low elastic modulus material, various rubbers or synthetic resins having the same elastic modulus can be used, for example, in addition to urethane rubber.

Further, the valve shaft is raised by the piston rod, and the integral cam follower also rises. When the cam follower reaches the upper end position of the guide groove and stops, the valve shaft also stops rising. But,
The piston rod is still raised, so that the link connecting the lower end of the valve shaft and the upper end of the piston rod (or another member integral with the piston rod) in an inclined position is in a horizontal position. The link then pushes the lower end of the valve shaft to the opposite side of the valve seat,
The valve shaft is tilted about a cam follower at the upper end position of the guide groove as a tilt axis.

The reason why the valve shaft does not tilt in the middle of the process until the link is brought to the horizontal position is that the lower end of the valve shaft is pulled up by the spring.
The horizontal orientation of the link is due to the piston rod pushing up the link against the tension of the spring. As described above, since the cam follower serves as a tilt axis at the upper end position of the guide groove, it is desirable that at least the upper end of the guide groove has a semicircular shape and the cam follower also has a cylindrical shape. Since the purpose of the tilting of the valve shaft is to avoid sliding between the seal ring mounted on the valve body and the valve seat when the valve shaft is moved up and down, the amount of tilting displacement of 1 mm or less is sufficient. Although depending on the length of the shaft, the tilt angle is usually about 1 degree or less, but the objective can be sufficiently achieved.

As the valve body becomes large and the weight of the valve body and the valve shaft increases, the springs for pulling these up also need to have a large tension, and the air cylinder which operates the piston rod against the tension of the spring is required. Large diameters are required. Therefore, it is preferable that tilting of the valve shaft during the vertical movement can be prevented without depending on the spring, but it is preferable to provide a cam follower and another auxiliary cam follower which does not become a tilting axis to move up and down in the guide groove. Is possible. The auxiliary cam follower may be provided with a dedicated guide groove, and the cam follower and the auxiliary cam follower may be arranged vertically within the same guide groove. In this case, it is necessary that each of the cam follower and the auxiliary cam follower have the same shape so that the cam follower does not become loose in the guide groove.

However, since the valve shaft cannot be tilted under the above condition, when the cam follower reaches the upper end position of the guide groove and becomes the tilt axis, the valve shaft is tilted, and the auxiliary cam follower which is also rotated around the cam follower is retracted. A place may be provided. That is, it is sufficient to provide a space where the sub cam follower can enter the peripheral wall of the guide groove at the position where the sub cam follower is located when the cam follower is at the upper end position of the guide groove. Although a notch may be simply provided, it is preferable that a low elastic modulus material, for example, urethane rubber or the like is embedded in the notched portion. As a result, the peripheral wall of the guide groove becomes flat, and if necessary, the auxiliary cam follower can enter and retract. As described above, the tilt angle of the valve shaft is about 1 degree or 1 degree or less, and therefore, depending on the interval between the cam follower serving as the tilt axis and the auxiliary cam follower, the displacement amount of the auxiliary cam follower is also 1 mm or less. By providing such a shelter, the object can be sufficiently achieved.

[0027]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing a mounting mechanism of a gate valve and a valve body according to the present invention.

FIG. 1 is a longitudinal sectional view of a gate valve 1 according to a first embodiment. FIG. 2 is a sectional view taken along the line [2]-[2] in FIG. 1, and FIG. 3 is a sectional view taken along the line [3]-[3]. FIG. 4 shows a state in which the valve body 21 is brought into contact with the valve seat 13 by tilting the valve shaft 22 or the cam follower 47 from the state of FIG. Referring to FIGS. 1 to 4, a gate valve 1 is provided with a valve seat 13 of a valve seat member 12 attached to an opening 11 of a valve body 10 shown by a two-dot chain line, and a valve body which is opened and closed in contact with and separated therefrom. 21. The valve body 21 has a horizontally long rectangular shape as shown in FIG. 1, and a seal ring 20 is fitted around the outer periphery thereof as shown in FIGS. 2 to 4. The valve body 21 is attached to the upper end of the valve shaft 22. As will be described in detail later, the valve shaft 22 is tilted around a cam follower 47 serving as a tilt axis to rotate the valve seat 1.
Close contact with 3. The valve shaft 22 protrudes downward from the inside of the valve body 10 via a cylindrical bellows 29. An air cylinder 3 is provided at the lower end of the valve shaft 22.
One piston rod 32 is connected, and the valve shaft 22 and the upper half of the piston rod 32 are housed in a casing 51 having frames 52 on both sides. The air cylinder 31 is attached to the bottom plate 53 of the casing 51, and the ceiling plate 5 of the casing 51
4 is attached to the attachment plate 14 of the valve body 10 to constitute the whole. FIG. 1 shows a state in which the piston rod 32 raises the valve shaft 22 and the cam follower 47 from a position indicated by a dashed line to a position indicated by a solid line. In this position, the valve element 21 is connected to the valve seat 13.
It is in the position facing.

As shown in FIGS. 1 and 2, the upper end of the piston rod 32 and the lower end of the valve shaft 22 are connected by a link 35.
Are connected by That is, an elevating plate 33 is attached to the upper end of the piston rod 32, and a bearing 34 provided on the surface of the elevating plate 33 near the valve seat 13, and the valve seat 13 on the lower end surface of the valve shaft 22. And a plate-like link 3 having both ends pivotally supported by a bearing 24 provided on the far side opposite thereto.
5 is attached. Also, in FIG.
Cam follower mounting plates 42 are erected on both right and left ends of 3, and two guide / cam followers 46 vertically arranged on each cam follower mounting plate 42 are fixed by nuts 43. The guide / cam follower 46 is provided in the lower half of the frame 52 in a vertically extending guide groove 5.
6 and moves up and down along the guide groove 56, and guides the up and down movement of the piston rod 32 to make it smooth.
As shown in FIG. 2, a stopper 27 is fixed to a side of the elevating plate 33 near the valve seat 13.
It is used to press the lower end of the valve shaft 22.

As shown in FIGS. 1 and 3, the lower end of the mounting member 23 fixed to the lower half of the valve shaft 22 has
On the opposite side to the valve seat 13, locking portions 28 are attached to both sides. Also, as shown in FIG.
Locking portion mounting plate 37 inside the cam follower mounting plate 42
As shown in FIG. 3, the upper end of the locking portion mounting plate 37 near the valve seat 13 has the locking portion 28.
A locking portion 38 is provided at a higher position. A tension spring 39 is mounted between the locking portion 28 on the valve shaft 22 side and the locking portion 38 on the piston rod 32 side to support the lower end of the valve shaft 22 by pulling it up. The lower end of 22 is pressed against a stopper 27.

Further, as shown in FIG.
A tilting plate 44 is fixed to each of the left and right sides of the upper end of the mounting member 23 fixed to the mounting member 23, and a cylindrical cam follower 47 is mounted to the upper end of the tilting plate 44. The cam follower 47 is fitted in a guide groove 57 formed vertically inside the upper half portion of the frame 52, moves in the guide groove 57 up and down, and moves to the tilt plate 44 and the tilt plate 44. Integrated valve shaft 22
Guide up and down movement. FIG. 5A is a partially enlarged view showing the left guide groove 57 and the cam follower 47 in FIG.
FIG. 5B is a cross-sectional view taken along the line [B]-[B] in FIG. 5A. FIGS. 5A and 5B show the valve shaft 2.
2, a cam follower 47 fixed to an upper end portion of a tilting plate 44 integrated with a nut 45 via a mounting member 23 is raised by a piston rod 32 from a lower end position in a guide groove 57 shown by a dashed line, and At the upper end position. A stopper 55 in which urethane rubber is embedded is provided in a portion extending from the uppermost peripheral wall portion of the guide groove 57 to the ceiling plate 54, thereby preventing damage due to collision of the cam follower 47 when ascending. As will be described in detail later, at the upper end position of the guide groove 57, the cam followers 47 on both sides serve as tilting axes, the tilting plate 44 and the valve shaft 22 are tilted, and the valve body 21 is pressed against the valve seat 13 to push the gate. Opening 11 of valve 1
Is to be sealed.

When the cam follower 47 reaches the upper end position of the guide groove 57, the tilt plate 44 fixing the cam follower 47 and the valve shaft 22 integrated with the tilt plate 44 are stopped from rising, but the piston rod 32 is further moved. When lifted against the tension of the tension spring shown in FIG. 3, the link 35 connecting the upper end of the piston rod 32 and the lower end of the valve shaft 22 in an inclined position in FIG. 2 is shown in FIG. As in the horizontal position. That is, the lower end of the valve shaft 22 is pushed leftward by the link 35 in FIG. 2 and is tilted around the cam follower 47 as a tilt axis. Therefore, the upper end of the valve shaft 22 is on the right side,
That is, the gate valve 1 is tilted toward the valve seat 13, the valve body 21 is brought into close contact with the valve seat 13 via the seal ring 20, and the gate valve 1 is closed as shown in FIG.

In the state of FIG. 4 in which the gate valve 1 is closed, the force for moving the valve body 21 to the left and opening it is changed by a cam follower 47 as a tilt axis, and the lower end of the valve shaft 22 This is a force that presses the link 35 whose part is in a horizontal posture to the right, and does not become a force that pushes the piston rod 32 downward. That is, the valve body 21 is locked and does not open, and the gate valve 1 is kept closed. As described above, the valve shaft 22 can be tilted around the cam follower 47. However, since the tension spring 39 pulls up the valve shaft 22, the valve shaft 22 is not tilted while the valve shaft 22 is being moved up and down. Absent. When the pressurized air from the air cylinder 31 is removed, the valve body 21 and the valve shaft 2
The reason why the piston rod 32 is not pushed down by its own weight is that the inside of the valve body 10 is vacuum and is pressed by the atmospheric pressure through the bellows 29.

When the gate valve 1 is to be opened, referring to FIG.
At the same time, the lifting plate 33 is lowered, and the link 35 in the horizontal position is returned to the inclined position shown in FIG. 2 against the tension of the tension spring 39, so that the slightly inclined valve shaft 22 serves as a tilt axis. Is returned around the cam follower 47 and becomes vertical, and the valve element 21 moves away from the valve seat 13 to the opposing position. And furthermore, piston rod 3
When the valve 2 is lowered, the valve body 21 is lowered from a position facing the valve seat 13 to a lower end position indicated by a dashed line in FIG. 1, and the gate valve 1 is opened.

FIG. 6 shows the valve element 21 shown in FIGS.
7 is a partially enlarged cross-sectional view of the valve shaft 22 and the opposed valve seat member 12, and FIG. 7 is a partially cutaway plan view of the valve body 21 and the valve shaft 22 of FIG. 6 as viewed from above, and is the same as FIGS. Are given the same reference numerals. As shown in FIG. 6, the valve element 21 is inserted so as to cover the upper end portion 22 t from above the valve shaft 22 whose upper end portion 22 t is cut into a thick plate shape.
1 is fixed to the upper end portion 22t of the valve shaft 22 by two upper and lower fixing screws 63 screwed on the back surface side, that is, on the opposite side to the valve seat member 12. A surface adjustment bolt 65 is screwed into an opening 64 provided at the center on the back surface side of the valve body 21 so as to penetrate the upper end 22t of the valve shaft 22 so that the tip slightly projects. Is a convex spherical portion 65s. The convex spherical portion 65 s is in contact with a wear-resistant hard metal plate 66 provided on the inner surface side of the valve body 21, and when the fixing screw 63 is loosened, the surface of the valve body 21 is convexly spherical. By rotating around the portion 65s in the direction indicated by the arrow p, for example, the surface of the valve element 21 with respect to the surface of the valve seat 13 can be adjusted upward or downward.

Further, as shown in FIG.
The left and right ends 22r of the thick plate-shaped upper end portion 22t are cylindrical surfaces and are inserted into the holes 62 provided in the valve body 21. When the fixing screws 63 are loosened, the surface of the valve seat 13 is The left and right sides of the valve body 21 in the horizontal direction are easily rotated in the direction indicated by the arrow q around the upper end 22t of the valve shaft 22 so that the slight deviation of the parallelism between the valve body 21 and the surface of the valve body 21 is easily enlarged. Can be adjusted.

That is, when the valve body 21 of the gate valve 1 of the first embodiment is assembled, including the valve seat member 12 of the valve body 10, the sealing ring 63 shown in FIG. The valve body 21 and the valve seat 13 are brought into contact with each other through the contact hole, and the surface of the valve body 21 is formed into a convex shape as shown in FIG. By rotating the spherical portion 65s in the direction indicated by the arrow p in the center, and by rotating the surface of the valve body 21 around the valve shaft 22 in the direction indicated by the arrow q as shown in FIG.
After obtaining the most preferable direction of the surface, the fixing screw 63 is tightened to fix the valve body 21 to the upper end portion 22t of the valve shaft 22. When adjusting the direction of the surface of the valve body 21, the uniformity of the contact pressure applied to the sealing 20 can be easily confirmed by sandwiching a thin pressure-sensitive coloring paper between the seal ring 20 and the valve seat 13.

Even if the gate valve 1 whose surface direction of the valve body 21 is adjusted as described above is mounted and operated in an actual process, the valve body 21 changes its direction during that time, and the valve seat 21 changes its direction. Since the state of contact with the valve 13 is not adjusted, unlike the gate valve of the third conventional example, the sliding when changing the direction of the valve body 321 does not generate fine particles that become a contamination source. And, of course, the seal ring 20 does not hit one side, and the seal ring 20 and the valve seat 13 do not slide when the valve body 21 is opened and closed. In addition, as described above, the mechanism for moving the valve body 21 up and down and tilting around the cam follower 47 as a tilt axis is all outside the valve body 10, and the mechanical element that slides is the valve by the bellows 29. Since the inside of the body 10 is shut off, the inside of the valve body 10 is not contaminated by mechanically generated fine particles.

(Embodiment 2) The gate valve 1 of Embodiment 1 supports the valve body 21 and the valve shaft 22 by the tension spring 39. However, the size of the valve body 21 increases, and accordingly, the valve body 21 and the valve As the weight of the shaft 22 increases, the tension spring 39 supporting the shaft 22 also needs to have a large tension. The increase in the tension of the tension spring 39 increases the air cylinder 31 that moves the piston rod 32 up and down against the tension of the tension spring 39.
Also requires a large inner diameter, which makes the entire gate valve 1 larger. Therefore, similarly to the first embodiment, a lock mechanism for the valve body 21 by the link 35 is provided, and the tension spring 3
The gate valve 2 according to the second embodiment has been developed in which the valve shaft 22 does not tilt around the cam follower 47 and slide down while the valve shaft 22 is being moved up and down without having the groove 9.

FIG. 8 is a longitudinal section showing the structure of the gate valve 2 of the second embodiment, and FIG. 9 is [9]-[9] in FIG.
FIG. 10 is a sectional view taken along line [10]-[1] in FIG.
FIG. 11 shows a state in which the valve shaft 22 is tilted from the state shown in FIG. 10 and the valve body 21 is in contact with the valve seat 13. The gate valve 2 according to the second embodiment does not have the tension spring 39 as compared with the gate valve 1 according to the first embodiment, but the components constituting the gate valve 2 are basically the same as the gate valve 1 according to the first embodiment. Therefore, common elements are denoted by the same reference numerals, and description thereof is omitted as much as possible. Hereinafter, mainly different parts will be described in detail.

As shown in FIGS. 8, 9 and 10, the gate valve 2 is a valve seat 1 formed on a valve seat member 12 of a valve body 10.
3. A valve shaft 22 to which the valve element 21 is attached, an air cylinder 31 for operating the valve shaft 22, a piston rod 32, and two links 35 'connecting the lower end of the valve shaft 22 and the upper end of the piston rod 32. And a bearing 24 ′ on the valve shaft 22 side that supports the link 35 ′ therebetween, a bearing 34 ′ on the piston link side, and the like.
As the valve shaft 22 moves up and down, the cylindrical cam follower 47 attached to the tilt plate 44 integral with the valve shaft 22 moves up and down in the guide groove 57, and the cam follower 47 reaches the upper end position of the guide groove 57. And the inclined plate 44
After the valve shaft 22 is stopped from rising, the piston rod 32 is further moved up, so that the cam follower 47 becomes a tilting axis, the valve shaft 22 is tilted, and the valve body 2
Similarly, 1 is in contact with the valve seat 13, and the link 35, which was in the inclined position at that time, is set in the horizontal position, and the valve element 21 is locked.

The gate valve 1 and the valve shaft 2 of the first embodiment
While the lower end of the valve shaft 22 is supported by a tension spring 39 in order to prevent the valve shaft 22 from tilting around the cam follower 47 as a tilt axis while the valve 2 moves up and down, the gate of the second embodiment is The valve 2 is a tilting plate 44
A sub-cam follower 48 of the same shape is attached to the lower side of the cam follower 47, and is moved up and down along a guide groove 57 provided in the frame 52 in the vertical direction. That is, since the valve shaft 22 is guided by the vertically arranged cam followers 47 and the sub cam followers 48 and moves up and down, the valve shaft 22 cannot tilt around the cam followers 47 in the middle thereof. This eliminates the need to pull up the valve shaft 22 with the tension spring 39 as in the gate valve 1 of the embodiment. However, as it is, the valve shaft 2
2 does not tilt, and the valve element 21 cannot contact the valve seat 13.

FIG. 12 shows [12]-[12] in FIG.
It is sectional drawing of a linear direction, and is an enlarged view which shows the effect | action of the tilting plate 44. That is, FIG. 12A shows the frame 52 in which the guide groove 57 is formed, in which the tilting plate 44 is located at the lower end position, and the columnar cam followers 47 and the auxiliary cam followers 48 of the same shape attached to the tilting plate 44. Are in the guide groove 57 side by side. In FIG. 12A, the uppermost peripheral wall of the guide groove 57 extends from the ceiling plate 5.
A stopper 55 in which urethane rubber is embedded is provided over 4, and a retracting portion 59 in which urethane rubber is also embedded is provided on the left peripheral wall. FIG. 12B shows FIG.
7A, the tilting plate 44 at the lower end position is moved to the upper end position together with the valve shaft 22 and is tilted rightward with the cam follower 47 as the tilt axis, but the cam follower 47 reaches the upper end position of the guide groove 57. When the sub-cam follower 48 that rises together is occupied by the guide groove 57, a retraction part 59 in which urethane rubber is fitted to the left peripheral wall is provided.

That is, the cam follower 47 is
Although the tilting plate 44 and thus the valve shaft 22 are stopped from rising by colliding with the upper end of the cam 7, a stopper 55 is provided to prevent the cam follower 47 and the guide groove 57 from being damaged in the collision. When the piston rod 32 is further raised, the link 35 in the inclined position shown in FIG. 9 is brought into a horizontal position as shown in FIG. 11, and the valve shaft 22 is tilted around the cam follower 47 in the direction of the arrow. At that point,
As shown in FIG. 12B, the auxiliary cam follower 48 is rotated from the position indicated by the dashed line to the position indicated by the solid line about the cam follower 47 of the tilting axis, and partially invades the retracting portion 59, whereby the valve is opened. The shaft 22 tilts and the valve body 21
Abuts on the valve seat 13. In FIG. 11 showing a state in which the valve shaft 22 is tilted, a leftward force for moving the valve body 21 to the left and opening it is changed in the opposite direction by a cam follower 47 as a tilting axis. Link 35 in which the lower end of 22 is in a horizontal posture
Of the piston rod 32 to the right, not the force of pushing the piston rod 32 downward. That is, even if the pressurized air in the air cylinder 31 is cut off, the valve body 21 does not open, and the gate valve 2 is kept closed.

When the gate valve 2 is to be opened, referring to FIG. 11, the air cylinder 31 lowers the elevating plate 33 together with the piston rod 32, and the horizontal link 35 is tilted as shown in FIG. When the valve shaft 22 is returned to the inclined position, the slightly inclined valve shaft 22 is returned around the cam follower 47 to become vertical, and the valve body 21 is moved to the valve seat 1.
3 and moves to the opposing position. Further, the piston rod 32 is further lowered to open the gate valve 2 as in the case of the first embodiment. Further, the valve shaft 2 of the valve body 21 in the gate valve 2 of the second embodiment.
The attachment to the valve body 2 is exactly the same as that of the first embodiment, and the parallelism of the surface of the valve body 21 with respect to the valve seat 13 is adjusted in advance, but the description is omitted.

Also in the gate valve 2 of the second embodiment, the mechanism for vertically moving the valve element 21 and tilting it around the cam follower 47 is outside the valve body 10, and the mechanical element that slides is the bellows 29. Therefore, the inside of the valve body 10 is not contaminated by generating fine particles by mechanical sliding. In addition, valve seat 1
The direction of the surface of the valve body 21 with respect to the surface of No. 3 is adjusted in advance,
Even if it is installed in the production line and put into practical use,
Since the valve body 21 itself does not adjust the direction, naturally, no fine particles are generated by the sliding at that time.

Although the present invention has been described with reference to the embodiments, it is needless to say that the present invention is not limited thereto, and various modifications can be made based on the technical concept of the present invention.

For example, in the first and second embodiments, the gate valve 1 with respect to the opening 11 provided in the valve body 10
2, the gate valve of the present invention is the same as that of the conventional examples 1 and 2.
Can be applied as a gate valve provided with the valve box as shown in FIG. In the first and second embodiments, the gate valves 1 and 2 are provided with the valve body 21 on the upper side, and upward gate valves 1 and 2 that are opened and closed from below by a valve shaft 22 attached to the valve body 21 will be described. However, it is also possible to provide a downward gate valve provided with a valve element on the lower side and opening and closing the valve element from the upper side by a valve shaft. In this case, the tension spring 3 used in the first embodiment may be used.
Instead of 9, a compression spring that pushes down the valve shaft 22 will be used. Of course, a lateral gate valve may be used.

In the second embodiment, the same shape of the cam follower 47 and the
12 are arranged vertically, but as shown in FIG. 13 similar to FIG.
8, the cam follower 47 may be moved up and down in the guide groove 57, and the sub-cam follower 48 ′ may be moved up and down in the sub-guide groove 58. That is, in FIG. 13A, the tilt plate 44 is located at the lower end position with respect to the guide groove 57 and the sub guide groove 58 formed in the frame 52, and the cam follower 47 as the tilt shaft attached to the tilt plate 44 guides the guide groove. The sub-cam follower 48 ′, which is located in the groove 57 and has a small cylindrical shape, is also fitted in the sub-guide groove 58. In FIG. 13A, a stopper 55 made of urethane rubber is provided on the uppermost peripheral wall of the guide groove 57, and the evacuation section 5 is provided on the upper right end of the sub-guide groove 58.
9 'is provided. In FIG. 13B, the tilting plate 44 at the lower end position in FIG. 13A is moved to the upper end position,
The state where the tilting plate 44 is tilted together with the valve shaft 22 is shown.

That is, the cam follower 47 is
7, the tilting plate 44 and thus the valve shaft 2
2 is also stopped, but as the piston rod 32 continues to be raised, the link 35 which has been in the inclined position is brought into the horizontal position as shown in FIG. At this point, just in the direction indicated by the arrow in FIG.
As shown in FIG. 13C, which is an enlarged view of the part marked with a circle, the cam follower 48 'partially falls into the retraction part 59' from the position shown by the dashed line as shown by the solid line. The valve shaft 22 is tilted, and the valve body 21 is moved to the valve seat 1.
Contact 3

In the first embodiment, one link 35
In the second embodiment, two links 35 'are used, but the number of links is not particularly limited. Further, the shape of the link may be other than the plate shape.

Further, in the first and second embodiments, the gate valves 1 and 2 having the horizontally elongated rectangular valve body 21 have been exemplified. However, the shape of the valve body may be other shapes, for example, a square shape or a circular shape. The shape of the valve body is not limited. In the first and second embodiments, the case where the upper end of the piston rod 32 and the lower end of the valve shaft 22 are directly connected by the link 35 or the two links 35 ′ is exemplified. A third rod is interposed between the third rod and the valve shaft 2.
2 may be connected by link 35 or link 35 '.

Further, in the first and second embodiments, the gate valves 1 and 2 having only one air cylinder 31 have been described. One valve shaft may be operated. In the first and second embodiments, the guide / cam followers 46, the cam followers 47, and the sub-cam followers 48 are provided in the guide grooves 56 and 57 provided in the frame 52.
Or, the case where the guide groove is moved up and down by fitting into 58 is shown, but the guide groove may be provided on a side wall of the air cylinder depending on a place other than the frame, for example, an installation place of the air cylinder,
The location where the guide groove is provided is not limited.

In the first and second embodiments, the gate valves 1 and 2 each having one valve shaft 22 are shown. However, in the case of a large valve body, two or three valve shafts are used. Is done. The present invention is also applied to a gate valve having a plurality of valve shafts.

[0055]

The mounting mechanism of the gate valve and the valve element according to the present invention is embodied in the form described above, and has the following effects.

According to the gate valve of the first aspect, since the mechanism for operating the valve body is provided outside the valve body or the valve box via the bellows, even if fine particles are generated by mechanical sliding. Do not contaminate the inside of the valve body or valve box. The link between the valve shaft and the piston rod is linked so that the valve is locked when the gate valve is closed, so the valve is closed even if pressurized air in the air cylinder is cut off. And the order in the manufacturing facility where the gate valve is installed is not disturbed. Further, since the valve shaft is supported by the spring, the valve shaft does not tilt except when the valve body is raised and reaches the position facing the valve seat. According to the gate valve of the second aspect, a stopper made of a material having a low elastic modulus is provided at the uppermost end of the guide groove, so that the impact caused by the collision and stopping is reduced, and the cam follower and the guide groove are deformed. Damage and damage can be avoided, and stable long-term opening and closing of the gate valve is guaranteed.

According to the third aspect of the present invention, since the mechanism for operating the valve element is provided outside the valve body or the valve box via the bellows, even if fine particles are generated by mechanical sliding. Do not contaminate the inside of the valve body or valve box. The valve body is locked when the gate valve is closed by connecting the valve shaft and the piston rod with a link, so that even if the pressurized air in the air cylinder escapes and becomes atmospheric pressure, for example, the valve body is closed. The state is maintained and the order in the production facility where the gate valve is installed is not disturbed. Furthermore, since the vertical movement of the valve shaft is guided and a sub-cam follower is provided in addition to the cam follower serving as the tilt axis of the valve shaft, the same guide groove or parallel guide groove is moved up and down.
The valve shaft does not tilt except when the valve body is raised and reaches a predetermined valve seat facing position. And since the spring which supports the valve body and the valve shaft is not used, there is no operation of the valve shaft against the tension of the spring, and even if the valve body and the valve shaft become large, the air cylinder becomes large. Can be suppressed.

According to the gate valve of the fourth aspect, since the stopper made of the low elastic modulus material is provided at the uppermost end of the first guide groove, the impact caused by the collision and stop of the cam follower is reduced. Deformation and damage of the cam follower and the first guide groove can be avoided, and stable long-term opening and closing of the gate valve is guaranteed. According to the gate valve of the fifth aspect, since the retracting portion of the sub cam follower is formed of a low elastic modulus material, the side wall of the guide groove is flat, and the vertical movement of the cam follower is ensured. The cam follower can be easily retracted.

According to the valve body mounting mechanism of the sixth aspect, the rotation of the valve body around the upper end of the valve shaft and the upper end of the valve shaft in a state where the fixing of the valve body to the valve shaft is loosened. After adjusting the parallelism of the surface of the valve body to the surface of the valve seat by changing the direction of the valve body on the convex spherical portion protruding from the outer peripheral surface on the valve seat side, the valve body is moved to the upper end of the valve shaft. Since the seal ring interposed between the seal ring and the seal ring does not contact one side and is uniformly compressed, the life of the seal ring is extended, and the seal ring does not slide on the valve seat and does not generate fine particles. According to the valve body mounting mechanism of the seventh aspect, since the convex spherical portion is formed at the tip of the bolt inserted and screwed into the upper end portion of the valve shaft, the production is easy and the degree of protrusion is easy. Can also be adjusted. According to the gate valve of claim 8, since the valve body is locked, the closed state is maintained even when the pressurized air of the air cylinder is cut off, and the mechanical element for operating the valve shaft is the valve body or the valve box. Since it is outside and the valve body itself does not slide, it does not generate contaminating particulates in the valve body or valve box.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a gate valve according to a first embodiment.

FIG. 2 is a sectional view taken along line [2]-[2] in FIG.

FIG. 3 is a sectional view taken along line [3]-[3] in FIG.

FIG. 4 is a view showing a state where the valve shaft is tilted from the state of FIG. 3;

FIG. 5 is a view showing the operation of a cam follower, where A is FIG.
B is an enlarged view of one guide groove portion of FIG.
It is sectional drawing of the [-B] line direction.

FIG. 6 is a longitudinal sectional view showing a mechanism for attaching a valve body to a valve shaft according to the present invention.

FIG. 7 is a partially broken plan view of a valve body.

FIG. 8 is a longitudinal sectional view of a gate valve according to a second embodiment.

9 is a cross-sectional view taken along the line [9]-[9] in FIG.

FIG. 10 is a sectional view taken along the line [10]-[10] in FIG.

11 is a view showing a state where the valve shaft is tilted from the state of FIG. 10;

12 is a view showing the operation of the cam follower, wherein A is a cross-sectional view taken along the line [12]-[12] in FIG. 8 and shows a state where the cam follower is at a lower end position; Shows the state of ascending to the position.

FIG. 13 is a diagram showing a modification of the arrangement of the cam followers and the sub cam followers.

FIG. 14 is a view showing a gate valve of Conventional Example 1;
Is a longitudinal sectional view, and B is a sectional view taken along line [B]-[B] in A.

FIG. 15 is a view showing a gate valve of Conventional Example 2;
Is a longitudinal sectional view, and B is a sectional view taken along line [B]-[B] in A.

16A and 16B are diagrams showing attachment of a valve body to a valve shaft in Conventional Example 3, in which A is a longitudinal sectional view, and B is a sectional view taken along the line [B]-[B] in A.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Gate valve 10 Valve body 13 Valve seat 2 21 Valve 22 Valve shaft 23 Mounting member 24 Bearing 28 Locking part 29 Bellows 31 Air cylinder 32 Piston rod 33 Lifting plate 34 Bearing 35 Link 38 Locking part 39 Tension spring 44 Tilt plate 46 Guide / Cam Follower 47 Cam Follower 48 Secondary Cam Follower 52 Frame 57 Guide Groove 58 Secondary Guide Groove

Claims (8)

[Claims] 1. A valve body that abuts and separates a valve seat at an opening inside a valve body or a valve box to open and close the opening, and the valve body or the valve box having the valve body at an upper end portion. The lower end is projected outside the valve body or the valve box via a bellows between the valve shaft, and the valve shaft is moved up and down to tilt and open and close the opening, and the valve shaft is operated. A gate valve comprising a piston rod to be moved, a shaft portion bearing provided on a lower end portion of the valve shaft on a side opposite to the valve seat, and an upper end portion of the piston rod or another member integral with the piston rod. The rod portion bearing provided on the valve seat side is connected in an inclined posture, and after the valve shaft is raised and the valve body is stopped at a position facing the valve seat, the valve shaft is brought into a horizontal posture. The valve A link for tilting the valve shaft, formed integrally with the valve shaft, fitted in a vertical guide groove parallel to the valve shaft, guiding the vertical movement of the valve shaft, and reaching the upper end position of the guide groove. A cam follower serving as a tilt axis of a valve shaft; one end of which is provided at a lower end of the valve shaft at a shaft portion locking member provided on the opposite side to the valve seat, and the other end of which is at the upper end of the piston rod; A gate that is provided at a position higher than the shaft portion locking tool and that is supported by the rod portion locking tool and that supports the valve shaft. 2. The gate valve according to claim 1, wherein a low elastic modulus material is embedded as a stopper at an uppermost end of the upper end position of the guide groove to which the cam follower reaches. 3. A valve body which abuts and separates a valve seat of an opening inside a valve body or a valve box to open and close said opening, and said valve body at an upper end portion, wherein said valve body or said valve box has The lower end is projected outside the valve body or the valve box via a bellows between the valve shaft, and the valve shaft is moved up and down to tilt and open and close the opening, and the valve shaft is operated. A gate valve comprising a piston rod to be moved, a shaft portion bearing provided on a lower end portion of the valve shaft on a side opposite to the valve seat, and an upper end portion of the piston rod or another member integral with the piston rod. The rod portion bearing provided on the valve seat side is connected in an inclined posture, and after the valve shaft is raised and the valve body is stopped at a position facing the valve seat, the valve shaft is brought into a horizontal posture. The valve A link for tilting the valve shaft; and a link formed integrally with the valve shaft and fitted in a first guide groove in a vertical direction parallel to the valve shaft to guide vertical movement of the valve shaft and an upper end of the first guide groove. A cam follower which is a tilt axis of the valve shaft at a position; and a cam follower which is provided close to the cam follower, is fitted in the first guide groove or a second guide groove parallel to the first guide groove, and moves up and down simultaneously with the cam follower. When the valve follower is tilted as the cam follower reaches the upper end position of the first guide groove and becomes the tilt axis,
A gate cam valve provided with a retracting portion for the auxiliary cam follower which is simultaneously moved around the tilt axis. 4. The gate valve according to claim 3, wherein a low elastic material is embedded as a stopper at an uppermost end of the upper end position of the first guide groove to which the cam follower reaches. 5. The gate valve according to claim 3, wherein the shunting portion is formed by cutting a side wall of the first guide groove or the second guide groove and embedding a low elastic material. . 6. A valve body that abuts and separates a valve seat of an opening inside a valve body or a valve box to open and close the opening, and the valve body or the valve box having the valve body at an upper end portion. The lower end is projected outside the valve body or the valve box via a bellows between the valve shaft, and the valve shaft is moved up and down to tilt and open and close the opening, and the valve shaft is operated. In the mechanism for attaching the valve body to the valve shaft of a gate valve having a piston rod to be rotated, an upper end portion of the valve shaft inserted from a central portion on a lower end side of the valve body rotates the valve body. At least partially having a cylindrical outer peripheral surface for holding the valve seat, and protruding from the outer peripheral surface on the valve seat side so that the direction of the valve element to be brought into contact with the valve seat can be freely changed. And provided with a convex spherical portion that abuts against the inner wall surface of the valve body. The degree of parallelism of the surface of the valve body with respect to the surface of the valve seat was adjusted by rotating the valve body around the cylindrical outer peripheral surface and changing the direction of the valve body by the convex spherical portion. And a mechanical fixing portion for fixing the valve body to the upper end of the valve shaft. 7. The bolt according to claim 6, wherein the convex spherical portion is formed at a tip end of a bolt that is screwed through the upper end of the valve shaft from a side opposite to the valve seat. Gate valve. 8. The gate valve according to claim 1, wherein the mounting of the valve body to the valve shaft is performed by the mounting mechanism according to claim 6 or 7.