CN114351109B - Turnover plate isolating device for large-size glass vacuum coating - Google Patents
Turnover plate isolating device for large-size glass vacuum coating Download PDFInfo
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- CN114351109B CN114351109B CN202111660045.8A CN202111660045A CN114351109B CN 114351109 B CN114351109 B CN 114351109B CN 202111660045 A CN202111660045 A CN 202111660045A CN 114351109 B CN114351109 B CN 114351109B
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Abstract
The invention discloses a turning plate isolating device for vacuum coating of large-size glass, which comprises turning plates and locking assemblies, wherein the turning plates and the locking assemblies are rotatably arranged on two opposite sides of a vacuum chamber opening; the turning plate has an open state and a closed state relative to the vacuum chamber port, a bearing block is fixed on one side of the turning plate back to the vacuum chamber port, and the bearing block is provided with a guide inclined plane; the locking assembly comprises a rotating shaft and a locking arm fixed on the rotating shaft, and the end part of the locking arm is pressed against the guide inclined plane when the turning plate is in a closed state to drive the turning plate to be close to the vacuum chamber port. The turnover plate of the turnover plate isolating device for vacuum coating of large-size glass can quickly and effectively seal the opening of the vacuum chamber under the action of the locking assembly, and has a simple integral structure and convenient operation.
Description
Technical Field
The invention relates to the technical field of vacuum coating equipment, in particular to a turnover plate isolating device for vacuum coating of large-size glass.
Background
The vacuum continuous coating production line generally comprises a plurality of process cavities with different functions, a substrate to be coated generally enters from one end, the coating process is completed through the whole coating production line, in order to ensure the normal operation of vacuum coating, vacuum isolation or atmosphere isolation needs to be performed between two adjacent cavities, and the turning plate isolation device with directionality is a core component for realizing the vacuum isolation or atmosphere isolation.
The existing turning plate isolating device for vacuum coating mainly comprises an air cylinder, a transmission gear, a turning plate shaft linked with the transmission gear and a turning plate fixed at one end of the turning plate shaft, particularly for large-size glass, the length of the turning plate needs to be large during glass coating because the size of the glass is large, and when a chamber opening of two adjacent cavities is closed, the air cylinder moves and acts power on the turning plate shaft through the gear, so that the turning plate is driven to be close to the chamber opening until the chamber opening is completely closed. However, the turnover plate isolating device for vacuum coating has the problems of troublesome operation, low transmission efficiency and the like, and is difficult to keep a long-term and reliable closing state, so that the vacuum isolation effect is poor, and the coating quality of the substrate is influenced.
Disclosure of Invention
The invention aims to solve the problems and provides the turnover plate isolating device for the vacuum coating of the large-size glass, which has a simple structure and is convenient to control, and particularly, the turnover plate isolating device for the vacuum coating of the large-size glass is applied to the coating of the large-size glass with a longer turnover plate length between two adjacent process chambers, so that the long-term sealing of the chamber opening can be realized.
The turnover plate isolating device for vacuum coating of the large-size glass comprises turnover plates and locking assemblies, wherein the turnover plates and the locking assemblies are rotatably arranged on two opposite sides of a vacuum chamber opening; the turning plate has an open state and a closed state relative to the vacuum chamber port, a bearing block is fixed on one side of the turning plate back to the vacuum chamber port, and the bearing block is provided with a guide inclined plane; the locking assembly comprises a rotating shaft and a locking arm fixed on the rotating shaft, and the end part of the locking arm is pressed against the guide inclined plane when the turning plate is in a closed state to drive the turning plate to be close to the vacuum chamber port.
Several alternatives are provided below, but not as an additional limitation to the above general solution, but merely as a further addition or preference, each alternative being combinable individually for the above general solution or among several alternatives without technical or logical contradictions.
Optionally, one end of the locking arm is a connecting end fixed to the rotating shaft, the other end of the locking arm is a working end matched with the guide inclined plane, and the working end is provided with an arc-shaped peripheral surface.
Optionally, the working end is provided with a roller matched with the guide slope.
Optionally, the connecting end is provided with a shaft hole for accommodating the rotating shaft, a gap belt is arranged on the periphery of the shaft hole, clamping parts of the rotating shaft are formed on two sides of the gap belt and are matched with each other, and an adjusting screw rod is arranged between the two clamping parts.
Optionally, the gap strip is positioned away from the working end.
Optionally, the turning plate and the axis of the rotating shaft of the locking arm are parallel to each other and distributed on two lateral sides of the vacuum chamber opening, the locking arm is arranged at intervals along the rotating shaft, and the number and the positions of the bearing blocks are correspondingly matched.
Optionally, the locking arm has an operating position matched with the guiding inclined plane and an initial position separated from the guiding inclined plane, and the locking arm is always located on one side close to the vacuum chamber port in the switching process between the operating position and the initial position.
Optionally, the initial position is located laterally of the working position along the vacuum chamber port.
Optionally, the vacuum chamber is sequentially fixed with a plurality of supporting seats from top to bottom at a position adjacent to the vacuum chamber port, and the rotating shaft sequentially penetrates through each supporting seat.
Optionally, one end of the rotating shaft is connected with a power device.
Compared with the prior art, the turning plate isolating device for vacuum coating of large-size glass provided by the invention can realize effective locking of the turning plate through the arranged locking assembly, realize sealing of a vacuum chamber port and achieve a good vacuum isolating effect, and is simple in structure and easy to control.
Drawings
FIG. 1 is a schematic structural view of a turning plate isolation device for vacuum coating of large-size glass;
FIG. 2 is a partial block diagram of FIG. 1;
FIG. 3 is an enlarged view of a portion of FIG. 2;
FIG. 4 is a schematic view of the operation of the flap isolating device for vacuum coating of large-sized glass.
The reference numerals in the figures are illustrated as follows:
100. a housing; 110. a vacuum chamber port;
200. turning over a plate; 210. a bearing block; 211. a guide slope; 220. a rotating shaft; 230. a power plant;
300. a locking assembly; 310. a rotating shaft; 320. a locking arm; 321. a connecting end; 3211. a shaft hole; 3212. a gap band; 3213. adjusting the screw rod; 322. a working end; 3221. a roller; 330. a power plant; 400. and (4) supporting the base.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, the flap isolating device for vacuum coating of large-sized glass generally comprises a housing 100, a vacuum chamber port 110 is formed on a side wall of the housing 100, and at least one side of the vacuum chamber port 110 is communicated with a process chamber. In order to realize the vacuum isolation of the process chamber, the turning plate isolation device for the large-size glass vacuum coating comprises a turning plate 200 and a locking assembly 300 which are rotatably arranged at two opposite sides of a vacuum chamber port 110; wherein, a bearing block 210 is fixed on one side of the turning plate 200 back to the vacuum chamber port 110, and the bearing block 210 is provided with a guide inclined plane 211; the locking assembly 300 comprises a rotating shaft 310 and a locking arm 320 fixed on the rotating shaft, the flap 200 has an open state and a closed state relative to the vacuum chamber port 110, when the flap 200 is in the closed state, an end of the locking arm 320 presses against the guide slope 211 to drive the flap 200 to be close to the vacuum chamber port 110, as shown in fig. 2, after a partial structure of the housing 100 is disassembled, the matching condition of the locking assembly and the flap 200 can be observed, and particularly, refer to fig. 3. When the locking arm 320 is released from pressing the turning plate 200, the turning plate 200 can enter the open state, i.e. the vacuum chamber port 110 is opened.
The turning plate 200 can be rotatably mounted and connected with a power device 230 through a rotating shaft 220, the power device can adopt a servo motor, compared with the traditional cylinder driving and gear transmission, the method is more labor-saving, and the rotation of the turning plate 200 can be better controlled through the servo motor.
In the locking assembly, one end of the rotating shaft 310 is fixed to the locking arm 320, and the other end is usually used for connecting a power device 330 for driving the rotating shaft 310 to rotate, and the power device 330 can be a servo motor to improve the rotating efficiency of the locking arm 320. The end of the locking arm 320 fixed to the rotating shaft is a connecting end 321, and the other end is a working end 322, and the working end 322 has an arc-shaped outer peripheral surface to facilitate the engagement of the guiding inclined surface 211 of the turning plate 200.
In order to fix the rotating shaft and the connecting end 321, in an embodiment, the connecting end 321 is provided with a shaft hole 3211 for accommodating the rotating shaft, a gap tape 3212 is formed at the periphery of the shaft hole 3211, clamping portions of the stirrup rotating shaft which are mutually matched are formed at two sides of the gap tape 3212, and an adjusting screw 3213 is arranged between the two clamping portions and used for adjusting the size of the gap tape 3212, so that the stirrup rotating shaft is fixed. The position of the gap 3212 facing away from the working end 322 facilitates installation of the locking arm 320.
In order to improve the matching effect of the working end 322 and the guiding inclined plane 211, the working end 322 is provided with a roller 3221 matched with the guiding inclined plane 211, and the roller 3221 can reduce the sliding friction force on the guiding inclined plane 211.
Referring to fig. 4, during the engagement of the locking arm 320 with the guide slope 211, the locking arm 320 has an operating position (fig. 4 f) where the guide slope 211 is engaged and an initial position (fig. 4 a) where the locking arm 320 is separated from the guide slope 211, and the locking arm 320 is always located at a side close to the vacuum chamber port 110 during the switching between the operating position and the initial position. Wherein the initial position is outside the working position, transversely to the vacuum chamber port 110.
Referring to fig. 4a to c, the turning plate 200 is continuously close to the vacuum chamber port 110, and when the turning plate 200 reaches the closed state, the power device drives the locking arm 320 to move from the initial position to the working position, so as to compress the turning plate 200, and the turning plate 200 is more tightly attached to the vacuum chamber port 110, as shown in fig. 4d to f. On the contrary, when the vacuum chamber port 110 is to be opened, the pressing of the locking arm 320 against the flap 200 is firstly released, i.e. the locking arm 320 is driven by the power device to return to the initial position from the working position, and then the flap 200 is driven to rotate to be away from the vacuum chamber port 110.
Generally, the axes of the rotating shafts of the turning plate 200 and the locking arm 320 are parallel to each other and are distributed at two lateral sides of the vacuum chamber port 110, a plurality of locking arms 320 are arranged at intervals along the rotating shaft, and accordingly, the number and the positions of the bearing blocks 210 on the turning plate 200 are correspondingly matched and can be matched with the locking arms 320 to realize the locking of the turning plate 200.
In order to enable the locking arms 320 to work synchronously, a plurality of supporting seats 400 are sequentially fixed on the vacuum chamber from top to bottom at the position adjacent to the vacuum chamber opening 110, and the rotating shaft sequentially penetrates through each supporting seat 400; the locking arms 320 are arranged between two adjacent supporting seats 400, and under the action of a power device, one rotating shaft can drive all the locking arms 320 to rotate simultaneously, so that each locking arm 320 can be tightly matched with the turning plate 200, the purpose of locking the turning plate 200 is achieved, and the vacuum degree of each process chamber is effectively isolated.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features. When technical features in different embodiments are represented in the same drawing, it can be seen that the drawing also discloses a combination of the embodiments concerned.
The above examples only show several embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (8)
1. A turning plate isolating device for vacuum coating of large-size glass is characterized by comprising a turning plate (200) and a locking assembly (300), wherein the turning plate (200) and the locking assembly are rotatably arranged on two opposite sides of a vacuum chamber opening (110);
the turning plate (200) has an open state and a closed state relative to the vacuum chamber port (110), a force bearing block (210) is fixed on one side of the turning plate (200) opposite to the vacuum chamber port (110), and the force bearing block (210) is provided with a guide inclined plane (211);
the locking assembly (300) comprises a rotating shaft (310) and a locking arm (320) fixed on the rotating shaft (310), one end of the locking arm (320) is a connecting end (321) fixed on the rotating shaft (310), the other end of the locking arm is a working end (322) matched with the guide inclined plane (211), the working end (322) is provided with an arc-shaped peripheral surface, and the working end (322) is provided with a roller (3221) matched with the guide inclined plane (211);
the axes of the turning plate (200) and the rotating shaft (310) of the locking arm (320) are parallel to each other;
when the flap (200) is in a closed state, the end of the locking arm (320) presses against the guide inclined surface (211), and the flap (200) is driven to be close to the vacuum chamber port (110).
2. The turning plate isolating device for the vacuum coating of large-size glass according to claim 1, wherein the connecting end (321) is provided with a shaft hole for accommodating the rotating shaft (310), the periphery of the shaft hole is provided with a gap belt (3212), two sides of the gap belt (3212) form clamping parts for mutually matching hooping the rotating shaft (310), and an adjusting screw rod (3213) is arranged between the two clamping parts.
3. The flap isolating device for vacuum coating of large-size glass according to claim 2, wherein the position of the gap belt (3212) is opposite to the working end (322).
4. The flap isolating device for vacuum coating of large-size glass according to claim 1, wherein the axis of the turning flap (200) is parallel to the axis of the rotating shaft (310) of the locking arm (320) and the flap isolating device is distributed on two lateral sides of the vacuum chamber port (110), the locking arm (320) is arranged in a plurality at intervals along the rotating shaft (310), and the number and the position of the force bearing blocks (210) are correspondingly matched.
5. The flap isolating device for vacuum coating of large-size glass according to claim 1, wherein the locking arm (320) has an operating position cooperating with the guiding inclined surface (211) and an initial position separated from the guiding inclined surface (211), and the locking arm (320) is always located at a side close to the vacuum chamber port (110) during switching between the operating position and the initial position.
6. The flap isolating device for vacuum coating of large-size glass according to claim 5, wherein the initial position is located outside the working position in a direction transverse to the vacuum chamber opening (110).
7. The turning plate isolation device for vacuum coating of large-size glass according to claim 1, wherein a plurality of supporting seats (400) are sequentially fixed on the vacuum chamber from top to bottom at the position adjacent to the vacuum chamber opening (110), and the rotating shaft (310) sequentially penetrates through each supporting seat (400).
8. The turning plate isolation device for vacuum coating of large-size glass according to claim 1, wherein a power device (330) is connected to one end of the rotating shaft (310).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660045.8A CN114351109B (en) | 2021-12-31 | 2021-12-31 | Turnover plate isolating device for large-size glass vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111660045.8A CN114351109B (en) | 2021-12-31 | 2021-12-31 | Turnover plate isolating device for large-size glass vacuum coating |
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| Publication Number | Publication Date |
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| CN114351109A CN114351109A (en) | 2022-04-15 |
| CN114351109B true CN114351109B (en) | 2022-11-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111660045.8A Active CN114351109B (en) | 2021-12-31 | 2021-12-31 | Turnover plate isolating device for large-size glass vacuum coating |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203582966U (en) * | 2013-09-06 | 2014-05-07 | 肇庆市科润真空设备有限公司 | Vacuum gate valve for lamp lens continuous coating device |
| CN109141007A (en) * | 2018-08-15 | 2019-01-04 | 安徽谷王烘干机械有限公司 | A kind of fire door locking mechanism and shower furnace |
| CN209412301U (en) * | 2018-10-12 | 2019-09-20 | 浙江上方电子装备有限公司 | A kind of continous way magnetic control sputtering film plating device |
| CN210600204U (en) * | 2019-10-10 | 2020-05-22 | 川北真空科技(北京)有限公司 | Flap valve |
-
2021
- 2021-12-31 CN CN202111660045.8A patent/CN114351109B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203582966U (en) * | 2013-09-06 | 2014-05-07 | 肇庆市科润真空设备有限公司 | Vacuum gate valve for lamp lens continuous coating device |
| CN109141007A (en) * | 2018-08-15 | 2019-01-04 | 安徽谷王烘干机械有限公司 | A kind of fire door locking mechanism and shower furnace |
| CN209412301U (en) * | 2018-10-12 | 2019-09-20 | 浙江上方电子装备有限公司 | A kind of continous way magnetic control sputtering film plating device |
| CN210600204U (en) * | 2019-10-10 | 2020-05-22 | 川北真空科技(北京)有限公司 | Flap valve |
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| CN114351109A (en) | 2022-04-15 |
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