KR20030050409A - the rectangular gate valve in mounting formmation - Google Patents

the rectangular gate valve in mounting formmation Download PDF

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Publication number
KR20030050409A
KR20030050409A KR1020010080839A KR20010080839A KR20030050409A KR 20030050409 A KR20030050409 A KR 20030050409A KR 1020010080839 A KR1020010080839 A KR 1020010080839A KR 20010080839 A KR20010080839 A KR 20010080839A KR 20030050409 A KR20030050409 A KR 20030050409A
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KR
South Korea
Prior art keywords
mounting
rectangular
gate valve
disk
square
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KR1020010080839A
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Korean (ko)
Inventor
임승호
Original Assignee
주식회사 엠지아이
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Priority to KR1020010080839A priority Critical patent/KR20030050409A/en
Publication of KR20030050409A publication Critical patent/KR20030050409A/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Abstract

PURPOSE: A square gate valve is provided to obtain the pressurizing and the sealing effects of a passage in a main body by forming a square disk, a mounting roll and a mounting member in a cylinder shaft. CONSTITUTION: A square opening/closing disk(20) is hinged with a cylinder shaft(3). The square opening/closing disk comprises four mounting rolls(22) in each corner of the square, a side rolling roll(23) to be rolled in the left and the right sides and a square o-ring(21) to be rounded with the corner of the disk. Four mounting members(13) are formed in the inner rear face of a main body of a square gate valve with an ascending angle corresponding to the mounting roll. Three ball plungers are protruded inside the front of the main body. The ball plungers gives force to withdraw the square opening/closing disk from the front of the main body. The square opening/closing disk seals a front passage(1) completely by lifting the square opening/closing disk through the lifting movement of the shaft and raising the mounting rolls through the mounting members.

Description

마운팅형 사각 게이트밸브{the rectangular gate valve in mounting formmation}The rectangular gate valve in mounting formmation

본 발명은 특수한 코팅이나 에칭작업등 작업환경이 진공을 요구하는 작업을 할 때 사용되는 사각의 통로를 구비한 사각 게이트밸브에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a square gate valve having a rectangular passage used when a working environment requires a vacuum such as a special coating or etching operation.

특히, 오링이나 메탈실로 진공을 유지한 체 승하강운동을 하는 실린더축에 힌지 연결된 사각 디스크와 사각 디스크의 각 모서리부에 구르는 마운팅롤, 이와 대응하는 마운팅구를 두어 마운팅롤이 마운팅구를 올라 타며 본체의 통로를 가압 , 밀폐의 효과를 노리는 마운팅형 4각 게이트밸브이다.In particular, a rectangular disk hinged to a cylinder shaft that moves up and down with an O-ring or metal seal, a mounting roll rolled at each corner of the square disk, and a mounting hole corresponding thereto, so that the mounting roll rides the mounting hole. It is a mounting quadrilateral gate valve aiming at the effect of pressurizing and sealing the main body passage.

일반적으로 게이트밸브란 작업환경이 진공을 요하는 작업시 그 개폐작용을하기 위한 것인데, 이러한 진공을 요하는 작업은 많이 존재한다.In general, the gate valve is to open and close the operation when the working environment requires a vacuum, there are many jobs that require such a vacuum.

또한 그 진공이란 그 진공도에 따라 작업의 종류가 달라지는 경우가 있는데, 이 게이트밸브는 밸브 좌우측에 구성된 방의 진공도가 다른 형태의 작업환경이 필요한 경우에도 그 불균등한 진공상태를 유지하며 작업을 할 때도 사용된다.In addition, the type of vacuum may vary depending on the degree of vacuum. This gate valve is also used to maintain an uneven vacuum even when a different working environment is required. do.

구체적으로 특수한 코팅이나 CVD, 에칭등 정밀한 작업을 요하는 부분에 진공을 요구하고 있는데, 이중 코팅부분을 실예로 그 쓰임을 설명하자면, 안경의 렌즈나 반도체 또는 정밀한 전자부품의 표면에 얇은 막을 씌우는 건식코팅을 위한 도구로 사용된다.Specifically, vacuum is required for the part requiring precise work such as special coating, CVD, etching, etc. The double coating part is used as an example. To explain the use, a thin film is applied to the surface of a lens of a glasses, a semiconductor, or a precision electronic component. Used as a tool for coating.

그 사용방법은 도시된 도 6을 통해 살펴볼수 있는데, 도시된 도면에서 처럼 게이트 밸브(100)의 좌우측에 각각 제품투입구(80)와 작업공간(90)이 마련된다.How to use it can be seen through Figure 6 shown, the product inlet 80 and the work space 90 is provided on the left and right sides of the gate valve 100 as shown in the figure.

우측의 작업공간(90)은 작업을 위해 먼저 그 하단에 마련된 진공펌프(85)를 이용하여 공기를 빼내어 진공의 상태를 유지하고, 제품투입구(80)에 코팅을 위한 제품을 집어 넣는다.The working space 90 on the right side first draws air using a vacuum pump 85 provided at the bottom thereof to maintain a vacuum state, and puts a product for coating into the product inlet 80.

이때 게이트밸브(100)의 통로는 막힌 상태이기에 좌우공간에 공기의 유동이 없다.At this time, since the passage of the gate valve 100 is blocked, there is no air flow in the left and right spaces.

집어 넣어진 제품투입구(80)는 그 출구가 막히고 별도의 진공펌프를 이용하여 진공상태를 유지한다.The inserted product inlet 80 is blocked by its outlet and maintains a vacuum state using a separate vacuum pump.

이후 게이트밸브(100)의 디스크를 열어 작업공간으로 제품을 이동시킨후 건식코팅의 작업을 한다.After opening the disk of the gate valve 100 to move the product to the work space and dry coating work.

상기와 같이 사용되는 게이트밸브 혹은 진공밸브중 그 통로의 형태가 사각으로 구성된 게이트벨브를 사각 게이트밸브라 통칭하고 있다.Among the gate valves or vacuum valves used as described above, the gate valve having a rectangular shape of the passage is called a square gate valve.

그런데 종래 이러한 사각 게이트밸브를 생산하고 제조하는 과정에 있어서 많은 문제가 발생되고 있는데, 이들을 간략하게 간추려 보면 다음과 같다.By the way, there are many problems in the process of producing and manufacturing such a square gate valve conventionally, briefly summarized as follows.

첫째, 도시된 도 2에서 보이듯, 사각의 디스크(9) 외주면을 돌려가며 오링(9')을 감고 이 감겨진 오링(9')이 본체의 내면과 긴밀하게 밀착되어 밀폐의 효과를 노리게 되는대, 그 오링(9')을 디스크(9) 외주면에 감아 밀착시키는 작업이란 까다롭고 힘들다.First, as shown in FIG. 2, the O-ring 9 'is wound while rotating the outer circumferential surface of the rectangular disk 9, and the wound O-ring 9' is closely adhered to the inner surface of the main body, thereby achieving the effect of sealing. It is difficult and difficult to wind the O-ring 9 'on the outer circumferential surface of the disk 9 and adhere it closely.

즉, 오링(9')을 압착하여 외주면에 체결하기도 힘들고, 본체의 내면과 밀착되기 위해 두께도 철저하게 계측되어야 하는데 이러한 작업은 그리 손쉬운 일이 아니다.That is, it is difficult to fasten the O-ring 9 'to the outer circumferential surface, and the thickness must be thoroughly measured to be in close contact with the inner surface of the main body, which is not so easy.

둘째, 상기 문제점에 의해 게이트밸브(100)의 제작을 위한 제작시간과 그 비용이 많이 발생된다.Second, the production time and the cost for the production of the gate valve 100 is generated by the above problems.

셋째, 어려운 공정을 통과해서 제작된 디스크의 경우도 그 불량률이 높다.Third, the defect rate is high even in the case of a disc produced through a difficult process.

넷째, 디스크의 외주면에 오링을 견고하게 체결하는 구성을 취하기에, 뒤따르는 공정의 수도 증가하고, 다른 구성요소의 제작비용도 전체적으로 증가시킨다.Fourth, to take the configuration of fastening the O-ring to the outer peripheral surface of the disk, the number of subsequent processes increases, and the overall manufacturing cost of other components also increases.

본 발명은 오링이나 메탈실로 진공을 유지한 체 승하강운동을 하는 실린더축에 힌지 연결된 사각 디스크와 사각 디스크의 각 모서리부에 구르는 마운팅롤, 이와 대응하는 마운팅구를 두어 마운팅롤이 마운팅구를 올라 타며 본체의 통로를 가압 , 밀폐의 효과를 노리는 마운팅형 4각 게이트밸브를 제공하고자 한다.According to the present invention, a mounting disc rolls up a mounting hole by placing a rolling roll and a corresponding mounting hole on each corner of the square disk, which are hinged to a cylinder shaft for lifting and lowering a vacuum with an O-ring or metal seal. It is to provide a mounting type four-way gate valve aiming at the effect of pressurizing and sealing the passage of the main body.

도 1은 사각 게이트밸브의 형상을 도시한 사시도1 is a perspective view showing the shape of a square gate valve

도 2는 종래 사각 게이트밸브의 작동모습을 도시한 측단면도Figure 2 is a side cross-sectional view showing the operation of the conventional rectangular gate valve

도 3은 본 발명의 게이트밸브를 단면한 정단면도Figure 3 is a front cross-sectional view of the gate valve of the present invention

도 4는 본 발명의 게이트밸브를 단면한 측단면도Figure 4 is a side cross-sectional view of the gate valve of the present invention

도 5는 본 발명의 개폐의 작용을 도시한 요부개념도Figure 5 is a main part conceptual diagram showing the action of the opening and closing of the present invention

본 발명은 오링들로로 진공을 유지하며 축을 승하강시키는 에어실린더와, 사각의 디스크 및 그 상부에 직사각형상의 통로를 구비한 본체로 구성된 사각 게이트밸브에 관한 것으로 다음과 같은 구성들로 이루어 진다.The present invention relates to a rectangular gate valve composed of an air cylinder for raising and lowering the shaft while maintaining a vacuum to the O-rings, and a main body having a rectangular disk and a rectangular passage thereon.

실린더축(3)과 힌지(4)연결되고, 사각의 각 모서리부에 구성된 4개의 마운팅롤(22), 좌우측면에 구름작용을 하는 측면구름롤(23), 디스크(20) 전면부에 모서리를 돌린 직사각형의 오링(21)이 구성된 사각개폐디스크(20);Four mounting rolls 22 connected to the cylinder shaft 3 and the hinge 4 and configured at each corner of the quadrangle, side rolling rolls 23 rolling on left and right sides, and edges at the front surface of the disk 20. Square opening and closing disk 20 is configured to turn the rectangular O-ring 21;

사각 게이트밸브 본체(10)의 내측 배면에 마운팅롤(22)에 대응하게 오름각을 가진 4개의 마운팅구(13);Four mounting holes 13 having rising angles corresponding to the mounting rolls 22 on the inner rear surface of the rectangular gate valve body 10;

상기 본체의 전면(11) 내측에서 돌출하되, 좌우측에 치우져 각각 3개씩 형성시킨 볼프렌져(14)가;Protruding from the inside of the front surface 11 of the main body, the ball franchisee 14 is formed on the left and right sides of each of the three;

볼프렌져(14)는 항상 사각개폐디스크(20)를 본체의 전면(11)에서 멀어지는 방향으로 힘을 부여하고;The ball blender 14 always applies a force in the direction away from the front face 11 of the rectangular opening and closing disk 20;

축(3)의 승강운동에 의해 사각개폐디스크(20)가 승강, 마운팅구(13)를 마운팅롤(22)이 타고 오름에 따라, 오링(21)이 구성된 사각개폐디스크(20)가 전면의 통로(1)에 밀착, 완전 밀폐를 이루는 것에 특징이 있다.As the rectangular opening / closing disc 20 moves up and down by the lifting and lowering motion of the shaft 3 and the mounting roll 22 rides up the mounting opening 13, the square opening / closing disc 20 having the O-ring 21 is formed on the front side. It is characterized by being in close contact with the passage 1 and making it completely sealed.

상기 내용은 청구항 1항에 의해 권리범위로 청구하지만 청구항 2항으로 청구할 사항은, 사각의 개폐디스크(20)에 전면에 메탈실을 둥근모서리를 가진 직사각형상으로 체결하여 밀폐작용을 유지함을 청구한다.The above contents are claimed in the scope of rights according to claim 1, but the matters claimed in claim 2 are required to maintain the sealing operation by fastening the metal thread on the front surface of the rectangular opening / closing disc 20 in a rectangular shape having a rounded corner. do.

본 발명의 다른 특징은 상기 각각 4개씩 구성된 마운팅롤과 마운팅구는 6~10개가 선택적으로 적용될 수도 있다.Another feature of the present invention is that the mounting rolls and the mounting holes each composed of four each of 6 to 10 may be selectively applied.

앞에서는 본 발명의 구성을 개략적으로 살펴보았고, 뒤로는 본 발명의 작동과 구성을 도시된 도면과 함께 상세히 설명한다.The foregoing has outlined the configuration of the present invention, and the back will be described in detail with reference to the operation and configuration of the present invention.

도시된 도 3에서 처럼 에어실린더(2)의 내부에는 그 축(3)의 연동운동에 의해 공기가 밀려들어 오는 것을 방지시키려 각 부분부분 마다 오링(21)을 댄 상태로, 본 발명의 에어실린더(2)는 승하강운동을 한다.As shown in FIG. 3, the inside of the air cylinder 2 is provided with an O-ring 21 for each part to prevent air from being pushed in by the interlocking motion of the shaft 3. (2) do the lifting and lowering movement.

이 승하강운동에 따라 축(3)과 힌지(4) 결합된 사각의 개폐디스크(20)는 수직으로 승하강하게 되느데, 이를 돕기 위한 구성으로 사각의 본체(10) 내면을 타고 구르게 하는 측면구름롤(23)과 마운팅롤(22)이 구성된다.According to this lifting motion of the rectangular opening and closing disk 20 coupled to the shaft (3) and the hinge (4) is raised and lowered vertically, the side to roll on the inner surface of the rectangular body 10 as a configuration to help this The rolling roll 23 and the mounting roll 22 are configured.

도 3,4에 도시된 것처럼 측면구름롤러(23)는 사각개폐디스크(20)의 좌우측면에 각각 2개로 구성시켜 본체(10) 좌우측판의 내면을 타고 구르게 구성하고, 마운팅롤(22)은 사각개폐디스크(20)의 모서리부분에 4개가 설치되어 본체의 배면(12)을 타고 구를 수 있게 구성되어 있다.As shown in FIGS. 3 and 4, the two side rolling rollers 23 are formed on the left and right sides of the rectangular opening / closing disc 20 to be rolled on the inner surface of the left and right plates of the main body 10, and the mounting roll 22 is formed. The four are installed in the corner portion of the rectangular opening and closing disk 20 is configured to be rolled on the back 12 of the body.

물론 본 고안의 밸브가 큰 경우에는 이 마운팅롤(22)의 갯수는 6~10개로 증가되어 설치될 수도 있다.Of course, when the valve of the present invention is large, the number of the mounting rolls 22 may be increased to 6-10.

그런데 도시된 도면과 같은 형태를 참고로 이 마운팅롤(22)이 구성된 디스크(20)의 두께가 본체(10)의 전면(11)과 배면(12)의 간격에 비해 다소 좁기에 본체 전면(11)에는 내부로 돌출되는 볼플렌져(14)가 좌.우측의 상하로 각각 3개씩구성된다.However, the thickness of the disk 20 in which the mounting roll 22 is configured with reference to the shape as shown in the drawing is slightly narrower than the distance between the front surface 11 and the rear surface 12 of the body 10, so that the front body 11 ) Is provided with three ball flangers 14 protruding into the upper and lower sides of the left and right sides.

이는 도시된 도 3과 4에 일점쇄선으로 블럭처리된 위치에 구성되는데, 공지의 물품이라 상세한 도시는 생략한다.3 and 4 are shown at positions blocked by dashed lines in FIGS. 3 and 4, which are well-known articles and thus are not shown in detail.

아무튼 이렇게 롤러(22,23)의 구름에 따라 부드럽게 승강한 사각개폐디스크(20)는 마운팅롤(22)과 승강시 대응하는 위치에 구성된 마운팅구(13)를 타고 올라서게 된다.Anyway, the rectangular opening / closing disc 20 which is smoothly lifted and lowered according to the clouds of the rollers 22 and 23 is climbed on the mounting hole 13 formed at the corresponding position during the lifting and lowering of the mounting roll 22.

이 마운팅구(13)는 도 3,4에 상세히 도시되어 있는데, 마운팅롤(22)이 올라설수 있도록 경사진 상태로, 본체의 배면에 구성된다( 도 5에 마운팅롤이 마운팅구에 올라서는 개념도가 상세히 도시되어 있다.).The mounting holes 13 are shown in detail in FIGS. 3 and 4, and are mounted on the rear surface of the main body in an inclined state so that the mounting rolls 22 can rise (a conceptual diagram in which the mounting rolls are mounted on the mounting holes in FIG. 5). Is shown in detail).

따라서 사각의 개폐디스크(20)는 전면(11)에 밀착되며, 마운팅롤(22)이 올라선 위치까지 전면(11)을 가압하게 된다.Therefore, the rectangular opening and closing disk 20 is in close contact with the front surface 11, and presses the front surface 11 to a position where the mounting roll 22 is raised.

이 가압에 의해 개폐디스크(20)에 구성된 오링(21)은 본체전면(11)에 구성된 통로(1)를 막아 밀폐시킨다.O-ring 21 formed on the opening / closing disk 20 blocks the passage 1 formed on the main body front face 11 by this pressurization.

이 작동을 성사시키는 마운팅롤(22)과 마운팅구(13)는 본 발명에 있어서 상당히 중요한 구성으로 재질의 강도, 그 경사각, 두께의 설정등 본 발명의 출원인이 세심히 고려한 부분이다.The mounting rolls 22 and the mounting holes 13 which accomplish this operation are a very important configuration in the present invention, and are carefully considered by the applicant of the present invention, such as setting the strength of the material, its inclination angle, and thickness.

더불어 본 발명의 사각 게이트 밸브에 있어서, 또하나의 중요한 점은 도시된 도 3에서 보이듯 디스크의 전면에 구성시킨 오링(21)이다.In addition, in the square gate valve of the present invention, another important point is the O-ring 21 configured on the front of the disk as shown in FIG.

이 오링(21)은 디스크에 동일 형상의 오링홈을 파서 형성시킬 수도 있으며, 메탈실을 견고히 체결시켜 동일 작동을 하도록 구성시킬 수도 있는데, 보통 오링으로 밀폐효과를 내는 것보다 메탈실로 내는 효과가 크다.The O-ring 21 may be formed by digging the same shape of the O-ring grooves on the disk, it may be configured to securely fasten the metal seal to the same operation, it is usually more effective to produce a metal seal than the sealing effect with the O-ring. .

즉, 진공상태의 정도는 각각 다른데, 메탈실을 이용하여 밀폐시키는 게이트밸브(100)는 그 진공의 정도가 높다.That is, although the degree of vacuum is different, the gate valve 100 sealed using a metal seal has a high degree of vacuum.

앞서 언급한 것처럼 본 발명의 게이트 밸브의 구성이 큰 형태의 밸브에 적용된다면 마운팅롤, 마운팅구 및 볼프렌져도 그 크기에 대응하여 6~10개로 추가되어 구성될 수도 있다.As mentioned above, if the configuration of the gate valve of the present invention is applied to a large valve, the mounting rolls, the mounting holes, and the ball blender may be configured to be added to 6 to 10 corresponding to the size thereof.

본 발명은 전체적으로 그 구동에 의한 밀폐작용이 손쉽기에 그 구조가 간단하다.The present invention is simple in its structure since the sealing action by the driving is easy as a whole.

또한 밀폐효과가 높고, 디스크의 제작이 용이하며, 그 제작비용도 저렴하다.In addition, the sealing effect is high, the production of the disk is easy, the production cost is low.

더불어 밀폐작용을 위해 디스크에 체결시키는 구성인 메탈실을 오링으로도 또는 메탈실로도 적용가능하여 필요한 진공도의 범위에 따라 선택적으로 적용가능하다.In addition, the metal seal, which is a component that is fastened to the disk for sealing, can be applied as an O-ring or a metal seal.

아울러 본 발명은 서술된 명세서에서 보이듯 특정의 바람직한 실시예에 한정되지 않는다.In addition, the present invention is not limited to the specific preferred embodiment as shown in the specification described.

즉, 청구범위에서 청구하는 본 발명의 요지에서 벗어남이 없이 당업자가 통상의 지식을 가지고 변경할 수 있는 정도의 실시는 본 발명의 권리범위인 청구범위의 기재내의 사항으로 봄이 합당하다.That is, implementation of the extent to which those skilled in the art can change with ordinary knowledge without departing from the gist of the present invention claimed in the claims is reasonable within the description of the claims that are the scope of the present invention.

Claims (3)

오링들로 진공을 유지하며 축을 승하강시키는 에어실린더와, 사각의 디스크 및 그 상부에 직사각형상의 통로를 구비한 본체로 구성된 사각 게이트밸브에 있어서,In the rectangular gate valve composed of an air cylinder for raising and lowering the shaft while maintaining a vacuum with the O-rings, and a main body having a rectangular disk and a rectangular passage on the top thereof, 실린더축(3)과 힌지(4)연결되고, 사각의 각 모서리부에 구성된 4개의 마운팅롤(22), 좌우측면에 구름작용을 하는 측면구름롤(23), 디스크(20) 전면부에 모서리를 돌린 직사각형의 오링(21)이 구성된 사각개폐디스크(20);Four mounting rolls 22 connected to the cylinder shaft 3 and the hinge 4 and configured at each corner of the quadrangle, side rolling rolls 23 rolling on left and right sides, and edges at the front surface of the disk 20. Square opening and closing disk 20 is configured to turn the rectangular O-ring 21; 사각 게이트밸브 본체(10)의 내측 배면에 마운팅롤(22)에 대응하게 오름각을 가진 4개의 마운팅구(13);Four mounting holes 13 having rising angles corresponding to the mounting rolls 22 on the inner rear surface of the rectangular gate valve body 10; 상기 본체의 전면(11) 내측에서 돌출하되, 좌우측에 치우져 각각 3개씩 형성시킨 볼프렌져(14)가;Protruding from the inside of the front surface 11 of the main body, the ball franchisee 14 is formed on the left and right sides of each of the three; 볼프렌져(14)는 항상 사각개폐디스크(20)를 본체의 전면(11)에서 멀어지는 방향으로 힘을 부여하고;The ball blender 14 always applies a force in the direction away from the front face 11 of the rectangular opening and closing disk 20; 축(3)의 승강운동에 의해 사각개폐디스크(20)가 승강, 마운팅구(13)를 마운팅롤(22)이 타고 오름에 따라, 오링(21)이 구성된 사각개폐디스크(20)가 전면의 통로(1)에 밀착, 완전 밀폐를 이루는 것에 특징이 있는 마운팅형 사각 게이트밸브.As the rectangular opening / closing disc 20 moves up and down by the lifting and lowering motion of the shaft 3 and the mounting roll 22 rides up the mounting opening 13, the square opening / closing disc 20 having the O-ring 21 is formed on the front side. Mounting type square gate valve, characterized by close contact with the passage (1) and complete sealing. 제 1항에 있어서,The method of claim 1, 사각의 개폐디스크(20)에 전면에 메탈실을 둥근모서리를 가진 직사각형상으로 체결하여 밀폐작용을 유지함을 특징으로 하는 마운팅형 사각 게이트밸브.Mounting type square gate valve, characterized in that the metal seal on the front of the square opening and closing disk 20 in the rectangular shape with a rounded corner to maintain the sealing action. 제 1항에 있어서,The method of claim 1, 각각 4개씩 구성된 마운팅롤과 마운팅구는,The mounting rolls and the mounting holes, each consisting of four, 6~10개가 선택적으로 적용될 수도 있는 것에 특징이 있는 마운팅형 사각 게이트밸브.Mounting rectangular gate valve characterized by six to ten may be selectively applied.
KR1020010080839A 2001-12-18 2001-12-18 the rectangular gate valve in mounting formmation KR20030050409A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101020364B1 (en) * 2007-10-10 2011-03-08 도쿄엘렉트론가부시키가이샤 Gate valve and substrate processing apparatus using the same
KR20160130575A (en) 2015-05-04 2016-11-14 프리시스 주식회사 Vacuum Valves
KR20170017212A (en) 2015-08-06 2017-02-15 (주) 세진프리시젼 Gate valve
KR20170037128A (en) 2015-09-25 2017-04-04 프리시스 주식회사 Two-way gate valve

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118388A (en) * 1981-12-29 1983-07-14 Hitachi Ltd Gate valve for vacuum
JP2001021048A (en) * 1999-06-29 2001-01-26 Varian Inc Gate valve having lamp actuator mechanism
JP2001090849A (en) * 1999-09-22 2001-04-03 V Tex:Kk Opening/closing device for gate valve

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58118388A (en) * 1981-12-29 1983-07-14 Hitachi Ltd Gate valve for vacuum
JP2001021048A (en) * 1999-06-29 2001-01-26 Varian Inc Gate valve having lamp actuator mechanism
JP2001090849A (en) * 1999-09-22 2001-04-03 V Tex:Kk Opening/closing device for gate valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101020364B1 (en) * 2007-10-10 2011-03-08 도쿄엘렉트론가부시키가이샤 Gate valve and substrate processing apparatus using the same
KR20160130575A (en) 2015-05-04 2016-11-14 프리시스 주식회사 Vacuum Valves
KR20170017212A (en) 2015-08-06 2017-02-15 (주) 세진프리시젼 Gate valve
KR20170037128A (en) 2015-09-25 2017-04-04 프리시스 주식회사 Two-way gate valve
US9995402B2 (en) 2015-09-25 2018-06-12 Presys.Co.,Ltd Two-way gate valve

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