CN209412301U - A kind of continous way magnetic control sputtering film plating device - Google Patents
A kind of continous way magnetic control sputtering film plating device Download PDFInfo
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- CN209412301U CN209412301U CN201821663180.1U CN201821663180U CN209412301U CN 209412301 U CN209412301 U CN 209412301U CN 201821663180 U CN201821663180 U CN 201821663180U CN 209412301 U CN209412301 U CN 209412301U
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- press strip
- valve plate
- continous way
- way magnetic
- valve
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Abstract
The utility model discloses a kind of continous way magnetic-controlled sputtering coating equipments, comprising: side wall has the vacuum chamber of material delivery port；Seal the material delivery port can flap valve, there is turnover valve plate around the shaft；The press strip being flexibly connected by several connecting rods with the side wall close to or far from the valve plate when press strip moves along its length, and compresses the valve plate when flap valve is closed.The utility model filming equipment valve plate and the sealing of material delivery port cooperate, and are compressed using press strip, and simple relative to existing flap valve, sealing performance is more excellent.
Description
Technical field
The utility model relates to a kind of coating apparatus more particularly to a kind of reliable continous way magnetron sputterings of sealing performance
Film device.
Background technique
It is provided with multi-stage vacuum room before and after the coating chamber of continous way magnetic control sputtering film plating device, by increaseing or decreasing step by step
The indoor atmospheric pressure of vacuum finally ensures that the vacuum degree of coating chamber meets process conditions.To be passed therethrough convenient for substrate, Mei Gezhen
Empty room two sides all have opening, wherein a side opening is provided with flap valve, it is ensured that be isolated with previous stage vacuum chamber.
As CN202913052U discloses a kind of capacitive touch screen double-sided coating magnetron sputtering production line, including Vacuum Deposition
Membrane cavity body and multiple cavities bracket, the vacuum coating cavity are mounted on multiple cavities bracket, and inside is equipped with interior transmission and is
System, vacuum coating cavity are divided into import vacuum zone, import buffer vacuum section, import transition vacuum zone, technique plated film vacuum
Seven sections of vacuum zone of section, outlet transition vacuum zone, outlet buffer vacuum section and outlet；Every section is equipped with extract system, vacuum cavity
Between separated using gate valve or flap valve, may be implemented effectively to separate, process for stabilizing gas.
As CN207525333U discloses a kind of turnover panel valve gear for being applicable in vacuum coating equipment, comprising: true for being mounted on
Valve board structure between empty room and main valve chamber；Valve board structure includes for being connected or the valve plate of closing vacuum chamber and main valve chamber；With
In the rotating shaft mechanism for driving valve plate rotation；And the driving mechanism for the rotation of drive shaft mechanism, driving mechanism include driving
Component and rack pinion component；Driving part drives valve plate rotation by rack pinion component.Although the flap valve
Structure is simple, but sealing performance is not good enough.
As CN103470789 discloses a kind of vacuum chamber flap valve of continuous vacuum coating line, comprising: a valve port；
One valve plate；One main shaft, rotating support is on vacuum chamber wall surface；One connecting rod, first end are fixedly connected with main shaft,
Its second end extends to the back side of valve plate；The second end of valve plate and connecting rod is pivotally connected by one pivot；One dip angle regulating device,
It is made of at least a pair of of lifting pin mechanism, lifting pin mechanism includes pin hole, sliding pin, elastic element and screw；Pin hole is set to connecting rod
Second end on, sliding pin is arranged in pin hole, towards the one end at the valve plate back side on set elastic element, set at the other end described
Screw presses sliding pin with this screw, and the elastic element for sliding pin end compresses the back side of valve plate；Two in a pair of of lifting pin mechanism
A lifting pin mechanism is respectively in the two sides of pivot on length of connecting rod direction；One rotary drive mechanism, driving main shaft rotation.It should
Flap valve sealing performance makes moderate progress, but structure is complicated, is not easy to realize.
Utility model content
The utility model provides a kind of continous way magnetic control sputtering film plating device, and it is multiple to solve existing apparatus flap valve
Miscellaneous or not good enough sealing performance problem.
A kind of continous way magnetic-controlled sputtering coating equipment, comprising:
Side wall has the vacuum chamber of material delivery port；
The flap valve of the material delivery port is sealed, there is turnover valve plate around the shaft；
The press strip being flexibly connected by several connecting rods with the side wall, the press strip it is close when moving along its length or
The valve plate is compressed far from the valve plate, and when flap valve is closed.
Preferably, the idler wheels of multiple cooperations with valve plate are provided on the press strip, in press strip translation motion, idler wheel along
Pressing plate rolls, and can gradually compress the valve plate, improves sealing performance.
Preferably, the valve plate includes the connecting plate of plate body and several connection shafts and plate body, when flap valve is closed,
The press strip contact compresses the connecting plate and contacts compression fit, and on the one hand which is convenient for the assembly and disassembly of valve plate, another
Aspect plate body is not to be directly connected to shaft, it helps valve plate and the sealing of material delivery port cooperate.
Preferably, multiple idler wheels with valve plate cooperation are provided on the press strip, the idler wheel and connecting plate correspond
Setting, idler wheel and connecting plate cooperate, and pressure is passed to plate body, seal it with material transferring mouth and cooperate.
Preferably, the end of the connecting plate has the guiding surface cooperated with idler wheel, can gradually compress valve plate.
Preferably, the oil cylinder mobile including driving press strip, the piston rod of the oil cylinder are connected by interlocking lever and press strip one end
It connecing, the interlocking lever both ends are rotatablely connected with piston rod and press strip respectively, when piston rod stretches, driving press strip translation, due to even
Bar is pullled, and press strip is close to or far from valve plate.
The bracket for being used to support substrate is provided on the inside of the material delivery port.
The utility model filming equipment valve plate and the sealing of material delivery port cooperate, and are compressed using moveable press strip, phase
Simple for existing flap valve, sealing performance is more excellent.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model turnover panel the valve opening state.
Fig. 2 is flap valve positive structure schematic shown in Fig. 1.
Fig. 3 is the A-A directional profile figure of Fig. 2.
Fig. 4 is the structural schematic diagram of the utility model turnover panel valve closing state.
Fig. 5 is the positive structure schematic of flap valve shown in Fig. 4.
Fig. 6 is the B-B directional profile figure of Fig. 5.
Specific embodiment
As shown in figures 1 to 6, a kind of continous way magnetic-controlled sputtering coating equipment, is mainly used for the plated film of glass substrate, by multiple
The vacuum chamber composition being sequentially connected in series, because its improvement essentially consists in the structure of flap valve, therefore Fig. 1-6 illustrate at flap valve
Structure.
As shown in figures 1 to 6, the one of side wall of vacuum chamber is provided with material delivery port 1, which, which is provided with, to turn over
The valve plate 2 turned, valve plate 2 are made of plate body 21 and connecting plate 23, and 23 both ends of connecting plate pass through bolt and plate body 21 and shaft respectively
22 are fixedly connected, and one end of shaft 22 is connected and installed in the motor output shaft (not shown) outside vacuum chamber, plate body 21 and object
Expect that delivery port 1 cooperates, seals entire vacuum chamber.
The inside of material delivery port 1 is additionally provided with press strip 3, and press strip 3 passes through the side wall of multiple isometric connecting rods 4 and vacuum chamber
Be flexibly connected, press strip 3 be it is horizontally disposed, the both ends of connecting rod 4 respectively with vacuum chamber side wall and press strip 3 rotation connection, when press strip 3 is flat
When shifting, for press strip 3 close to or far from valve plate 2, and when flap valve is closed, press strip 3 compresses valve plate 2.
In order to improve sealing performance, multiple idler wheels 31 being arranged in a one-to-one correspondence with connecting plate 23, connection are provided on press strip 3
The end of plate 23 has the guiding surface 230 cooperated with idler wheel 31, and when press strip 3 compresses valve plate 2, idler wheel 31 is along inclined-plane 230
It rolls, gradually compresses valve plate 2.
As shown in figs. 1 and 4,3 one end of press strip is connect by interlocking lever 32 with the piston rod 33 of oil cylinder (not shown), even
The both ends of lever 32 are rotatablely connected with press strip 3 and piston rod 33 respectively, when piston rod stretches, push press strip 3 to translate, to lean on
Close or remote from valve plate 2.
It is also set up in vacuum chamber there are two bracket 5, the top of bracket 5 is provided with bracket roller, convenient for substrate in delivered inside.
Utility model works principle is as follows:
As shown in Figure 1-3, valve plate 2 is in the open state, the piston rod 33 of oil cylinder is shunk, and pulls press strip 3 far from valve plate 2,
The side wall of the vertical vacuum chamber of connecting rod 4.As Figure 4-Figure 6, valve plate 2 is in close state, and the piston rod 33 of oil cylinder extends, and pushes pressure
Item 3 is close to valve plate 3, and idler wheel 31 connects the end of plate 23, and contacts with guiding surface 230, gradually compresses valve plate 2, makes
It obtains valve plate 2 and cooperation is fully sealed in material delivery port.When needing to open flap valve, then oil cylinder pulls press strip 3, and press strip 3 is separate
Valve plate 2,2 opposite direction of valve plate overturning, opens material delivery port, glass substrate can be allowed to enter vacuum chamber.
Claims (7)
1. a kind of continous way magnetic-controlled sputtering coating equipment characterized by comprising
Side wall has the vacuum chamber of material delivery port；
The flap valve of the material delivery port is sealed, there is turnover valve plate around the shaft；
The press strip being flexibly connected by several connecting rods with the side wall, when the press strip moves along its length close to or far from
The valve plate, and the valve plate is compressed when flap valve is closed.
2. continous way magnetic-controlled sputtering coating equipment as described in claim 1, which is characterized in that be provided on the press strip multiple
With the idler wheel of valve plate cooperation.
3. continous way magnetic-controlled sputtering coating equipment as described in claim 1, which is characterized in that the valve plate include plate body and
The connecting plate of several connection shafts and plate body, when flap valve is closed, the press strip contact compresses the connecting plate contact and compresses
Cooperation.
4. continous way magnetic-controlled sputtering coating equipment as claimed in claim 3, which is characterized in that be provided on the press strip multiple
With the idler wheel of valve plate cooperation, the idler wheel is arranged in a one-to-one correspondence with connecting plate.
5. continous way magnetic-controlled sputtering coating equipment as claimed in claim 4, which is characterized in that the end of the connecting plate has
With the guiding surface of idler wheel cooperation.
6. continous way magnetic-controlled sputtering coating equipment as described in claim 1, which is characterized in that including the mobile oil of driving press strip
Cylinder, the piston rod of the oil cylinder are connect by interlocking lever with press strip one end, the interlocking lever both ends respectively with piston rod and press strip
Rotation connection.
7. continous way magnetic-controlled sputtering coating equipment as described in claim 1, which is characterized in that the inside of the material delivery port
It is provided with the bracket for being used to support substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821663180.1U CN209412301U (en) | 2018-10-12 | 2018-10-12 | A kind of continous way magnetic control sputtering film plating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821663180.1U CN209412301U (en) | 2018-10-12 | 2018-10-12 | A kind of continous way magnetic control sputtering film plating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209412301U true CN209412301U (en) | 2019-09-20 |
Family
ID=67932512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821663180.1U Active CN209412301U (en) | 2018-10-12 | 2018-10-12 | A kind of continous way magnetic control sputtering film plating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209412301U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853304A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
| CN114351109A (en) * | 2021-12-31 | 2022-04-15 | 安徽立光电子材料股份有限公司 | Turnover plate isolating device for large-size glass vacuum coating |
-
2018
- 2018-10-12 CN CN201821663180.1U patent/CN209412301U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853304A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
| CN114351109A (en) * | 2021-12-31 | 2022-04-15 | 安徽立光电子材料股份有限公司 | Turnover plate isolating device for large-size glass vacuum coating |
| CN114351109B (en) * | 2021-12-31 | 2022-11-29 | 安徽立光电子材料股份有限公司 | Turnover plate isolating device for large-size glass vacuum coating |
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