JP2004360754A - Gate valve for vacuum - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a gate valve for vacuum which can supply air to an inflated seal with a simple constitution and which has few possibility of generating particles from the inflated seal. <P>SOLUTION: The gate valve for the vacuum includes the long tube-like inflated seal which can expand by supplying air into its interior and which is mounted along the periphery of an opening 4a on an inner surface of a valve box body 2, and an air supply passage 7 provided in the valve body 2 to supply the air to the interior of the inflated seal 5. The inflated seal 5 is expanded in the direction of a valve plate 3 to be pushed against the valve plate 3 by the air from the air supply passage 7, and the opening 4a is closed thereby. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a vacuum gate valve used in a vacuum device, and more particularly, to a vacuum gate valve sealed with an inflate seal.
[0002]
[Prior art]
2. Description of the Related Art In a vacuum apparatus used for manufacturing semiconductors, thin films, liquid crystals, and the like, a gate valve that opens and closes each chamber is used.
[0003]
2. Description of the Related Art Conventionally, various types of vacuum gate valves are known, and one of them is one that seals with an inflat seal when the valve is closed (for example, see Patent Documents 1 and 2).
[0004]
FIG. 9 shows an example of a conventional vacuum gate valve using this inflat seal. The vacuum gate valve 100 includes a valve body 102 and a valve plate 103 provided inside the valve body 102. Openings 104a and 104b are formed in the valve body 102 through two opposing side walls.
[0005]
On both sides of the valve plate 103, an inflat seal 105 is attached at a position in contact with the inner surface of the side wall of the valve box main body 102 at the valve closing position, and the inflat seal 105 is formed by an air passage formed inside the valve plate 103. 133.
[0006]
When closing the valve body 102 in the open state, the air cylinder 131 on the upper part of the valve body 102 is driven to close the valve plate 103 attached to its end via the cylinder rod 132. Move to the position. Then, the air from the air cylinder 131 is introduced into the air passage 133 formed inside the valve plate 103 through the inside of the cylinder rod 132, and the inflatable seal 105 is expanded by air pressure, so that the inner surface of the side wall of the valve box main body 102 is formed. To close the valve between the inner surfaces around the openings 104a and 104b of the valve body 102 and the valve plate 103 with an inflat seal 105.
[0007]
[Patent Document 1]
JP-A-5-215249 [Patent Document 2]
Japanese Patent Application Laid-Open No. 2000-145980
[Problems to be solved by the invention]
In this conventional gate valve 100, an inflat seal 105 is attached to a valve plate 103. For this reason, it is necessary to supply air for inflating the inflatable seal 105 to the valve plate 103 which is a moving member, and it is difficult to simplify the configuration for air supply.
[0009]
Each time the movement of the valve plate 103 is repeated between the valve opening position and the valve closing position, the inflat seal 105 attached to the valve plate 103 also repeats the movement between these two positions. Particles are easily generated, and the possibility of contaminating the inside of the chamber increases.
[0010]
The present invention has been made to solve the above-described problems of the related art, and an object of the present invention is to be able to supply air to an inflat seal with a simple configuration, and to generate particles from the inflat seal. An object of the present invention is to provide a gate valve for vacuum.
[0011]
[Means for Solving the Problems]
The vacuum gate valve of the present invention is a valve box body having an opening formed through two opposing side walls,
A valve plate provided inside the valve box main body, the valve plate opening and closing the opening of the valve box main body by moving between a valve opening position and a valve closing position along a direction substantially parallel to the opening. Gate valve for
A long tubular inflatable seal that can be expanded by supplying air to the inside thereof is attached to the inner surface of the side wall of the valve body along the periphery of the opening, and
In the valve body, an air supply path for supplying air to the inside of the inflat seal is provided,
The inflatable seal is inflated in the direction of the valve plate by air from the air supply passage and pressed against the valve plate, thereby closing the opening.
[0012]
Thus, the inflat seal is attached to the valve box main body, and the valve box main body air supply path is provided to supply air to the inflat seal from the air supply path.
[0013]
Therefore, air can be supplied to the inflatable seal with a simpler configuration than in the past.
[0014]
Further, since the inflat seal is attached to the valve body, the inflat seal does not move as in the case where the inflat seal is attached to the valve plate, and is always located at a predetermined position.
[0015]
Therefore, generation of particles from the inflat seal can be effectively prevented.
[0016]
Further, the vacuum gate valve of the present invention is such that when the plate surface of the valve plate located at the valve closing position is close to the inner surface of the side wall where the opening is formed, a receiving member for receiving the valve plate is provided on the side wall. It is characterized by being attached to the inner surface. The receiving member is attached to a side wall of the valve box body to which the inflate seal is attached, or to a side wall facing the side wall. Further, it is preferable that the receiving member is formed of polytetrafluoroethylene resin, polyether ether ketone resin, polyimide resin or stainless steel.
[0017]
As described above, since the receiving member is attached to the inner surface of the valve body, when the plate surface of the valve plate approaches the side wall of the box-shaped body due to the differential pressure, the receiving member on the low pressure side receives the valve plate and receives the side wall. Prevent direct metal touch with.
[0018]
Therefore, generation of particles due to contact between the valve plate and the side wall of the valve box main body can be prevented.
[0019]
Further, in some cases, the plate surface of the valve plate 3 is pushed by the differential pressure, and the valve plate 3 is received before the inflatable seal 5 and the valve plate 3 are excessively separated from each other, thereby preventing a decrease in sealing performance. it can.
[0020]
Further, the vacuum gate valve of the present invention, on the inner surface of the side wall opposite to the side wall on which the inflate seal is mounted, a seal member is attached along the periphery of the opening,
The inflat seal is inflated in the direction of the valve plate by the air from the air supply path and pressed against the valve plate, thereby moving the valve plate in the direction of the seal member, and moving the valve plate to the seal member. The opening is closed by pressing.
[0021]
As described above, the inflatable seal is inflated to move the valve plate toward the side wall of the valve box main body, and the valve plate is pressed against the seal member to seal with the seal member.
[0022]
Therefore, an appropriate seal can be provided, an inexpensive seal member such as an ordinary O-ring can be used while being replaced, and a seal member of a type suitable for the intended use can be arbitrarily selected.
[0023]
Further, the vacuum gate valve of the present invention provides each cylinder for opening and closing the valve plate at both sides of the opening of the valve box body, and also provides each cylinder rod along both sides of the valve plate. The valve plate and the cylinder rod are fixed at an end of the valve plate on the valve opening direction side.
[0024]
Further, the vacuum gate valve of the present invention is provided with a position sensor in the cylinder,
The position sensor detects the piston position of the cylinder when the valve plate moves from the valve opening position to the valve closing position and reaches the valve closing position or the vicinity of the valve closing position. The air is supplied from the air supply path to the inside of the inflat seal based on a signal, whereby the opening is closed.
[0025]
Further, in the vacuum gate valve of the present invention, the inflate seal includes a long tubular inflatable portion and a base portion,
The base is
The width of the inflatable seal is formed integrally with the inflatable portion along the long tube direction on the bottom side of the inflatable portion, and a groove is formed between the inflatable portion and both sides in the width direction of the inflatable seal. Extending on both sides in the direction,
A pair of holding members for holding the inflat seal to the inner surface of the side wall of the valve body,
The pair of holding members are respectively attached along both sides in the width direction of the inflat seal, and these holding members are formed with protruding portions along both front ends facing each other,
The base portion is fixed between each protruding portion located in the groove and the inner surface of the side wall of the valve box body, whereby the inflat seal is held on the inner surface of the side wall of the valve box body. And
[0026]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the gate valve for vacuum of the present invention is explained in detail, referring to drawings.
[0027]
1 and 2 are explanatory views showing an embodiment of the vacuum gate valve of the present invention. FIG. 1 is an explanatory view of the inside of the valve box main body from the top side of the main body, and FIG.
[0028]
As shown in FIGS. 1 and 2, the vacuum gate valve 1 of the present embodiment includes a valve box main body 2 and a valve plate 3 provided inside the valve box main body 2. The valve box body 2 is formed with openings 4a and 4b penetrating two opposing side walls thereof, and communicates with the respective chambers through the openings 4a and 4b. The valve plate 3 moves inside the valve body 2 between a valve opening position (a dotted line position in FIG. 1) and a valve closing position (a solid line position in FIG. 1) along a direction substantially parallel to the openings 4a and 4b. I do. In the present embodiment, the moving direction of the valve plate 3 is the horizontal direction, but the moving direction is not particularly limited, and may be a vertical direction.
[0029]
As shown in FIG. 2, the opening and closing drive of the valve plate 3 is performed by two cylinders 9, 9 provided on both sides of the openings 4a, 4b of the valve body 2. Cylinder rods 10, 10 of the cylinders 9, 9 are provided along both side portions of the valve plate 3, and the cylinder rods 10, 10 and the valve plate 3 are fixed to each other at an end on the valve opening direction side by a fixing member. It is fixed via 12,12.
[0030]
A long tubular inflatable seal 5 is attached to the inner surface of the side wall of the valve body 2 along the periphery of the opening 4a. The inflat seal 5 can be inflated by supplying air to the inside thereof. For example, a seal formed of EPDM, fluororubber, or the like can be used. It is desirable to use
[0031]
The valve body 2 is provided with an air introduction part 8 for introducing air from an air supply source (not shown) and an air supply path 7 communicating from the air introduction part 8 to the inside of the seal member 5. The air is supplied from the air introduction section 8 to the inside of the inflatable seal 5 through the air supply path 7 to expand the inflatable seal 5.
[0032]
When closing the opening 4a of the valve box main body 2 and shutting off the chambers on both sides of the valve, the valve plate 3 is moved from the valve opening position to the valve closing position by driving the cylinder 9, and the air is introduced from the air introducing portion 8. Air is supplied to the inside of the flat seal 5 to expand the inflat seal 5 and press it against the valve plate 3. Thereby, the side wall of the valve box main body 2 and the valve plate 3 are sealed with the inflat seal 5 around the opening 4a, and the opening 4a is closed.
[0033]
When closing the opening 4a, the timing of inflating the inflatable seal 5 is not particularly limited, but the inflatable seal 5 may be expanded and brought into contact with the valve plate 3 after the valve plate 3 reaches the valve closing position. preferable.
[0034]
In the present embodiment, when closing the opening 4a, the cylinder 9 is provided with a position sensor 11 for expanding the seal member 5 at a predetermined timing. The position sensor 11 detects the piston inside the cylinder 9 when the valve plate 3 moves from the open position to the closed position with the movement of the cylinder rod 10 and reaches the closed position or the vicinity of the closed position. Detect position. Then, based on the detection signal from the position sensor 11, air is supplied from the air introduction section 8 to the inside of the inflatable seal 5 to close the opening 4a.
[0035]
As the position sensor 11, various sensors such as a contact type such as a limit sensor and a non-contact type using magnetism, laser, radio waves, and the like can be used.
[0036]
If the inflatable seal 5 expands due to the internal pressure without performing an inflation operation by supplying air due to the vacuum atmosphere, the inside of the inflate seal 5 is evacuated by a vacuum pump or the like to reduce the expansion. May be prevented.
[0037]
The inflat seal 5 is attached to the inner surface of the side wall of the valve box body 2 along the periphery of the opening 4a by the holding member 6, and is preferably attached along the vicinity of the opening 4a.
[0038]
FIGS. 7A and 7B are cross-sectional views of the inflat seal 5 and the holding member 6. 7A shows a state before the inflatable seal 5 expands, and FIG. 7B shows a state after the inflate seal 5 expands. As shown in the figure, in the present embodiment, the inflatable seal 5 includes an inflatable portion 17 and a base portion 16 that are integrally formed. The base portion 16 is formed along the long tube direction on the bottom side of the elongated tubular inflatable portion 17, and forms an inflatable seal 18 with the inflatable portion 17 from both sides in the width direction of the inflatable seal 5. 5 are formed to extend on both sides in the width direction.
[0039]
A pair of holding members 6 a and 6 b for attaching the inflat seal 5 to the inner surface of the side wall of the valve body 2 are attached along both sides in the width direction of the inflat seal 5. Projections 19a, 19b are formed along both front ends of the holding members 6a, 6b, which face each other.
[0040]
These protruding portions 19a and 19b are inserted into the grooves 18 of the inflatable seal 5, and fix the base portion 16 to the inner surface of the side wall of the valve box body 2. Thus, the inflat seal 5 is held on the inner surface of the side wall of the valve body 2.
[0041]
Support portions 15a, 15b are provided upright on the holding members 6a, 6b along the expansion portion 17 of the inflatable seal 5. For example, when the inflatable portion 17 is compressed by the valve plate 3 when the inflatable portion 17 is inflated, by supporting both sides of the inflatable portion 17 with the support portions 15a and 15b, the inflatable portion 17 is supported. The width is increased in the direction of 15b to prevent crushing more than necessary.
[0042]
As described above, in the present embodiment, the inflat seal is attached to the valve box body, and the air supply path is provided in the valve box body to supply the air from the air supply path to the inflate seal. With the configuration, air can be supplied to the inflat seal, and since the inflat seal does not move and is always located at a predetermined position, for example, when the inflat seal is attached to the valve plate, In addition, generation of particles can be effectively prevented. Since the installation of the inflatable seal on the valve plate and the processing for air supply are not required, the mounting and processing of the member on the valve plate, for example, by incorporating a heater in the valve plate or circulating cooling water. The degree of freedom is greatly increased.
[0043]
3 and 4 are explanatory views showing another embodiment of the vacuum gate valve of the present invention. FIG. 3 is an explanatory view of the inside of the valve body from the upper surface side of the body, and FIG.
[0044]
In this embodiment, receiving members 13 and 14 are attached to the inner surface of the valve body 2. For example, when there is a pressure difference (for example, like the atmospheric pressure and the vacuum pressure) in each of the chambers provided on both sides of the valve box main body 2 via the openings 4a and 4b, the differential pressure causes the valve to be closed. The plate surface of the located valve plate 3 may be pushed and approach the side wall of the box-shaped main body 2 where the openings 4a and 4b are formed.
[0045]
When the valve plate 3 pressed in the side wall direction comes into contact with the inner surface of the side wall, particles may be generated from the contact portion.
[0046]
When the valve plate 3 moves away from the inner surface of the side wall to which the inflatable seal 5 is attached due to the pressure difference, the inflatable seal 5 and the valve plate 3 gradually separate from each other, and the sealing performance therebetween is deteriorated. Cause
[0047]
The receiving members 13 and 14 receive the valve plate 3 when the plate surface of the valve plate 3 located at the valve closing position approaches the side wall of the box-shaped main body 2 where the openings 4a and 4b are formed. As a result, direct metal touch between the inner surface of the side wall and the valve plate 3 is prevented, and in some cases, the valve plate 3 is received before the inflatable seal 5 and the valve plate 3 are excessively separated from each other. Can be prevented from decreasing.
[0048]
As a material of the receiving members 13 and 14, for example, a resin such as PTFE (polytetrafluoroethylene), PEEK (polyetheretherketone), PI (polyimide), or stainless steel is used. It is not preferable to use a material that easily generates particles, gas, and the like that contaminate the inside of the chamber due to contact with the valve plate 3 or the like.
[0049]
In the present embodiment, the receiving member 13 is attached to the side wall of the valve body 2 to which the inflate seal 5 is attached, and the receiving member 14 is attached to the side wall facing the side wall of the valve body 2 to which the inflate seal 5 is attached. Attached. The shape of the receiving members 13 and 14 is not particularly limited as long as it has an appropriate protruding width from the inner surface of the side wall of the valve body 2. For example, the annular receiving member 14 can be attached along the periphery of the opening 4 b, Alternatively, a plurality of receiving members 14, 14,... May be prepared, and these may be attached intermittently along the periphery of the opening 4b.
[0050]
The mounting position of the receiving member 13 is desirably on the outer peripheral side of the inflatable seal 5 as shown in FIG. As shown in FIG. 8, the protruding width L1 from the inner surface of the valve body 2 is set smaller than the protruding width L2 from the inner surface of the valve body 2 when the inflatable seal 5 is expanded. The plate 3 and the receiving member 13 are prevented from constantly coming into contact with each other.
[0051]
5 and 6 are explanatory views showing another embodiment of the vacuum gate valve of the present invention.
[0052]
In the present embodiment, a seal member 20 such as an O-ring is attached along the periphery of the opening 4b on a side wall facing the side wall of the valve box main body 2 to which the inflatable seal 5 is attached.
[0053]
In the valve closing operation, the valve plate 3 is moved from the valve opening position to the valve closing position (FIG. 5), and the inflatable seal 5 is expanded and pressed against the valve plate 3, whereby the valve plate 3 is moved toward the sealing member 20. This is performed by moving the valve plate 3 against the seal member 20 while moving it in the side wall direction (FIG. 6).
[0054]
That is, in the present embodiment, the inflatable seal 5 does not act as a sealing material but acts as an actuator for pressing the valve plate 3 against the sealing member 20, and the inner surface of the valve body 2 and the valve plate are actuated by the sealing member 20. 3 is sealed.
[0055]
As the seal member 20, an inexpensive seal member such as an ordinary O-ring can be used, and a seal member of a type corresponding to a reactive gas, plasma, or the like used in a vacuum can be arbitrarily selected. Can be.
[0056]
Although the embodiments of the vacuum gate valve of the present invention have been described above, the present invention is not limited to these embodiments.For example, the receiving member may be a side wall or a side wall of a valve box main body to which an inflate seal is attached. The inflatable seal may be attached to only one of the opposite side walls, and the inflatable seal may be attached to both side walls of the valve box body where the opening is formed. You may be comprised so that it can be sealed with.
[0057]
【The invention's effect】
According to the vacuum gate valve of the present invention, the inflat seal is attached to the valve body, and the air supply path is provided in the valve body to supply air from the air supply path to the inflat seal. Air can be supplied to the inflatable seal with a simple configuration.
[0058]
In addition, since the inflat seal is attached to the valve body, the inflat seal does not move and is always located at a predetermined position, for example, when the inflat seal is attached to the valve plate, Generation of particles can be effectively prevented.
[0059]
Also, by attaching the receiving member to the inner surface of the valve body, when the plate surface of the valve plate approaches the side wall of the box-shaped body due to the differential pressure, the receiving member on the low pressure side receives the valve plate and directly contacts the side wall. Prevent metal touch.
[0060]
Therefore, generation of particles due to contact between the valve plate and the side wall of the valve box main body can be prevented.
[0061]
Further, in some cases, the plate surface of the valve plate 3 is pushed by the differential pressure, and the valve plate 3 is received before the inflatable seal 5 and the valve plate 3 are excessively separated from each other, thereby preventing a decrease in sealing performance. it can.
[0062]
In addition, by expanding the inflate seal to push and move the valve plate toward the side wall of the valve box main body, and by pressing the valve plate against the seal member to perform sealing with the seal member, appropriate sealing is possible, Inexpensive seal members such as ordinary O-rings can be used while being replaced, and a type of seal member can be arbitrarily selected according to the application.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing one embodiment of a vacuum gate valve of the present invention (an explanatory view from the upper surface side of a main body inside a valve body).
FIG. 2 is an explanatory view of the inside of a valve body of the vacuum gate valve of FIG. 1 as viewed from the front side of the main body.
FIG. 3 is an explanatory view showing another embodiment of the vacuum gate valve of the present invention (an explanatory view from the upper surface side of the main body inside the valve body).
FIG. 4 is an explanatory view of the inside of the valve box main body of the vacuum gate valve of FIG. 3 as viewed from the front side of the main body.
FIG. 5 is an explanatory view showing another embodiment of the vacuum gate valve of the present invention (an explanatory view from the top side of the main body inside the valve box main body).
FIG. 6 is an explanatory view showing a state after expansion of an inflatable seal in the vacuum gate valve of FIG. 5;
7 (A) and 7 (B) are cross-sectional views of a seal member and a holding member, FIG. 7 (A) shows a state before the seal member 5 is expanded, and FIG. The state after the expansion of the seal member 5 is shown.
FIG. 8 is an explanatory diagram of a relationship between a receiving member and a seal member, and a protruding width from an inner surface of the valve body.
FIG. 9 is an explanatory view showing an example of a conventional vacuum gate valve.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Vacuum gate valve 2 Valve body 3 Valve plate 4a Opening 4b Opening 5 Inflate seal 6 Holding member 6a Holding member 6b Holding member 7 Air supply path 8 Air introduction port 9 Cylinder 10 Cylinder rod 11 Position sensor 12 Fixed member 13 Receiving Member 14 Receiving member 15a Supporting member 15b Supporting member 16 Base 17 Inflatable portion 18 Groove 19 Projecting portion 20 Sealing member 100 Vacuum gate valve 102 Valve box body 103 Valve plate 104a Opening 104b Opening 105 Inflate seal 131 Air cylinder 132 Cylinder Rod 133 air passage

Claims (9)

A valve box body having an opening formed therethrough through two opposing side walls,
A valve plate provided inside the valve box main body, the valve plate opening and closing the opening of the valve box main body by moving between a valve opening position and a valve closing position along a direction substantially parallel to the opening. Gate valve for
A long tubular inflatable seal that can be expanded by supplying air to the inside thereof is attached to the inner surface of the side wall of the valve body along the periphery of the opening, and
In the valve body, an air supply path for supplying air to the inside of the inflat seal is provided,
A gate valve for vacuum, wherein the inflatable seal is inflated in the direction of the valve plate by air from the air supply path and pressed against the valve plate, thereby closing the opening. The receiving member for receiving the valve plate is attached to the inner surface of the side wall when the plate surface of the valve plate located at the valve closing position approaches the inner surface of the side wall where the opening is formed. 2. The vacuum gate valve according to 1. The vacuum gate valve according to claim 2, wherein the receiving member is attached to a side wall on a side where the inflate seal is attached. The vacuum gate valve according to claim 2, wherein the receiving member is attached to a side wall opposite to a side wall on which the inflate seal is attached. The vacuum gate valve according to any one of claims 2 to 4, wherein the receiving member is formed of a polytetrafluoroethylene resin, a polyetheretherketone resin, a polyimide resin, or stainless steel. On the inner surface of the side wall opposite to the side wall on which the inflate seal is mounted, a seal member is attached along the periphery of the opening,
The inflat seal is inflated in the direction of the valve plate by the air from the air supply path and pressed against the valve plate, thereby moving the valve plate in the direction of the seal member, and moving the valve plate to the seal member. The vacuum gate valve according to claim 1, wherein the opening is closed by pressing. Each cylinder for opening and closing the valve plate is provided at both sides of the opening of the valve box main body, and each cylinder rod is provided along both side portions of the valve plate. 7. The vacuum gate valve according to claim 1, wherein the valve plate and the cylinder rod are fixed at a portion. Providing a position sensor on the cylinder,
The position sensor detects the piston position of the cylinder when the valve plate moves from the valve opening position to the valve closing position and reaches the valve closing position or the vicinity of the valve closing position. 8. The vacuum gate valve according to claim 7, wherein air is supplied from the air supply path to the inside of the inflatable seal based on a signal, thereby closing the opening. The inflate seal comprises a long tubular inflatable portion and a base portion,
The base is
The width of the inflatable seal is formed integrally with the inflatable portion along the long tube direction on the bottom side of the inflatable portion, and a groove is formed between the inflatable portion and both sides in the width direction of the inflatable seal. Extending on both sides in the direction,
A pair of holding members for holding the inflat seal to the inner surface of the side wall of the valve body,
The pair of holding members are respectively attached along both sides in the width direction of the inflat seal, and these holding members are formed with protruding portions along both front ends facing each other,
The base portion is fixed between each protruding portion located in the groove and the inner surface of the side wall of the valve box body, whereby the inflat seal is held on the inner surface of the side wall of the valve box body. The gate valve for vacuum according to any one of claims 1 to 8.

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