CN114607784B - Valve plate for isolation, driving device for driving valve plate and valve - Google Patents
Valve plate for isolation, driving device for driving valve plate and valve Download PDFInfo
- Publication number
- CN114607784B CN114607784B CN202210230295.6A CN202210230295A CN114607784B CN 114607784 B CN114607784 B CN 114607784B CN 202210230295 A CN202210230295 A CN 202210230295A CN 114607784 B CN114607784 B CN 114607784B
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- Prior art keywords
- valve plate
- valve
- driven portion
- sealed
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000002955 isolation Methods 0.000 title claims abstract description 11
- 238000007789 sealing Methods 0.000 claims abstract description 25
- 238000007906 compression Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 2
- 230000013011 mating Effects 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0227—Packings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Abstract
A valve plate for isolation comprising a working face for sealing a channel to be sealed and a valve plate body carrying the working face extending in a direction away from the working face, characterized in that the valve plate body comprises a first driven part having a cross section tapering from the working face to the direction away from and a second driven part mounting a first return means for return force away from the channel to be sealed, as well as a drive device and a valve for vacuum sealing.
Description
Technical Field
The present invention relates to the field of vacuum, in particular a valve plate for isolation, a driving device for driving said valve plate, and a valve comprising a driving device for said valve plate.
Background
Vacuum is the basis of the semiconductor industry, and is the basis for most semiconductor processes. The vacuum is related to the problem of vacuum sealing, and a vacuum gate valve is a common part of vacuum sealing. The vacuum gate valve is commonly used in the situations of isolation between an air extraction pipeline and a vacuum pump, isolation between chambers and the like.
As shown in figure 1, the conventional gate valve basically has a structure that a steel ball 3 is arranged between two valve plates 1,2, and the valve plates 1,2 are pressed against a valve body 4 to realize sealing by changing the positions of the steel balls 3 between the valve plates 1,2 so as to change the distance between the two valve plates 1, 2.
In the vacuum industry, vacuum sealing is a permanent topic, a vacuum gate valve is also a common component for vacuum sealing, the prior gate valve technology generally has the problems of large outline dimension, large noise, large vibration and the like caused by unsmooth action of a valve plate, and for some precise semiconductor equipment, the defects can lead to the increase of the overall outline dimension of the equipment, the waste of space and the increase of cost, and most importantly, the process precision of the equipment is influenced by the larger vibration, and the overall process precision and the level of the equipment are lowered.
The prior art gate valve has large valve opening and closing stroke, so that the overall dimension of the valve is large, and the existing valve mechanism causes large vibration and large noise when the valve is closed and opened. Based on the problems, the invention provides the gate valve which is compact in mechanism, small in external dimension, smooth in valve movement, free of impact and low in noise.
Disclosure of Invention
Aiming at the existing problems, the technical scheme provides the gate valve for vacuum sealing, which has smooth movement and good sealing, well solves the problems of large noise and large vibration when the valve plate is opened and closed, has smaller size, and is particularly advantageous on precise equipment with high precision requirement and space shortage.
The inventors therefore propose the following solution:
A valve plate for isolation comprising a working face for sealing a passage to be sealed and a valve plate body carrying the working face extending in a direction away from the working face, the valve plate body comprising a first driven portion having a cross section tapering from the working face to the direction away from and a second driven portion mounting a return means for the return force away from the passage to be sealed, further comprising a third driven portion inclined upwardly.
Also disclosed is a drive device for driving the valve plate, comprising a guide device which cooperates with the second driven part and allows the valve to swing.
Preferably, the guide device comprises a long hole arranged on the driving bracket and a cross rod with two ends arranged in the long hole.
Preferably, the driving bracket includes first and second arms provided with the long holes, and a connecting portion connecting the first and second arms, the connecting portion being provided with a first inclined surface to be engaged with the first driven portion.
Preferably, the valve plate further comprises a pressing sliding block for pressing the valve plate, and the pressing sliding block is provided with a second inclined surface matched with the first driven part.
Preferably, the device further comprises a second restoring device having a restoring force for moving the pressing slider away from the driving bracket.
Preferably, the valve further comprises a spherical protrusion provided on the valve body for engagement with the third driven portion.
Preferably, the motor is connected with the driving bracket in parallel.
Preferably, the valve further comprises a limiting boss arranged on the valve body and used for limiting the pressing sliding block when the channel to be sealed is sealed.
The valve comprises the valve plate and the driving device, wherein the valve plate is provided with an opening position and a closing position, the working face of the valve plate is far away from a channel to be sealed when in the opening position, and the working face of the valve plate seals the channel to be sealed when in the closing position.
Drawings
FIG. 1 is a cross-sectional view of the prior art valve insert operating direction;
FIG. 2 is a schematic exploded perspective view of the valve of the present invention;
FIG. 3 is a front view, in semi-section, of the valve of the present invention, wherein the valve is in an open position;
FIG. 4 is a front view, in semi-section, of the valve of the present invention, wherein the valve is in a closed position;
FIG. 5 is a perspective view of the valve body of FIG. 2 with the valve body turned 180 degrees; and
Fig. 6 is an assembled perspective view of a valve plate of the present invention and a drive for driving the same.
The valve comprises a valve body, 102-sealing rings, 103-guide bearing supports, 104-guide rods, 105-compression sliding blocks, 106-sliding block return springs, 107-valve cover plates, 108-guide bearings, 109-valve plate supports, 110-valve plate guide strips, 111-valve plate return springs, 112-valve plates, 113-motors, 114-motor supports, 115-push rods, 116-connecting plates, 201-channels to be sealed, 300-upstream channels, 1012-valve body bottom surfaces, 1013-spherical protrusions, 1014-limiting tables, 1011-middle holes, 1015-valve body grooves, 1091-oblong holes, 1101-bearings, 1, 2-valve plates, steel balls of 3-prior art plug valves, valve bodies of 4-prior art plug valves, guide grooves of 5-prior art plug valves, downward inclined surfaces on 1121-valve plates and upward inclined upper surfaces of 1122-valve plates.
Detailed Description
2-6, The valve body 101 is a main body supporting structure of the gate valve, the valve body is internally provided with a hollow structure, and the hollow structure of the valve body is an important place for the structural movement and sealing of the valve plate. The sealing ring 102 is arranged on the valve plate 112, the valve plate 112 is connected with the valve plate bracket 109 through the valve plate guide strip 110, the valve plate shaft penetrating through the valve plate guide strip 110 is provided with the valve plate return spring 111, the two sides of the valve plate bracket 109 are provided with guide grooves of the oblong holes 1091, and the valve plate guide strip 110 can freely slide in the grooves through bearings on the guide grooves. The pressing slide 105 is connected to the valve plate support 109 through the guide rod 104 and can slide freely on the guide rod, and a slide return spring 106 is sleeved on the guide rod between the pressing slide 105 and the valve plate support 109. The valve plate 112, the pressing slide 105 and the valve plate bracket 109 are contacted through inclined planes, and when the pressing slide 105 approaches the valve plate 112, the inclined planes can press the valve plate to translate upwards. Guide bearings 108 are provided on either side of the valve plate support 109, the guide bearings 108 allowing the valve plate 112 to translate entirely within the recess 1015 of the valve body 101 without being offset in the vertical direction of motion. The valve plate holder 109 is connected to a linear motor 113 through a push rod 115, and the linear motor 113 is fixed to the valve body 101 through a motor holder 114.
The valve plate 112 should be understood in conjunction with fig. 2, 4 and 6 that the valve plate 112 includes a first driven portion 1121, i.e., a slope that tapers toward as seen in the direction of fig. 4, and a second driven portion, i.e., a shaft 1123, that extends downward in connection with the driving portion, and an upper slope, also referred to herein as a third driven portion 1122, shown in detail in fig. 6.
The drive device according to the invention, comprising a valve plate holder 109, also called drive holder, shown in fig. 2, comprises a first return device 111 and a second return device 106, as can also be seen in fig. 2, and in particular the device that can be used comprises a spring. The direction and the size of the restoring force can be adjusted according to actual needs by the spring.
Therefore, the following technical scheme can be summarized from the specific embodiments of the patent:
A valve plate for isolation comprising a working face for sealing a passage to be sealed and a valve plate body carrying the working face extending in a direction away from the working face, the valve plate body comprising a first driven portion having a cross section tapering from the working face to the direction away from and a second driven portion mounting a return means for the return force away from the passage to be sealed, further comprising a third driven portion inclined upwardly.
A drive means for driving the valve plate for isolation includes a guide means for permitting the valve to oscillate in cooperation with the second driven portion.
In a variant of the preferred embodiment of the invention, the guide means comprise a slot provided in the drive bracket and a transverse bar arranged in the slot at both ends.
In a modification of the preferred embodiment of the present invention, the drive bracket includes a first arm and a second arm provided with the long hole, and a connecting portion connecting the first arm and the second arm, the connecting portion being provided with a first inclined surface to be engaged with the first driven portion.
A variant of the preferred embodiment of the invention further comprises a pressing slider pressing the valve plate, the pressing slider being provided with a second inclined surface cooperating with the first driven portion.
A variant of the preferred embodiment of the invention is that it further comprises second return means with a return force that brings the hold-down slide away from the drive bracket.
A variant of the preferred embodiment of the invention further comprises a spherical projection provided on the valve body for cooperation with said third driven portion.
A variant of the preferred embodiment of the invention is to further comprise an electric motor connected in parallel with the drive carriage.
A variant of the preferred embodiment of the invention is that it further comprises a limiting boss provided on the valve body for limiting the pressing slider when sealing the passage to be sealed.
According to the vacuum gate valve, sealing is achieved by pressing the inclined planes of the sliding blocks and the valve plate bracket to squeeze the valve plate; the sealing surface of the valve plate is provided with a slope which is matched with the spherical bulge of the valve body, so that the valve can be effectively prevented from being blocked; the valve plate is provided with a reset spring, and can be opened by itself by means of the elastic force of the spring; the compressing sliding block is provided with a reset spring, and the sliding block automatically slides by means of the elasticity of the spring; the valve plate can swing in a certain range on the valve plate support, so that sealing surfaces can be better attached to each other.
Finally, an embodiment of the invention is a valve for vacuum sealing comprising a valve plate and a drive device, which is provided with an open position in which the working surface of the valve plate is remote from the channel to be sealed and a closed position in which the working surface of the valve plate seals the channel to be sealed.
When the gate valve 100 is opened, referring to fig. 3, the linear motor 113 pushes the push rod 115 outwards, the push rod drives the valve plate bracket 109 to translate, at this time, the distance between the pressing slide block 105 and the valve plate bracket increases under the thrust of the slide block return spring 106, the valve plate 112 moves towards the direction away from the bottom surface of the valve body under the thrust of the valve plate return spring, in addition, the spherical bulge on the valve body contacts with the upper inclined surface of the valve plate, so that the downward movement of the spherical bulge is further assisted, and the situation that the valve plate is blocked, the rubber ring and the valve body are stuck together and the like can be prevented, and the valve is completely opened along with the gradual movement of the motor.
When the valve 100 is closed, referring to fig. 4, the linear motor 113 pulls the push rod 115 inwards, the push rod drives the valve plate bracket 109 and a mechanism thereon to translate together, when the push rod moves to a limit table where the compressing sliding block contacts the valve body, the compressing sliding block is extruded to approach the valve plate bracket by continuing to translate, the distance between the compressing sliding block and the valve plate bracket is reduced, the valve plate 112 is extruded to move upwards until the valve plate contacts the valve body, and a sealing ring on the valve plate is extruded on the valve body to realize sealing of the valve.
The above examples are merely preferred embodiments of the present invention, and variations and modifications based on the technical solutions of the present invention should not be excluded from the protection scope of the present invention in this field. For example, the through hole of the valve may be in the form of a direct opening without the tube in the figures; the motor of the scheme can be replaced by a cylinder; the contact inclined surface angles of the valve plate, the valve plate bracket and the compression sliding block can be changed; the sliding structure of the guide rod of the pressing sliding block can be changed into a bearing rolling structure.
Claims (10)
1. A valve plate for isolation comprising a working face for sealing a passage to be sealed and a valve plate body carrying the working face extending in a direction away from the working face, characterized in that the valve plate body comprises a first driven portion having a cross section gradually narrowing in a direction away from the working face and a second driven portion mounting a first restoring means restoring force away from the passage to be sealed, and further comprises a third driven portion inclined upward,
Install the sealing washer on the valve plate, the valve plate passes through valve plate guide bar and valve plate support connection, pass the epaxial valve plate reset spring that is provided with of valve plate guide bar, there is the guide way of slotted hole valve plate support both sides, the valve plate guide bar can be through the bearing on it free slip in the inslot, compress tightly the slider and pass through the guide bar and connect on the valve plate support, and can freely slide on the guide bar, there is slider reset spring cover on the guide bar between compressing tightly slider and valve plate support, the valve plate, compress tightly slider and valve plate support three and pass through the inclined plane contact, when compressing tightly the slider and being close to the valve plate, the inclined plane can extrude the valve plate and upwards translate.
2. A driving device for driving the valve plate for isolation according to claim 1, characterized by comprising guide means for allowing the valve to swing in cooperation with the second driven portion.
3. The driving device according to claim 2, wherein the guide means comprises a long hole provided on the driving bracket and a cross bar provided in the long hole with both ends.
4. A driving device according to claim 3, wherein the driving bracket includes a first arm and a second arm provided with the long hole, and a connecting portion connecting the first arm and the second arm, the connecting portion being provided with a first inclined surface to be engaged with the first driven portion.
5. The driving device as recited in claim 4 further comprising a hold-down slide for holding down said valve plate, said hold-down slide being provided with a second ramp for engaging said first driven portion.
6. The drive of claim 5, further comprising a second return device having a return force that moves the hold-down slide away from the drive bracket.
7. The drive device of claim 6, further comprising a spherical protrusion disposed on the valve body for mating with the third driven portion.
8. The drive of claim 7, further comprising a motor in parallel with the drive bracket.
9. The drive of claim 8, further comprising a limiting boss provided on the valve body for limiting the compression slider when sealing the passage to be sealed.
10. A valve for vacuum sealing, characterized in that it comprises a valve plate according to claim 1 and a drive device according to any one of claims 2-9, provided with an open position in which the working surface of the valve plate is remote from the channel to be sealed, and a closed position in which the working surface of the valve plate seals the channel to be sealed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210230295.6A CN114607784B (en) | 2022-03-09 | 2022-03-09 | Valve plate for isolation, driving device for driving valve plate and valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210230295.6A CN114607784B (en) | 2022-03-09 | 2022-03-09 | Valve plate for isolation, driving device for driving valve plate and valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114607784A CN114607784A (en) | 2022-06-10 |
| CN114607784B true CN114607784B (en) | 2024-06-04 |
Family
ID=81862015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210230295.6A Active CN114607784B (en) | 2022-03-09 | 2022-03-09 | Valve plate for isolation, driving device for driving valve plate and valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114607784B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005240883A (en) * | 2004-02-25 | 2005-09-08 | Nippon Valqua Ind Ltd | Vacuum gate valve |
| WO2011088482A1 (en) * | 2010-01-25 | 2011-07-28 | Vat Holding Ag | Vacuum valve |
| CN201916518U (en) * | 2010-12-30 | 2011-08-03 | 中国原子能科学研究院 | All-metal seal high vacuum gate valve |
| CN203548963U (en) * | 2013-11-19 | 2014-04-16 | 石家庄华威重工阀门有限公司 | Flat gate valve of single gate disc |
| CN107013696A (en) * | 2017-06-16 | 2017-08-04 | 洪德隆 | Without abrasion prop open type ball surface gate valve |
| CN206918280U (en) * | 2017-04-28 | 2018-01-23 | 星弧涂层新材料科技（苏州）股份有限公司 | High vacuum push-pull valve |
| JP6607428B1 (en) * | 2019-05-07 | 2019-11-20 | 入江工研株式会社 | Gate valve |
| CN212360839U (en) * | 2020-04-30 | 2021-01-15 | 龙岩学院 | Totally-enclosed gate valve |
| TW202120841A (en) * | 2019-11-01 | 2021-06-01 | 日商開滋Ｓｃｔ股份有限公司 | Vacuum gate valve capable of reliably performing valve-body open-close movements and then inhibiting the occurrence of particles |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017021120A1 (en) * | 2015-08-06 | 2017-02-09 | Vat Holding Ag | Valve, preferably vacuum valve |
-
2022
- 2022-03-09 CN CN202210230295.6A patent/CN114607784B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005240883A (en) * | 2004-02-25 | 2005-09-08 | Nippon Valqua Ind Ltd | Vacuum gate valve |
| WO2011088482A1 (en) * | 2010-01-25 | 2011-07-28 | Vat Holding Ag | Vacuum valve |
| CN201916518U (en) * | 2010-12-30 | 2011-08-03 | 中国原子能科学研究院 | All-metal seal high vacuum gate valve |
| CN203548963U (en) * | 2013-11-19 | 2014-04-16 | 石家庄华威重工阀门有限公司 | Flat gate valve of single gate disc |
| CN206918280U (en) * | 2017-04-28 | 2018-01-23 | 星弧涂层新材料科技（苏州）股份有限公司 | High vacuum push-pull valve |
| CN107013696A (en) * | 2017-06-16 | 2017-08-04 | 洪德隆 | Without abrasion prop open type ball surface gate valve |
| JP6607428B1 (en) * | 2019-05-07 | 2019-11-20 | 入江工研株式会社 | Gate valve |
| TW202120841A (en) * | 2019-11-01 | 2021-06-01 | 日商開滋Ｓｃｔ股份有限公司 | Vacuum gate valve capable of reliably performing valve-body open-close movements and then inhibiting the occurrence of particles |
| CN212360839U (en) * | 2020-04-30 | 2021-01-15 | 龙岩学院 | Totally-enclosed gate valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114607784A (en) | 2022-06-10 |
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