CN206918280U - High vacuum push-pull valve - Google Patents
High vacuum push-pull valve Download PDFInfo
- Publication number
- CN206918280U CN206918280U CN201720460706.5U CN201720460706U CN206918280U CN 206918280 U CN206918280 U CN 206918280U CN 201720460706 U CN201720460706 U CN 201720460706U CN 206918280 U CN206918280 U CN 206918280U
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- Prior art keywords
- valve
- valve plate
- jacking
- high vacuum
- pull
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Abstract
The utility model discloses high vacuum push-pull valve, including valve body, the valve body has two coaxial valve ports, guiding mechanism is provided with the body cavity, the jacking type core assembly for setting and can blocking a valve port is slided on the guiding mechanism, the jacking type core assembly connection drives it to be reciprocatingly slided along the guiding mechanism and controls the drive mechanism of valve port opening.The utility model deft design, it is simple in construction, driven using servomotor and leading screw, can effectively control the shift position of jacking type core assembly, so as to accurately adjust the aperture of valve port, and then the vacuum in vacuum chamber is controlled, using flexible.
Description
Technical field
A kind of push-pull valve is the utility model is related to, especially a kind of high vacuum push-pull valve.
Background technology
Push-pull valve is the important valve body for completely cutting off two adjacent spaces, and in vacuum industry, push-pull valve is widely used in respectively
On kind of vacuum equipment, for completely cutting off the region of two different vacuums or isolation vacuum environment and other gaseous environments.
As Patent No. ZL 2014100968474 Chinese patent, a kind of its guide tracked vacuum gate valve disclosed are main
If using double-layer guide rail structure, driven by cylinder, and valve is realized using the L-shaped structure of lower floor guide rail and the gravity of valve plate
The locking of door, but above-mentioned push-pull valve there is also some problems, be mainly manifested in：
Due to being driven using cylinder, and two states only are extended and retracted during cylinder operation, stroke can not be adjusted, this is just
Cause push-pull valve also only to open and close two states, valve port opening can not be adjusted, cannot also carry out the effective of vacuum
Regulation, function phase is to single.
Meanwhile above-mentioned push-pull valve is when closing, mainly using the gravity of valve plate itself and the structure of lower floor guide rail so as to band
Dynamic valve plate moves down the sealing for realizing valve port, although connecting vavle shelf by connecting rod to provide certain lower pressure, due to
Vavle shelf and push rod are be hinged, i.e., vavle shelf can be movable, and it is also activity that this, which results in valve plate, not reliable support
Structure, therefore when the pressure of sealed end is more than the pressure of the other end, valve plate is possible to be pushed upwardly, and this adds increased let out
The probability of leakage, causes sealing effectiveness to be deteriorated, or even seal failure.
In addition, in valve plate closing process, guide wheel mechanism II is there is the process to be fallen along guide rail, and hardly possible during this
Exempt from certain concussion occur, this stability for allowing for parts connection is impacted；And in valve plate opening procedure, guide wheel machine
Structure II is there is the process being drawn out out of groove, and the operation that the reaction force during this also certainly will be to cylinder produces necessarily
Influence, the ride comfort of overall operation, stability deficiency.
Finally, due to push-pull valve use, in vacuum environment, and in vacuum environment, friction factor is high, and frictional heat can not
Taken away by gaseous exchange conduction, therefore guide rail, guiding mechanism etc. easily wear, reduction service life, and double-layer guide rail knot
Structure, not only guide rail structure is complicated, further increases the quantity of guide rail and guiding mechanism, further increases the risk of the wear of work,
Make drawback more prominent.
Utility model content
The purpose of this utility model is exactly to solve the above-mentioned problems in the prior art, there is provided a kind of high vacuum is inserted
Plate valve.
The purpose of this utility model is achieved through the following technical solutions：
High vacuum push-pull valve, including valve body, the valve body have two coaxial valve ports, are provided with the body cavity
Guiding mechanism, the jacking type core assembly for setting and can blocking a valve port, the jacking type valve element are slided on the guiding mechanism
Component connection drives it to be reciprocatingly slided along the guiding mechanism and controls the drive mechanism of valve port opening.
Preferably, described high vacuum push-pull valve, wherein：The guiding mechanism extends to the valve body both ends including two
Guide rail, the jacking type core assembly is erected on two guide rails by self-lubricating bushing.
Preferably, described high vacuum push-pull valve, wherein：The jacking type core assembly includes lower valve plate and upper valve plate,
Under non-tight state, the lower valve plate and upper valve plate fitting, and the lower valve plate and upper valve plate with two valve ports
Keep gap；
Under sealing state, the lower valve plate and the separation of upper valve plate, and the lower valve plate or upper valve plate are by a valve port
Sealing.
Preferably, described high vacuum push-pull valve, wherein：Set on the face of the lower valve plate or upper valve plate sealing valve mouth close
Seal, the diameter of the sealing ring are more than the diameter of the valve port.
Preferably, described high vacuum push-pull valve, wherein：Also include the jacking resetting-mechanism for driving the upper valve plate, institute
The jacking block that jacking resetting-mechanism includes being connected with the upper valve crab bolt is stated, the jacking block is limited in what is set on the lower valve plate
Jacked in convex shape spacing hole and by jacking cylinder, the jacking block is also connected with driving it to slide answering for reset along the spacing hole
Position spring.
Preferably, described high vacuum push-pull valve, wherein：The jacking cylinder is located at outside the valve body, and passes through ripple
Pipe or sealing are connected with the valve seal.
Preferably, described high vacuum push-pull valve, wherein：The drive mechanism includes connecting the jacking type core assembly
Leading screw, the leading screw is tightly connected the rotating power source outside the valve body by magnetic coupling type.
The advantages of technical solutions of the utility model, is mainly reflected in：
The utility model deft design, it is simple in construction, driven using servomotor and leading screw, can effectively control jacking
The shift position of formula core assembly, so as to accurately adjust the aperture size of valve port, and then the vacuum in vacuum chamber is controlled,
Using flexible.
Due to sealing or opening valve port come drive valve plate using jacking resetting-mechanism, sufficient support is provided by external force
Power, be not rely on the gravity of valve plate itself, therefore, even if the pressure of sealed end be more than the other end pressure, still be able to so that
Valve plate and the effective gluing, sealing of valve port inwall, reduce the possibility of leakage.
Relative to prior art, in the course of the work, the movement of jacking type core assembly is gentle, stably for push-pull valve, and more
To be reliable.
The guide frame of individual layer, relative to the guide frame of bilayer, whether the difficulty of processing of parts or entirety are tied
Structure, it is all more simple, and the connection of jacking type core assembly and guide rail is realized using self lubrication bearing, it can avoid significantly true
Frictional dissipation in Altitude, the service life of elongated component.
Leading screw and the outside driving source being tightly connected by magnetic coupling type in valve body, can be realized complete inside and outside valve body
Isolation, avoid the problem of easily being revealed using conventional sealing, mechanical seal etc. so that the overall leak rate of push-pull valve is low
In 1x10-9 mbar.L/s。
Brief description of the drawings
Fig. 1 is stereogram of the present utility model；
Fig. 2 is the sectional view of the utility model jacking resetting-mechanism.
Embodiment
The purpose of this utility model, advantage and feature, figure will be carried out by the non-limitative illustration of preferred embodiment below
Show and explain.These embodiments are only the prominent examples using technical solutions of the utility model, all to take equivalent substitution or wait
Effect conversion and formed technical scheme, all fall within the requires of the utility model protection within the scope of.
The utility model discloses high vacuum push-pull valve, and as shown in Figure 1, including valve body 1, the valve body 1 are overall in length
Cube, certain its shape and material can be designed according to being actually needed, have on two relative faces of the valve body 1 coaxial
Valve port 11, the form and dimension of two first valve ports 11 can be consistent, can also be inconsistent, and preferably they are circle
And diameter is identical.
As shown in Figure 1, it is provided with guiding mechanism 2 in the inner chamber of the valve body 1, the guiding mechanism 2 is two from institute
The one end for stating valve body 1 extends to the guide rail 21 of the other end, and two guide rails 21 are between two valve ports 11 and every
The side inwall of guide rail 21 and valve body 1 is pressed close to, and they are parallel with the long side of the valve body 1 and are cylinder.Certainly, at other
In embodiment, the guiding mechanism 2 can also be other feasible structures, will not be repeated here, and the setting of guiding mechanism 2
Position can also be adjusted according to being actually needed.
Slideably being set up as shown in accompanying drawing 1, accompanying drawing 2, on two guide rails 21 has for sealing or opening an institute
The jacking type core assembly 3 of valve port 11 is stated, specifically, the jacking type core assembly 3 includes lower valve plate 31 and upper valve plate 32, institute
Lower valve plate 31 and upper valve plate 32 are stated between two valve ports 11, is set respectively at four corner positions of the lower valve plate 31
A self-lubricating bushing 311 is put, the self-lubricating bushing 311 is sleeved on the periphery of the guide rail 21, so that the lower valve plate 31
It can be slided along the bearing of trend of the guide rail 21, the upper valve plate 32 is flexibly connected with lower valve plate 31, and the upper valve plate 32
It can be synchronized with the movement with the lower valve plate 31.
Under non-tight state, the relative two sides fitting of the lower valve plate 31 and upper valve plate 32, and the upper valve plate 32 is with
Valve plate 31 keeps gap with the valve port 11；
Under sealing state, the relative two sides separation of the lower valve plate 31 and upper valve plate 32, and the upper valve plate 32 or lower valve
Plate 21 seals a valve port 11.
It is preferred that being sealed the valve port 11 of its face by the upper valve plate 32, corresponding, the upper valve plate 32 seals valve port
Sealing ring 35 is set on face, and the diameter of the sealing ring 35 is more than the diameter of the valve port 11.
During specific sealing, the upper valve plate 32 is driven by jacking resetting-mechanism 33, as shown in Figure 2, the jacking is multiple
Position mechanism 33 includes jacking block 332, and the shape of cross section of the jacking block 332 is inverted T-shape, the protruding end end face of the jacking block 332
（Upper surface）On be opened in a screw 3321, be provided with the counterbore 321 matched with the screw 3321 on the upper valve plate 32,
The aperture of the small end of counterbore 321 is less than the diameter of the protruding end end face of the jacking block 332, and a bolt 3322 runs through the counterbore
321 and it is threadedly coupled in the screw 3321, so as to realize the mating of the upper valve plate 32 and lower valve plate 31.
The jacking block 332 is limited in a convex shape spacing hole 331 and can back and forth slided in the convex shape spacing hole 331
Dynamic, the convex shape spacing hole 331 is located on the lower valve plate 31 and the less one end of its size is towards the upper valve plate 32.
The jacking block 332 carries out upper top by the driving of jacking cylinder 333 being disposed below, the jacking cylinder 333
Telescopic shaft is corresponding with the convex shape spacing hole 331 and it is located at outside the valve body 1, therefore, in order to ensure push-pull valve
Overall tightness, the telescopic shaft of the jacking cylinder 333 are tightly connected by bellows or sealing 334 with the valve body 1；And
And in order to ensure the stationarity of the upper jacking of valve plate 32, the jacking cylinder 333 is at least 3, and they are respectively positioned on the sealing
Outside the coverage of circle 35, in the present embodiment, preferably described jacking cylinder 333 is four.
The jacking block 332 is jacked up when the telescopic shaft of the jacking cylinder 333 stretches out, the jacking block 332 is to the upper valve plate
32 application thrusts make the upper valve plate 32 be moved to the direction of valve port 11 of its face, by the ejection of the upper valve plate 32 is in institute
When stating the area of coverage of sealing ring 35 and covering the valve port 11, when preferably described sealing ring 35 is coaxial with the valve port 11, therefore, with
The 32 continuous lifting of upper valve plate, sealing ring 35 thereon is bonded with 11 corresponding madial wall of valve port, so that whole plate
Valve breakdown.
As shown in Figure 2, the jacking resetting-mechanism 33 also includes driving the upper valve plate 32 from ejection state reset
Back-moving spring 335, one end of the back-moving spring 335 are fixed or are resisted against on the step surface of the jacking block 332, and its other end is consolidated
Determine or be resisted against at the convex shoulder of the spacing hole 331, when the jacking block 332 jacks, the back-moving spring 335 compresses, and works as institute
When stating the retraction of jacking cylinder 333, the reaction force of the back-moving spring 335 drives the jacking block 332 to reset.
Further, the connection of jacking type core assembly 3 drives it to be reciprocatingly slided along the guiding mechanism 2 and controls valve port
The drive mechanism 4 of aperture, the drive mechanism 4 is tightly connected with the valve body 1 and its rotating power source 41 is located at the valve body 1
Outside.
Specifically, as shown in Figure 1, the drive device 4 includes the leading screw 43 being connected with the lower valve plate 31, comes in detail
Say, the traveling nut of the leading screw 43 is connected with the lower valve plate 31, and the screw rod of the leading screw 43 seals 42 by magnetic coupling type
Rotating power source 41 of the connection outside the valve body 1, the rotating power source 41 can be various motors, preferably servo electricity
Machine, can also other structures, such as belt gear, gear drive.
During push-pull valve work of the present utility model, its process is as follows：
When needing to turn off the push-pull valve, start the rotating power source 41, by magnetic coupling type sealing 42 again
Drive the screw rod in the leading screw 43 to rotate so that the traveling nut in leading screw 43 moves along the screw rod, and then drive with
Its lower valve plate 31 connected moves to the direction of valve port 11, while makes the synchronizing moving of upper valve plate 32.
When the area of coverage of the sealing ring 35 on the upper valve plate 32 covers the valve port, preferably described sealing ring 35 and institute
State valve port 11 it is coaxial when, the jacking cylinder 333 starts, and its telescopic shaft, which stretches out, promotes the jacking block 332, and the jacking block 332 is same
When apply thrust to the upper valve plate 32 and the upper valve plate 32 is moved through thereon close to the direction of valve port 11 of its face
Seal 35 seals valve port 11, and due to the support of the jacking cylinder 333, the inwall of the sealing ring 35 and the valve body 1 pastes
Close firmly, be not in loosening situation, will not also be influenceed by both ends air pressure.
While being pushed up on the jacking block 332, the jacking block 332 applies pressure to the spring 334 makes its deformation, but institute
The opposition for stating spring 334 is far smaller than the thrust for rising cylinder 333.
When needing to open the push-pull valve, start the jacking cylinder 333, its telescopic shaft is retracted, with telescopic shaft
Retraction no longer apply thrust to the jacking block 332, the reaction force of the spring 341 promotes the jacking block 332 to the top
The movement of the direction of cylinder 333 is risen, and drives the upper valve plate 32 to be moved to the direction of lower valve plate 31, so that the sealing ring 35
Separated with the inwall of the valve body 1, after the telescopic shaft of the jacking cylinder 333 is fully retracted, the upper valve plate 32 and lower valve
After plate 31 pastes again, now, restart the reverse drive of rotating power source 41, make the jacking type core assembly 3 is overall to move
Go out the area of coverage of the valve port 11, and due to driving the jacking type core assembly 3, therefore energy using servomotor and leading screw
Sliding distance of the jacking type core assembly 3 along the guide rail 21 is enough accurately controlled, so as to control the aperture of valve port 11.
The utility model still has numerous embodiments, all technologies formed using equivalents or equivalent transformation
Scheme, all fall within the scope of protection of the utility model.
Claims (7)
1. high vacuum push-pull valve, including valve body（1）, the valve body（1）With two coaxial valve ports（11）, it is characterised in that：
The valve body（1）Guiding mechanism is provided with inner chamber（2）, the guiding mechanism（2）Upper slip setting can block a valve port
（11）Jacking type core assembly（3）, the jacking type core assembly（3）Connection drives it along the guiding mechanism（2）Back and forth
Slide and control the drive mechanism of valve port opening（4）.
2. high vacuum push-pull valve according to claim 1, it is characterised in that：The guiding mechanism（2）Including two extensions
To the valve body（1）The guide rail at both ends（21）, the jacking type core assembly（3）Pass through self-lubricating bushing（311）It is erected at two
Bar guide rail（21）On.
3. high vacuum push-pull valve according to claim 2, it is characterised in that：The jacking type core assembly（3）Including under
Valve plate（31）And upper valve plate（32）,
Under non-tight state, the lower valve plate（31）With upper valve plate（32）Fitting, and the lower valve plate（31）With upper valve plate（32）
With two valve ports（11）Keep gap；
Under sealing state, the lower valve plate（31）With upper valve plate（32）Separation, and the lower valve plate（31）Or upper valve plate（32）Will
One valve port（11）Sealing.
4. high vacuum push-pull valve according to claim 3, it is characterised in that：The lower valve plate or upper valve plate sealing valve mouth
Sealing ring is set on face（35）, the sealing ring（35）Diameter be more than the valve port（11）Diameter.
5. high vacuum push-pull valve according to claim 4, it is characterised in that：Also include driving the upper valve plate（32）Top
Rise resetting-mechanism（33）, the jacking resetting-mechanism（33）Including with the upper valve plate（32）Bolted jacking block（332）, institute
State jacking block（332）It is limited in the lower valve plate（31）The convex shape spacing hole of upper setting（331）In and pass through jacking cylinder（333）
Jacking, the jacking block（332）It is also connected with driving it along the spacing hole（331）Slide the back-moving spring resetted（335）.
6. high vacuum push-pull valve according to claim 5, it is characterised in that：The jacking cylinder（333）Positioned at the valve
Body（1）Outside, and bellows or sealing are passed through（334）With the valve body（1）It is tightly connected.
7. according to any described high vacuum push-pull valves of claim 1-6, it is characterised in that：The drive mechanism（4）Including even
Connect the jacking type core assembly（3）Leading screw（43）, the leading screw（43）Sealed by magnetic coupling type（42）Connection is positioned at institute
State valve body（1）Outer rotating power source（41）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720460706.5U CN206918280U (en) | 2017-04-28 | 2017-04-28 | High vacuum push-pull valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720460706.5U CN206918280U (en) | 2017-04-28 | 2017-04-28 | High vacuum push-pull valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206918280U true CN206918280U (en) | 2018-01-23 |
Family
ID=61307439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720460706.5U Active CN206918280U (en) | 2017-04-28 | 2017-04-28 | High vacuum push-pull valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206918280U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110513810A (en) * | 2019-09-12 | 2019-11-29 | 珠海格力电器股份有限公司 | Blower wall system, method, apparatus and unit equipment |
| CN111664262A (en) * | 2019-03-06 | 2020-09-15 | 宝钢工程技术集团有限公司 | Sealing valve for LF furnace dust collecting hood |
| CN111839280A (en) * | 2019-04-25 | 2020-10-30 | 广东美的生活电器制造有限公司 | Drain valve and food processor |
| CN112109740A (en) * | 2019-06-19 | 2020-12-22 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Fail-safe gate valve and have its vacuum pipe |
| CN113416934A (en) * | 2021-06-26 | 2021-09-21 | 丹阳市鼎新机械设备有限公司 | Lens double-chamber vacuum coating process |
| CN114165611A (en) * | 2021-12-14 | 2022-03-11 | 拓荆科技股份有限公司 | Gate valve, gate valve opening and closing method and semiconductor equipment |
| CN114607784A (en) * | 2022-03-09 | 2022-06-10 | 北京真空电子科技有限公司 | Valve plate for isolation, driving device for driving valve plate and valve |
-
2017
- 2017-04-28 CN CN201720460706.5U patent/CN206918280U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664262A (en) * | 2019-03-06 | 2020-09-15 | 宝钢工程技术集团有限公司 | Sealing valve for LF furnace dust collecting hood |
| CN111839280A (en) * | 2019-04-25 | 2020-10-30 | 广东美的生活电器制造有限公司 | Drain valve and food processor |
| CN112109740A (en) * | 2019-06-19 | 2020-12-22 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Fail-safe gate valve and have its vacuum pipe |
| CN112109740B (en) * | 2019-06-19 | 2021-10-19 | 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） | Fail-safe gate valve and have its vacuum pipe |
| CN110513810A (en) * | 2019-09-12 | 2019-11-29 | 珠海格力电器股份有限公司 | Blower wall system, method, apparatus and unit equipment |
| CN113416934A (en) * | 2021-06-26 | 2021-09-21 | 丹阳市鼎新机械设备有限公司 | Lens double-chamber vacuum coating process |
| CN114165611A (en) * | 2021-12-14 | 2022-03-11 | 拓荆科技股份有限公司 | Gate valve, gate valve opening and closing method and semiconductor equipment |
| CN114607784A (en) * | 2022-03-09 | 2022-06-10 | 北京真空电子科技有限公司 | Valve plate for isolation, driving device for driving valve plate and valve |
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