WO2011137691A1 - Mécanisme d'entraînement pour plaque de soupape de chambre d'étanchéité - Google Patents

Mécanisme d'entraînement pour plaque de soupape de chambre d'étanchéité Download PDF

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Publication number
WO2011137691A1
WO2011137691A1 PCT/CN2011/071911 CN2011071911W WO2011137691A1 WO 2011137691 A1 WO2011137691 A1 WO 2011137691A1 CN 2011071911 W CN2011071911 W CN 2011071911W WO 2011137691 A1 WO2011137691 A1 WO 2011137691A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve plate
driving device
mounting plate
cylinder
piston rod
Prior art date
Application number
PCT/CN2011/071911
Other languages
English (en)
Chinese (zh)
Inventor
杨明生
郭远伦
刘惠森
范继良
王勇
王曼媛
Original Assignee
东莞宏威数码机械有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2011137691A1 publication Critical patent/WO2011137691A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)

Abstract

Un mécanisme d'entraînement pour une plaque de soupape d'une chambre d'étanchéité comprend un dispositif de guidage mobile (20), une plaque d'installation (22), un premier dispositif d'entraînement (24), un dispositif de raccordement (26), et un second dispositif d'entraînement (28). Le dispositif de guidage mobile (20) est situé sous une fenêtre de transfert (12) de la chambre d'étanchéité (10) et est raccordé fixement à une paroi latérale externe (101) de la chambre d'étanchéité (10). La plaque d'installation (22) est raccordée de façon coulissante au dispositif de guidage mobile (20) dans la direction longitudinale. Le premier dispositif d'entraînement (24) est raccordé fixement à la plaque d'installation (22), et le dispositif de raccordement (26) est raccordé à la plaque de soupape (14) et au second dispositif d'entraînement (28). Le second dispositif d'entraînement (28) est raccordé au dispositif de raccordement (26) et à la plaque d'installation (22). Lorsque le premier dispositif d'entraînement (24) du mécanisme d'entraînement pour la plaque de soupape de la chambre d'étanchéité amène la plaque de soupape (14) à effectuer un mouvement alternatif droit longitudinal au moyen de la plaque d'installation (22), et que le second dispositif d'entraînement (28) amène la plaque de soupape (14) à effectuer un mouvement alternatif droit transversal, le mécanisme d'entraînement réalise l'ouverture ou la fermeture de la fenêtre de transfert (12) au moyen de la plaque de soupape (14). Grâce à un traitement de pièces et d'accessoires, à un fonctionnement et à un entretien simples, le mécanisme présente une structure simple et compacte et est flexible en mouvement. Le mécanisme est simple à mettre en œuvre et son équipement est peu onéreux.
PCT/CN2011/071911 2010-05-06 2011-03-17 Mécanisme d'entraînement pour plaque de soupape de chambre d'étanchéité WO2011137691A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2010101711638A CN101956861B (zh) 2010-05-06 2010-05-06 密封腔体阀板驱动机构
CN201010171163.8 2010-05-06

Publications (1)

Publication Number Publication Date
WO2011137691A1 true WO2011137691A1 (fr) 2011-11-10

Family

ID=43484369

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2011/071911 WO2011137691A1 (fr) 2010-05-06 2011-03-17 Mécanisme d'entraînement pour plaque de soupape de chambre d'étanchéité

Country Status (2)

Country Link
CN (1) CN101956861B (fr)
WO (1) WO2011137691A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014037889A (ja) * 2012-08-17 2014-02-27 Vat Holding Ag バルブ
US9086172B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
US9086173B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101956861B (zh) * 2010-05-06 2012-02-29 东莞宏威数码机械有限公司 密封腔体阀板驱动机构
CN103021909A (zh) * 2012-11-30 2013-04-03 北京七星华创电子股份有限公司 一种移动式密封装置
CN103021910B (zh) * 2012-11-30 2015-09-09 北京七星华创电子股份有限公司 可移动式密封装置
TWI730808B (zh) * 2020-06-11 2021-06-11 新萊應材科技有限公司 二向移動之閥件驅動裝置
CN111983153B (zh) * 2020-08-31 2021-08-31 中国科学院地理科学与资源研究所 底泥以及水体的温室气体排放检测系统和方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6056266A (en) * 1997-10-20 2000-05-02 Vat Holding Ag Device for closing an opening of a tank or a tubular conduit
US20040206925A1 (en) * 2003-04-16 2004-10-21 Bernhard Duelli Closure device for vacuum closure of at least one opening in a wall
CN2665103Y (zh) * 2003-11-28 2004-12-22 云南昆船第二机械有限公司 风油增压自动顶起装置
US20050012066A1 (en) * 2003-07-14 2005-01-20 Vat Holding Ag; Load-lock device for introducing substrates into a vacuum chamber
US20060011140A1 (en) * 2004-07-13 2006-01-19 Jeff Blahnik Single-sided inflatable vertical slit valve
CN101131213A (zh) * 2006-05-24 2008-02-27 Vat控股公司 用于真空密封地封闭壁上的开口的封闭装置
CN201696725U (zh) * 2010-05-06 2011-01-05 东莞宏威数码机械有限公司 真空腔体阀板驱动装置
CN101956861A (zh) * 2010-05-06 2011-01-26 东莞宏威数码机械有限公司 密封腔体阀板驱动机构

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
CN2861324Y (zh) * 2005-05-26 2007-01-24 长沙中联重工科技发展股份有限公司 一种排污口盖板开启装置
US7500649B2 (en) * 2006-05-05 2009-03-10 Vat Holding Ag Vacuum valve drive

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6056266A (en) * 1997-10-20 2000-05-02 Vat Holding Ag Device for closing an opening of a tank or a tubular conduit
US20040206925A1 (en) * 2003-04-16 2004-10-21 Bernhard Duelli Closure device for vacuum closure of at least one opening in a wall
US20050012066A1 (en) * 2003-07-14 2005-01-20 Vat Holding Ag; Load-lock device for introducing substrates into a vacuum chamber
CN2665103Y (zh) * 2003-11-28 2004-12-22 云南昆船第二机械有限公司 风油增压自动顶起装置
US20060011140A1 (en) * 2004-07-13 2006-01-19 Jeff Blahnik Single-sided inflatable vertical slit valve
CN101131213A (zh) * 2006-05-24 2008-02-27 Vat控股公司 用于真空密封地封闭壁上的开口的封闭装置
CN201696725U (zh) * 2010-05-06 2011-01-05 东莞宏威数码机械有限公司 真空腔体阀板驱动装置
CN101956861A (zh) * 2010-05-06 2011-01-26 东莞宏威数码机械有限公司 密封腔体阀板驱动机构

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9086172B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
US9086173B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
JP2014037889A (ja) * 2012-08-17 2014-02-27 Vat Holding Ag バルブ
US9273800B2 (en) 2012-08-17 2016-03-01 Vat Holding Ag Valve

Also Published As

Publication number Publication date
CN101956861A (zh) 2011-01-26
CN101956861B (zh) 2012-02-29

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