CN218646052U - Vacuum sealing door and vacuum furnace - Google Patents

Abstract

The utility model discloses a vacuum seal door and vacuum furnace, this vacuum seal door include sealing door board, pressure strip, compress tightly module and drive module, establish on the furnace body of vacuum furnace pressing strip slidable, compress tightly the module and establish on the pressure strip and link to each other with sealing door board to the laminating of the sealed door board of drive or break away from the lateral wall of vacuum furnace, drive module links to each other with the pressure strip, and drive module is used for driving the pressure strip and slides, so that sealing door board seals or keeps away from the furnace gate mouth of furnace body. The vacuum sealing door has the advantages that the abrasion of the vacuum sealing ring is small in the opening and closing processes, the sealing effect of the vacuum sealing door is guaranteed, and the service life of the vacuum sealing door is prolonged.

Description

Vacuum sealing door and vacuum furnace

Technical Field

The utility model relates to a semiconductor manufacturing equipment technical field especially relates to a vacuum sealing door and vacuum furnace.

Background

The vacuum equipment generally vacuumizes the interior of the furnace body to complete the process. Before and after the process is started and completed, the furnace door is opened, and elements are fed into or taken out of the cavity, the conventional furnace door is of a hinge type structure or a parallelogram connecting rod structure, the sealing door rotates in the opening and closing process, so that a relative sliding process is caused between a sealing ring on the sealing door and the outer side wall of the furnace body, the surface of the sealing ring is possibly scratched, the sealing performance of the sealing door is influenced, and the service life of the sealing door is shortened.

SUMMERY OF THE UTILITY MODEL

A first object of the utility model is to provide a vacuum sealing door, this vacuum sealing door is less opening and the wearing and tearing that the in-process vacuum seal circle received, has guaranteed vacuum sealing door's sealed effect, has prolonged vacuum sealing door's life.

The second purpose of the novel vacuum furnace is to provide a vacuum furnace, the sealing effect of the air sealing door of the vacuum furnace is better, and the service life of the vacuum furnace is longer.

For realizing the technical effect, the technical scheme of the utility model as follows:

the utility model discloses a vacuum sealing door, vacuum sealing door includes: a sealing door panel; the pressing plate is slidably arranged on the furnace body of the vacuum furnace; the pressing module is arranged on the pressing plate and connected with the sealing door plate so as to drive the sealing door plate to be attached to or separated from the outer side wall of the vacuum furnace; the driving module is connected with the pressing plate and used for driving the pressing plate to slide so as to enable the sealing door plate to be closed or far away from a furnace door of the furnace body.

In some embodiments, the driving module comprises a driving source and a driving slider, and the driving slider is connected with the pressing plate and is in transmission fit with the driving source.

In some specific embodiments, the vacuum sealing door further comprises two limiting modules, the two limiting modules are arranged on the furnace body at intervals, and the limiting modules are used for limiting the driving sliding block.

In some specific embodiments, each of the position limiting modules includes: the limiting driving piece is arranged on the furnace body; the limiting piece is connected to the power output end of the limiting driving piece and can be inserted into a limiting groove in the driving sliding block; the limit switch is arranged on the furnace body and can detect the position of the driving slide block; wherein: when the limit switch detects the driving slide block, the limit driving piece drives the limit part to move so as to insert the limit part into the limit groove.

In some specific embodiments, the limiting module further comprises a stopper, the stopper is arranged on the furnace body, and the stopper is used for stopping the driving sliding block.

In some embodiments, the compression module comprises: the pressing driving assembly is connected to the pressing plate and is used for driving the sealing door plate to move so as to press the sealing door plate on the outer side wall of the furnace body; and one end of the elastic component is connected with the sealing door plate, the other end of the elastic component penetrates through the pressure plate, and the elastic component is used for driving the sealing door plate to be separated from the outer side wall of the furnace body.

In some specific embodiments, the compression drive assembly comprises: the pressing cylinder is connected to the pressing plate; the compressing block is connected to a piston rod of the compressing cylinder; and the cylinder damping piece is arranged on the cylinder body of the pressing cylinder.

In some specific embodiments, a mounting hole is formed in the pressing plate, the mounting hole is a stepped hole, and the elastic component includes: one end of the connecting rod is connected with the sealing door plate, and the other end of the connecting rod penetrates through the mounting hole; the elastic piece is sleeved on the connecting rod, and one end of the elastic piece is abutted against the step surface of the mounting hole; the elastic sleeve is connected to one end, penetrating out of the mounting hole, of the connecting rod, and the other end of the elastic piece is connected to the elastic sleeve; the linear bearing penetrates through the mounting hole and is sleeved on the connecting rod.

In some embodiments, the seal door panel is provided with an observation hole, and the observation hole is a stepped hole; vacuum sealing door is still including the cooperation be in window module in the observation hole, the window module includes: a lens fitted within the viewing aperture to close the viewing aperture; the gland is connected to the sealing door plate to compress the lens; the shock absorption pad is clamped between the gland and the lens and between the lens and the step surface of the observation hole; a seal sandwiched between the lens and the sealing door panel.

The utility model also discloses a vacuum furnace, including furnace body and the foreland vacuum sealing door, be equipped with the furnace gate mouth on the furnace body, vacuum sealing door can open or seal the furnace gate mouth.

The utility model discloses a vacuum sealing door's beneficial effect: in the actual work process, the drive module can drive the reciprocating motion between the first position of sealing the furnace gate of furnace body and the second position of keeping away from the furnace gate of furnace body, when moving to the second position by the first position, at first compress tightly the module and drive sealed door panel earlier and break away from the furnace body, then drive module drive pressure strip motion, thereby drive sealed door panel and move to the first position by the second position, when moving to the first position by the second position, drive module drive pressure strip motion, drive sealed door panel and move to the first position by the second position, then compress tightly the module and move sealed door panel laminating on the furnace body earlier. Therefore, when the sealing door plate is opened or the furnace door is closed, the abrasion of the sealing ring is small, the sealing effect of the vacuum sealing door is ensured, and the service life of the vacuum sealing door is prolonged.

The utility model discloses a vacuum furnace's beneficial effect: due to the vacuum sealing door, the vacuum sealing door of the vacuum furnace has a good sealing effect, and the service life of the vacuum furnace is long.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

Fig. 1 is a schematic structural view of a vacuum sealing door according to an embodiment of the present invention;

fig. 2 is a schematic structural view of another direction of the vacuum sealing door according to the embodiment of the present invention;

fig. 3 is a schematic view illustrating a pressing plate and a pressing module of the vacuum sealing door according to an embodiment of the present invention;

fig. 4 is a schematic cross-sectional view of a structure of the pressing driving assembly and the sealing door plate of the vacuum sealing door according to the embodiment of the present invention;

fig. 5 is a schematic structural diagram of a pressing block of a pressing driving assembly of the vacuum sealing door according to an embodiment of the present invention;

fig. 6 is a schematic cross-sectional view of a structure of the elastic component and the sealing door plate of the vacuum sealing door according to the embodiment of the present invention;

fig. 7 is a schematic view of a matching structure of a driving module and a limiting module of the vacuum sealing door according to an embodiment of the present invention;

fig. 8 is a schematic cross-sectional view illustrating a structure of a window module and a sealing door plate of a vacuum sealing door according to an embodiment of the present invention;

fig. 9 is a schematic partial structure diagram of a vacuum furnace according to an embodiment of the present invention.

Reference numerals:

1. a sealing door panel; 11. an observation hole;

2. a compression plate; 21. mounting holes; 22. a mating groove;

3. a compression module; 31. a compression drive assembly; 311. a pressing cylinder; 312. a compression block; 3121. positioning pins; 313. a cylinder damper; 32. an elastic member; 321. a connecting rod; 322. an elastic member; 323. an elastic sleeve; 324. a linear bearing;

4. a driving module; 41. a drive source; 42. driving the slide block; 421. a limiting groove;

5. a limiting module; 51. a limiting driving piece; 52. a limiting member; 521. a limiting plate; 522. limiting the idler wheel; 53. a limit switch; 54. a stopper;

6. a window module; 61. a lens; 62. a gland; 63. a shock pad; 64. a seal member;

7. a guiding module; 71. a guide slide rail; 72. a guide slider;

8. a vacuum seal ring;

100. a furnace body; 110. a furnace door opening; 120. a vacuum extraction port; 130. the port is relieved by vacuum.

Detailed Description

In order to make the technical problem solved by the present invention, the technical solution adopted by the present invention and the technical effect achieved by the present invention clearer, the technical solution of the present invention will be further explained by combining the drawings and by means of the specific implementation manner.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In addition, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature for distinguishing between descriptive features, non-sequential, and non-trivial. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

The specific structure of the vacuum sealing door according to the embodiment of the present invention will be described with reference to fig. 1 to 8.

The utility model discloses a vacuum sealing door, as shown in fig. 1-fig. 2, the vacuum sealing door of this embodiment is including sealing door panel 1, pressure strip 2, compress tightly module 3 and drive module 4, sealing door panel 1 is equipped with vacuum seal 8 towards one side of the lateral wall of vacuum furnace, establish on the furnace body 100 of vacuum furnace 2 slidable, compress tightly module 3 and establish on pressure strip 2 and link to each other with sealing door panel 1, laminate or break away from the lateral wall of vacuum furnace with drive sealing door panel 1, drive module 4 links to each other with pressure strip 2, drive module 4 is used for driving pressure strip 2 and slides, so that sealing door panel 1 seals or keeps away from the furnace gate 110 of furnace body 100.

It can be understood that, in the actual working process, the driving module 4 can drive the sealing door panel 1 to reciprocate between the first position of the furnace door 110 of the closed furnace body 100 and the second position far away from the furnace door 110 of the furnace body 100, when moving from the first position to the second position, the pressing module 3 drives the sealing door panel 1 to separate from the furnace body 100, then the driving module 4 drives the pressing plate 2 to move, so as to drive the sealing door panel 1 to move from the second position to the first position, when moving from the second position to the first position, the driving module 4 drives the pressing plate 2 to move, so as to drive the sealing door panel 1 to move from the second position to the first position, and then the pressing module 3 drives the sealing door panel 1 to be attached to the furnace body 100. Therefore, when the sealing door panel 1 is opened or closed at the furnace door opening 110, the furnace body 100 has less abrasion to the vacuum sealing ring 8, the sealing effect of the vacuum sealing door is ensured, and the service life of the vacuum sealing door is prolonged.

In some embodiments, as shown in fig. 7, the driving module 4 includes a driving source 41 and a driving slider 42, and the driving slider 42 is connected to the pressing plate 2 and is in transmission fit with the driving source 41. It should be additionally noted that, in the present embodiment, the driving source 41 may be an air cylinder, an electric push rod, or a structure in which a motor drives a ball screw, and the specific structure of the driving source 41 may be selected according to actual needs.

In some embodiments, the vacuum sealing door further includes two limiting modules 5, the two limiting modules 5 are spaced apart from each other on the furnace body 100, and the limiting modules 5 are used for limiting the driving slide block 42. It will be appreciated that the stop module 5 is capable of limiting the travel of the drive slider 42, and thus acts to limit the travel of the closure panel 1. In some specific embodiments, as shown in fig. 7, each limiting module 5 includes a limiting driving member 51, a limiting member 52 and a limiting switch 53, the limiting driving member 51 is disposed on the furnace body 100, the limiting member 52 is connected to the power output end of the limiting driving member 51, the limiting member 52 can be inserted into the limiting groove 421 on the driving slider 42, the limiting switch 53 is disposed on the furnace body 100, and the limiting switch 53 can detect the position of the driving slider 42. When the limit switch 53 detects the driving slider 42, the limit driving member 51 drives the limiting member 52 to move so as to insert the limiting member 52 into the limiting groove 421. It can be understood that, in the actual working process, the sealing door panel 1 has a first position of the sealing furnace door 110 and a second position far away from the furnace door 110, in this embodiment, the limit switch 53 can detect whether the sealing door panel 1 reaches the first position or the second position, when the sealing door panel 1 reaches the first position and the second position, the limit driving member 51 drives the limit member 52 to insert into the limit groove 421, so that the sealing door panel 1 can be locked, the occurrence of shaking of the sealing door panel 1 is avoided, and the use reliability of the whole vacuum sealing door is ensured.

In some specific embodiments, as shown in fig. 7, the limiting module 5 further includes a stopper 54, the stopper 54 is disposed on the furnace body 100, and the stopper 54 is used for stopping the driving slider 42. It can be understood that the stop member 54 can limit the stroke of the driving slider 42, so as to limit the stroke of the sealing door panel 1, and avoid the phenomenon that the driving module 4 fails to cause excessive movement of the sealing door panel 1.

In some embodiments, as shown in fig. 3-7, the pressing module 3 includes a pressing driving assembly 31 and an elastic assembly 32, the pressing driving assembly 31 is connected to the pressing plate 2, the pressing driving assembly 31 is used for driving the sealing door panel 1 to move so as to press the sealing door panel 1 against the outer sidewall of the furnace body 100, one end of the elastic assembly 32 is connected to the sealing door panel 1, the other end is inserted into the pressing plate 2, and the elastic assembly 32 is used for driving the sealing door panel 1 to separate from the outer sidewall of the furnace body 100. It can be understood that, in the actual working process, the driving module 4 needs to drive the pressing block 312 to move so as to drive the sealing door panel 1 to move, if the pressing module 3 only includes one pressing driving component 31, then in order to ensure that the sealing door panel 1 can be stably separated from the furnace body 100, the power output end of the pressing driving component 31 must be directly connected with the sealing door panel 1, so that when the driving module 4 drives the pressing block 312 to move, the power output end of the pressing driving component 31 will receive a shearing force, and the pressing driving component 31 is easily damaged after long-term use. In this embodiment, the pressing module 3 includes a pressing driving component 31 and an elastic component 32, when the pressing driving component 31 is used for driving the sealing door panel 1 to move so as to press the sealing door panel 1 onto the outer side wall of the furnace body 100, the elastic component 32 deforms, and after the pressing driving component 31 is separated from the sealing door panel 1, the sealing door panel 1 can rebound under the action of the elastic component 32, so that the pressing driving component 31 does not need to be directly connected with the sealing door panel 1, and the service life of the pressing driving component 31 is prolonged.

In some specific embodiments, as shown in fig. 4, the pressing driving assembly 31 includes a pressing cylinder 311, a pressing block 312, and a cylinder damper 313, the pressing cylinder 311 is connected to the pressing plate 2, the pressing block 312 is connected to a piston rod of the pressing cylinder 311, and the cylinder damper 313 is disposed on a cylinder body of the pressing cylinder 311. It can be understood that, by adopting the pressing cylinder 311 to drive the pressing block 312 to realize the sealing door panel 1, not only can the pressing driving assembly 31 be ensured to stably press the sealing door panel 1, and the connection sealing performance between the sealing door panel 1 and the furnace body 100 be ensured, but also the structure of the pressing driving assembly 31 can be simplified, and the manufacturing cost can be reduced. According to the foregoing, when the pressing cylinder 311 retracts, the sealing door panel 1 rebounds under the action of the elastic component 32, the cylinder shock-absorbing piece 313 is arranged to avoid the phenomenon that the sealing door panel 1 collides with the pressing block 312 when rebounding, and the connection stability of the sealing door panel 1 is ensured.

Optionally, as shown in fig. 5, the pressing block 312 is provided with a fixing pin, and the fixing pin is connected to the piston rod. This ensures that the clamp block 312 is connected to the piston rod, and the clamp block 312 can stably press the closure panel 1 when the clamp cylinder 311 is operated.

In some specific embodiments, as shown in fig. 6, a mounting hole 21 is formed in the pressure plate 2, the mounting hole 21 is a stepped hole, the elastic component 32 includes a connecting rod 321, an elastic component 322, an elastic sleeve 323, and a linear bearing 324, one end of the connecting rod 321 is connected to the door seal panel 1, the other end of the connecting rod passes through the mounting hole 21, the elastic component 322 is sleeved on the connecting rod 321, and one end of the elastic component abuts against a stepped surface of the mounting hole 21, the elastic sleeve 323 is connected to one end of the connecting rod 321 that passes through the mounting hole 21, the other end of the elastic component 322 is connected to the elastic sleeve 323, and the linear bearing 324 is inserted in the mounting hole 21 and is sleeved on the connecting rod 321. It can be understood that when the pressing driving assembly 31 drives the closure panel 1 to move towards the furnace body 100, the connecting rod 321 will move along with the closure panel 1, and the connecting rod 321 can drive the elastic sleeve 323 to move so as to compress the elastic member 322. Therefore, when the pressing driving assembly 31 presses the sealing door panel 1 onto the furnace body 100, the elastic piece 322 is in a compressed energy storage state, when the sealing door panel 1 needs to be opened, only the pressing driving assembly 31 needs to be separated from the sealing door panel 1, the elastic piece 322 can release the stored energy, the elastic sleeve 323 is driven to move towards the direction far away from the furnace body 100, the connecting rod 321 and the sealing door panel 1 are driven to move towards the direction far away from the furnace body 100, and therefore the sealing door panel 1 is separated from the furnace body 100. Therefore, when the pressing driving assembly 31 releases the sealing door panel 1, the sealing door panel 1 automatically pops up under the action of the elastic piece 322, other power is not needed, the structure of the whole vacuum sealing door is simplified, and the manufacturing cost is reduced. The additional linear bearing 324 can reduce the friction between the connecting rod 321 and the mounting hole 21, thereby ensuring that the connecting rod 321 can stably slide in the mounting hole 21.

In some embodiments, as shown in fig. 8, the sealing door panel 1 is provided with an observation hole 11, and the observation hole 11 is a stepped hole; the vacuum sealing door further comprises a window module 6 which is matched in the observation hole 11, wherein the window module 6 comprises a lens 61, a pressing cover 62, a shock absorption pad 63 and a sealing piece 64, the lens 61 is matched in the observation hole 11 to seal the observation hole 11, the pressing cover 62 is connected to the sealing door panel 1 to press the lens 61, the shock absorption pad 63 is clamped between the pressing cover 62 and the lens 61 and between the lens 61 and the step surface of the observation hole 11, and the sealing piece 64 is clamped between the lens 61 and the sealing door panel 1. It can be understood that the observation hole 11 is arranged on the sealing door panel 1, so that a user can conveniently observe the internal condition of the furnace body 100 through the observation hole 11. The window module 6 can seal the observation hole 11 and enlarge the inside of the furnace body 100 through the lens 61, so that a user can observe the inside of the furnace body 100 more conveniently. The installation stability of lens 61 can be ensured to gland 62, and shock pad 63 can play the effect of protection lens 61, avoids lens 61 and gland 62 and sealing door panel 1 to appear the friction, and window module 6 and sealing door panel 1's connection leakproofness can be ensured to sealing member 64, avoids the phenomenon of observation hole 11 department gas leakage to take place.

In some embodiments, as shown in fig. 1-2, the vacuum sealing door further includes a guide module 7, the guide module 7 includes a guide rail 71 and a guide slider 72 fitted on the guide rail 71, the guide rail 71 is connected to the outer sidewall of the furnace body 100, and the guide slider 72 is connected to the pressing plate 2. It can be understood that the cooperation of the guide sliding block 72 and the guide sliding rail 71 can improve the stability of the driving module 4 when driving the pressing plate 2 to move, and avoid the occurrence of the phenomenon of jamming.

Preferably, there are two guide rails 71, and the two guide rails 71 are spaced apart from each other. From this, can ensure that door plant 1 moves steadily, avoid door plant 1 to appear the dead phenomenon of card.

The first embodiment is as follows:

as shown in fig. 1-2, the vacuum sealing door of this embodiment includes a sealing door panel 1, a pressing plate 2, a pressing module 3, a driving module 4, and two limiting modules 5, where the sealing door panel 1 is slidably disposed on the furnace body 100 along a first direction, a vacuum sealing ring 8 is disposed on one side of the sealing door panel 1 facing the outer side wall of the furnace body 100, an observation hole 11 is disposed on the sealing door panel 1, and the observation hole 11 is a stepped hole. The pressure strip 2 is established in the both sides of sealing door panel 1 along the second direction, and on the second direction, a part of pressure strip 2 overlaps and is connected with sealing door panel 1, compresses tightly the module 3 and establishes on pressure strip 2 and links to each other with sealing door panel 1 to the laminating of drive sealing door panel 1 or break away from the lateral wall of furnace body 100. The pressing plate 2 is provided with a mounting hole 21 and a matching groove 22, and the mounting hole 21 is a stepped hole. The guide module 7 includes a guide slide rail 71 extending along the first direction and a guide slider 72 fitted on the guide slide rail 71, the guide slide rail 71 is connected to the outer side wall of the furnace body 100, and the guide slider 72 is connected to the pressure strip 2.

As shown in fig. 3 to 6, the pressing module 3 includes three pressing driving assemblies 31 and three elastic assemblies 32, the pressing driving assembly 31 includes a pressing cylinder 311 and a pressing block 312, the pressing cylinder 311 is connected to the pressing plate 2, the pressing block 312 is connected to a piston rod of the pressing cylinder 311 through a positioning pin 3121, and a cylinder damper 313 is disposed on a cylinder body of the pressing cylinder 311. Elastic component 32 includes connecting rod 321, elastic component 322, elastic sleeve 323 and linear bearing 324, the one end of connecting rod 321 links to each other with sealing door panel 1, the mounting hole 21 is worn out to the other end, elastic component 322 cover is established on connecting rod 321, and one end is ended and is supported on the step face of mounting hole 21, elastic sleeve 323 is connected in the one end that mounting hole 21 was worn out to connecting rod 321, and the other end of elastic component 322 is connected on elastic sleeve 323, linear bearing 324 wears to establish in mounting hole 21 and the cover is established on connecting rod 321.

As shown in fig. 7, the driving module 4 is used for driving the pressing plate 2 to slide along a first direction so as to enable the sealing door panel 1 to close or move away from the furnace door opening 110 of the furnace body 100, and the driving module 4 comprises a driving source 41 and a driving slider 42, and the driving slider 42 is installed in the matching groove 22 and is in transmission matching with the driving source 41. Every spacing module 5 includes spacing driving piece 51, locating part 52, limit switch 53 and stop piece 54, spacing driving piece 51 is the cylinder and establishes on furnace body 100, locating part 52 includes limiting plate 521 and spacing gyro wheel 522, limiting plate 521 connects the power take off end at spacing driving piece 51, spacing gyro wheel 522 can insert the spacing groove 421 on the drive slider 42, limit switch 53 establishes on furnace body 100, limit switch 53 can detect the position of drive slider 42, spacing module 5 still includes stop piece 54, stop piece 54 establishes on furnace body 100, stop piece 54 is used for stopping drive slider 42.

As shown in fig. 8, the window module 6 includes a lens 61, a pressing cover 62, a shock-absorbing pad 63, and a sealing member 64, the lens 61 is fitted in the observation hole 11 to close the observation hole 11, the pressing cover 62 is connected to the door seal 1 to press the lens 61, the shock-absorbing pad 63 is sandwiched between the pressing cover 62 and the lens 61 and between the lens 61 and the step surface of the observation hole 11, and the sealing member 64 is sandwiched between the lens 61 and the door seal 1.

The advantages of the vacuum sealing door of the present embodiment are as follows:

firstly, the method comprises the following steps: the vacuum sealing door can be separated from the furnace body 100 in the opening process, so that the surface damage of the vacuum sealing ring 8 caused by the opening and closing of the vacuum sealing door is reduced, and the service life of the vacuum sealing ring 8 is prolonged;

secondly, the method comprises the following steps: the pressing plate 2 is adopted to press the vacuum sealing door, so that the vacuum sealing door and the vacuum sealing ring 8 can uniformly bear pressing force, and the sealing is reliable and convenient;

thirdly, the method comprises the following steps: simple structure, safety and reliability, and convenient installation, use and maintenance.

The utility model also discloses a vacuum furnace, as shown in FIG. 9, vacuum furnace includes furnace body 100 and the vacuum sealing door in the preceding, is equipped with furnace gate mouth 110, vacuum extraction mouth 120 and vacuum on the furnace body 100 and removes mouth 130, and vacuum sealing door can open or close furnace gate mouth 110. The vacuum furnace is provided with the vacuum sealing door, so that the vacuum sealing door of the vacuum furnace has a good sealing effect, and the service life of the vacuum furnace is long.

In the description herein, references to the description of "some embodiments," "other embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.

Claims (10)

1. Vacuum sealing door, characterized in that, vacuum sealing door includes:

a sealing door panel (1);

the pressing plate (2) is slidably arranged on a furnace body (100) of the vacuum furnace;

the pressing module (3) is arranged on the pressing plate (2) and connected with the sealing door panel (1) to drive the sealing door panel (1) to be attached to or separated from the outer side wall of the furnace body (100);

the driving module (4), the driving module (4) with the pressure strip (2) link to each other, the driving module (4) are used for driving the pressure strip (2) to slide, so that the sealing door panel (1) is closed or is far away from a furnace door opening (110) of the furnace body (100).

2. Vacuum sealing door according to claim 1, characterized in that the drive module (4) comprises a drive source (41) and a drive slider (42), the drive slider (42) being connected to the hold-down plate (2) and being in driving engagement with the drive source (41).

3. The vacuum sealing door according to claim 2, characterized in that the vacuum sealing door further comprises two limiting modules (5), the two limiting modules (5) are arranged on the furnace body (100) at intervals, and the limiting modules (5) are used for limiting the driving sliding block (42).

4. Vacuum sealing door according to claim 3, characterized in that each of said retaining modules (5) comprises:

the limiting driving piece (51), the limiting driving piece (51) is arranged on the furnace body (100);

the limiting piece (52), the limiting piece (52) is connected to the power output end of the limiting driving piece (51), and the limiting piece (52) can be inserted into a limiting groove (421) on the driving sliding block (42);

the limit switch (53), the limit switch (53) is set on the furnace body (100), the limit switch (53) can detect the position of the driving slide block (42); wherein:

when the limit switch (53) detects the driving slider (42), the limit driving part (51) drives the limit part (52) to move so as to insert the limit part (52) into the limit groove (421).

5. The vacuum sealing door of claim 4, characterized in that the limiting module (5) further comprises a stopper (54), the stopper (54) is disposed on the oven body (100), and the stopper (54) is used for stopping the driving slider (42).

6. Vacuum sealing door according to any of claims 1-5, characterized in that the compression module (3) comprises:

the pressing driving assembly (31), the pressing driving assembly (31) is connected to the pressing plate (2), and the pressing driving assembly (31) is used for driving the sealing door panel (1) to move so as to press the sealing door panel (1) on the outer side wall of the furnace body (100);

one end of the elastic component (32) is connected with the sealing door panel (1), the other end of the elastic component (32) penetrates through the pressing plate (2), and the elastic component (32) is used for driving the sealing door panel (1) to be separated from the outer side wall of the furnace body (100).

7. Vacuum sealing door according to claim 6, characterized in that the pressing drive assembly (31) comprises:

the pressing cylinder (311), the pressing cylinder (311) is connected to the pressing plate (2);

the pressing block (312) is connected to a piston rod of the pressing cylinder (311);

a cylinder damper (313), the cylinder damper (313) being provided on a body of the pressing cylinder (311).

8. The vacuum sealing door of claim 6, characterized in that the pressing plate (2) is provided with a mounting hole (21), the mounting hole (21) is a stepped hole, and the elastic component (32) comprises:

one end of the connecting rod (321) is connected with the sealing door panel (1), and the other end of the connecting rod (321) penetrates through the mounting hole (21);

the elastic piece (322) is sleeved on the connecting rod (321), and one end of the elastic piece (322) abuts against the step surface of the mounting hole (21);

the elastic sleeve (323) is connected to one end, penetrating out of the mounting hole (21), of the connecting rod (321), and the other end of the elastic piece (322) is connected to the elastic sleeve (323);

the linear bearing (324) penetrates through the mounting hole (21) and is sleeved on the connecting rod (321).

9. The vacuum sealing door according to any one of claims 1 to 5, characterized in that the sealing door panel (1) is provided with a viewing hole (11), and the viewing hole (11) is a stepped hole;

vacuum sealing door is still including the cooperation be in window module (6) in observation hole (11), window module (6) include:

a lens (61), said lens (61) fitting within said viewing aperture (11) to close said viewing aperture (11);

a gland (62), the gland (62) being connected to the closure door panel (1) to compress the lens (61);

a shock-absorbing pad (63), wherein the shock-absorbing pad (63) is clamped between the gland (62) and the lens (61) and between the lens (61) and the step surface of the observation hole (11);

a seal (64), the seal (64) being interposed between the lens (61) and the seal door panel (1).

10. Vacuum furnace, characterized in that it comprises a furnace body (100) and a vacuum-tight door according to any one of claims 1 to 9, said furnace body (100) being provided with a furnace door opening (110), said vacuum-tight door being able to open or close said furnace door opening (110).

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