CN101956861B - 密封腔体阀板驱动机构 - Google Patents
密封腔体阀板驱动机构 Download PDFInfo
- Publication number
- CN101956861B CN101956861B CN2010101711638A CN201010171163A CN101956861B CN 101956861 B CN101956861 B CN 101956861B CN 2010101711638 A CN2010101711638 A CN 2010101711638A CN 201010171163 A CN201010171163 A CN 201010171163A CN 101956861 B CN101956861 B CN 101956861B
- Authority
- CN
- China
- Prior art keywords
- valve plate
- seal chamber
- driving mechanism
- mounting plate
- drive unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007789 sealing Methods 0.000 title abstract description 19
- 230000033001 locomotion Effects 0.000 claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 15
- 239000011148 porous material Substances 0.000 claims description 8
- 230000003139 buffering effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 15
- 239000000758 substrate Substances 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711638A CN101956861B (zh) | 2010-05-06 | 2010-05-06 | 密封腔体阀板驱动机构 |
PCT/CN2011/071911 WO2011137691A1 (zh) | 2010-05-06 | 2011-03-17 | 密封腔体阀板驱动机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711638A CN101956861B (zh) | 2010-05-06 | 2010-05-06 | 密封腔体阀板驱动机构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101956861A CN101956861A (zh) | 2011-01-26 |
CN101956861B true CN101956861B (zh) | 2012-02-29 |
Family
ID=43484369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101711638A Expired - Fee Related CN101956861B (zh) | 2010-05-06 | 2010-05-06 | 密封腔体阀板驱动机构 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN101956861B (zh) |
WO (1) | WO2011137691A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101956861B (zh) * | 2010-05-06 | 2012-02-29 | 东莞宏威数码机械有限公司 | 密封腔体阀板驱动机构 |
US9086173B2 (en) | 2012-07-19 | 2015-07-21 | Vat Holding Ag | Vacuum valve |
US9086172B2 (en) | 2012-07-19 | 2015-07-21 | Vat Holding Ag | Vacuum valve |
JP6173818B2 (ja) * | 2012-08-17 | 2017-08-02 | バット ホールディング アーゲー | バルブ |
CN103021909A (zh) * | 2012-11-30 | 2013-04-03 | 北京七星华创电子股份有限公司 | 一种移动式密封装置 |
CN103021910B (zh) * | 2012-11-30 | 2015-09-09 | 北京七星华创电子股份有限公司 | 可移动式密封装置 |
TWI730808B (zh) * | 2020-06-11 | 2021-06-11 | 新萊應材科技有限公司 | 二向移動之閥件驅動裝置 |
CN111983153B (zh) * | 2020-08-31 | 2021-08-31 | 中国科学院地理科学与资源研究所 | 底泥以及水体的温室气体排放检测系统和方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6089537A (en) * | 1999-06-23 | 2000-07-18 | Mks Instruments, Inc. | Pendulum valve assembly |
CN2861324Y (zh) * | 2005-05-26 | 2007-01-24 | 长沙中联重工科技发展股份有限公司 | 一种排污口盖板开启装置 |
CN201696725U (zh) * | 2010-05-06 | 2011-01-05 | 东莞宏威数码机械有限公司 | 真空腔体阀板驱动装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19746241C2 (de) * | 1997-10-20 | 2000-05-31 | Vat Holding Ag Haag | Einrichtung zum Verschließen einer Öffnung |
US6899316B2 (en) * | 2003-04-16 | 2005-05-31 | Vat Holding Ag | Closure device for vacuum closure of at least one opening in a wall |
US6916009B2 (en) * | 2003-07-14 | 2005-07-12 | Vat Holding Ag | Load-lock device for introducing substrates into a vacuum chamber |
CN2665103Y (zh) * | 2003-11-28 | 2004-12-22 | 云南昆船第二机械有限公司 | 风油增压自动顶起装置 |
US7422653B2 (en) * | 2004-07-13 | 2008-09-09 | Applied Materials, Inc. | Single-sided inflatable vertical slit valve |
US7500649B2 (en) * | 2006-05-05 | 2009-03-10 | Vat Holding Ag | Vacuum valve drive |
KR20070113122A (ko) * | 2006-05-24 | 2007-11-28 | 배트 홀딩 아게 | 벽 내의 개구부의 진공 밀봉 폐쇄를 위한 폐쇄장치 |
CN101956861B (zh) * | 2010-05-06 | 2012-02-29 | 东莞宏威数码机械有限公司 | 密封腔体阀板驱动机构 |
-
2010
- 2010-05-06 CN CN2010101711638A patent/CN101956861B/zh not_active Expired - Fee Related
-
2011
- 2011-03-17 WO PCT/CN2011/071911 patent/WO2011137691A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6089537A (en) * | 1999-06-23 | 2000-07-18 | Mks Instruments, Inc. | Pendulum valve assembly |
CN2861324Y (zh) * | 2005-05-26 | 2007-01-24 | 长沙中联重工科技发展股份有限公司 | 一种排污口盖板开启装置 |
CN201696725U (zh) * | 2010-05-06 | 2011-01-05 | 东莞宏威数码机械有限公司 | 真空腔体阀板驱动装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2011137691A1 (zh) | 2011-11-10 |
CN101956861A (zh) | 2011-01-26 |
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PD01 | Discharge of preservation of patent |
Date of cancellation: 20151205 Granted publication date: 20120229 |
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Date of cancellation: 20211205 Granted publication date: 20120229 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120229 Termination date: 20130506 |