CN102563109A - Vacuum gate valve for vacuum system - Google Patents
Vacuum gate valve for vacuum system Download PDFInfo
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- CN102563109A CN102563109A CN2011104610582A CN201110461058A CN102563109A CN 102563109 A CN102563109 A CN 102563109A CN 2011104610582 A CN2011104610582 A CN 2011104610582A CN 201110461058 A CN201110461058 A CN 201110461058A CN 102563109 A CN102563109 A CN 102563109A
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- valve body
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Abstract
The invention discloses a vacuum gate valve for a vacuum system, which comprises a driving element, a valve body, a valve spool and a lower cleaning cover plate. The valve body is of a hollow rectangular structure, the left side wall and the right side wall of the valve body are fixedly connected with vacuum chambers positioned on two sides of the valve body respectively, through holes are arranged on the left side wall and the right side wall of the valve body respectively and communicated with workpiece through holes in the vacuum chambers positioned on the two sides of the valve body, the valve spool is positioned inside the valve body, the tail end of the driving element penetrates through the top of the valve body and is fixedly connected with the top of the valve spool, and the lower cleaning cover plate is arranged at the bottom of the valve body. The vacuum gate valve effectively overcomes the defect of large occupied space of a traditional vacuum gate valve, and is fine in sealing effect. The valve spool is stable in structure and not easy to deform, and the vacuum gate valve is arranged between the two adjacent vacuum chambers, namely the vacuum gate valve is arranged outside the vacuum chambers, so that the vacuum gate valve is convenient in processing and daily maintenance.
Description
Technical field
The present invention relates to glass evacuated coating technique field, the vacuum push-pull valve that particularly a kind of vacuum system is used.
Background technique
The vacuum equipment that is used for coating film on glass technology; The vacuum push-pull valve is a requisite constituent elements between any two adjacent vacuum chambers; Its effect is: when needs are safeguarded single vacuum chamber or in single vacuum chamber more during conversion materials; Adjacent two vacuum chambers are isolated, the vacuum atmosphere in the vacuum chamber is not destroyed.Vacuum push-pull valve commonly used at present is the slat belt structure, and promptly the workpiece through-hole place in vacuum chamber is provided with the vacuum push-pull valve, and this vacuum push-pull valve is mainly a baffle plate; End face in baffle plate top and the vacuum chamber is hinged; When the vacuum push-pull valve cuts out, to turn under the baffle plate, its side is blocked workpiece through-hole and is realized sealing; When the vacuum push-pull valve was opened, baffle plate was closely attached on the end face in the vacuum chamber.Yet the vacuum push-pull valve of this structure is because the baffle plate employing is convertible, and shared space is bigger, because baffle plate blocks workpiece through-hole by deadweight, the baffle plate bottom did not have corresponding fixed mechanism when the vacuum push-pull valve cut out, and its sealing effect is bad; In addition, the vacuum push-pull valve of this structure must be located at internal vacuum chamber, and its difficulty of processing is big, and baffle plate is yielding, and daily maintenance is also quite difficult.
For this reason; Application number is that 200610169213.2 invention application discloses a kind of pendulum valve and slide gate vacuum, and the vacuum valve of this structure has overcome the defective of traditional vacuum push-pull valve poor air-tightness, but its complex structure; Required precision is higher between each constituent elements, so its cost is also higher.
Summary of the invention
The objective of the invention is to overcome the deficiency of existing technology, to the less vacuum chamber of workpiece through-hole bore, provide a kind of good airproof performance, the vacuum push-pull valve used of take up space little, processing and all more convenient vacuum system of regular maintenance.
Technological scheme of the present invention is: the vacuum push-pull valve that a kind of vacuum system is used; Comprise driving element, valve body, spool and clean cover plate down; Valve body is the rectangular structure of hollow, and the left and right sides wall of valve body is fixedly connected with the vacuum chamber that is positioned at its both sides respectively, has valve hole on the left and right sides wall of valve body; Valve hole communicates with the workpiece through-hole of the vacuum chamber that is positioned at the valve body both sides; Spool is located at valve inner, and the driving element end passes the valve body top and is connected with the spool roof anchorage, and following cleaning cover plate is located at the valve body bottom.
Said driving element and connecting part, valve body top are provided with Sealing, can effectively improve the sealing of driving element reliability of operation and valve inner.
According to actual needs, the structural type of spool and valve body central space mainly contains 2 kinds:
(1) said spool is the quadrangular structure; The radial cross section of spool is first trapezoidal, and the side that spool is positioned at the first trapezoidal long base is first side, and the side that spool is positioned at the first trapezoidal short base is second side; The bi-side that spool is positioned on the first trapezoidal both sides waist are respectively the 3rd side and the 4th side; First side upwards and with driving element is terminal is fixedly connected, and second side is downward, and the 3rd side and the 4th side lay respectively at the left and right sides;
The radial cross section of valve body central space is the Hexagon of the rectangular and the second trapezoidal composition, and rectangular is positioned at top, the second trapezoidal bottom that is positioned at, and second trapezoidal each limit size and first trapezoidal each limit are measure-alike;
When spool fell to the bottom, the 3rd side of spool and the 4th side were closely attached on the inner side surface of valve body respectively;
The bottom of valve body has through hole at the bottom of the valve, the equal in length on the width of through hole and the first trapezoidal short base at the bottom of the valve;
Under clean cover plate and be located at through hole below at the bottom of the valve.
Also have on the 3rd side of said spool and the 4th side seal groove that seal ring is used is set, between spool and valve body, set up seal ring, can improve its sealing effect better.
(2) said spool is the tri-prism structure, and the radial cross section of tri-prism is a del, and the spool end face is fixedly connected with driving element is terminal;
When spool fell to the bottom, the bi-side of spool were closely attached on the inner side surface of valve body respectively;
The bottom of valve body has through hole at the bottom of the valve, and following cleaning cover plate is located at through hole below at the bottom of the valve.
Also have on the bi-side of said spool the seal groove that seal ring is used is set, between spool and valve body, set up seal ring, can improve its sealing effect better.
Said driving element is driving element, motor or hydraulic transmission part.
When the vacuum push-pull valve that this vacuum system is used used, its principle was: when needs are closed the vacuum push-pull valve, and the driving element operation; Its terminal spool that drives moves downwards in the valve body central space; When spool fell to the bottom, the left and right sides face of spool was closely attached on the inner side surface of valve body, and separate the valve hole on the wall of the valve body left and right sides this moment; Thereby block the workpiece through-hole on the vacuum chamber of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, driving element operation, it is terminal to drive spool upwards motion in the valve body central space, and spool rises to its end and is higher than the residing position of valve hole and gets final product.
The present invention has following beneficial effect with respect to existing technology:
Vacuum push-pull valve that this vacuum system is used adopts driving element to drive spool and moves up and down and realize that it opens and closes, and can effectively overcome the traditional vacuum push-pull valve big defective that takes up room.Simultaneously, after this vacuum push-pull valve cut out, because the spool bottom is taper or near the structure of taper, so backwardness can be closely attached on the madial wall of valve body under the spool, its good sealing effect, valve core structure are also comparatively firm, and be not yielding.
The vacuum push-pull valve that this vacuum system is used is located between adjacent two vacuum chambers, promptly is located at the vacuum chamber outside, and its processing and regular maintenance are all comparatively convenient.
In addition, the vacuum push-pull valve that this vacuum system is used also has the following advantages: simple in structure, manufacturing is easy, reliability greatly improves than Flap valve; Simultaneously, sealing effect is better, and is also more durable, and the service intervals time is long.
Description of drawings
Fig. 1 is the structural representation of this vacuum push-pull valve.
Fig. 2 is that the A of Fig. 1 is to view.
Fig. 3 is that the B of Fig. 1 is to view.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is done further detailed description, but mode of execution of the present invention is not limited thereto.
Embodiment 1
The vacuum push-pull valve that a kind of vacuum system of present embodiment is used; Its structure comprises cylinder 1, valve body 3, spool 4 and cleans cover plate 5 down that valve body 3 is the rectangular structure of hollow shown in Fig. 1～3; The left and right sides wall of valve body is fixedly connected with the vacuum chamber that is positioned at its both sides respectively; Have valve hole 6 on the left and right sides wall of valve body, valve hole 6 communicates with the workpiece through-hole of the vacuum chamber that is positioned at the valve body both sides, and spool 6 is located at valve body 3 inside; Cylinder 1 end passes valve body 3 tops and is connected with spool 4 roof anchorage, and following cleaning cover plate 5 is located at valve body 3 bottoms.
Cylinder 1 is provided with Sealing 2 with connecting part, valve body 3 top, can effectively improve the sealing of cylinder reliability of operation and valve inner.
As shown in Figure 1, spool 4 is the quadrangular structure, and the radial cross section of spool is first trapezoidal; The side that spool is positioned at the first trapezoidal long base is first side 7; The side that spool is positioned at the first trapezoidal short base is second side 8, spool be positioned at bi-side on the first trapezoidal both sides waist be respectively the 3rd side 9 and 10, the first sides 7, the 4th side upwards and with cylinder 1 terminal the fixed connection; Second side 8 is downward, and the 3rd side 9 and the 4th side 10 lay respectively at the left and right sides;
The radial cross section of valve body 3 central space is the Hexagon of the rectangular and the second trapezoidal composition, and rectangular is positioned at top, the second trapezoidal bottom that is positioned at, and second trapezoidal each limit size and first trapezoidal each limit are measure-alike;
When spool 4 fell to the bottom, the 3rd side 9 of spool and the 4th side 10 were closely attached on the inner side surface of valve body 3 respectively;
The bottom of valve body 4 has through hole 11 at the bottom of the valve, the equal in length on the width of through hole 11 and the first trapezoidal short base at the bottom of the valve;
Under clean cover plate 5 and be located at through hole 11 belows at the bottom of the valve.
Also have on the 3rd side 9 of spool and the 4th side 10 seal groove that seal ring is used is set, between spool and valve body, set up seal ring, can improve its sealing effect better.
When the vacuum push-pull valve that this vacuum system is used used, its principle was: when needs are closed the vacuum push-pull valve, and cylinder 1 operation; Its terminal spool 4 that drives moves downwards in valve body 3 central space; When spool 4 fell to the bottom, the left and right sides face of spool 4 was closely attached on the inner side surface of valve body 3, and separate the valve hole 6 on valve body 3 left and right sides walls this moment; Thereby block the workpiece through-hole on the vacuum chamber of the valve body left and right sides, reach the purpose of sealing; When needs are opened the vacuum valve plate, cylinder 1 operation, it is terminal to drive spool 4 upwards motion in valve body 3 central space, and spool 4 rises to its end and is higher than valve hole 6 residing positions and gets final product.
The vacuum push-pull valve that a kind of vacuum system of present embodiment is used is compared with embodiment 1, and its difference is that spool is the tri-prism structure, and the radial cross section of tri-prism is a del, and the spool end face is fixedly connected with cylinder is terminal;
When spool fell to the bottom, the bi-side of spool were closely attached on the inner side surface of valve body respectively;
The bottom of valve body has through hole at the bottom of the valve, and following cleaning cover plate is located at through hole below at the bottom of the valve.
Also have on the bi-side of spool the seal groove that seal ring is used is set, between spool and valve body, set up seal ring, can improve its sealing effect better.
As stated, can realize preferably that just the present invention, the foregoing description are merely preferred embodiment of the present invention, be not to be used for limiting practical range of the present invention; Be that all equalizations of doing according to content of the present invention change and modification, all contained by claim of the present invention scope required for protection.
Claims (7)
1. the vacuum push-pull valve used of vacuum system; It is characterized in that comprise driving element, valve body, spool and clean cover plate down, valve body is the rectangular structure of hollow; The left and right sides wall of valve body is fixedly connected with the vacuum chamber that is positioned at its both sides respectively; Have valve hole on the left and right sides wall of valve body, valve hole communicates with the workpiece through-hole of the vacuum chamber that is positioned at the valve body both sides, and spool is located at valve inner; The driving element end passes the valve body top and is connected with the spool roof anchorage, and following cleaning cover plate is located at the valve body bottom.
2. the vacuum push-pull valve of using according to the said vacuum system of claim 1 is characterized in that, said driving element and connecting part, valve body top are provided with Sealing.
3. the vacuum push-pull valve of using according to the said vacuum system of claim 1; It is characterized in that said spool is the quadrangular structure, the radial cross section of spool is first trapezoidal; The side that spool is positioned at the first trapezoidal long base is first side; The side that spool is positioned at the first trapezoidal short base is second side, and the bi-side that spool is positioned on the first trapezoidal both sides waist are respectively the 3rd side and the 4th side, and first side upwards and with driving element is terminal is fixedly connected; Second side is downward, and the 3rd side and the 4th side lay respectively at the left and right sides;
The radial cross section of valve body central space is the Hexagon of the rectangular and the second trapezoidal composition, and rectangular is positioned at top, the second trapezoidal bottom that is positioned at, and second trapezoidal each limit size and first trapezoidal each limit are measure-alike;
When spool fell to the bottom, the 3rd side of spool and the 4th side were closely attached on the inner side surface of valve body respectively;
The bottom of valve body has through hole at the bottom of the valve, the equal in length on the width of through hole and the first trapezoidal short base at the bottom of the valve;
Under clean cover plate and be located at through hole below at the bottom of the valve.
4. the vacuum push-pull valve of using according to the said vacuum system of claim 3 is characterized in that, also has on the 3rd side of said spool and the 4th side seal groove that seal ring is used is set.
5. the vacuum push-pull valve of using according to the said vacuum system of claim 1 is characterized in that, said spool is the tri-prism structure, and the radial cross section of tri-prism is a del, and the spool end face is fixedly connected with driving element is terminal;
When spool fell to the bottom, the bi-side of spool were closely attached on the inner side surface of valve body respectively;
The bottom of valve body has through hole at the bottom of the valve, and following cleaning cover plate is located at through hole below at the bottom of the valve.
6. the vacuum push-pull valve of using according to the said vacuum system of claim 1 is characterized in that, also has on the bi-side of said spool the seal groove that seal ring is used is set.
7. the vacuum push-pull valve of using according to the said vacuum system of claim 1 is characterized in that, said driving element is cylinder, motor or hydraulic transmission part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104610582A CN102563109A (en) | 2011-12-31 | 2011-12-31 | Vacuum gate valve for vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104610582A CN102563109A (en) | 2011-12-31 | 2011-12-31 | Vacuum gate valve for vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102563109A true CN102563109A (en) | 2012-07-11 |
Family
ID=46409326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104610582A Pending CN102563109A (en) | 2011-12-31 | 2011-12-31 | Vacuum gate valve for vacuum system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102563109A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
| CN103451614A (en) * | 2013-09-06 | 2013-12-18 | 肇庆市科润真空设备有限公司 | Continuous coating device and method for lamp lens |
| CN110500425A (en) * | 2019-07-26 | 2019-11-26 | 上海卫星装备研究所 | A kind of multilayer high vacuum plate valve system and its application method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4921213A (en) * | 1988-09-14 | 1990-05-01 | Vat Holding Ag | Valve slide |
| JPH0743068B2 (en) * | 1985-03-04 | 1995-05-15 | 東京瓦斯株式会社 | Pipe fitting with shut-off valve |
| JPH08145201A (en) * | 1994-11-16 | 1996-06-07 | Kubota Corp | Gate valve |
| CN2338546Y (en) * | 1998-05-31 | 1999-09-15 | 郭文明 | No-water high temp.-resistant valve |
| US6302372B1 (en) * | 1998-12-11 | 2001-10-16 | Beybold Systems Gmbh | Gate valve |
| JP2001289333A (en) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | Vacuum valve for separating two vacuum chambers |
| CN2814042Y (en) * | 2005-04-28 | 2006-09-06 | 日扬科技股份有限公司 | Vacuum sluice valve |
| CN202520975U (en) * | 2011-12-31 | 2012-11-07 | 肇庆市腾胜真空技术工程有限公司 | Vacuum flashboard valve for vacuum system |
-
2011
- 2011-12-31 CN CN2011104610582A patent/CN102563109A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0743068B2 (en) * | 1985-03-04 | 1995-05-15 | 東京瓦斯株式会社 | Pipe fitting with shut-off valve |
| US4921213A (en) * | 1988-09-14 | 1990-05-01 | Vat Holding Ag | Valve slide |
| JPH08145201A (en) * | 1994-11-16 | 1996-06-07 | Kubota Corp | Gate valve |
| CN2338546Y (en) * | 1998-05-31 | 1999-09-15 | 郭文明 | No-water high temp.-resistant valve |
| US6302372B1 (en) * | 1998-12-11 | 2001-10-16 | Beybold Systems Gmbh | Gate valve |
| JP2001289333A (en) * | 2000-03-23 | 2001-10-19 | Vat Holding Ag | Vacuum valve for separating two vacuum chambers |
| CN2814042Y (en) * | 2005-04-28 | 2006-09-06 | 日扬科技股份有限公司 | Vacuum sluice valve |
| CN202520975U (en) * | 2011-12-31 | 2012-11-07 | 肇庆市腾胜真空技术工程有限公司 | Vacuum flashboard valve for vacuum system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103322226A (en) * | 2013-07-05 | 2013-09-25 | 费海鸿 | Insert pneumatic vacuum transfer valve |
| CN103451614A (en) * | 2013-09-06 | 2013-12-18 | 肇庆市科润真空设备有限公司 | Continuous coating device and method for lamp lens |
| CN103451614B (en) * | 2013-09-06 | 2015-08-19 | 肇庆市科润真空设备有限公司 | Lamp lens continuous coating apparatus and method |
| CN110500425A (en) * | 2019-07-26 | 2019-11-26 | 上海卫星装备研究所 | A kind of multilayer high vacuum plate valve system and its application method |
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Application publication date: 20120711 |