WO2011137691A1

WO2011137691A1 - Driving mechanism for valve plate of sealing chamber

Info

Publication number: WO2011137691A1
Application number: PCT/CN2011/071911
Authority: WO
Inventors: 杨明生; 郭远伦; 刘惠森; 范继良; 王勇; 王曼媛
Original assignee: 东莞宏威数码机械有限公司
Priority date: 2010-05-06
Filing date: 2011-03-17
Publication date: 2011-11-10
Also published as: CN101956861B; CN101956861A

Abstract

A driving mechanism for a valve plate of a sealing chamber comprises a movable guide device (20), an installation plate (22), a first driving device (24), a connection device (26), and a second driving device (28). The movable guide device (20) is located below a transferring window (12) of the sealing chamber (10) and fixedly connected to an external sidewall (101) of the sealing chamber (10). The installation plate (22) is slidablely connected to the movable guide device (20) along the longitudinal direction. The first driving device (24) is fixedly connected to the installation plate (22), and the connection device (26) is connected to the valve plate (14) and the second driving device (28). The second driving device (28) is connected to the connection device (26) and the installation plate (22). As the first driving device (24) of the driving mechanism for the valve plate of the sealing chamber drives the valve plate (14) to conduct longitudinal straight reciprocating motion by the installation plate (22) and the second driving device (28) drives the valve plate (14) to conduct transverse straight reciprocating motion, the driving mechanism carries out to open or close the transferring window (12) by the valve plate (14). With simple processing of parts and accessories, operating, and maintenance, the mechanism is simple and compact in structure and flexible in motion. The mechanism is easy to implement and low cost to equip.

Description

Sealed cavity valve plate drive mechanism

Technical field

The present invention relates to a sealed chamber for providing a vacuum environment in the field of vacuum coating, and more particularly to a valve plate drive mechanism for opening or closing a transfer window of a sealed chamber. BACKGROUND OF THE INVENTION In the field of organic light emitting diodes (English: Organic Light Emitting Diodes, OLEDs) and the solar panel industry, there is a large demand for coating substrates, and for providing sealing chambers required for coating (also called Vacuum chambers are essential. In order to facilitate the input of the substrate to be coated from the outside into the sealed cavity or the output of the coated substrate from the sealed cavity, a transfer window for the substrate to enter and exit is usually formed on the sealed cavity, and is connected to the driving mechanism. The valve plate is used to open or close the above transfer window.

In the prior art, a worm wheel disc drive unit is generally used to achieve the sealing opening and closing of the valve plate.

The worm wheel valve plate driving device is mainly formed by connecting the first transmission system and the second transmission system to each other. Wherein the first transmission system mainly comprises a first worm pair composed of a first worm and a first worm wheel and a hand wheel for driving the rotation of the first worm, the second transmission system mainly comprising a second worm and a second worm pair formed by the second worm wheel, a limit bolt for defining a range of rotation angles of the second worm wheel, and a valve stem coupled to the second worm wheel and driven by the second worm wheel. The first worm meshes with the first worm gear, the second worm gear meshes with the second worm gear, and the transmission between the first worm gear and the second worm gear is connected by a flat key. When the valve plate is opened or closed, the hand wheel is manually rotated to drive the first worm to rotate, thereby driving the first worm to mesh with The first worm wheel rotates, the first worm wheel drives the second worm to rotate, and thereby drives the second worm wheel that meshes with the second worm to rotate, the second worm gear drives the valve stem, and the valve stem is The opening or closing of the valve plate is achieved. In this process, the rotation angle of the second worm wheel is controlled by the limit bolt to achieve the requirements of full opening and full closing of the valve plate.

However, the structure of the worm wheel disc drive device is relatively complicated, and the processing, operation and maintenance of the components are complicated, difficult to implement, and the equipment configuration cost is high.

Summary of the invention

SUMMARY OF THE INVENTION It is an object of the present invention to provide a sealed chamber valve plate drive mechanism that is simple, compact, easy to operate and maintain, and that has low equipment configuration costs.

To achieve the above object, the present invention provides a sealed cavity valve plate drive mechanism for driving the valve plate to open or close a transfer window of a sealed cavity. The sealing cavity valve plate driving mechanism includes a moving guiding device, a mounting plate, a first driving device, a connecting device and a second driving device, the moving guiding device is located below the transfer window of the sealing cavity and The outer side wall of the sealing cavity is fixedly connected, the mounting plate is longitudinally slidably connected to the moving guiding device, the first driving device is fixedly connected with the mounting plate, and the first driving device drives the mounting plate Performing a longitudinal linear reciprocating motion along the moving guiding device, one end of the connecting device is connected to the valve plate, and the other end of the connecting device is fixedly connected with the second driving device, and the second driving device is The mounting plate is fixedly connected, the second driving device drives the valve plate to perform a horizontal linear reciprocating motion, and the first driving device drives the valve plate to perform a longitudinal linear reciprocating motion through the mounting plate.

Specifically, the mounting plate includes a lateral portion and a longitudinal portion that are vertically connected.

Specifically, the first driving device includes a first cylinder and a first piston rod, the first cylinder is mounted on an outer sidewall of the sealing cavity, and one end of the first piston rod is slidably received in the The other end of the first piston rod is sealingly extended from the seat body of the first cylinder and fixedly connected to the lateral portion of the mounting plate. Specifically, the second driving device includes a second cylinder and a second piston rod, the second cylinder is fixedly connected to a longitudinal portion of the mounting plate, and one end of the second piston rod is slidably received in the first portion In the seat of the two cylinders, the other end of the second piston rod is sealingly extended from the seat body of the second cylinder and connected to the connecting device.

Preferably, the connecting device includes a connecting seat and a connecting rod, the connecting seat is fixedly connected to the valve plate, the connecting seat defines a spherical hole, and one end of the connecting rod is spherical and inserted into the connecting seat In the spherical hole, the other end of the connecting rod is provided with an internally threaded hole, and one end of the second piston rod extending from the seat body of the second cylinder is provided with an external thread, and the internal threaded hole of the connecting rod is The external threads of the second piston rod cooperate. One end of the connecting rod having a spherical shape is inserted into the spherical hole of the connecting seat to form a ball hinge, so that the valve plate can have a partial free swing to compensate for the sealing of the transfer window of the valve plate and the sealing cavity. The non-parallelism between the faces enables parallel contact between the valve plate and the sealing surface of the transfer window to improve the sealing effect.

Preferably, the connecting device further includes a lock nut and a locking ring, the lock nut passes through the connecting rod and is fixedly connected with the connecting seat, and the locking ring is sleeved into the locking nut .

Specifically, the moving guiding device comprises a guide rail, a sliding block and a connecting pillar, wherein the guiding rail is longitudinally fixedly mounted on an outer sidewall of the sealing cavity, and the sliding block is fixedly connected to one end of the connecting pillar, The other end of the connecting post is fixedly connected to the lateral portion of the mounting plate, and the guide rail is slidably engaged with the slider.

Preferably, the guide rail and the slider have a dovetail shape in cross section. In a preferred embodiment of the present invention, the guiding device further includes an upper sensor, a lower sensor and a blocking piece, wherein the upper sensor and the lower sensor are correspondingly mounted on the upper and lower ends of the rail and on the same vertical line, A flap is mounted on the slider and between the upper sensor and the lower sensor.

Preferably, the movement guiding device further comprises a buffering block which is protrudedly mounted to the lower end of the guide rail and faces the connecting pillar. Compared with the prior art, since the first driving device of the sealing cavity valve plate driving mechanism of the present invention drives the valve plate to perform linear reciprocating motion through the mounting plate, the second driving device drives the valve plate The horizontal linear reciprocating motion realizes the process of opening or closing the transfer window of the sealing cavity by the valve plate, the structure is simple and compact, the movement is flexible and light, and the processing, operation and maintenance of the components are relatively simple and easy to implement. , and the device configuration cost is lower.

The invention will be more apparent from the following description, taken in conjunction with the accompanying drawings.

DRAWINGS

1 is a schematic view showing the structure of a sealing cavity valve plate driving mechanism applied to the outside of a sealed cavity according to the present invention. Fig. 2 is an enlarged view of a portion I shown in Fig. 1.

Figure 3 is a schematic view of the exploded view of Figure 2 and the outer sidewall of the sealed chamber.

Figure 4 is a plan view of Figure 2.

Figure 5 is a cross-sectional view taken along line A-A of Figure 4 .

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE INVENTION Embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. As described above, the present invention provides a sealed cavity valve plate driving mechanism, wherein the first driving device of the sealing cavity valve plate driving mechanism of the present invention drives the valve plate to perform a longitudinal linear reciprocating motion through the mounting plate, The second driving device drives the valve plate to perform a horizontal linear reciprocating motion, thereby realizing the process of opening or closing the transfer window of the sealing cavity by the valve plate, the structure is simple and compact, and the movement is flexible and light, and the components are Processing, operation and maintenance are relatively simple, easy to implement, and equipment configuration costs are low.

Referring to FIG. 1-3, the sealed cavity valve plate driving mechanism of the present invention is used to drive the valve plate 14 to the sealed cavity. The opening or closing of the transfer window 12 of the body 10. As shown in FIGS. 1, 2 and 3, the sealed cavity valve plate drive mechanism of the present invention includes a moving guide 20, a mounting plate 22, a first driving device 24, a connecting device 26, and a second driving device 28. The moving guiding device 20 is located below the transmission window 12 of the sealing cavity 10 and is fixedly connected to the outer side wall 101 of the sealing cavity 10 , and the mounting plate 22 and the moving guiding device 20 are longitudinally sliding The first driving device 24 is fixedly connected to the mounting plate 22, and the first driving device 24 drives the mounting plate 22 to perform a longitudinal linear reciprocating motion along the moving guiding device 20, the connecting device One end of the connecting device 26 is connected to the valve plate 14, the other end of the connecting device 26 is fixedly connected to the second driving device 28, and the second driving device 28 is fixedly connected to the mounting plate 22, the second The driving device 28 drives the valve plate 14 to perform a horizontal linear reciprocating motion, and the first driving device 24 drives the valve plate 14 through the mounting plate 22 to perform a longitudinal linear reciprocating motion. Specifically, as shown in FIG. 2, the mounting plate 22 includes a lateral portion 221 and a longitudinal portion 222 that are vertically connected.

Specifically, as shown in FIG. 1, the moving guide 20 includes a guide rail 201, a slider 202, a connecting post 203, an upper sensor 204, a lower sensor 205, a blocking piece 206, and a buffer stop 207. The guide rail 201 is longitudinally fixedly mounted on the outer side wall 101 of the sealing cavity 10 and below the transfer window 12, and the slider 202 is fixedly connected to one end of the connecting post 203, the connection The other end of the pillar 203 is fixedly coupled to the lateral portion 221 of the mounting plate 22, and the guide rail 201 is slidably coupled to the slider 202. The upper sensor 204 and the lower sensor 205 (photoelectric sensors in this embodiment) are correspondingly mounted at extreme positions of the upper and lower ends of the guide rail 201 and are located on the same vertical line, and the blocking piece 206 is installed at the The slider 202 is located between the upper sensor 204 and the lower sensor 205, and the buffer block 207 is protrudedly mounted on the lower end of the guide rail 201 and faces the connecting post 203. When the slider 202 slides to the extreme positions of the upper and lower ends of the guide rail 201, the blocking piece 206 can block the light source of the upper sensor 204 and the lower sensor 205 to achieve the valve plate 14 Control of the travel of the up and down movement. In addition, when the slider 202 is moved down to the bottom end of the guide rail 201, the setting of the buffering block 207 can play a certain buffering role.

Preferably, the cross section of the guide rail 201 and the slider 202 are in the shape of a dovetail groove. Specifically, as shown in FIG. 1, the first driving device 24 includes a first cylinder 241 and a first piston rod 242. The first cylinder 241 is fixed on the substrate 30. The substrate 30 is fixed on the support member 32. The support member 32 is fixed on the outer sidewall 101 of the sealing cavity 10 and below the transfer window 12. One end of the first piston rod 242 is slidably received in the first cylinder 241, and the other end of the first piston rod 242 is sealingly extended from the seat of the first cylinder 241 and The lateral portion 221 of the mounting plate 22 is fixedly connected.

Specifically, as shown in FIG. 2-5, the second driving device 28 includes a second cylinder 281 and a second piston rod 282, and the second cylinder 281 is fixedly connected to the longitudinal portion 222 of the mounting plate 22, One end of the second piston rod 282 is slidably received in the seat of the second cylinder 281, and the other end of the second piston rod 282 is sealingly extended from the seat of the second cylinder 281 and The connecting device 26 is connected.

Preferably, the connecting device 26 includes a connecting seat 261, a connecting rod 262, a lock nut 263, and a locking ring 264. The connecting seat 261 is fixedly connected to the valve plate 14. The connecting base 261 defines a spherical hole (not shown) and a threaded hole 261a (shown in FIG. 3). One end of the connecting rod 262 is spherical. And inserted into the spherical hole, the other end of the connecting rod 262 is provided with an internally threaded hole (not shown), and the second piston rod 282 extends out of the end of the second cylinder 281. Threading (as shown in FIG. 3), the internally threaded hole of the connecting rod 262 is integrally coupled with the external thread of the second piston rod 282, so that the telescopic movement of the second piston rod 282 is converted into the The axial movement of the valve plate 14 , the lock nut 263 passes through the connecting rod 262 and is fixedly connected to the connecting seat 261 , and the locking ring 264 fits into the locking nut 263 .

Wherein, a spherical end of the connecting rod 262 cooperates with the spherical hole of the connecting seat 261 to form a ball hinge, so that the valve plate 14 can have a partial free swing to compensate the valve plate 14 and the transmission. The non-parallelism between the sealing faces of the window 12 allows parallel contact between the valve plate 14 and the sealing surface of the transfer window 12 to improve the sealing effect.

The outer cylindrical surface of the lock nut 263 is externally threaded, and cooperates with the internal thread of the threaded hole 261a of the connecting seat 261 to adjust the end surface of the locking nut 263 adjacent to the connecting rod 262. The spacing between them limits the local free oscillation of the valve plate 14 to a specified allowable range. The inner cylindrical surface of the locking ring 264 is internally threaded, and the locking ring 264 fits into the locking nut 263 and cooperates with the external thread of the outer cylindrical surface of the locking nut 263 for axial locking. The lock nut 263 is fixed in place.

It should be noted that, in this embodiment, the sealed cavity valve plate driving mechanism includes two sets of moving guiding devices 20 and two sets of second driving devices 28. The connecting posts 203 of the two sets of guiding devices 20 are fixedly connected to the two ends of the lateral portion 221 of the mounting plate 22, respectively, and the second cylinders 281 of the two sets of second driving devices 28 are respectively associated with the longitudinal portions 222 of the mounting plate 22. The connection between the two sets of the mobile guiding device 20 and the other components of the two sets of the second driving device 28 and the working principle thereof are similar, and details are not described herein again. The arrangement of the two sets of moving guides 20 provides a certain guiding effect on the downward movement of the valve plate 14, while also sharing the transverse shear force of the first piston rod 242 (when the valve plate 14 moves laterally) The valve plate 14 generates a transverse shearing force on the first piston rod 242 to prevent deformation and damage of the first piston rod 242, thereby affecting the axial direction of the first piston rod 242. Motion accuracy.

Referring to FIG. 1, FIG. 3 and FIG. 5, the rising and closing process of the valve plate 14 is specifically as follows: The first cylinder 241 is in intake, and the first piston rod 242 is pushed upward to move a certain stroke. In this process, the first piston rod 242 will push the lateral portion 221, the longitudinal portion 222, the connecting rod 262 and the valve plate 14 of the mounting plate 22 upward together to a desired position, that is, the valve plate 14 is positive The transfer window 12 of the sealed chamber 10, that is, the transfer window 12, is located at the center of the orthographic projection of the valve plate 14 on the sealed cavity 10. So far, the ascending process of the valve plate 14 is completed.

Next, the second cylinder 281 is inflated, and the second piston rod 282 is pushed to move in a direction close to the sealing surface of the transfer window 12 of the sealing chamber 10. In this process, the second piston rod 282 will drive the connecting rod 262, the connecting seat 261 and the valve plate 14 together to move to a desired position in the direction of the sealing surface of the transfer window 12, that is, to be mounted on The O-ring 141 in the seal groove of the valve plate 14 is in contact with the sealing surface of the transfer window 12. So far, the closing process of the valve plate 14 is completed.

After the valve plate 14 is closed, the sealing cavity 10 can be evacuated, and the sealing of the valve plate 14 to the transfer window 12 is forced by the pressure of atmospheric pressure difference inside and outside the sealing cavity 10. When the surface is close, the O-ring is forced to be compressed and deformed to be in close contact with the sealing surface of the transfer window 12, thereby achieving a stable and reliable sealing requirement.

Referring to FIG. 1 , FIG. 3 and FIG. 5 , the opening and lowering process of the valve plate 14 is specifically: filling the sealing cavity 10 with the atmosphere to reduce the degree of vacuum in the sealing cavity 10 until the The inflation is stopped when the air pressure in the sealed chamber 10 is balanced with the atmospheric pressure.

Next, the second cylinder 281 is inflated to push the second piston rod 282 to move a certain stroke in a direction away from the sealing surface of the transfer window 12 of the sealing chamber 10. In this process, the second piston rod 282 will move the connecting rod 262, the connecting seat 261 and the valve plate 14 to the original stroke position, and the sealing surface of the O-ring 141 and the transfer window 12 is completely Get out of a certain distance (such as 5mm). So far, the opening process of the valve plate 14 is completed.

Thereafter, the first cylinder 241 is inflated to push the first piston rod 242 downward for a certain stroke. In this process, the first piston rod 242 will drive the lateral portion 221, the longitudinal portion 222, the connecting rod 262 and the valve plate 14 of the mounting plate 22 downward to the initial position, that is, on the valve plate 14. The height along the horizontal plane is slightly lower than the lower horizontal plane of the transfer window 12. So far, the descending process of the valve plate 14 is completed.

The invention has been described above in connection with the preferred embodiments, but the invention is not limited to the embodiments disclosed above, but should be construed to cover various modifications and equivalent combinations in accordance with the nature of the invention.

Claims

Rights request

A sealing cavity valve plate driving mechanism for driving a valve plate to open or close a transfer window of a sealing cavity, wherein: the sealing cavity valve plate driving mechanism comprises a moving guiding device, a mounting plate, a first driving device, a connecting device and a second driving device, the moving guiding device is located below the transfer window of the sealing cavity and is fixedly connected with the outer side wall of the sealing cavity, the mounting plate and the moving The guiding device is longitudinally slidably connected, the first driving device is fixedly connected to the mounting plate, and the first driving device drives the mounting plate to perform a linear reciprocating motion along the moving guiding device, the connecting device One end of the connection device is connected to the valve plate, the other end of the connecting device is fixedly connected to the second driving device, the second driving device is fixedly connected to the mounting plate, and the second driving device drives the valve The plate is linearly reciprocated in a lateral direction, and the first driving device drives the valve plate through the mounting plate to perform a longitudinal linear reciprocating motion.

2. The sealed cavity valve plate drive mechanism of claim 1 wherein said mounting plate includes a transversely connected transverse portion and a meandering follower.

3. The sealed cavity valve plate drive mechanism according to claim 2, wherein: said first driving device comprises a first cylinder and a first piston rod, said first cylinder being mounted on said sealed cavity One end of the first piston rod is slidably received in the seat body of the first cylinder, and the other end of the first piston rod is sealingly extended from the seat body of the first cylinder and The lateral portion of the mounting plate is fixedly connected.

4. The sealed cavity valve plate drive mechanism according to claim 2, wherein: said second driving device comprises a second cylinder and a second piston rod, said second cylinder and a longitudinal portion of said mounting plate a fixed connection, one end of the second piston rod is slidably received in the seat body of the second cylinder, and the other end of the second piston rod is sealingly extended from the seat body of the second cylinder and The connection device is connected.

5. The sealing cavity valve plate driving mechanism according to claim 4, wherein: the connecting device comprises a connecting seat and a connecting rod, wherein the connecting seat is fixedly connected to the valve plate, and the connecting seat has a connection Spherical hole, One end of the connecting rod is spherical and inserted into a spherical hole of the connecting seat, the other end of the connecting rod is provided with an internally threaded hole, and the second piston rod extends out of one end of the seat body of the second cylinder An external thread is provided, and the internally threaded hole of the connecting rod cooperates with the external thread of the second piston rod.

6. The sealed cavity valve plate drive mechanism of claim 5, wherein: said connecting device further comprises a lock nut and a locking ring, said lock nut passing through said connecting rod and said The connecting seat is connected, and the locking ring is sleeved into the lock nut.

7. The sealed cavity valve plate driving mechanism according to claim 2, wherein: the moving guiding device comprises a guide rail, a slider and a connecting post, wherein the guiding rail is longitudinally fixedly mounted on the sealing cavity. The outer side wall is fixedly connected to one end of the connecting post, the other end of the connecting post is fixedly connected to the lateral portion of the mounting plate, and the guide rail is slidably engaged with the slider.

8. The sealed cavity valve plate drive mechanism according to claim 7, wherein: the guide rail and the slider have a dovetail shape in cross section.

9. The sealed cavity valve plate driving mechanism according to claim 7, wherein: the moving guiding device further comprises an upper sensor, a lower sensor and a blocking piece, wherein the upper sensor and the lower sensor are correspondingly mounted on the guiding rail. The upper and lower ends are located on the same longitudinal line, and the blocking piece is mounted on the slider and located between the upper sensor and the lower sensor.

10. The sealed cavity valve plate drive mechanism of claim 9, wherein: said moving guide post.