CN103021909A - Mobile sealing device - Google Patents
Mobile sealing device Download PDFInfo
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- CN103021909A CN103021909A CN2012105075344A CN201210507534A CN103021909A CN 103021909 A CN103021909 A CN 103021909A CN 2012105075344 A CN2012105075344 A CN 2012105075344A CN 201210507534 A CN201210507534 A CN 201210507534A CN 103021909 A CN103021909 A CN 103021909A
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- Prior art keywords
- sealing device
- mobile sealing
- guide rail
- processing chamber
- drive unit
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Abstract
The invention provides a mobile sealing machine which comprises a mobile sealing plate, a driving device, a guide rail and a guide rail sliding block. The guide rail is connected with the guide rail sliding block; one end of the mobile sealing plate is connected with the guide rail sliding block, and the other end of the mobile sealing plate is connected with the driving device. The mobile sealing device is arranged at the opening position of a processing chamber, before a mechanical arm extends into the processing chamber, the sealing device moves to the lowest position so that the mechanical arm can enter into the processing chamber to grasp and place silicon chips; and after the mechanical arm withdraws from the processing chamber, the sealing device can instantly seal the processing device. By means of the mobile sealing device to seal the processing chamber, the micro-environment of the silicon chips inside the processing chamber can be well isolated from the external environment, thereby guaranteeing the cleanliness inside the processing chamber and enabling a device to meet a high process requirement.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing process field, be specifically related to a kind of mobile sealing device.
Background technology
Along with the development of semiconductor manufacturing equipment, also more and more higher to the cleaning manufacture process requirement of integrated circuit silicon chip.In integrated circuit cleaning process, for the microenvironment of processing chamber inside higher requirement is arranged, in order to guarantee a good inside microenvironment, need to seal the processing chamber around the silicon chip, so that silicon chip completely cuts off with on every side environment.But simultaneously, manipulator silicon chip is grasped with the process of placing in, processing chamber is communicated with external environment condition.For making silicon chip in the process of cleaning, reduce as much as possible external environment condition to its impact, after the silicon chip placement is complete, should seal timely processing chamber, to guarantee the technological requirement of processing chamber.
Summary of the invention
The technical problem that (one) will solve
The object of the present invention is to provide a kind of manipulator enter in the processing chamber silicon chip grasped with place and withdraw from processing chamber after, the mobile sealing device that can in time seal processing chamber.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of mobile sealing device, the sealing device comprises: mobile sealing plate, drive unit, guide rail and guide rail slide block; Described guide rail is connected with guide rail slide block; Described mobile sealing plate one end is connected with guide rail slide block, and the other end is connected with drive unit.
Further, described drive unit is cylinder.
Further again, described cylinder is provided with the slide block that can move up and down.
Wherein, the sealing device also comprises connector; Described mobile sealing plate is connected with the slide block of cylinder by connector.
Wherein, the sealing device also comprises the drive unit protective cover, and described drive unit is positioned at described drive unit protective cover.
Further, described drive unit protective cover is the electric actuator protective cover.
Wherein, described electric actuator protective cover adopts dustless etch-proof nonmetallic materials.
Wherein, described electric actuator protective cover one side has long recess, and opposite side has the first short groove and the second short groove.
Wherein, the sealing device also comprises position control; Described position control is installed in the drive unit protective cover.
Further, described position control comprises the first limit sensors and the second limit sensors, and described the first limit sensors and the second limit sensors are installed in respectively in the first short groove and the second short groove of electric actuator protective cover.
(3) beneficial effect
Mobile sealing device provided by the invention is installed in the processing chamber opening part, before manipulator enters processing chamber, the sealing device moves to extreme lower position, so that manipulator can enter in the processing chamber silicon chip is grasped and places, after manipulator withdraws from processing chamber, use the sealing device that processing chamber is in time sealed.Utilize mobile sealing device provided by the invention that processing chamber is sealed, can make microenvironment on every side and the external environment of the inner silicon chip of placing of processing chamber accomplish better isolation, thereby guarantee the lustration class of processing chamber inside, make equipment reach higher technological requirement.
Description of drawings
Fig. 1 is fixed on schematic diagram on the processing chamber panel with the mobile sealing device.
Fig. 2 is the structure chart of mobile sealing device provided by the invention.
Fig. 3 is the structure chart of the mobile sealing plate of mobile sealing device shown in Figure 2.
Fig. 4 is the structure chart of the cylinder of mobile sealing device shown in Figure 2.
Fig. 5 is the structure chart of the connector of mobile sealing device shown in Figure 2.
Fig. 6 is the structure chart that does not contain the electric actuator protective cover in the top cover situation.
Fig. 7 is the structure chart of the guide rail slide block of mobile sealing device shown in Figure 2.
Among the figure, 1: processing chamber; 2: the mobile sealing device; 3: the mobile sealing plate; 301: the first holes; 302: the second holes; 4: cylinder; 401: slide block; 5: connector; 501: the first through holes; 502: the second through holes; 6: the electric actuator protective cover; 601: the first short grooves; 602: the second short grooves; 603: long recess; 7: the first limit sensors; 8: the second limit sensors; 9: guide rail; 10: guide rail slide block.
Embodiment
Be described in further detail below in conjunction with the embodiment of accompanying drawing to mobile sealing device provided by the invention.These execution modes only are used for explanation the present invention, and are not limitation of the present invention.
In description of the invention, need to prove, term " " center "; " vertically "; " laterally "; " on "; D score; " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only be for convenience of description the present invention and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second ", " the 3rd " only are used for describing purpose, and can not be interpreted as indication or hint relative importance.
In description of the invention, need to prove that unless clear and definite regulation and restriction are arranged in addition, term " installation ", " linking to each other ", " connection " should be done broad understanding, for example, can be to be fixedly connected with, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can indirectly link to each other by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete meaning in the present invention.In addition, in description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
As shown in Figure 1, have a mouth that is of moderate size on the processing chamber 1, be used in processing chamber 1, picking and placeing silicon chip, mobile sealing device 2 is fixed on processing chamber 1 opening part (processing chamber only shows one of them face among the figure) by securing members such as screws.
Such as Fig. 2, shown in Figure 7, mobile sealing device 2 provided by the invention comprises: mobile sealing plate 3, drive unit, guide rail 9 and guide rail slide block 10, and the sealing device also comprises drive unit protective cover, connector 5 and position control; Described guide rail 9 is connected with guide rail slide block 10; Described mobile sealing plate 3 one ends are connected with guide rail slide block 10, and the other end is connected with drive unit by connector 5; Described guide rail slide block 10 is two.
In the present embodiment, reaching mobile sealing plate 3 by guide rail slide block 10 is optimal way of the present invention in the effect that guide rail 9 slides, and other connected modes that can reach this effect are also within protection scope of the present invention.
Described drive unit adopts cylinder 4 drivings, is used for driving moving up and down of mobile sealing plate 3, to guarantee that the driving process steadily, reliably; In order to reach good sealing effectiveness, the area of described mobile sealing plate 3 should be a bit larger tham the area of the opening on the processing chamber 1; Described connector 5 is used for connecting cylinder 4 and mobile sealing plate 3; Described drive unit protective cover is electric actuator protective cover 6, and described drive unit is positioned at described drive unit protective cover, is used for isolation drive device and surrounding environment, and reducing affects technical process owing to drive unit produces molecule in moving process; Described position control is installed in the drive unit protective cover, and it comprises the first limit sensors 7 and the second limit sensors 8, is used for the position limitation protection of sealing device 2 when moving up and down; Described guide rail 9 is used for guide-localization, to guarantee that sealing device 2 does not move along fixed-direction in moving process relatively large deviation can occur; In order to guarantee the stability of this mobile sealing device 2, the contact area of described guide rail 9 and guide rail slide block 10 can not be too little.
As shown in Figure 3, mobile sealing plate 3 is provided with the first hole 301 and the second hole 302, the first hole 301 and the second hole 302 lay respectively at the left and right sides of mobile sealing plate 3, the first hole 301 is used for being connected of mobile sealing plate 3 and guide rail slide block 10, and the second hole 302 is connected for mobile sealing plate 3 and cylinder 4.
As shown in Figure 4, cylinder 4 is provided with the slide block 401 that can move up and down, and has screwed hole on the described slide block 401; Described mobile sealing plate 3 is connected with the slide block 401 of cylinder 4 by connector 5.
As shown in Figure 5, connector 5 is provided with the first through hole 501 and the second through hole 502, the first through holes 501 and is used for being connected of connector 5 and mobile sealing plate 3, and the second through hole 502 is connected for the slide block 401 of connector 5 and cylinder 4 tops; The problems such as installation difficulty in order to reduce to cause owing to mismachining tolerance are processed into ellipticity with described the first through hole 501.
As shown in Figure 6, electric actuator protective cover 6 one sides have long recess 603, be used for moving up and down of connector 5, opposite side has the first short groove 601 and the second short groove 602, be respectively applied to install the first limit sensors 7 and the second limit sensors 8, when mobile sealing plate 3 moves to limes superiors position or limit inferior position, the first limit sensors 7 or the second limit sensors 8 send triggering signal makes cylinder 4 stop to drive, with protection mobile sealing device 2, also can guarantee good sealing effectiveness simultaneously; Produce molecule and affect the effect that integrated circuit cleans for fear of the electric actuator protective cover 6 that adopts metal material to make, electric actuator protective cover 6 adopts dustless etch-proof nonmetallic materials to make.
The seal process of 2 pairs of processing chambers 1 of mobile sealing device provided by the invention is as follows:
S1: manipulator is placed into silicon chip the correct position of processing chamber 1 and withdraws from chamber;
S2: drive unit drives mobile sealing plate 3 and moves up and down along guide rail 9;
S3: the skidding distance of the first limit sensors 7 and 8 pairs of mobile sealing plates 3 of the second limit sensors is controlled;
S4: when the opening of mobile sealing plate 3 complete covering process chambers 1, drive unit stops to drive, and this moment, seal process finished.
The above only is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (10)
1. a mobile sealing device is characterized in that, the sealing device comprises: mobile sealing plate (3), drive unit, guide rail (9) and guide rail slide block (10); Described guide rail (9) is connected with guide rail slide block (10); Described mobile sealing plate (3) one ends are connected with guide rail slide block (10), and the other end is connected with drive unit.
2. mobile sealing device according to claim 1 is characterized in that, described drive unit is cylinder (4).
3. mobile sealing device according to claim 2 is characterized in that, described cylinder (4) is provided with the slide block (401) that can move up and down.
4. mobile sealing device according to claim 3 is characterized in that, the sealing device also comprises connector (5); Described mobile sealing plate (3) is connected with the slide block (401) of cylinder (4) by connector (5).
5. mobile sealing device according to claim 1 is characterized in that, the sealing device also comprises the drive unit protective cover, and described drive unit is positioned at described drive unit protective cover.
6. mobile sealing device according to claim 5 is characterized in that, described drive unit protective cover is electric actuator protective cover (6).
7. mobile sealing device according to claim 6 is characterized in that, described electric actuator protective cover (6) adopts dustless etch-proof nonmetallic materials.
8. mobile sealing device according to claim 6 is characterized in that, described electric actuator protective cover (6) one sides have long recess (603), and opposite side has the first short groove (601) and the second short groove (602).
9. mobile sealing device according to claim 8 is characterized in that, the sealing device also comprises position control; Described position control is installed in the drive unit protective cover.
10. mobile sealing device according to claim 9; it is characterized in that; described position control comprises the first limit sensors (7) and the second limit sensors (8), and described the first limit sensors (7) and the second limit sensors (8) are installed in respectively in the first short groove (601) and the second short groove (602) of electric actuator protective cover (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105075344A CN103021909A (en) | 2012-11-30 | 2012-11-30 | Mobile sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105075344A CN103021909A (en) | 2012-11-30 | 2012-11-30 | Mobile sealing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103021909A true CN103021909A (en) | 2013-04-03 |
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ID=47970362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105075344A Pending CN103021909A (en) | 2012-11-30 | 2012-11-30 | Mobile sealing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103021909A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681981A (en) * | 2020-06-17 | 2020-09-18 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1485558A (en) * | 2002-09-24 | 2004-03-31 | 协真工程株式会社 | Door open-shut device of processing device |
| CN101408682A (en) * | 2008-11-21 | 2009-04-15 | 友达光电（苏州）有限公司 | Protecting device of display module group driver |
| US20090294442A1 (en) * | 2008-05-27 | 2009-12-03 | Tdk Corporation | Lid opening/closing system for closed container, contained object insertion/takeout system having same lid opening/closing system, and substrate processing method using same lid opening/closing system |
| CN101956861A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Valve plate driving mechanism of sealing cavity |
| CN203013677U (en) * | 2012-11-06 | 2013-06-19 | 党庆风 | Vacuum film-coated directional-lighting low-temperature sodium lamp |
-
2012
- 2012-11-30 CN CN2012105075344A patent/CN103021909A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1485558A (en) * | 2002-09-24 | 2004-03-31 | 协真工程株式会社 | Door open-shut device of processing device |
| US20090294442A1 (en) * | 2008-05-27 | 2009-12-03 | Tdk Corporation | Lid opening/closing system for closed container, contained object insertion/takeout system having same lid opening/closing system, and substrate processing method using same lid opening/closing system |
| CN101408682A (en) * | 2008-11-21 | 2009-04-15 | 友达光电（苏州）有限公司 | Protecting device of display module group driver |
| CN101956861A (en) * | 2010-05-06 | 2011-01-26 | 东莞宏威数码机械有限公司 | Valve plate driving mechanism of sealing cavity |
| CN203013677U (en) * | 2012-11-06 | 2013-06-19 | 党庆风 | Vacuum film-coated directional-lighting low-temperature sodium lamp |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681981A (en) * | 2020-06-17 | 2020-09-18 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
| CN111681981B (en) * | 2020-06-17 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
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Application publication date: 20130403 |