CN201956333U - 基片对位上载装置 - Google Patents
基片对位上载装置 Download PDFInfo
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- CN201956333U CN201956333U CN2010205559033U CN201020555903U CN201956333U CN 201956333 U CN201956333 U CN 201956333U CN 2010205559033 U CN2010205559033 U CN 2010205559033U CN 201020555903 U CN201020555903 U CN 201020555903U CN 201956333 U CN201956333 U CN 201956333U
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CN2010205559033U CN201956333U (zh) | 2010-09-30 | 2010-09-30 | 基片对位上载装置 |
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CN2010205559033U CN201956333U (zh) | 2010-09-30 | 2010-09-30 | 基片对位上载装置 |
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CN201956333U true CN201956333U (zh) | 2011-08-31 |
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CN2010205559033U Expired - Fee Related CN201956333U (zh) | 2010-09-30 | 2010-09-30 | 基片对位上载装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101992948A (zh) * | 2010-09-30 | 2011-03-30 | 东莞宏威数码机械有限公司 | 基片自动上载装置 |
CN103264885A (zh) * | 2013-05-29 | 2013-08-28 | 徐阳 | 用于真空腔体内传输的管叉装置 |
CN105575868A (zh) * | 2014-11-10 | 2016-05-11 | 上海理想万里晖薄膜设备有限公司 | 基板校准方法与装置 |
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- 2010-09-30 CN CN2010205559033U patent/CN201956333U/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101992948A (zh) * | 2010-09-30 | 2011-03-30 | 东莞宏威数码机械有限公司 | 基片自动上载装置 |
CN101992948B (zh) * | 2010-09-30 | 2013-07-31 | 东莞宏威数码机械有限公司 | 基片自动上载装置 |
CN103264885A (zh) * | 2013-05-29 | 2013-08-28 | 徐阳 | 用于真空腔体内传输的管叉装置 |
CN103264885B (zh) * | 2013-05-29 | 2015-06-17 | 徐阳 | 用于真空腔体内传输的管叉装置 |
CN105575868A (zh) * | 2014-11-10 | 2016-05-11 | 上海理想万里晖薄膜设备有限公司 | 基板校准方法与装置 |
WO2016074173A1 (zh) * | 2014-11-10 | 2016-05-19 | 上海理想万里晖薄膜设备有限公司 | 基板校准方法与装置 |
CN105575868B (zh) * | 2014-11-10 | 2018-12-07 | 上海理想万里晖薄膜设备有限公司 | 基板校准方法与装置 |
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