KR101725251B1 - Vacuum Valves - Google Patents

Abstract

A valve housing 100 having a driving space 110 formed on an inner side thereof and having passages 120 and 120` formed on both sides thereof so as to move an object thereon; A main shaft 300 coupled to a rear surface of the blade 200 and a valve seat 200 formed at a lower portion of the valve housing 100 and having an opening A vertical moving part 400 connected to the main shaft 300 to move the blade 200 in the upward and downward directions, a first piston 410 moved in the upward and downward directions by the air pressure, A horizontal moving part 500 coupled to the lower part of the moving part 400 and provided with vertically moving guide grooves 510 and 510` formed at both sides in the vertical direction, A second piston (610) which is moved up and down by air pressure, and a second piston (630, 630 ') formed on both sides of the movement guide block (620) and passing through the vertical movement guide grooves (510, 510') respectively, The vertical movement guide grooves 510 and 510 'are formed on both sides of the valve housing 100 so that the vertical movement part 400 and the horizontal movement part 500 are accommodated. Closing guide grooves 710 for guiding the blade 200 to move forward and backward in accordance with upward and downward movement of the horizontal moving unit 600 by inserting the cam rollers 630 and 630 ' And 710 'are inclined, respectively.

Description

Vacuum Valves

A vacuum valve includes a valve housing (100) having a driving space (110) formed on an inner side thereof, a movable passage part (120, 120 ') formed on both sides thereof, A main shaft 300 coupled to a rear surface of the blade 200 and a lower shaft 200 connected to the lower portion of the valve housing 100. The blade 200 is installed in the space 110 and opens and closes the moving passage 120 from the inside, A first piston 410 which is moved upward and downward by air pressure and a vertical movement part 400 for moving the blade 200 in the upward and downward directions is connected to the main shaft 300, A horizontal moving part 500 coupled to a lower part of the vertical moving part 400 and having vertically moving guide grooves 510 and 510` formed in a vertical direction on both sides thereof, And a second piston (420) provided in the inner part (500) and moved up and down by air pressure, A movement guide block 620 formed at the lower portion of the second piston 610 and a guide block 620 formed at both sides of the movement guide block 620 and passing through the vertical movement guide grooves 510 and 510 ' The horizontal movement unit 600 includes the cam rollers 630 and 630 and the vertical movement unit 400 and the horizontal movement unit 500 are received in the lower portion of the valve housing 100, The cam rollers 630 and 630` passed through the vertical movement guide grooves 510 and 510` are inserted to move the blade 200 forward and backward as the horizontal movement unit 600 moves upward and downward And the main body bracket 700 has slanting opening / closing guide grooves 710 and 710 'for guiding movement of the main body 100 in the direction of the arrow.

In general, since a semiconductor manufacturing process for manufacturing a semiconductor device requires high precision, a high degree of cleanliness and a special manufacturing technique are required.

For this reason, the semiconductor device is manufactured in a state in which the contact of the foreign substances contained in the air is completely blocked, that is, in a vacuum state, thereby making it possible to produce a product with high reliability and a high degree of completion.

On the other hand, a vacuum pump for sucking air and other gases in the process chamber is installed outside the process chamber in order to maintain a vacuum inside the process chamber for manufacturing semiconductor devices.

A vacuum valve is provided between the process chamber and the vacuum pump to open the vacuum valve when air and other gases in the process chamber are discharged to the outside and to maintain the vacuum state inside the process chamber, Thereby making it possible to keep the inside of the process chamber always in a clean vacuum state.

[0003] A "mount type square gate valve" (Korean Patent Laid-Open Publication No. 2003-0050409) of Patent Document 1 of the above vacuum valve is an air cylinder which holds a vacuum by O-rings and moves up and down a shaft, A square gate valve comprising a body having a rectangular passage, comprising: four mounting rolls hingedly connected to a cylinder shaft, the mounting rolls being formed at each corner of a square, side roll rolls rolling on left and right sides, And four mounting holes having an upward angle corresponding to the mounting roll on the inner rear surface of the square gate valve main body and a ball rolling device protruding from the inside of the front surface of the main body, The square opening / closing disk is urged in a direction away from the front surface of the main body, As the mounting roll is lifted and raised, the square opening / closing disk with the O-ring is closely attached to the front passageway, and the sealing effect of the disk and the passageway is high, and the disk is easily manufactured. there was.

However, in the "mount square gate valve" of Patent Document 1, a square opening / closing disk having four mounting rolls, a side rolling roll and a rectangular O-ring in the object moving space is provided, Rolls, side cloud rolls, and rectangular O-rings are worn out, causing air leaks (air leakage phenomenon) and particles in the object moving space.

In addition, when the rectangular opening / closing disk rises by the air cylinder, the mounting roll is mounted on the mounting roll in an inclined state so that the rectangular opening / closing disk closes the passage. When the square opening / closing disk is moved upward and downward, air is leaked into the air cylinder, the rectangular opening / closing disk is arbitrarily opened, which makes it impossible to normally operate the mount type square gate valve.

Patent Document 1: Korean Patent Publication No. 2003-0050409

SUMMARY OF THE INVENTION The present invention has been conceived to solve the problems described above, and it is an object of the present invention to provide a valve housing having only a simple structure of a blade that opens and closes a moving passage without any other configuration, And to minimize the possibility that generated particles will be generated inside the valve housing.

Further, the present invention provides a vacuum valve that can be accommodated in the main body bracket so that the vertical moving part and the horizontal moving part serving as cylinders can be accommodated in the inside of the main bracket, so that the vacuum valve is manufactured as a type of cam effect and can receive less spatial restriction.

Further, by moving the blade in the forward and backward directions using the cam rollers and the opening and closing guide grooves, it is possible to open and close the moving path portion by simple operation, and even if the air leaks to the horizontal moving portion, And to provide a vacuum valve which can prevent the blade from being arbitrarily operated.

In order to solve the above-mentioned problems, the vacuum valve according to the present invention is characterized in that a driving space 110 is formed on the inner side, and on both side surfaces thereof, a passage opening 120, 120 ' A blade 200 installed in the driving space 110 to open and close the moving path 120 from the inside and a main shaft 300 coupled to a rear surface of the blade 200; A first piston 410 which is formed in a lower portion of the valve housing 100 and moves in an upward and downward direction by pneumatic pressure and the main shaft 300 are connected to the blade 200, (510, 510 ') which are coupled to the lower part of the vertical movement part (400) and vertically formed on both sides of the vertical movement part, the vertical movement part 500 and the horizontal moving part 500, A second guide plate 620 formed on the lower portion of the second piston 610 and a second guide plate 620 formed on both sides of the guide block 620 to guide the vertical movement guide grooves 510, The horizontal moving unit 600 includes cam rollers 630 and 630 passing through the vertical movement unit 400 and the horizontal movement unit 500 at the lower portion of the valve housing 100, And the cam rollers 630 and 630` passed through the vertical movement guide grooves 510 and 510` are inserted into both sides of the horizontal movement unit 600 so as to move up and down the horizontal movement unit 600, (710, 710 ') for guiding movement of the main body (200) in the forward and backward directions are inclined, respectively.

The lower portions of the opening and closing guide grooves 710 and 710` are formed in the closed groove sections 710a and 710a` which are recessed in the back surface direction of the valve housing 100. The opening and closing guide grooves 710 and 710 ' The upper portion of the valve housing 100 is formed to extend from the closed groove sections 710a and 710a` to form open groove sections 710b and 710b` which are recessed toward the front surface of the valve housing 100. [

The cam rollers 630 and 630 'are disposed on the interface between the closed groove sections 710a and 710a` and the open groove sections 710b and 710b` in a state in which the cam rollers 630 and 630` are positioned in the open groove sections 710b and 710b' (711, 711 ') are protruded to prevent the cam rollers (630, 630') from being arbitrarily detached from the open groove sections (710b, 710b).

In addition, the main body bracket 700 is provided with insertion grooves 720 and 720 'on the inner side surfaces thereof and inserted into the insertion grooves 720 and 720' on both lateral sides of the vertical movement part 400, And the rotation roller portions 420 and 420 'are formed so that the vertical movement portion 400 is rotated about the insertion grooves 720 and 720'.

Guide shafts 310 and 310 'for guiding the upward and downward movement of the blade 200 are formed symmetrically on the rear surface of the blade 200. Guide grooves 621 'of the horizontal moving unit 600 are symmetrically formed in the vertical direction and are respectively inserted into the guide grooves 621, 621' in the lower part of the horizontal moving unit 500, And fixed shaft members 640 and 640 'for guiding movement are protruded.

As described above, according to the present invention, since only the blade having a simple structure for opening and closing the moving path portion is provided inside the valve housing, particles generated by mechanical abrasion due to vertical movement of the blade Thereby minimizing the likelihood of being generated in the network.

In addition, since the vertical moving part serving as a cylinder and the horizontal moving part can be accommodated in the main body bracket, it is possible to manufacture a cam-like type so that space restriction can be reduced.

Further, by moving the blade in the forward and backward directions using the cam rollers and the opening and closing guide grooves, it is possible to open and close the moving path portion by a simple operation, and even if air leaks to the horizontal moving portion, It is possible to prevent the blade from being operated arbitrarily.

1 is a perspective view showing the entire configuration of a vacuum valve according to a preferred embodiment of the present invention;
FIG. 2 is a perspective view showing an internal perspective view of a valve housing and a main body bracket of a vacuum valve according to a preferred embodiment of the present invention.
FIG. 3 is an internal perspective view showing a structure of a vertical and horizontal moving part of a vacuum valve according to a preferred embodiment of the present invention. FIG.
FIG. 4 is a perspective view of a vacuum valve according to a preferred embodiment of the present invention,
5 is a side view showing the structure of the vertical movement guide groove and the opening and closing guide groove in the structure of the vacuum valve according to the preferred embodiment of the present invention
6 is a view showing a state before the operation of the vacuum valve according to the preferred embodiment of the present invention
FIG. 7 is an operational state diagram showing a state in which a main shaft and a guide shaft are elevated due to the operation of the vertical moving part of the structure of the vacuum valve according to the preferred embodiment of the present invention. FIG.
FIG. 8 is a diagram showing an operation state of the vacuum valve according to the preferred embodiment of the present invention, in which the blade moves in all directions due to the operation of the horizontal moving part. FIG.

Hereinafter, a vacuum valve according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that, in the drawings, the same components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as to avoid obscuring the subject matter of the present invention.

The vacuum valve 1 according to an embodiment of the present invention includes a valve housing 100, a blade 200, a main shaft 300, a vertical moving part 400, a horizontal moving part 500, 600 and a main body bracket 700.

Prior to the description, it should be noted that the right side is set to the closing direction and the left side is set to the opening direction with reference to Fig.

It should also be noted that the object described in the present invention is a substance or an object including a semiconductor element, a wafer, a fluid and the like.

First, the valve housing 100 will be described. 1 and 2, the valve housing 100 is a constituent element formed on both sides of the valve housing 100 such that the moving passages 120 and 120 ', in which the object is moved, are formed in the valve housing 100, A driving space 110 having a space is formed without a separate configuration so that the valve blade 200 to be provided is provided.

A plurality of shaft insertion holes (not shown) are formed in the lower portion of the valve housing 100 so that the main shaft 300 and the guide shafts 310 and 310, which will be described later, 310 'are respectively coupled to the valve blades 200 provided inside the driving space 110.

Next, the blade 200 will be described. 3 or 4, the blade 200 is installed inside the driving space 110 and includes the vertical movement unit 400 and the horizontal movement unit 500, the horizontal movement unit 600, And moves in the vertical or horizontal direction to open or close the moving passage 120. [

Next, the main shaft 300 will be described. 3 or 4, the main shaft 300 is a component that is coupled to the valve blade 100 through the shaft inserting hole (not shown), and the vertical movement part 400 and the horizontal The driving force of the moving part 500 is transmitted to the blade 200 to allow the blade 200 to move vertically or horizontally.

The blade 200 is further coupled to a pair of guide shafts 310 and 310 in addition to the main shaft 300 so that the vertical movement and horizontal movement of the blade 200, The driving force of the moving part 500 is uniformly received, and the hermeticity with the moving passage part 120 is improved.

A first passage hole (not shown) through which the main shaft 300 and the guide shafts 310 and 310 'pass is formed in an inner upper portion of the vertical movement unit 400, and a shaft movement guide block 320 It is possible to prevent the main shaft 300 and the guide shafts 310 and 310 from being shaken from vibrations due to driving when the vertical and horizontal moving parts 400 and 500 are driven, Thereby enabling precise positional movement of the body 200.

Next, the vertical movement unit 400 will be described. As shown in FIG. 2 or 4, the vertical moving part 400 is a component formed at a lower portion of the valve housing 100 and acting as a kind of cylinder moving upward and downward of the blade 200 A first piston 410, rotating roller portions 420 and 420 ', and a piston movement restricting block 430.

The first piston 410 is connected to a distal end of the main shaft 300 and is positioned inside the vertical moving part 400. The first piston 410 rotates the blade 200 in the vertical direction And to move it.

The rotation roller portions 420 and 420 are inserted into the insertion grooves 720 and 720 of the main body bracket 700 to be described later on both lateral sides of the vertical movement portion 400, The horizontal moving unit 500 and the horizontal moving unit 600 are moved in the horizontal direction to move the blade 200 in a state in which the blade 200 is lifted by the vertical moving unit 410 The vertical movement unit 400, the horizontal movement unit 500 and the horizontal movement unit 600 are guided to rotate about the insertion grooves 720 and 720 ' Thereby enabling precise horizontal positional movement of the lens.

The vertical movement unit 400 may include a piston movement restricting block 430 that restricts the movement of the first piston 410 that is lowered according to the operation of the vertical movement unit 400.

Next, the horizontal moving part 500 will be described. As shown in FIG. 2 or 3, the horizontal moving part 500 is a kind of housing coupled to the lower part of the vertical moving part 400 to guide the operation of the horizontal moving unit 600, 510, 510 ').

The vertical movement guide grooves 510 and 510 'are formed in the vertical direction on both sides of the horizontal movement part 500, and the vertical movement unit 600 is provided inside the horizontal movement part 500 The cam rollers 630 and 630 'of the vertical movement unit 600 to be described later are inserted and passed to guide the vertical movement of the vertical movement unit 600 by the air pressure inside the horizontal movement unit 500, .

Next, the horizontal movement unit 600 will be described. 3 or 4, the horizontal moving unit 600 is provided inside the horizontal moving part 500, and the pneumatic pressure generated inside the horizontal moving part 500 and the main body bracket 700, which will be described later, The movement guide block 620, the cam rollers 630 and 630 ', and the second piston 610, the movement guide block 620, and the cam rollers 630 and 630' , And fixed axes 640 and 640 '.

The second piston 610 is positioned below the horizontal moving part 500. The second piston 610 moves upward and downward by a cylinder operation by pneumatic pressure to move the moving guide block 620 in a vertical direction .

The movement guide block 620 is formed below the second piston 610 and moves the cam rollers 630 and 630 in accordance with the vertical movement of the second piston 610.

The guide grooves 621 and 621 'are symmetrical with respect to the movement guide block 620 and are formed in the vertical direction, respectively. The guide grooves 621 and 621' 640` is inserted to allow the horizontal movement unit 600 to perform an accurate operation when the horizontal movement unit 600 moves vertically according to the operation of the horizontal movement unit 500. [

The cam rollers 630 and 630 'are constituent elements rotatably formed on both sides of the movement guide block 620 and inserted into the vertical movement guide grooves 510 and 510' 710 'so that the blade 200 can be moved in the opening direction or the closing direction depending on the seating position inside the opening and closing guide grooves 710, 710'.

The fixed shaft members 640 and 640 'are protruded from the inside of the horizontal moving part 500 and are respectively inserted into the guide grooves 621 and 621' It serves as a guide for correct operation.

Next, the main body bracket 700 will be described. As shown in FIG. 4 or 5, the main body bracket 700 is a component formed to receive the vertical movement part 400 and the horizontal movement part 500 below the valve housing 100, Grooves 710 and 710 ', and insertion grooves 720 and 720'.

The opening and closing guide grooves 710 and 710 are formed on both inner side surfaces of the main body bracket 700 in a predetermined shape and are inserted into the vertical movement guide grooves 510 and 510 ' And 630 'are inserted to allow the blade 200 to move in the forward and backward directions as the horizontal movement unit 600 moves upward and downward.

The opening and closing guide grooves 710 and 710` are formed in a closed groove section 710a and 710a` which are recessed in the lower direction of the valve housing 100, 710b` extending from the sections 710a and 710a` and being recessed toward the front surface of the valve housing 100 are formed.

The cam rollers 630 and 630 'are disposed on the interface between the closed groove sections 710a and 710a` and the open groove sections 710b and 710b` in a state where the cam rollers 630 and 630` are positioned in the open groove sections 710b and 710b`. (711, 711 ') are protruded to prevent the cam rollers (630, 630) from being arbitrarily disengaged from the open groove sections (710b, 710b).

The insertion grooves 720 and 720` are formed on both inner side surfaces of the main body bracket 700 so as to be connected to the rotation roller portions 420 and 420`, So that the vertical movement unit 400 and the horizontal movement unit 500 can be rotated.

Hereinafter, the process of closing the moving passage 120 by the blade 200 according to a preferred embodiment of the present invention will be described with reference to FIGS. 5 to 8. FIG.

6, when the first moving passage 120 is opened, due to a low air pressure inside the vertical movement unit 400 and the horizontal movement unit 500, the first piston 410 are seated on the upper portion of the piston movement restricting block 430 so that the blade 200 is positioned at the inner lower portion of the valve housing 100. [

The second piston 610 is also in contact with the lower portion of the piston movement restricting block 430 so that the cam rollers 630 and 630 are moved to the open groove sections 710b and 710b The blade 200 is horizontally spaced apart from the moving path 120.

7, when the air pressure is increased in the vertical movement part 400, the first piston 410 is moved upward, The main shaft 300 and the guide shafts 310 and 310 connected to the first piston 410 are also moved upward to move the blade 200 to the inner upper portion of the valve housing 100 .

8, when the pneumatic pressure is increased in the horizontal moving part 500, the second piston 610 is lowered, so that the moving guide block 620 is lowered. As a result, The cam rollers 630 and 630 'are moved from the open groove sections 710b and 710b to the closed groove sections 710a and 710a' through the release preventing protrusions 711 and 711 '.

5, when the cam rollers 630 and 630 'are seated in the closed groove sections 710a and 710a', the opening and closing guide grooves 710a and 710b ', which are inclined downward in the opening direction from the closing direction, The vertical moving part 400 and the horizontal moving part 500 and the horizontal moving unit 600 are inserted into the insertion grooves 720 and 720 in which the rotating roller parts 420 and 420 ' 720 'so that the blade 200 closes the moving passage 120. [0051] As shown in FIG.

Meanwhile, the opening process of the blade 200 is preferably performed in the reverse order of the closing process.

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: Vacuum valve
100: valve housing
110: driving space
120, 120`:
200: blade
300: Main shaft
310, 310`: guide shaft 320: shaft movement guide block
400: vertical transverse section
410: first piston 420, 420 ': rotating roller part
430: piston movement restricting block
500: horizontal moving part 501: horizontal moving inner part
510, 510`: vertical movement guide groove
600: Horizontal movement unit
610: Second piston
620: movement guide block 621, 621 ': guide groove
630, 630`: cam rollers 640, 640`: fixed shaft
700: Main body bracket
710, 710`: opening and closing guide grooves 710a, 710a`: closed groove section
710b, 710b`: opening groove section 711, 711`:
720, 720`: insertion groove

Claims (5)

A valve housing 100 in which a driving space 110 is formed on the inner side and on which the moving passage portions 120 and 120 'are formed so as to allow the object to move;
A blade 200 installed in the driving space 110 and opening / closing the moving path 120 from the inside;
A main shaft 300 coupled to a rear surface of the blade 200;
A first piston 410 which is formed at a lower portion of the valve housing 100 and moves in an upward and downward direction by pneumatic pressure is connected to the main shaft 300 to rotate the blade 200 in the upward and downward directions A vertical moving part 400 for moving the movable part 400;
A horizontal moving part 500 coupled to a lower part of the vertical moving part 400 and including vertically moving guide grooves 510 and 510 'formed in both sides thereof in a vertical direction;
A second piston 610 provided in the horizontal movement part 500 and moved upward and downward by pneumatic pressure and a movement guide block 620 formed under the second piston 610, A horizontal movement unit 600 formed on both sides of the movement guide block 620 and having cam rollers 630 and 630 'passing through the vertical movement guide grooves 510 and 510', respectively;
The vertical movement part 400 and the horizontal movement part 500 are accommodated in the lower part of the valve housing 100 and the cam roller 630 passing through the vertical movement guide groove 510, And 610` are inserted into the guide holes 710 and 710` for guiding the blade 200 to move forward and backward in accordance with the upward and downward movement of the horizontal moving unit 600, And a main body bracket (700) provided on the main body. The method according to claim 1,
The lower portions of the opening and closing guide grooves 710 and 710 'are formed in the closed groove sections 710a and 710a` which are recessed in the back surface direction of the valve housing 100,
The upper portions of the opening and closing induction grooves 710 and 710` extend from the closed groove sections 710a and 710a` and have open groove sections 710b and 710b` which are recessed toward the front surface of the valve housing 100 (1). ≪ / RTI > The method of claim 2,
The cam rollers 630 and 630 'are provided on the interface between the closed groove sections 710a and 710a` and the open groove sections 710b and 710b` while the cam rollers 630 and 630` are positioned in the open groove sections 710b and 710b`. Preventing protrusions 711 and 711 'are protruded to prevent the protrusions 630 and 630' from being arbitrarily detached from the open groove sections 710b and 710b '. The method according to claim 1,
The main body bracket 700 is provided with insertion grooves 720 and 720 '
The vertical movement part 400 is inserted into the insertion grooves 720 and 720 'so that the vertical movement part 400 is rotated about the insertion grooves 720 and 720' 420, and 420 ', respectively. The method according to claim 1,
Guide shafts 310 and 310 'for guiding the upward and downward movement of the blade 200 are formed symmetrically on the rear surface of the blade 200,
The guide grooves 621 and 621 'are formed symmetrically in the movement guide block 620 and are formed in the vertical direction, respectively,
640 'inserted into the guide grooves 621 and 621` for guiding the vertical movement of the horizontal moving unit 600 are protruded from the inside of the horizontal moving unit 500 (1).

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