CN101992948A - 基片自动上载装置 - Google Patents
基片自动上载装置 Download PDFInfo
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- CN101992948A CN101992948A CN 201010502627 CN201010502627A CN101992948A CN 101992948 A CN101992948 A CN 101992948A CN 201010502627 CN201010502627 CN 201010502627 CN 201010502627 A CN201010502627 A CN 201010502627A CN 101992948 A CN101992948 A CN 101992948A
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CN 201010502627 CN101992948B (zh) | 2010-09-30 | 2010-09-30 | 基片自动上载装置 |
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CN 201010502627 CN101992948B (zh) | 2010-09-30 | 2010-09-30 | 基片自动上载装置 |
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CN101992948A true CN101992948A (zh) | 2011-03-30 |
CN101992948B CN101992948B (zh) | 2013-07-31 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104528037A (zh) * | 2014-12-26 | 2015-04-22 | 昆山精讯电子技术有限公司 | 液晶模组分类包装用托盘传送装置 |
CN106328516A (zh) * | 2016-09-10 | 2017-01-11 | 舟山市智海技术开发有限公司 | 一种多功能二极管生产装置 |
CN106736478A (zh) * | 2016-12-30 | 2017-05-31 | 苏州博众精工科技有限公司 | 一种批头快换机构 |
CN106893996A (zh) * | 2017-04-18 | 2017-06-27 | 东旭科技集团有限公司 | 立式磁控溅射镀膜用的偏压结构及其夹持装置 |
WO2018018750A1 (zh) * | 2016-07-28 | 2018-02-01 | 意力(广州)电子科技有限公司 | 用于产品自动转移料架的装置 |
CN111607774A (zh) * | 2020-07-02 | 2020-09-01 | 苏州锐世讯光学科技有限公司 | 一种真空溅射镀膜生产系统 |
CN111921280A (zh) * | 2020-06-29 | 2020-11-13 | 安徽世倾环保科技有限公司 | 中小型燃煤锅炉烟气净化用滤袋的制备方法 |
CN113911733A (zh) * | 2021-11-09 | 2022-01-11 | 珠海格力智能装备有限公司 | 输送装置及空调两器生产线 |
CN117253931A (zh) * | 2023-11-20 | 2023-12-19 | 苏州中航天成电子科技有限公司 | 一种半导体电源封壳的封装设备 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08117583A (ja) * | 1994-10-24 | 1996-05-14 | Ulvac Japan Ltd | 真空処理装置 |
GB2392309A (en) * | 2002-08-22 | 2004-02-25 | Leica Microsys Lithography Ltd | Substrate loading and unloading apparatus |
CN1608318A (zh) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | 被处理体的搬送装置和具有搬送装置的处理系统 |
US20080295771A1 (en) * | 2007-05-30 | 2008-12-04 | Industrial Technology Research Institute | Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
CN102034725A (zh) * | 2010-09-30 | 2011-04-27 | 东莞宏威数码机械有限公司 | 基片自动对位上载装置 |
CN201825561U (zh) * | 2010-09-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | 基片上载装置 |
CN201956333U (zh) * | 2010-09-30 | 2011-08-31 | 东莞宏威数码机械有限公司 | 基片对位上载装置 |
-
2010
- 2010-09-30 CN CN 201010502627 patent/CN101992948B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08117583A (ja) * | 1994-10-24 | 1996-05-14 | Ulvac Japan Ltd | 真空処理装置 |
CN1608318A (zh) * | 2001-12-25 | 2005-04-20 | 东京毅力科创株式会社 | 被处理体的搬送装置和具有搬送装置的处理系统 |
GB2392309A (en) * | 2002-08-22 | 2004-02-25 | Leica Microsys Lithography Ltd | Substrate loading and unloading apparatus |
US20080295771A1 (en) * | 2007-05-30 | 2008-12-04 | Industrial Technology Research Institute | Power-delivery mechanism and apparatus of plasma-enhanced chemical vapor deposition using the same |
CN102034725A (zh) * | 2010-09-30 | 2011-04-27 | 东莞宏威数码机械有限公司 | 基片自动对位上载装置 |
CN201825561U (zh) * | 2010-09-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | 基片上载装置 |
CN201956333U (zh) * | 2010-09-30 | 2011-08-31 | 东莞宏威数码机械有限公司 | 基片对位上载装置 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104528037A (zh) * | 2014-12-26 | 2015-04-22 | 昆山精讯电子技术有限公司 | 液晶模组分类包装用托盘传送装置 |
WO2018018750A1 (zh) * | 2016-07-28 | 2018-02-01 | 意力(广州)电子科技有限公司 | 用于产品自动转移料架的装置 |
CN106328516B (zh) * | 2016-09-10 | 2019-05-10 | 一诠科技(中国)有限公司 | 一种多功能二极管生产装置 |
CN106328516A (zh) * | 2016-09-10 | 2017-01-11 | 舟山市智海技术开发有限公司 | 一种多功能二极管生产装置 |
CN106736478A (zh) * | 2016-12-30 | 2017-05-31 | 苏州博众精工科技有限公司 | 一种批头快换机构 |
CN106893996A (zh) * | 2017-04-18 | 2017-06-27 | 东旭科技集团有限公司 | 立式磁控溅射镀膜用的偏压结构及其夹持装置 |
CN106893996B (zh) * | 2017-04-18 | 2019-03-15 | 东旭科技集团有限公司 | 立式磁控溅射镀膜用的偏压结构及其夹持装置 |
CN111921280A (zh) * | 2020-06-29 | 2020-11-13 | 安徽世倾环保科技有限公司 | 中小型燃煤锅炉烟气净化用滤袋的制备方法 |
CN111607774A (zh) * | 2020-07-02 | 2020-09-01 | 苏州锐世讯光学科技有限公司 | 一种真空溅射镀膜生产系统 |
CN111607774B (zh) * | 2020-07-02 | 2022-03-18 | 苏州锐世讯光学科技有限公司 | 一种真空溅射镀膜生产系统 |
CN113911733A (zh) * | 2021-11-09 | 2022-01-11 | 珠海格力智能装备有限公司 | 输送装置及空调两器生产线 |
CN117253931A (zh) * | 2023-11-20 | 2023-12-19 | 苏州中航天成电子科技有限公司 | 一种半导体电源封壳的封装设备 |
CN117253931B (zh) * | 2023-11-20 | 2024-01-23 | 苏州中航天成电子科技有限公司 | 一种半导体电源封壳的封装设备 |
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CN101992948B (zh) | 2013-07-31 |
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