JP2005240883A - Vacuum gate valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum gate valve capable of operating sure and smooth open-close operation without damaging a seal member, excellent in sealing performance, and capable of making whole device compact. <P>SOLUTION: This vacuum gate valve is provided with a valve main body having opening passing through two opposing side walls, a valve plate provided inside of the valve main body and opening and closing the opening of the valve main body by moving between a valve close position and a valve open position along a direction roughly in parallel with the opening, and a valve plate drive mechanism moving the valve plate between the valve open position and the valve close position. The valve drive mechanism is provided with a guide rail arranged on one end side of the valve plate, a valve plate hanging member sliding along the guide rail and hanging the valve plate, and a valve plate moving device moving the valve plate between the valve open position and the valve close position by reciprocating the valve plate hanging member along the guide rail. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vacuum gate valve used, for example, between a vacuum chamber and an external atmosphere or between vacuum chambers in a semiconductor manufacturing apparatus or the like.

  In semiconductor manufacturing such as silicon wafers, thin film manufacturing, liquid crystal manufacturing, and the like, film forming processing of devices such as sputtering and plasma etching is performed in a high environment in a clean environment.

  In these manufacturing apparatuses, for example, a vacuum gate valve is used to open and close the chambers between the vacuum chamber and the external atmosphere and between the vacuum chambers. Various vacuum gate valves have been conventionally known as the vacuum gate valve, and one of them is one that performs sealing with an infra-teal seal when the valve is closed (see, for example, Patent Documents 1 and 2). reference).

  FIG. 10 shows an example of a conventional vacuum gate valve using this inflatate seal. The vacuum gate valve 100 includes a valve box body 102 and a valve plate 103 provided inside the valve box body 102. The valve box main body 102 is formed with openings 104a and 104b penetrating through the two opposing side walls.

  On the both surfaces of the valve plate 103, an inflate seal 105 is attached at a position where the valve plate 103 comes into contact with the inner surface of the side wall of the valve box body 102. The inflate seal 105 is formed in an air passage formed inside the valve plate 103. 133 is in communication.

When closing the valve box body 102 in the opened state, the air cylinder 131 at the top of the valve box body 102 is driven to close the valve plate 103 attached to the end thereof via the cylinder rod 132. Move to position. Then, air from the air cylinder 131 is introduced into the air passage 133 formed inside the valve plate 103 through the inside of the cylinder rod 132, and the inflate seal 105 is expanded by the air pressure so as to expand the inner surface of the side wall of the valve box body 102. Thus, the space between the inner surface around the openings 104a and 104b of the valve box main body 102 and the valve plate 103 is sealed with an inflate seal 105 to close the valve.
JP-A-5-215249 JP 2000-145980 A

  However, in the conventional vacuum gate valve 100, it is necessary to arrange the inflating seal 105 in a closed annular state along the periphery of the openings 104a and 104b.

  For this reason, the cost of the inflate seal 105 is high, and the cost becomes extremely high particularly when it is made of a highly functional elastomer. In addition, in order to arrange the inflate seal 105 in a closed annular state, the structure to be attached to the valve plate 103 is complicated, and the inflatate seal 105 communicates with the air passage 133 provided inside the valve plate 103. The structure is also complicated.

Further, in the conventional vacuum gate valve 100, as shown in FIG. 10, when the valve is closed, the internal spaces 106 and 108 of the driving unit of the valve box body 102 and the chambers 110 and 112 are connected to the inflate seal 105. Sealed and separated by the internal space 106
, 108 are in an atmospheric pressure state, and the chambers 110 and 112 are in a vacuum state.

  For this reason, the inflate seal 105 is pressed and deformed due to the pressure difference between the internal spaces 106 and 108 and the chambers 110 and 112 toward the chambers 110 and 112 in a vacuum state, and the sealing performance is deteriorated. At the same time, frictional force is generated by the movement accompanying deformation on the seal surface, and the inflate seal 105 is worn and damaged, the seal performance is lowered, particles are likely to be generated, and the inside of the chamber can be contaminated. Increases nature.

  Further, the inflate seal 105 is made of rubber or the like so that it can be expanded by supplying air to the inside. However, since the seal surface of the inflate seal 105 has a fine surface roughness, a temperature such as a high temperature is used. Depending on the environment, the inflate seal 105 may adhere to the inner surface of the side wall of the valve box body 102 when the valve is closed.

  For this reason, the valve cannot be opened, and if the valve is opened forcibly, the inflate seal 105 is damaged and damaged, and the sealing performance is lowered and particles are generated. It becomes easy and the possibility of contaminating the inside of the chamber increases.

  Furthermore, as shown in FIG. 11, there is a conventional vacuum gate valve 200 called a “two-action type”. In this case, after the valve plate 203 is moved to the valve closing position, the valve is moved by the drive mechanism. The valve plate 203 is moved to the opening 204a side of the box body 202, and the opening 204a is closed by a seal member 205 provided on the opening 204a side of the valve plate 203.

  In such a conventional gate valve for vacuum 200 called a “two-action type”, the driving mechanism is complicated and the cost is high.

  In view of such a current situation, the present invention can surely and smoothly open and close during the opening and closing operation, has excellent sealing performance without causing damage to the sealing member, and can further downsize the entire apparatus. An object of the present invention is to provide a vacuum gate valve.

  Further, according to the present invention, a normal O-ring member can be used for the valve plate as a seal member. In addition, the valve plate can be reliably sealed in the closed state, and the closed state can be released to open the valve. An object of the present invention is to provide an inexpensive vacuum gate valve that can be reliably operated, has little wear damage to the seal member, and has a very low risk of particle generation.

The present invention was invented in order to achieve the above-described problems and objects in the prior art, and the vacuum gate valve of the present invention is a valve box in which an opening penetrating two opposing side walls is formed. The body,
A valve plate that is provided inside the valve box body, and that opens and closes the opening of the valve box body by moving between a valve opening position and a valve closing position along a direction substantially parallel to the opening;
A vacuum gate valve comprising a valve plate drive mechanism for moving the valve plate between a valve open position and a valve close position;
The valve plate driving mechanism is disposed on one end side of the valve plate,
The valve plate drive mechanism is
A guide rail disposed on one end side of the valve plate;
A valve plate suspension member that slides along the guide rail and suspends the valve plate;
And a valve plate moving device that moves the valve body between a valve opening position and a valve closing position by reciprocating the valve plate suspension member along a guide rail.

  Since the valve plate drive mechanism is arranged on one end side of the valve plate in this way, the space for the valve plate drive mechanism can be reduced and the entire apparatus can be made compact.

  In addition, the valve plate suspension member that suspends the valve plate slidably guides along the guide rail in a suspended state, so that the other end side of the valve plate is not restrained at all. Therefore, the opening and closing operation can be performed smoothly and reliably, and the sealing member is not damaged or damaged, so that it can be reliably sealed and no particles are generated.

  Moreover, since the other end side of the valve plate is not restrained at all, the shaft seal portion of the drive mechanism or the like is not damaged and the sealing function is not deteriorated.

  In the vacuum gate valve of the present invention, the valve plate suspension member includes a link mechanism, and the valve plate is brought into close contact with the opening in a substantially vertical direction at the valve closing position of the valve plate. It is comprised so that it can do.

  Thus, since the valve plate suspension member includes the link mechanism, the valve plate can be brought into close contact with the opening in the substantially vertical direction at the valve-closed position of the valve plate. Since the lateral force is not received, the sealing member is not damaged and damaged, and the sealing performance is improved.

  In addition, even when the valve plate is moved by receiving the differential pressure by the link mechanism, the movement is buffered by the link, so that no force is directly transmitted to the drive mechanism. There is no possibility that the sealing function is deteriorated due to breakage and damage to the parts.

In addition, the vacuum gate valve of the present invention is attached to the valve plate and is an elongated tubular expansion / closing drive member that can be expanded by supplying air to the inside,
A long tubular expansion / disengagement release drive member attached to the valve plate and expandable by supplying air to the inside;
A seal member attached to the valve plate along the periphery of the opening;
In the valve closing position, by supplying air to the inside of the expansion / closing driving member, the expansion / closing driving member is inflated, and the valve plate is pressed to the opening side. And configured to hermetically close the opening,
The supply of air to the inside of the expansion / closing drive member is stopped, and air is supplied to the inside of the expansion / closure release drive member to inflate the expansion / closure release drive member, so that the valve plate is removed from the opening. It is configured to move in a separating direction, thereby releasing the hermetically closed state of the opening by the sealing member of the valve plate.

  With this configuration, by supplying air to the inside of the expansion / closing drive member at the valve closed position, the valve plate is pressed to the opening side only by expanding the expansion / close drive member, and the valve plate The opening can be reliably hermetically closed by the seal member.

  Therefore, a normal O-ring member can be used for the valve plate as the seal member, the structure is simple, various known seal materials can be used, and the cost can be reduced.

In addition, by supplying air to the inside of the expansion / closure release drive member, the valve plate moves in a direction away from the opening simply by inflating the expansion / closure release drive member, and the opening is sealed by the valve plate seal member. The closed state can be released.

  Therefore, even if the sealing member is fixed between the inner surface of the side wall of the valve box body in the closed state due to a temperature environment such as a high temperature, the closed state can be released and the valve opening operation can be performed reliably. Further, it is possible to provide a long-life vacuum gate valve with little wear damage to the seal member and extremely low possibility of generation of particles.

  Further, the differential pressure between the vacuum chamber and the internal space of the valve box acts on a seal member, which is separated from the vacuum chamber by the seal member, and these expansion and closing drive members And the expansion / closure release driving member only applies a load in the compression direction, i.e., the driving direction. In addition, it is possible to provide a long-life vacuum gate valve that is less likely to be damaged by wear and has a very low risk of generating particles.

  According to the present invention, since the valve plate driving mechanism is disposed on one end side of the valve plate, the space for the valve plate driving mechanism can be reduced, and the entire apparatus can be made compact.

  In addition, the valve plate suspension member that suspends the valve plate slidably guides along the guide rail in a suspended state, so that the other end side of the valve plate is not restrained at all. Therefore, the opening and closing operation can be performed smoothly and reliably, and the sealing member is not damaged or damaged, so that it can be reliably sealed and no particles are generated.

  Moreover, since the other end side of the valve plate is not restrained at all, the shaft seal portion of the drive mechanism or the like is not damaged and the sealing function is not deteriorated.

  In the vacuum gate valve of the present invention, since the valve plate suspension member includes a link mechanism, the valve plate can be brought into close contact with the opening in the substantially vertical direction at the valve closing position. Since the seal member does not roll or receive a lateral force, the seal member is not damaged or damaged, and the sealing performance is improved.

  In addition, even when the valve plate is moved by receiving the differential pressure by the link mechanism, the movement is buffered by the link, so that no force is directly transmitted to the drive mechanism. Parts and the like are not damaged and the sealing function does not deteriorate.

  Hereinafter, embodiments (examples) of the present invention will be described in more detail with reference to the drawings.

  FIG. 1 is a schematic front view of the vacuum gate valve of the present invention in a closed position, FIG. 2 is a schematic diagram of the front and back surfaces of a valve plate 14, and FIGS. It is an upper surface expanded sectional view of the gate valve for vacuum in the BB line of FIG. 1 explaining the action | operation state of a gate valve.

  As shown in FIG. 1, the vacuum gate valve 10 of the present invention includes a valve box body 12 and a substantially rectangular valve plate 14 provided inside the valve box body 12. The valve box main body 12 is formed with substantially rectangular openings 16a and 16b penetrating through the opposing two side walls 12a and 12b. The openings 16a and 16b communicate with the chambers 11 and 13 (not shown). .

The valve plate 14 moves between the valve opening position and the valve closing position along the direction substantially parallel to the openings 16a and 16b inside the valve box body 12. In this embodiment, the moving direction of the valve plate 14 is the horizontal direction, but this moving direction is not particularly limited and may be the vertical direction.

  Further, a drive mechanism 18 composed of, for example, a piston cylinder mechanism is fixed to the upper portion of the valve box body 12, and a substantially L-shaped flange member 22 is fixed to the piston rod 20 of the drive mechanism 18. .

  On the other hand, a guide rail 24 is provided in the horizontal direction at the upper part of the valve box body 12, and the sliding guide members 26, 26 slide along the guide rail 24. The sliding guide members 26 and 26 are linked to the link members 36 and 38 of the substantially arch-shaped valve plate suspension member 34 by pivot pins 30 and 30.

  Also, the left and right end portions 40, 42 of the valve plate suspension member 34 are linked by link pins 48, 50 attached to substantially central portions of the left and right sides of the valve plate 14 by pivot pins 44, 46. Yes.

  The front end of the flange member 22 is connected to the sliding guide member 26, and the sliding mechanism 26 is moved along the guide rail 24 by operating the drive mechanism 18 to expand and contract the piston rod 20. , 26 slide, the valve plate 14 can be moved in the left-right direction between the valve open position and the valve close position via the valve plate suspension member 34. Thereby, smooth movement between the valve opening position and the valve closing position of the valve plate 14 is ensured.

  In this embodiment, the drive mechanism 18 is constituted by a piston cylinder mechanism. However, a known drive mechanism such as an electric motor or a stepping motor can be employed.

  On the other hand, as shown in FIG. 2A, on one side 14a of the valve plate 14, there are four expansions arranged on the upper, lower, left and right sides of the valve plate 14 so as to be positioned around the opening 16a of the valve box body 12. A closing drive member 56 is attached.

  Further, as shown in FIG. 2B, an expansion / closure release drive member 58 is attached to the other side 14 b of the valve plate 14 so as to be positioned around the opening 16 b of the valve box body 12. . The expansion / closure release drive member 58 includes four expansion / closure release drive members 58 arranged on the top, bottom, left, and right of the valve plate 14, similarly to the expansion / closure release drive member 56.

  In this embodiment, each of the expansion / closing drive member 56 and the expansion / closure release drive member 58 includes four expansion / closure drive members 56 and an expansion / closure release drive member 58 arranged on the top, bottom, left and right of the valve plate 14. However, this number is not particularly limited, and for example, it may be provided only in a pair of upper and lower sides or a pair of left and right.

  The expansion / closing drive member 56 and the expansion / closure release drive member 58 have substantially the same configuration, and extend from the hollow long tubular main body portions 56a and 58a and the long tubular main body portions 56a and 58a. The base portions 56 b and 58 b are provided, and the base portions 56 b and 58 b are fixed to the valve plate 14 by being fixed by the mounting members 61.

  And although not shown in figure, it is comprised so that long tubular main-body part 56a, 58a may expand | swell by supplying air from these air supply sources to the hollow parts 56c, 58c in these long tubular main-body parts 56a, 58a. Has been.

  The expansion / closing drive member 56 and the expansion / closure release drive member 58 are not particularly limited, but those used as a known inflate seal can be diverted.

  Such an expansion / closure drive member 56 and an expansion / closure release drive member 58 can be made of a material that can be expanded by supplying air to the inside, and is formed of, for example, EPDM, fluororubber, or the like. Can be used, but it is desirable to use rubber made of a material that emits less gas over time.

  Further, as shown in FIG. 1, the other side 14b of the valve plate 14 is positioned on the inner peripheral side of the expansion / closure release drive member 58 and around the opening 16b of the valve box body 12, as shown in FIG. A rectangular annular seal member 60 is mounted in the seal groove 62.

  Examples of the material of the seal member 60 include fluorine elastomer, perfluoro elastomer, NBR (nitrile rubber), and EPDM (ethylene propylene diene three-dimensional copolymer). In view of the above, a fluorine-based elastomer can be preferably used.

  The vacuum gate valve 10 of the present invention configured as described above is operated as follows.

  That is, first, in the valve closing operation, the drive mechanism 18 is operated to move the valve plate 14 to the valve closing position as shown in FIG.

  In this state, as shown in FIG. 4, air is supplied from a non-illustrated air supply source to the hollow portion 56c in the long tubular body portion 56a of the expansion closing drive member 56 provided on one side 14a of the valve plate 14. Is supplied, the elongated tubular main body 56a is expanded.

  As a result, the main body portion 56a of the inflated expansion / closing drive member 56 comes into contact with the side wall 12a of the valve box main body 12 opposite to the main body portion 56a. It is pushed toward the opening 16b, that is, toward the other side wall 12b of the valve box body 12.

  Accordingly, the seal member 60 provided on the other side 14b of the valve plate 14 is pressed against the other side wall 12b on the other opening 16b side, and the opening 16b is hermetically closed by the seal member 60. Yes.

  On the other hand, during the valve opening operation, as shown in FIG. 5, the supply of air to the hollow portion 56 c in the main body portion 56 a of the expansion closing drive member 56 is stopped.

  Then, by supplying air from an air supply source (not shown) to the hollow portion 58c in the long tubular main body 58a of the expansion / closing release driving member 58 provided on the other side 14b of the valve plate 14, the long tubular The main body 58a is expanded.

  As a result, the main body 58a of the expansion / closing release driving member 58 abuts against the side wall 12b of the valve box main body 12 opposite to the main body 58a, so that the valve plate 14 is opened to the other opening as shown by the arrow in FIG. It is moved in a direction away from 16b, that is, toward one opening 16a.

Thereby, the sealing member 60 provided on the other side 14b of the valve plate 14 is connected to the other opening 1.
It is separated from the other side wall 12b on the 6b side, and the hermetically closed state of the opening by the seal member 60 of the valve plate 14 is released.

  After that, as shown in FIG. 6, the supply of air to the hollow portion 58c in the main body portion 58a of the expansion / closure release drive member 58 is stopped.

  Then, by operating the drive mechanism 18, the valve plate 14 is moved to the valve opening position as shown by the arrow in FIG. Such a cycle is repeated.

  In this embodiment, after the valve plate 14 is moved to the valve closing position, air is supplied to the hollow portion 56c in the main body portion 56a of the expansion closing drive member 56, but this timing can be selected as appropriate. For example, the air supply timing may be set based on the detection result of the position sensor that detects the position of the valve plate 14.

  Therefore, with such a configuration, even if the seal member 60 is fixed between the inner surface of the side wall 12b of the valve box body 12 in the closed state due to a temperature environment such as high temperature, the closed state is released. The valve opening operation can be performed reliably, the wear damage of the seal member 60 is small, and the possibility of generation of particles is extremely reduced.

  Further, as shown in FIG. 4, the differential pressure between the vacuum side chamber 11 and the internal space 12 c of the valve box body 12 acts on the seal member 60. The expansion / closure drive member 56 and the expansion / closure release drive member 58 are only applied with a load in the compression direction, that is, the drive direction. Therefore, for example, the expansion / closure drive member 56 and the expansion / closure drive member 58 are separated from each other. As the release drive member 58, a conventionally used inflate seal can be used, and it is less likely to be worn and damaged, and the possibility of generation of particles is extremely reduced.

  Further, when the valve plate 14 is moved to the one opening 16a and the other opening 16b at the time of such valve opening and closing, as shown in the schematic view of FIG. Since the link member 36 (38) of the valve plate suspension member 34 and the link member 48 (50) attached to the substantially central portion of the side portion of the valve plate 14 are supported by the link, they are indicated by arrows. As described above, the valve plate 14 moves substantially horizontally, and the seal member is prevented from rolling and being damaged when the valve is closed.

  In addition, since the link member 36 (38) and the link member 48 (50) are linked and supported in this way, when the valve plate 14 is moved by receiving a differential pressure between the chambers 11 and 13, the valve plate 14 is moved. In addition, the valve plate suspension member 34, the link members 36 and 38, the sliding guide members 26 and 26, and the guide rail 24 do not follow the movement of the valve plate 14 and are not damaged or damaged. ing.

  Furthermore, in the conventional gate valve for vacuum called “two-action type”, a complicated drive mechanism is required. In this embodiment, the drive mechanism 18 moves the valve between the valve open position and the valve close position. It is only necessary to move the valve plate 14, the drive mechanism is simple, and the cost can be reduced.

  FIG. 8 is a schematic front view of another embodiment of the vacuum gate valve according to the present invention in a closed position, and FIG. 9 is an enlarged explanatory view of the link mechanism at the upper part of the valve plate 14 of FIG.

In the vacuum gate valve 10 of FIG. 1, the valve plate 14 is suspended by the valve plate suspension member 34 through the link members 48 and 50. As shown in FIG. In the vacuum gate valve 10, the upper portion of the valve plate 14 is connected to the sliding guide members 26 and 26 via the link mechanisms 64 and 64 instead of the valve plate hanging member 34.

  As shown in FIG. 9, the link mechanism 64 includes lever members 66, 68, and 70 that are connected so as to intersect in a substantially cross shape. The structure is connected to the plate 14.

  With such a link mechanism, the valve plate 14 moves almost horizontally during sealing when the valve is closed, and the seal member 60 is further rotated when the valve is closed than the vacuum gate valve of FIG. It is prevented from moving and being damaged by wear.

  In addition, since the link is supported only by the link members 64 and 64 as described above, even when the valve plate 14 receives the pressure difference between the chambers 11 and 13 and moves, the sliding guide members 26 and 26 and The guide rail 24 does not follow the movement of the valve plate 14 and is not damaged or damaged, so that a more compact vacuum gate valve can be provided.

FIG. 1 is a schematic front view of the vacuum gate valve of the present invention in a closed position. FIG. 2 is a schematic front and back view of the valve plate. FIG. 3 is an enlarged top sectional view for explaining the operating state of the vacuum gate valve of the present invention. FIG. 4 is an enlarged top sectional view for explaining the operating state of the vacuum gate valve of the present invention. FIG. 5 is an enlarged top sectional view for explaining the operating state of the vacuum gate valve of the present invention. FIG. 6 is an enlarged top sectional view for explaining the operating state of the vacuum gate valve of the present invention. FIG. 7 is a schematic view schematically showing the movement of the valve plate by the valve plate hanging member of the vacuum gate valve of the present invention. FIG. 8 is a schematic front view of the vacuum gate valve according to another embodiment of the present invention in a closed position. FIG. 9 is an enlarged explanatory view of the link mechanism at the top of the valve plate 14 of FIG. FIG. 10 is a schematic view of a conventional vacuum gate valve using an infra-teal seal. FIG. 11 is a schematic view of a conventional vacuum gate valve called a “two-action type”.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Vacuum gate valve 11, 13 Chamber 12a, 12b Side wall 12c Internal space 12 Valve box main body 14 Valve plate 16a, 16b Opening 18 Drive mechanism 20 Piston rod 22 Flange member 24 Guide rail 26 Sliding guide member 30 Pivot pin 34 Valve plate Hanging members 36, 38 Link members 40, 42 End portions 44, 46 Pivot pins 48, 50 Link member 56 Expansion closing drive member 56a Main body portion 56b Base portion 56c Hollow portion 58 Expansion closure release driving member 58a Main body portion 58b Base portion 58c Hollow portion 60 Seal member 61 Mounting member 62 Seal groove 64 Link mechanism 100 Vacuum gate valve 102 Valve box body 103 Valve plate 104a, 104b Opening 105 Infrat seal 106, 108 Internal space 110, 112 Chamber 131 Air cylinder 132 Silin Rod 133 air passage 200 vacuum gate valve 202 valve box body 203 valve plate 204a opening 205 sealing member

Claims (3)

A valve box body in which an opening penetrating two opposing side walls is formed;
A valve plate that is provided inside the valve box body and opens and closes the opening of the valve box body by moving between a valve opening position and a valve closing position along a direction substantially parallel to the opening;
A vacuum gate valve comprising a valve plate drive mechanism for moving the valve plate between a valve open position and a valve close position;
The valve plate drive mechanism is
A guide rail disposed on one end side of the valve plate;
A valve plate suspension member that slides along the guide rail and suspends the valve plate;
A vacuum gate comprising: a valve plate moving device for moving the valve body between a valve open position and a valve close position by reciprocating the valve plate suspension member along a guide rail. valve.   The valve plate suspension member includes a link mechanism, and is configured to be able to closely contact the valve plate with respect to the opening in a valve closing position of the valve plate. The vacuum gate valve according to claim 1. An elongate tubular inflatable closing drive member attached to the valve plate and inflatable by supplying air to the inside;
A long tubular expansion / disengagement release drive member attached to the valve plate and expandable by supplying air to the inside;
A seal member attached to the valve plate along the periphery of the opening;
In the valve closing position, by supplying air to the inside of the expansion / closing driving member, the expansion / closing driving member is inflated, and the valve plate is pressed to the opening side. And configured to hermetically close the opening,
The supply of air to the inside of the expansion / closing drive member is stopped, and air is supplied to the inside of the expansion / closure release drive member to inflate the expansion / closure release drive member, so that the valve plate is removed from the opening. 3. The vacuum gate valve according to claim 1, wherein the vacuum gate valve is configured to move in a separating direction, thereby releasing a hermetically closed state of the opening by a sealing member of the valve plate. .