JP4238255B2 - Vacuum gate valve and method for opening and closing the vacuum gate valve - Google Patents

Description

  The present invention relates to a gate valve (vacuum gate valve) used for maintaining a vacuum chamber in a semiconductor manufacturing apparatus or the like in a vacuum state.

  Conventionally, various types of gate valves have been proposed.

  In Patent Document 1, a valve plate and a counter plate, which are respectively opposed to and parallel to a valve seat surface and a base surface of a valve box, and a support plate provided between the valve plate and the counter plate are used. The valve body is slidable in a direction perpendicular to the axis, and a flexible leaf spring is formed on each face of the valve plate and the opposing plate at an acute angle θ with the sliding direction of the valve body. A vacuum gate valve configured to close and close a valve plate by bending a leaf spring with the support plate to enlarge the acute angle θ when the support plate is moved relative to the valve plate and the opposing plate. Has been.

  Patent Document 2 discloses a dual slot valve used in a semiconductor process cluster architecture arrangement, which includes a housing having a first surface and a second surface, and the housing includes a first module and a second module. Having a second slot having a first slot located on the first surface and a second slot located on the second surface for passing a substrate therebetween, the first module comprising: Attached to the first surface of the housing, the second module is attached to the second surface of the housing and is movable within the housing to allow the first slot to be closed And a second door movably mounted in the housing to allow the second slot to be closed. Dual slot valves are described.

  In Patent Document 3, a) a housing having a space and a pair of valve box openings that allow fluid to flow into and out of the space; and b) a fluid within the space that has a first valve box opening. A first valve body movable between a fully open position that allows passage and a fully closed position that seals the first valve box opening so that fluid cannot pass; and c) the interior. In the space, it pivots between a fully open position that allows fluid to pass through the second valve box opening and a fully closed position that seals the second valve box opening and prevents fluid from passing therethrough. A valve assembly with a second movable valve body is described.

  Even the applicant of the present application has proposed a gate valve shown in Patent Document 4.

Japanese Patent No. 2714473 Japanese translation of PCT publication No. 2002-540612 Special Table No. 2004-502105 JP 2005-76836 A

  Conventionally, as described above, the valve box having the first and second valve box openings, the valve seat provided around the edge of the valve box opening in the internal space, and the first and second valve box openings respectively. Although it is known that the first and second valve bodies that open and close are provided, a large load is required to open and close the valve because it is not sealed in a direction with good pressure conditions, that is, in the same pressure or positive pressure direction. In other words, the valve opening and closing operation and the sealing operation are integrally performed, so that the valve base portion is held by the operation portion. For this reason, the load on the valve is increased, resulting in an increase in the size of the operation unit and an increase in the weight of the valve.

  In view of the above, an object of the present invention is to provide a gate valve that is small, light, and inexpensive by reducing the load on the valve and making the opening / closing operation and the sealing operation of the valve independent.

  The present invention seals a valve box having two openings arranged opposite to each other, and an inner surface of the valve box, which is formed around each valve box opening, through a seal ring. A valve body assembly having two valve plates, and a gate core (valve shaft) that holds the valve body assembly in the vertical direction, the valve body assembly extending inside the valve box, and the valve body assembly vertically A gate valve having a first drive device that slides in a direction, the second drive device having two second drive devices fixed in the valve box in a longitudinal direction of the valve body assembly. An operation direction conversion unit that converts an operation force in the longitudinal direction generated by the second drive device into an operation force in a perpendicular direction between the device and the valve body assembly; and Assen The valve body assembly is held in a neutral position that is in a non-contact state with respect to the valve box, and a longitudinal operating force is generated by the second driving device, The operation direction conversion section converts the operation force in the longitudinal direction into any one of the orthogonal operation forces to move the valve body assembly in the neutral position in any one of the orthogonal directions, thereby opening one of the valve box openings. Is sealed with one valve plate of the valve body assembly through the seal ring, and the other valve plate of the valve body assembly in a neutral position is further opened from the other valve box opening. Provide a valve.

  Further, the present invention provides a valve body, and a valve body having two valve plates for sealing a valve box seating surface formed around each opening on the inner surface of the valve box through a seal ring. An assembly, a valve body assembly that includes a gate core (valve shaft) that holds the valve body assembly in the vertical direction and extends inside the valve box, and a first drive device that slides the valve body assembly in the vertical direction The gate valve has two second drive devices fixed to the valve box in the longitudinal direction of the valve body assembly, and the second drive device extends in the longitudinal direction. A cylinder rod and a rolling element attached to the tip of the cylinder rod are provided, and the two opposing rolling elements are arranged with a gap L therebetween, and the valve assembly is spaced in the longitudinal direction and in the gap L direction. From L It has an engagement part which has a large engagement width and engages with one of the rolling elements, and when one of the rolling elements engages with the engaging element, the other rolling element engages with the engaging element. The valve body assembly is moved to the non-engaging rolling element side, and one of the valve box openings is sealed with one valve plate of the valve body assembly via the seal ring, and the other valve box is sealed. There is provided a gate valve characterized in that the opening is further opened from the other valve body assembly.

  Further, the present invention provides a gate valve characterized in that the rolling element rolls along the inner surface of the valve box.

  According to the present invention, the valve body assembly is provided between two valve plates, a pin provided between the valve plates in an opening / closing direction, and the valve body, and the first driving device. A gate valve comprising a gate core connected to the cylinder rod is slidable with respect to the pin.

  According to the present invention, there is provided a gate valve characterized in that the second driving device is provided opposite to both sides in the longitudinal direction of the valve body assembly, and both opposing rolling elements operate synchronously. provide.

  Furthermore, the present invention includes a valve box, a valve body assembly that seals a seating surface on the inner surface thereof through a seal ring, and a gate core that holds the valve body assembly in a vertical direction. Two second drive devices that are provided in the longitudinal direction of the valve body assembly and are fixed to the valve box, the valve body assembly extending, and a first drive device that slides the valve body assembly in the vertical direction. , And a gate opening / closing method using a gate valve provided with a conversion unit that converts a longitudinal operation force generated by the second drive device into a right-angle operation force, the valve body assembly by the first drive device. Holding the valve body assembly in a neutral position in a non-contact state with respect to the valve box, and And generating the operating force in the longitudinal direction and converting the operating force in the longitudinal direction into any one of the operating forces in the perpendicular direction by the operating direction conversion unit, and The valve body is sealed with one valve plate of the valve body assembly through the seal ring, and the other valve body assembly in the neutral position is sealed with the other valve box. There is provided a gate valve opening / closing method characterized by further opening from a seating surface.

  In the present invention, when the gate valve is provided between the vacuum transfer chamber, the vacuum processing chamber, and the vacuum processing chamber, when the vacuum of the vacuum processing chamber is opened or weakened, the valve body A gate valve characterized by sealing one valve box opening of the valve plate on the vacuum transfer chamber side of the assembly through a seal ring to further open the other valve plate of the valve body assembly from the other valve box opening. Provide an opening and closing method.

  According to the present invention, the opening / closing operation and the sealing operation of the valve are independent, and the sealing operation is an operation to be pressed in the vertical direction with respect to the valve seat, so there is no need to hold the valve body portion at the operation portion, A small and inexpensive gate valve can be provided. In addition, sealing can be performed in the same pressure / positive pressure direction with good pressure conditions, and the burden on the valve can be reduced.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a view showing an appearance of a gate valve 100 according to an embodiment of the present invention. In FIG. 1, a gate valve (valve) 100 includes a valve box (housing) 1 indicated by a chain line, and openings 17 in FIG. 3 respectively housed in the valve box 1 and provided at positions facing the valve box 1. 18 is a valve body assembly 2 that opens and closes 18, a first cylinder 3 that is a first drive device that opens and closes the valve body assembly 2, and a second drive device that performs a seal operation of the valve body assembly 2. A second cylinder 4. The valve box 1 has openings 17 and 18 formed therein. The first cylinder 3 and the second cylinder 4 are controlled by a system control device (not shown) so that the opening / closing operation and the sealing operation by the valve body assembly 2 are performed independently. In FIG. 1, an opening / closing operation and a sealing operation are performed by arrows, and each cylinder 3, 4 is supplied with Air from an Air (air) source 6, and the cylinder rods 7, 8 of each cylinder 3, 4 operate. Reference numeral 5 denotes, for example, an O-ring as a seal ring (seal material) provided in the valve body assembly 2.

  As shown in FIG. 1, the valve body assembly 2 is moved up and down in the vertical direction by two first cylinders 3 arranged on the left and right, and two each of the valve body assemblies 2 arranged at both longitudinal positions of the valve body assembly 2. The second cylinder 4 is operated in a direction perpendicular to the vertical direction. The mechanism by which the operating force in the longitudinal direction by the second cylinder 4 is converted into the operating force in the perpendicular direction will be described later. Accordingly, herein, the right-angle direction is the direction perpendicular to the vertical direction and the direction of the openings 17 and 18 provided in the valve box 1. The two second cylinders 4 are juxtaposed in the longitudinal direction, and the cylinder rods 8 attached to the second cylinders 4 are set at specific intervals and are arranged in the horizontal direction in the longitudinal direction.

  Since the operations of the valve assembly 2 by the two second cylinders arranged on the left and right are synchronized and perform the same operation, the second cylinder 4 on one side will be mainly described below. The description of the second cylinder 4 on the side is incorporated. The same applies to the first cylinder 3.

  FIG. 3 is a cross-sectional view of the valve box 1 and the valve body assembly 2 taken along a section of the first cylinder 3.

  2 and 3, the valve box 1 includes an upper lid 15 and a lid 16 that are integrated with bolts 13 at the top and bottom. Openings 17 and 18 are formed in the valve box 1, and the openings 17 and 18 are disposed, for example, toward the vacuum transfer chamber and the vacuum processing chamber of the semiconductor manufacturing apparatus, respectively.

  A first cylinder 3 is provided below the valve box 1 and is fixed to the lower lid 16 by a bolt 19. The first cylinder 3 includes a cylinder rod 7 that extends upward, that is, into the space 21 of the valve box 1. Reference numeral 20 denotes a ground provided between the cylinder rod 7 and the lower lid 16.

  A valve body assembly 2 is provided in the space 21 so as to face the openings 17 and 18. The valve body assembly 2 includes valve body plate portions 22 and 23, and connecting pieces 24 and 25 are connected to the valve body by bolts 30. It is attached to the assembly 2.

  In FIG. 3, a cylinder in which a gate core (valve shaft) 32 is provided in a vertical direction in a space 31 (a space between the valve body plate portions 22 and 23) of the valve body assembly 2 and penetrates a long hole 33 provided in the gate core 32. The rod 7 is integrated with a bolt 34. An O-ring 5 (5A, 5B) is provided on the outer surface of the valve body assembly 22 toward the seating surface (valve box seating surface) of the inner surface of the valve box 1.

  As described above, the valve body plate portions 22 and 23 for sealing the seating surface formed around the inside of the openings 17 and 18 of the valve box 1 through the O-ring 5 and the valve body plate portion are held in the vertical direction. The valve body assembly 2 is configured to include the gate core 32. The valve body assembly 2 is provided by extending the space 21 inside the valve box 1 in the vertical direction. The first cylinder 3 slides the valve assembly 2 in the vertical direction, that is, moves it up and down.

  FIG. 4 is a cross-sectional view of the valve box 1 and the valve body assembly 2 at a position outside the cross-sectional portion of the first cylinder 3.

  In FIG. 4, a space 41 communicating with the valve body plate portions 22 and 23 and the gate core 32 is formed. In this space 41, a cylindrical pin 42 is provided in a right angle direction (horizontal direction), and provided around the pin 42. A guide 43 having a flange portion 47, pin retainers 44 and 45 and springs 46 and 48 provided on the outer surface side of the valve body plate portions 22 and 23 are provided. The spring 46 presses the flange portion 47 in the step direction so that the flange portion 47 of the guide 43 is engaged with the step provided on the gate core 32.

  With such a configuration, the gate core 32 is moved up and down by the cylinder rod 7 (FIG. 2), and the valve body plate portions 22 and 23 are also moved up and down via the pins 42 in accordance therewith. Further, even if the valve body plate portions 22 and 23 are moved in the right angle direction and the pin 42 is moved in the right angle direction in this state, the relative position between the guide 43 and the flange portion 47 does not change, that is, the gate core 32 is in the neutral position. Keep. Therefore, the operation of the first cylinder 3 is not hindered.

  FIG. 5 is a diagram illustrating a configuration of the operation direction conversion unit 50 that converts the operation force in the longitudinal direction of the second cylinder 4 into an operation force in a perpendicular direction without applying a rotation direction operation.

  Two second cylinders 4 (4A) and 4 (4B) are provided via a gland 51 provided at an end portion of the valve box 1 in the longitudinal direction. The second cylinder 4 includes cylinder rods 52 and 53, respectively, and the cylinder rods 52 and 53 extend in the direction of two parallel through holes 54 and 55 formed at the longitudinal ends of the valve box 1. To do. Rolling body holding portions 58 and 59 attached by bolts 56 and 57 are provided at the ends of the cylinder rods 52 and 53, and the rolling bodies 60 and 61 are rotated at the ends of the rolling body holding portions 58 and 59, respectively. It is attached as possible.

  When the cylinder rods 52 and 53 move in the longitudinal direction, the rolling element holding portions 58 and 59 and the rolling elements 60 and 61 move in the longitudinal direction. In this case, the rolling elements 60 and 61 roll on roller guides 64 and 65 attached to the valve box 1 by bolts 62 and 63, respectively. And the rolling elements 60 and 61 can roll to the position shown with a chain line.

  On the other hand, a holding plate 70 is provided at the longitudinal ends of the valve body plate portions 22 and 23, and a valve pressing guide 67 is attached to the holding plate 70 by bolts 65 and 66. The corners of the valve presser guide 67 are spherical and smooth.

  The rolling elements 60 and 61 are disposed with a gap L therebetween. That is, the gap between the lower end surface and the upper end surface of the rolling elements 60 and 61 facing each other is set to L. On the other hand, the width l between the upper and lower surfaces of the valve presser guide 67 constituting the engaging body is slightly longer than L. These lengths L and l are determined depending on the gap length between the valve body assembly 2 and the seating surface and the size of the O-ring.

  The selected one of the cylinder rods 52 and 53 is configured to extend in the longitudinal direction, so that only one of the rolling elements is engaged with the valve presser guide 67. For example, when 4 </ b> A of the first cylinder 4 operates, the rolling element 60 engages with the valve presser guide 67, but the rolling element 61 does not engage with the valve presser guide 67. When the rolling element 60 is engaged with the valve presser guide 67, the valve presser guide 67 moves in a right angle direction (downward in FIG. 5) as the rolling element 60 advances in relation to the gap L. Conversely, when 4B of the first cylinder 4 operates, the rolling element 61 engages with the valve presser guide 67, but the rolling element 60 does not engage with the valve presser guide 67. When the rolling element 61 engages with the valve presser guide 67, the valve presser guide 67 moves in a right angle direction (upward in the drawing) as the rolling element 61 advances in relation to the gap L.

  In this case, the valve presser guide 67 moves directly in the right angle direction, and the valve body assembly 2 integrated with the valve presser guide 67, that is, the valve body plate portions 22 and 23 also move in the right angle direction. As described in the configuration shown in FIG. 4, the gate core 32 maintains the neutral position even when the valve body plate portions 22 and 23 move in the right-angle direction.

  In this way, the operation direction conversion unit 50 that directly converts the operation force in the longitudinal direction generated by the second cylinder 4 between the second cylinder 4 and the valve body assembly 2 into the operation force in the perpendicular direction is provided. Composed.

  The operation direction conversion unit 50 may adopt a known configuration as long as it converts the operation force in the longitudinal direction into the operation force in the right angle direction.

  According to the above configuration, the valve body assembly 2 is moved in the vertical direction by the first cylinder 3 to hold the valve body assembly 2 in the neutral position in which the valve plate portions 11 and 12 are not in contact with each other. Then, a longitudinal operation force is generated by the second cylinder 4, and the valve body assembly in the neutral position is converted by the operation direction conversion unit 50 into any one of the orthogonal operation forces. In this case, the gate core 32 continues in the neutral position, and seals one valve seat surface to one inner valve seat surface via the O-ring, and the other in the neutral position. The inner valve seat surface is further opened from the other outer valve seat surface.

  More specifically, it has two second cylinders 4 fixed to the valve box 1 in the longitudinal direction of the valve body plate portions 22 and 23, and the second cylinder 4 extends in the longitudinal direction. Cylinder rods 52 and 53, and rolling elements 60 and 61 attached to the tip ends of the cylinder rods 52 and 53, the two opposing rolling elements 60 and 61 are arranged with a gap L therebetween, and the valve assembly 2 is A valve box having an engagement body (valve presser guide 67) that has an engagement width (that is, width l) larger than the gap L in the longitudinal direction in the gap L direction and that engages with any of the rolling elements 60 and 61. 1 and the valve body assembly 2 are configured. According to this configuration, when one of the rolling elements 60 and 61 is engaged with the engaging body, the other rolling element is not engaged with the engaging body, whereby the valve body assembly 2 is configured. Moves to the side of the rolling element that does not engage Allowed to seal one of the outer valve seat surface in the O-ring 5 to one of the inner valve seat surface through further be made that is made to open the other of the outer valve seat surface from the other of the inner valve seat surface.

Three operations of the gate valve 100 configured as described above will be described with reference to FIG.
6 (a) shows the gate valve open state, FIG. 6 (b) shows the gate valve open state, FIG. 6 (c) shows the valve seal state, and FIG. 6 (d) shows FIG. 6 (c). The valve seal state is shown enlarged.

  When the gate valve is in the open state shown in FIG. 6A, the valve body assembly 2 is moved downward by the inoperative operation of the first cylinder 3 and is located at the lowest position. The valve box openings 17 and 18 are open. In this state, the vacuum transfer chamber and the vacuum processing chamber are in the same vacuum state.

  In the gate valve open state shown in FIG. 6B, Air is supplied from the Air source 6 to the first cylinder 3 to operate, and the valve body operates upward in the valve body vertical direction. As a result, the valve boxes 17 and 18 are closed. However, in this state, sealing has not yet been performed, and the valve body assembly 2 is in a neutral position with respect to the valve box 1.

  In the valve seal state shown in FIG. 6C, the air supply to the first cylinder 3 is stopped, and the air supply to the second cylinder 4 is performed. The direction of operation of the operation direction conversion unit 50 is determined by an instruction from the control device of the system, and any one of the rolling elements 60 and 61 presses the engagement unit (valve presser guide 67), thereby causing the operation force in the longitudinal direction to be perpendicular. The inner valve seat surface is bonded to the outer valve seat surface via the O-ring 5 to perform valve sealing. In this case, when the gate valve 100 is provided between the vacuum transfer chamber and the vacuum processing chamber, when the vacuum in the vacuum transfer chamber is opened or weakened, the valve body assembly located at the vacuum processing chamber side 2 is provided. 2 is sealed to the seating surface through a seal ring (O-ring 5), and the valve body assembly 2 is further opened from the other seating surface from the vacuum transfer chamber side.

  According to the above configuration, the first drive device moves the valve body assembly in the vertical direction to hold the valve body assembly in a neutral position that is in a non-contact state with respect to the outer valve plate part. And a step of generating a longitudinal operation force by the second driving device, and converting the longitudinal operation force into any one of the orthogonal operation forces by the operation direction conversion unit. The valve body assembly 2 located in the neutral position is sealed through a seal ring so that the valve body assembly 2 in the neutral position is further opened from the other seat surface. it can.

  A step of moving the valve body assembly 2 in the vertical direction by the first driving device to hold the valve body assembly 2 in a neutral position in a non-contact state with respect to the valve plate portions 11 and 12; Generating a longitudinal operating force by the second driving device, and converting the longitudinal operating force into any one of the orthogonal operating forces by the engagement of the rolling elements and the engaging body. The valve body assembly 2 in the neutral position is moved in one of the right-angled directions and sealed on one seat surface through the seal ring, and the valve body assembly 2 in the neutral position is further opened from the other seat surface. can do.

  FIG. 6D shows an enlarged view of this valve seal situation. The valve body assembly 2 in the neutral position in the non-contact state closes the valve box opening through the O-ring 5 on the lower side in the drawing by the operation of the operation direction changing portion 50.

  According to the above embodiment, the following characteristic configuration and merit can be provided.

1) Two-way selective sealing method Instead of a mechanism that maintains the same pressure to reverse pressure with a conventional single-sided seal, it is possible to reduce the load on the valve by sealing in a direction with good pressure conditions (same pressure / positive pressure). it can.

2) Miniaturization of operation part (downsizing)
Since the opening / closing operation and the sealing operation of the valve are independent, it is not necessary to hold the valve body portion with the operation portion as in the conventional case, and the size can be reduced.

3) Easy maintenance To replace the seal ring, for example, the O-ring, remove the upper lid from the valve box and remove the two bolts connected to the cylinder rod of the open / close cylinder, and take out only the valve assembly. It is possible. There is no need to remove each valve operating part as in the past.

4) Low particle By using rolling elements for sealing operation, the dust generation location can be kept to the limit.

5) Ultra-low vibration and quiet operation The valve assembly assembly can be opened and closed and sealed using a cylinder with an air cushion.

6) Torsion of the seal ring, for example, O-ring, is reduced to perform perfect vertical sealing operation against the sealing surface. The opening / closing operation of the valve body assembly and the sealing operation are independent, and the sealing operation is pressed completely vertically. can do.

7) A seal ring, for example, an O-ring, can have a long life, that is, a maintenance cycle can be prolonged. (In order not to give excessive seal ring crushing force)
Unlike the conventional structure in which a single-sided seal is used to maintain positive pressure to reverse pressure, the valve seal is performed in two directions (selective), so there is no need to consider the excessive load that can withstand reverse pressure. In other words, since it is sufficient to maintain the sealing force only at the same pressure, it is not necessary to apply an excessive load to the O-ring as a sealing material.

8) It can be sealed against a slight pressure increase during the process.
Although it is a little contradictory to 3, in operation with the actual device attached, a slight slight back pressure may still occur due to gas introduction during the process. In consideration of this, the gate valve 100 of the present embodiment enables sealing from the same pressure to a slight reverse pressure on one side.

The schematic external view of the gate valve which is an Example of this invention. The vertical view of the center part of the gate valve which is an Example. The longitudinal cross-sectional view in the cylinder part of FIG. The longitudinal cross-sectional view in a part slightly outside from the part of a cylinder. The block diagram of an operation direction conversion part. 3 motion (operation) diagram of the present embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Valve box, 2 ... Valve body assembly, 3 ... 1st cylinder (1st drive device), 4 ... 2nd cylinder (2nd drive device), 5 ... O-ring (seal ring), 6 ... Air (air) source, 7 ... cylinder rod, 11, 12 ... valve plate part, 17, 18 ... valve box opening, 21 ... space, 22, 23 ... valve body plate part, 31 ... space, 32 ... gate core (valve shaft) , 41 ... Space, 42 ... Pin, 43 ... Guide, 44, 45 ... Pin presser, 46 ... Spring, 47 ... Hook part, 50 ... Operation direction changing part, 51 ... Ground, 52, 53 ... Cylinder rod, 54, 55 ... Through-hole, 58, 59 ... Rolling body holding part, 60, 61 ... Rolling body, 100 ... Gate valve.

Claims (7)

A valve body having a valve box opening disposed opposite to the valve body, a valve body assembly that seals a seating surface opposed to the inner surface of the valve box opening of the valve box through a seal ring, and the valve body assembly in a vertical direction. in the gate valve with a Getokoa for holding a first driving device for sliding the valve body assembly in a vertical direction, to,
Two second drive devices fixed to the valve box for generating an operating force in a horizontal direction of the valve body assembly, and the second drive device and the valve body assembly between the second drive device and the second drive device. An operation direction conversion unit that converts a horizontal operation force generated by the driving device into a seating surface operation force is provided, and the valve body assembly is moved in the vertical direction by the first driving device, thereby the valve body assembly. Is held in a neutral position that is not in contact with any of the opposing seating surfaces of the valve box,
A horizontal operating force is generated by the second driving device,
The operation direction conversion unit converts the horizontal operation force into an operation force in any seating surface direction of the opposing seating surface, and moves the valve body assembly in the neutral position in any seating surface direction. Te, gate valve, characterized in sea away Rukoto one of said valve body opening in the valve body Assenbu Li through the seal ring. A valve casing having a valve body opening arranged opposite the bearing surface are respectively opposed to the inner surface of the valve body opening of the valve box, a valve body assembly for sealing with a seal ring, the vertical direction the valve body assembly in the gate valve with a Getokoa for holding a first driving device for sliding the valve body assembly in a vertical direction, to,
Two second driving devices fixed to the valve box for generating an operation force in a horizontal direction of the valve body assembly;
The second drive device includes a cylinder rod extending in the horizontal direction and two opposing rolling elements attached to the tip of the cylinder rod,
The two opposing rolling elements are arranged with a gap L therebetween,
Said valve body assembly, has a greater engagement width than the gap L between gap L direction, an engagement portion which engages with one of the rolling elements that roll on the seat surface direction,
When one of the rolling elements is engaged with the engaging body, the other rolling element is not engaged with the engaging body, so that the valve body assembly is moved to the non-engaging rolling element side, and the valve box opening is opened. gate valve according to claim sea away Rukoto before Kibentai Assenbu Li through the seal ring one.   3. The gate valve according to claim 2, wherein the rolling element rolls along an inner surface of the valve box.   3. The valve body assembly according to claim 2, wherein the valve body assembly includes two valve plates, a pin provided between the valve plates in an opening / closing direction, and the cylinder rod of the first drive device. A gate valve comprising a gate core connected to the pin so as to be slidable with respect to the pin. According to claim 2, wherein the second driving device, horizontally juxtaposed provided opposite, the rolling elements against countercurrent gate valve, wherein the resulting Rukoto operate synchronously in the valve body assembly. A valve body having a valve box opening disposed opposite to the valve body, a valve body assembly that seals a seating surface opposed to the inner surface of the valve box opening of the valve box through a seal ring, and the valve body assembly in a vertical direction. and Getoko a holding in a first driving device for sliding the valve body assembly in a vertical direction, before there in the horizontal direction of the Kibentai assembly, fixed two second driving device to the valve body When a conversion unit for converting the horizontal direction of the operating force produced by the second drive unit to the operating force of the seat surface direction, the gate opening and closing method of the gate valve with a
Moving the valve body assembly in the vertical direction by the first driving device to hold the valve body assembly in a neutral position that is not in contact with any of the valve box openings of the valve box ;
Generating a horizontal operating force by the second driving device;
The operation direction conversion unit converts the horizontal operation force into an operation force in any seating surface direction of the opposing seating surface and moves the valve body assembly in the neutral position in any seating surface direction. , before sealed with the valve body Assenbu Li through the seal ring one of Kiben box opening, the Kibentai assembly before that was in the neutral position further from the other valve body opening opposite to the opening of the valve body A gate valve opening and closing method characterized by opening. The valve element assembly according to claim 6, wherein when the gate valve is provided between the vacuum transfer chamber and the vacuum processing chamber, when the vacuum of the vacuum processing chamber is opened or weakened, the valve assembly is provided. and sheet Lumpur in one valve body aperture in the valve plate of the vacuum transfer chamber side, of the gate valve, characterized by further opening the one of the other valve plate to which the valve body assembly having the other of the valve box opening Opening and closing method.

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