JP2010505075A - Gate valve - Google Patents

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JP2010505075A
JP2010505075A JP2009530259A JP2009530259A JP2010505075A JP 2010505075 A JP2010505075 A JP 2010505075A JP 2009530259 A JP2009530259 A JP 2009530259A JP 2009530259 A JP2009530259 A JP 2009530259A JP 2010505075 A JP2010505075 A JP 2010505075A
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gate valve
tube
opening
valve according
sealing plate
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JP5292296B2 (en
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キム，キョン−ス
ロ，ゼ−ミン
パク，チョン−フン
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エイティーエス エンジニアリング カンパニー リミテッド
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Priority claimed from PCT/KR2007/004573 external-priority patent/WO2008038940A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

本発明の構成は、真空チャンバに備えられ基板の出入りを制御できるゲートバルブにおいて、真空チャンバの開閉口の周辺に沿って備えられガイドレールが開閉口の両側に垂直に設けられたブラケットと、前記ガイドレールに沿って昇降する固定板、および前記固定板とシーリング板を互いに連結する少なくとも一つの軸ピン、および前記固定板に内設され、前記軸ピンの間に位置し膨張力によってシーリング板が開閉口を開閉するチューブが備えられた加圧部材と、前記ブラケットの一側に設けられ前記加圧部材を昇降させるシリンダと、前記加圧部材の両端部を互いに連結し、前記シリンダによって加圧部材が昇降する時に加圧部材の両端部が互いに同期動作できるようにするガイド部材と、を含んでなる。
本発明によると、気密性を均一に維持させると共に、シリンダに対する依存性を最小化し圧力を均一に分散させることができる。
【選択図】図３The structure of the present invention is a gate valve that is provided in a vacuum chamber and can control the entrance and exit of a substrate, and is provided along the periphery of the opening and closing port of the vacuum chamber and the guide rail is provided vertically on both sides of the opening and closing port A fixing plate that moves up and down along the guide rail, at least one shaft pin that connects the fixing plate and the sealing plate to each other, and a fixing plate that is provided in the fixing plate and is positioned between the shaft pins by an expansion force. A pressure member provided with a tube that opens and closes an opening / closing port, a cylinder provided on one side of the bracket for raising and lowering the pressure member, and both ends of the pressure member are connected to each other and pressurized by the cylinder And a guide member that allows both end portions of the pressure member to operate in synchronization with each other when the member moves up and down.
According to the present invention, the airtightness can be maintained uniformly, and the dependency on the cylinder can be minimized and the pressure can be uniformly distributed.
[Selection] Figure 3

Description

本発明は、ゲートバルブ(Ｇａｔｅ ｖａｌｖｅ)に関し、特に気密性を均一に維持させると共に、シリンダの依存性を最小化し圧力を均一に分散させることができるゲートバルブに関する。 The present invention relates to a gate valve, and more particularly, to a gate valve that can maintain airtightness uniformly and can evenly distribute pressure by minimizing cylinder dependency.

通常、半導体ウェハまたは液晶基板を処理するための装置において、半導体ウェハまたは液晶基板は、真空チャンバに備えられる基板移送通路を通じて種々の処理室から挿入または搬出されるが、この基板移送通路にはこの通路を開閉するゲートバルブが備えられる。 Usually, in an apparatus for processing a semiconductor wafer or a liquid crystal substrate, the semiconductor wafer or the liquid crystal substrate is inserted or unloaded from various processing chambers through a substrate transfer passage provided in a vacuum chamber. A gate valve for opening and closing the passage is provided.

このようなゲートバルブは、代表的な従来技術としては、図１に示すように、真空チャンバ１の一側に設けられた開閉口２上に前記開閉口と対応する大きさを有するシーリング板３３を設け、前記シーリング板３３を水平および垂直移動させる垂直シリンダ３１と水平シリンダ３５を複数個備え、前記垂直シリンダ３１は垂直ロード３２とブラケット３４により水平シリンダ３５と連結されており、前記水平シリンダ３５はシーリング板３３と連結されており、シーリング板３３を水平および垂直移動させて真空チャンバを開閉する。   As a typical prior art, such a gate valve has a sealing plate 33 having a size corresponding to the opening / closing port on an opening / closing port 2 provided on one side of the vacuum chamber 1, as shown in FIG. A plurality of vertical cylinders 31 and a plurality of horizontal cylinders 35 for moving the sealing plate 33 horizontally and vertically. The vertical cylinder 31 is connected to the horizontal cylinder 35 by a vertical load 32 and a bracket 34. Is connected to the sealing plate 33 and moves the sealing plate 33 horizontally and vertically to open and close the vacuum chamber.

しかしながら、このような従来技術は、真空チャンバの内部から発生する真空圧により水平シリンダ３５に強い圧力が加えられるが、この時加えられる圧力がそれぞれの水平シリンダに対して均一に対応しなければならないものの、それぞれの水平シリンダによって圧力差が発生するため、一部分において圧力の不均衡によって真空が破壊するという問題点があった。   However, in such a conventional technique, a strong pressure is applied to the horizontal cylinder 35 by the vacuum pressure generated from the inside of the vacuum chamber, and the pressure applied at this time must uniformly correspond to each horizontal cylinder. However, since a pressure difference is generated between the horizontal cylinders, there is a problem in that the vacuum breaks due to pressure imbalance in part.

また、前記ゲートバルブは、シーリング板を水平および垂直移動させることによって構造が複雑となり、シリンダを二重に制御しなければならないという問題点があった。   In addition, the gate valve has a problem that the structure is complicated by moving the sealing plate horizontally and vertically, and the cylinder must be controlled twice.

そして、図２に示すゲートバルブ４０は、シーリング板４５がロード４２に直接連結し、前記ロード４２と連結するカム軸４３はシリンダハウジング４６に設けられたカム４４に沿って移動する。これは、前記ロード４２の垂直移動をカム軸４３によって、カム４４の傾斜面に沿って移動させながら、シーリング板４５を傾斜させて移動させ、開閉口を遮蔽することができる。   In the gate valve 40 shown in FIG. 2, the sealing plate 45 is directly connected to the load 42, and the cam shaft 43 connected to the load 42 moves along the cam 44 provided in the cylinder housing 46. This is because the sealing plate 45 is inclined and moved while the vertical movement of the load 42 is moved along the inclined surface of the cam 44 by the cam shaft 43, and the opening / closing port can be shielded.

しかしながら、この場合は、シリンダがシーリング板を支持しているため、前記シリンダは真空圧と対応する力を持っていなければならないことから、相対的にシリンダの大きさが大きくなるという問題点があり、また、前記ロードの垂直移動をカムによって傾斜移動に切り替えることにより、シリンダの加圧力の分散によってシリンダがさらに大きくなるという問題点があった。   However, in this case, since the cylinder supports the sealing plate, the cylinder must have a force corresponding to the vacuum pressure, so there is a problem that the size of the cylinder is relatively large. In addition, there is a problem that the cylinder becomes larger due to the dispersion of the applied pressure of the cylinder by switching the vertical movement of the load to the inclined movement by the cam.

そして、継続的な反復運動から発生する誤差によって気密性が低下するという問題点があった。   And there existed a problem that airtightness fell by the error which arises from a continuous repetitive motion.

本発明は、前記の問題点を解決するためになされたものであって、本発明の目的は、気密性を均一に維持させると共に、シリンダの依存性を最小化し、圧力を均一に分散させることができるゲートバルブを提供することにある。 The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to maintain the airtightness uniformly, minimize the dependency of the cylinder, and evenly distribute the pressure. It is to provide a gate valve that can perform the above.

本発明は、上述の目的を達成するために次のような構成を有する。 In order to achieve the above-mentioned object, the present invention has the following configuration.

本発明のゲートバルブは、真空チャンバに備えられ基板の出入りを制御できるゲートバルブにおいて、真空チャンバの開閉口の周辺に沿って備えられガイドレールが開閉口の両側に垂直に設けられたブラケットと、前記ガイドレールに沿って昇降する固定板、および前記固定板とシーリング板を互いに連結する少なくとも一つの軸ピン、および前記固定板に内設され、前記軸ピンの間に位置し膨張力によってシーリング板が開閉口を開閉するチューブが備えられた加圧部材と、前記ブラケットの一側に設けられ前記加圧部材を昇降させるシリンダと、前記加圧部材の両端部を互いに連結し、前記シリンダによって加圧部材が昇降する時に加圧部材の両端部が互いに同期動作できるようにするガイド部材と、を含んでなる。   The gate valve of the present invention is a gate valve provided in a vacuum chamber and capable of controlling the entrance and exit of a substrate.A bracket provided along the periphery of the opening and closing port of the vacuum chamber, and guide rails provided vertically on both sides of the opening and closing port, A fixing plate that moves up and down along the guide rail, at least one shaft pin that connects the fixing plate and the sealing plate to each other, and a sealing plate that is provided in the fixing plate and is located between the shaft pins by an expansion force. A pressure member provided with a tube for opening and closing the opening and closing, a cylinder provided on one side of the bracket for raising and lowering the pressure member, and connecting both ends of the pressure member to each other. And a guide member that allows both end portions of the pressure member to operate in synchronization with each other when the pressure member moves up and down.

また、前記軸ピンには、前記固定板とシーリング板との間で弾性力を維持しながら互いに支持するスプリングをさらに備え、前記軸ピンは、前記チューブを挟んで上下対象に位置することが望ましい。   The shaft pin may further include springs that support each other while maintaining an elastic force between the fixed plate and the sealing plate, and the shaft pin is preferably positioned on the upper and lower sides with the tube interposed therebetween. .

そして、前記チューブは、その断面の形状が多角形、円形または楕円形から選ばれるいずれか一つからなり、前記断面の一側が屈曲された形状を有し、前記固定板に無限軌道の形態を有し内設されることが望ましい。   The tube has a cross-sectional shape selected from any one of a polygon, a circle, and an ellipse, and has a shape in which one side of the cross-section is bent, and the fixed plate has an endless track shape. It is desirable to have it inside.

また、前記固定板には、前記シリンダと同期動作する引張スプリングをさらに備えることが望ましく、前記ガイド部材は、鎖歯車(ｃｈａｉｎ ｓｐｒｏｃｋｅｔ)またはワイヤーから選ばれるいずれか一つによって前記固定板の両端を互いに連結することが望ましい。   The fixing plate may further include a tension spring that operates in synchronization with the cylinder, and the guide member may be connected to both ends of the fixing plate by one of a chain gear and a wire. It is desirable to connect with each other.

本発明によると、気密性を均一に維持させると共に、シリンダに対する依存性を最小化し圧力を均一に分散させることができる。 According to the present invention, the airtightness can be maintained uniformly, and the dependency on the cylinder can be minimized and the pressure can be uniformly distributed.

従来のゲートバルブを示す概略図である。It is the schematic which shows the conventional gate valve. 従来の他のゲートバルブを示す概略図である。It is the schematic which shows the other conventional gate valve. 本発明のゲートバルブを示す斜視図である。It is a perspective view which shows the gate valve of this invention. 図３に示されたゲートバルブを示す縦断面図である。FIG. 4 is a longitudinal sectional view showing the gate valve shown in FIG. 3. 図４に示された加圧部材の他の実施例を示す部分斜視図である。It is a fragmentary perspective view which shows the other Example of the pressurization member shown by FIG. 本発明に係るゲートバルブの作動状態を示す例示図である。It is an illustration figure which shows the operating state of the gate valve which concerns on this invention. 本発明に係るゲートバルブの作動状態を示す例示図である。It is an illustration figure which shows the operating state of the gate valve which concerns on this invention. 本発明に係るゲートバルブの作動状態を示す例示図である。It is an illustration figure which shows the operating state of the gate valve which concerns on this invention. 本発明の他のゲートバルブを示す斜視図である。It is a perspective view which shows the other gate valve of this invention. 図９のゲートバルブの作動状態を示す例示図である。FIG. 10 is an exemplary diagram illustrating an operating state of the gate valve of FIG. 9. 図９のゲートバルブの作動状態を示す例示図である。FIG. 10 is an exemplary diagram illustrating an operating state of the gate valve of FIG. 9.

以下、添付の図面を参照して、本発明の望ましい実施例を説明する。ただし、本発明はこれらの実施例によって限定されるものではない。 Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. However, the present invention is not limited to these examples.

図３または図４に示すように、前記ゲートバルブ１００は、ブラケット１１０、加圧部材１２０、ガイド部材１３０、シリンダ１４０およびシーリング板１６０からなる。   As shown in FIG. 3 or 4, the gate valve 100 includes a bracket 110, a pressure member 120, a guide member 130, a cylinder 140, and a sealing plate 160.

前記ブラケット１１０は、“コ”の字状で、両側にガイドレール１１２が垂直に設けられている。ここで前記ガイドレール１１２は、一般的な公知技術であるＬ/Ｍガイドを用いているので、その構成の具体的な説明は省略する。   The bracket 110 has a “U” shape, and guide rails 112 are vertically provided on both sides. Here, the guide rail 112 uses an L / M guide, which is a generally known technique, and a detailed description of its configuration is omitted.

前記加圧部材１２０は、固定板１２１、軸ピン１２２、スプリング１２３、チューブ１２４および空気注入管１２５からなる。   The pressure member 120 includes a fixed plate 121, a shaft pin 122, a spring 123, a tube 124, and an air injection tube 125.

前記固定板１２１は、前記ブラケット１１０の水平長さ方向に設けられ、前記ガイドレール１１２と連結されて上下垂直移動ができ、一側にシーリング板１６０が隣接して位置している。また、前記固定板１２１は、前記シーリング板１６０と隣接した一側の長さ方向にチューブ挿入溝１２４ａを設けてチューブ１２４を配置させることができる。   The fixing plate 121 is provided in the horizontal length direction of the bracket 110, is connected to the guide rail 112 and can move vertically and vertically, and a sealing plate 160 is located adjacent to one side. Further, the fixing plate 121 may be provided with a tube insertion groove 124a in the length direction on one side adjacent to the sealing plate 160, and the tube 124 may be disposed thereon.

前記軸ピン１２２は、前記固定板１２１を貫通して嵌挿されて、長さ方向に沿って一定間隔で複数個が設けられ、その両端に突出片(図示せず)を設けて前記固定板１２１とシーリング板１６０を互いに密着させる。ここで、前記のそれぞれの軸ピン１２２と固定板との間にスプリング１２３を設け、前記スプリング１２３によって前記固定板１２１と軸ピン１２２が互いに弾性支持され、シーリング板１６０が固定板側に密着する。   The shaft pins 122 are inserted through the fixed plate 121, and a plurality of the shaft pins 122 are provided at regular intervals along the length direction. Protruding pieces (not shown) are provided at both ends thereof, and the fixed plate is provided. 121 and the sealing plate 160 are brought into close contact with each other. Here, a spring 123 is provided between each of the shaft pins 122 and the fixed plate, and the fixed plate 121 and the shaft pin 122 are elastically supported by the spring 123 so that the sealing plate 160 is in close contact with the fixed plate side. .

ここで、前記軸ピン１２２は、前記チューブ１２４を挟んで上下対称に配置されることが望ましい。これは、前記チューブが膨張してシーリング板を加圧する時に、前記シーリング板に均一な加圧力が印加されて移動できるようにするためである。   Here, it is desirable that the shaft pins 122 be arranged vertically symmetrically with the tube 124 interposed therebetween. This is because when the tube expands and pressurizes the sealing plate, a uniform pressure is applied to the sealing plate so that the tube can move.

そして、前記軸ピン１２２が挿入される前記固定板１２１の孔の内周面に、前記軸ピン１２２の往復移動時における前記孔の摩耗を防止するためにボールブッシュ(Ｂａｌｌ Ｂｕｓｈ:Ｂ)をそれぞれ介する。   Ball bushes (Ball Bush) are provided on the inner peripheral surfaces of the holes of the fixing plate 121 into which the shaft pins 122 are inserted in order to prevent wear of the holes when the shaft pins 122 are reciprocated. Through.

前記チューブ１２４は、中空管の形状であり、前記固定板１２１の長さ方向に形成されたチューブ挿入溝１２４ａに内設される。この時、前記チューブ１２４は、その断面の形状が多角形、円形、楕円形から選ばれるいずれか一つからなり、前記断面の一側には屈曲が形成されることが望ましい。これは、前記チューブ挿入溝１２４ａに挿入されて前記シーリング板１６０と密着している時に、外部から注入される空気によってチューブを膨張させ、シーリング板１６０を一側方向に、すなわち、真空チャンバ(図示せず)の開閉口(図示せず)方向に移動させるためである。   The tube 124 has a hollow tube shape and is provided in a tube insertion groove 124 a formed in the length direction of the fixing plate 121. At this time, it is preferable that the tube 124 has a cross-sectional shape selected from any one of a polygon, a circle, and an ellipse, and a bend is formed on one side of the cross-section. This is because when the tube is inserted into the tube insertion groove 124a and is in close contact with the sealing plate 160, the tube is expanded by air injected from the outside, and the sealing plate 160 is moved in one direction, that is, a vacuum chamber (FIG. This is for moving in the direction of the opening / closing port (not shown) of the (not shown).

ここで、前記チューブ１２４の望ましい実施例として、前記チューブ１２４を一本の直線管(ＰｉＰｅ)状に図示しているが、図５に示すように、前記固定板２２１にチューブ挿入溝２２４ａをリング状に設け、前記チューブ２２４をチューブ挿入溝と対応するリング状の無限軌道に形成させ配置して備えることもできる。これは、前記チューブが上下配置される形状を有することにより、シーリング板に加えられる膨張力の均一性を増大させることができる。   Here, as a preferred embodiment of the tube 124, the tube 124 is illustrated as a single straight pipe (PiPe), but as shown in FIG. 5, a tube insertion groove 224 a is formed in the fixing plate 221 as a ring. The tube 224 may be formed and arranged in a ring-shaped endless track corresponding to the tube insertion groove. This can increase the uniformity of the expansion force applied to the sealing plate by having the shape in which the tube is vertically arranged.

前記の空気注入管１２５は、前記固定板１２１の一側を貫通して内設され、その一側端部は、外部に設けられた別途の空気注入手段(図示せず)と連結され、他側は、前記チューブ１２４と連結されてチューブ側に空気を供給する。   The air injection pipe 125 passes through one side of the fixed plate 121 and has one end connected to a separate air injection means (not shown) provided outside. The side is connected to the tube 124 to supply air to the tube side.

前記ガイド部材１３０は、滑車１３４ａ、１３４ｂ、１３４ｃおよびワイヤー１３２からなる。前記滑車１３４ａ、１３４ｂ、１３４ｃは、前記固定板１２１の３箇所の隅に軸(図示せず)により回転可能に取り付けられている。前記ワイヤー１３２は、前記滑車の外部を取り囲み、一側端部は前記固定板１２１の一側側部に固定され、他側は固定板の一側上部に連結されて、前記ガイドレールに沿って移動する時に固定板の両端が同期動作できるようにする。   The guide member 130 includes pulleys 134a, 134b, 134c and a wire 132. The pulleys 134a, 134b, 134c are rotatably attached to the three corners of the fixed plate 121 by shafts (not shown). The wire 132 surrounds the outside of the pulley, one end is fixed to one side of the fixed plate 121, and the other side is connected to one upper portion of the fixed plate, along the guide rail. Allow both ends of the fixed plate to operate synchronously when moving.

ここで、前記ガイド部材１３０の望ましい実施例としては、前記滑車およびワイヤーをあげて説明したが、前記ガイド部材１３０として鎖歯車(ｃｈａｉｎ ｓｐｒｏｃｋｅｔ)を用いることもできる。これは、前記滑車およびワイヤーを用いて、前記固定板の一側に結合された一つのシリンダによって昇降する固定板を同期動作させ、均一に昇降させる手段である。したがって、鎖歯車を用いても同一効果を期待することができる。   Here, as the preferred embodiment of the guide member 130, the pulley and the wire have been described. However, a chain sprocket can be used as the guide member 130. This is means for using the pulley and the wire to move the fixing plate that moves up and down by one cylinder coupled to one side of the fixing plate in a synchronized manner and to move it up and down uniformly. Therefore, the same effect can be expected even when a chain gear is used.

前記シリンダ１４０は、前記固定板１２１の一側下部に設けられ、ロード１４２により固定板を昇降させる役割をする。ここで、前記シリンダが位置した固定板の他側端部に引張スプリング１５０をさらに設けることが望ましい。これは、前記引張スプリング１５０を用いてシリンダから加えられる加圧力がワイヤーと連動して固定板を均一に昇降させ、前記シリンダの誤作動時は引張スプリングを用いて下降させることができる。前記シリンダは一般的な公知技術であるので、その構成の具体的な説明は省略する。   The cylinder 140 is provided at a lower portion on one side of the fixed plate 121 and serves to move the fixed plate up and down by a load 142. Here, it is desirable to further provide a tension spring 150 at the other end of the fixed plate where the cylinder is located. This is because the pressing force applied from the cylinder using the tension spring 150 moves the fixing plate up and down uniformly in conjunction with the wire, and can be lowered using the tension spring when the cylinder malfunctions. Since the cylinder is a generally known technique, a detailed description of its configuration is omitted.

前記シーリング板１６０は、真空チャンバに設けられた開閉口(図示せず)と対応する大きさを有しており、前記開閉口と密着している時に気密を維持できるようにシーリングパッド(図示せず)を備えている。   The sealing plate 160 has a size corresponding to an opening (not shown) provided in the vacuum chamber, and a sealing pad (not shown) so as to maintain airtightness when in close contact with the opening. )).

本発明のゲートバルブの結合関係を見ると、前記ブラケット１１０の両側にガイドレール１１２を固定し、前記ブラケットを真空チャンバ(図示せず)に設けられた開閉口(図示せず)側に固定させた後、前記加圧部材１２０がガイドレールと連結して昇降ができる。この時、前記シリンダ１４０を前記加圧部材１２０の下側一端に設けて前記加圧部材を昇降させ、前記シリンダの他側には引張スプリング１５０を設けて前記シリンダと同期動作させることができる。   When the gate valve connection relationship of the present invention is seen, guide rails 112 are fixed to both sides of the bracket 110, and the bracket is fixed to an opening / closing port (not shown) provided in a vacuum chamber (not shown). After that, the pressure member 120 is connected to the guide rail and can be moved up and down. At this time, the cylinder 140 may be provided at one lower end of the pressure member 120 to raise and lower the pressure member, and a tension spring 150 may be provided on the other side of the cylinder to synchronize with the cylinder.

また、前記加圧部材１２０の一側部にワイヤー１３２を連結し、他側の上端部にはワイヤーの他側端部を連結して結合した後、前記ブラケット１１０の３箇所の隅に取り付けられた滑車１３４ａ、１３４ｂ、１３４ｃをワイヤーで取り囲むように構成することにより、前記シリンダの動作によって前記滑車１３４ａ、１３４ｂ、１３４ｃに沿ってワイヤーが連動できる。そして、前記加圧部材１２０とシーリング板１６０との間にチューブ１２４を設け、前記チューブ１２４を挟んで上下対称になるように軸ピン１２２を設け、前記軸ピンでシーリング板と固定板１２１を連結すると共に、チューブの膨張力がシーリング板に均一に伝えられるようにする。この時、前記軸ピンと固定板との間にスプリング１２３を備え、前記スプリングの弾性力によって固定板と軸ピンが弾性支持され、シーリング板が固定板側に密着される。   In addition, the wire 132 is connected to one side of the pressure member 120 and the other end of the wire is connected to the upper end of the other side and connected to the corners of the bracket 110. By configuring the pulleys 134a, 134b, and 134c so as to be surrounded by wires, the wires can be interlocked along the pulleys 134a, 134b, and 134c by the operation of the cylinder. Then, a tube 124 is provided between the pressure member 120 and the sealing plate 160, an axis pin 122 is provided so as to be vertically symmetrical with the tube 124 interposed therebetween, and the sealing plate and the fixing plate 121 are connected by the axis pin. In addition, the expansion force of the tube is uniformly transmitted to the sealing plate. At this time, a spring 123 is provided between the shaft pin and the fixed plate, the fixed plate and the shaft pin are elastically supported by the elastic force of the spring, and the sealing plate is brought into close contact with the fixed plate side.

一方、前記チューブ１２４と連結する空気注入管１２５を固定板の一側を貫通させて連結することにより、前記チューブに空気を注入でき、シーリング板を開閉口側に移動させることができる。   On the other hand, by connecting the air injection pipe 125 connected to the tube 124 through one side of the fixed plate, air can be injected into the tube, and the sealing plate can be moved to the opening and closing side.

例えば、前記加圧部材の一側に設けられ、一つのシリンダおよび前記固定板と連結したワイヤーを用いて前記加圧部材に均一な力を加え、前記シリンダはシーリング板を昇降させる役割だけを遂行し、前記加圧部材とシーリング板との間に設けられたチューブを用いてシーリング板を加圧して水平移動させることにより、真空チャンバから発生した真空圧と対応する均一な加圧力を発生させ、開閉口の開閉を制御することができる。   For example, a uniform force is applied to the pressure member using a wire connected to one cylinder and the fixed plate, which is provided on one side of the pressure member, and the cylinder performs only the function of raising and lowering the sealing plate. Then, by pressing the sealing plate horizontally using a tube provided between the pressure member and the sealing plate, a uniform applied pressure corresponding to the vacuum pressure generated from the vacuum chamber is generated, The opening / closing of the opening / closing port can be controlled.

以下、添付の図面を参照して、本発明の作動状態を説明する。   Hereinafter, the operating state of the present invention will be described with reference to the accompanying drawings.

図６に示すように、先ず、前記シリンダ１４０を用いて前記加圧部材１２０を上昇させる。この時、前記加圧部材１２０にはワイヤーが連結しており、前記滑車１３４ａ、１３４ｂ、１３４ｃに沿ってワイヤーが移動し、加圧部材の両端を支持して同期動作させることになる。例えば、前記加圧部材の一側に取り付けられた滑車１３４ａは下側に力を受けると回転し、前記他側の滑車１３４ｃは上側に力を受けると回転して、前記加圧部材１２０の一側はシリンダによって上昇する力を受け、他側はワイヤーによって上昇する力を受けることにより、一つのシリンダによって加圧部材の均一な上昇が可能になる。そして、図７のように開閉口(図示せず)とシーリング板１６０が水平に配置され、図８のように空気注入孔１２５を通じて空気を注入してチューブ１２４を膨張させると、前記チューブ１２４はシーリング板１６０を加圧して開閉口側に移動し開閉口を閉塞する。この時、前記チューブの上下部に配置されたスプリング１２３によって、前記チューブ１２４の膨張力がシーリング板に均一に伝えられる。そして、前記真空チャンバで所定の工程を行う。   As shown in FIG. 6, first, the pressure member 120 is raised using the cylinder 140. At this time, a wire is connected to the pressurizing member 120, and the wire moves along the pulleys 134a, 134b, 134c, and supports both ends of the pressurizing member to be operated synchronously. For example, the pulley 134a attached to one side of the pressure member rotates when receiving a force on the lower side, and the pulley 134c on the other side rotates when receiving a force on the upper side, thereby The pressure member is uniformly raised by one cylinder by receiving the force rising by the cylinder on the side and the force rising by the wire on the other side. Then, as shown in FIG. 7, the opening / closing port (not shown) and the sealing plate 160 are horizontally disposed. When the air is injected through the air injection hole 125 and the tube 124 is expanded as shown in FIG. The sealing plate 160 is pressurized and moved to the opening / closing port side to close the opening / closing port. At this time, the expansion force of the tube 124 is uniformly transmitted to the sealing plate by the springs 123 disposed at the upper and lower portions of the tube. Then, a predetermined process is performed in the vacuum chamber.

一方、前記真空チャンバ(図示せず)で所定の工程を行った後、開閉口を開放してチューブに注入された空気を空気注入管によって除去すると、チューブは加圧部材側に収縮し、前記シーリング板は前記スプリングにより加圧部材側に移動して密着し、開閉口が開放される。   On the other hand, after performing a predetermined step in the vacuum chamber (not shown), when the air injected into the tube is removed by opening the opening and closing, the tube contracts to the pressure member side, The sealing plate is moved and brought into close contact with the pressure member by the spring, and the opening / closing port is opened.

このようにチューブを用いて開閉口の開閉を制御すると、チューブによってシーリング板の全体面積に対して均一に加圧できるだけでなく、真空チャンバから発生する真空圧をシーリング板によって均一に分散させることにより工程を簡略化し、且つ構成の簡略化および簡素化が可能となる。   When the opening and closing of the opening / closing port is controlled using a tube in this way, not only can the tube be uniformly pressurized over the entire area of the sealing plate, but also the vacuum pressure generated from the vacuum chamber can be uniformly dispersed by the sealing plate. The process can be simplified, and the configuration can be simplified and simplified.

本発明の他の実施例に係るゲートバルブ２００は、図９〜図１１に示すように、ブラケット２１０、加圧部材２２０、シリンダ２４０およびシーリング板２６０からなり、前記ブラケット２１０、加圧部材２２０、シリンダ２４０およびシーリング板２６０は上述の実施例と構造および機能が同一であるので、その詳細な説明は省略する。   As shown in FIGS. 9 to 11, the gate valve 200 according to another embodiment of the present invention includes a bracket 210, a pressure member 220, a cylinder 240 and a sealing plate 260, and the bracket 210, the pressure member 220, Since the cylinder 240 and the sealing plate 260 have the same structure and function as those of the above-described embodiments, detailed description thereof will be omitted.

特に、本実施例では上述の実施例とは異なり、前記加圧部材２２０は、その下側に一つ以上備えられるシリンダ２４０によって昇降される。   In particular, in this embodiment, unlike the above-described embodiment, the pressure member 220 is moved up and down by a cylinder 240 provided at least one lower side thereof.

前記ブラケット２１０は、“コ”の字状で、両側にガイドレール２１２が垂直に設けられている。ここで、前記ガイドレール２１２は一般的な公知技術であるＬ/Ｍガイドを用いている。   The bracket 210 has a “U” shape, and guide rails 212 are vertically provided on both sides. Here, the guide rail 212 uses an L / M guide which is a generally known technique.

前記加圧部材２２０は、後面にチューブ挿入溝２２４ａが形成される固定板２２１'、軸ピン２２２、スプリング２２３、チューブ２２４'および空気注入管２２５からなる。   The pressurizing member 220 includes a fixed plate 221 ′ having a tube insertion groove 224 a formed on the rear surface, a shaft pin 222, a spring 223, a tube 224 ′, and an air injection tube 225.

そして、前記軸ピン２２２が挿入される前記固定板２２１'の孔の内周面に、前記軸ピン２２２の往復移動時における前記孔の摩耗を防止するためにボールブッシュ(Ｂａｌｌ Ｂｕｓｈ:Ｂ)をそれぞれ介する。   A ball bushing (B) is provided on the inner peripheral surface of the hole of the fixing plate 221 ′ into which the shaft pin 222 is inserted in order to prevent wear of the hole when the shaft pin 222 is reciprocated. Through each.

前記シリンダ２４０は、前記ブラケット２１０の下部に一つ以上備えられ、前記シーリング板２６０を初期位置から前記真空チャンバの開閉口(図示せず)の高さまで上昇させる。本実施例では前記ブラケット２１０の両端に備えられるものを例示する。   One or more cylinders 240 are provided at a lower portion of the bracket 210, and raise the sealing plate 260 from an initial position to a height of an opening / closing port (not shown) of the vacuum chamber. In the present embodiment, those provided at both ends of the bracket 210 are illustrated.

以下、添付の図面を参照して、本発明の作動状態を説明する。   Hereinafter, the operating state of the present invention will be described with reference to the accompanying drawings.

図１０および図１１に示すように、先ず、前記シリンダ２４０を用いて前記加圧部材２２０を上昇させる。そして、前記開閉口とシーリング板２６０が水平に配置され、前記空気注入孔２２５を通して空気を注入してチューブ２２４'を膨張させると、前記チューブ２２４'は、シーリング板２６０を加圧して開閉口側に移動し前記開閉口を閉塞する。この時、前記チューブ２２４'の上下部に配置されたスプリング２２３によって、前記チューブ２２４'の膨張力がシーリング板に均一に伝えられる。そして、前記真空チャンバで所定の工程を行う。   As shown in FIGS. 10 and 11, first, the pressure member 220 is raised using the cylinder 240. When the opening / closing port and the sealing plate 260 are horizontally arranged and air is injected through the air injection hole 225 to expand the tube 224 ′, the tube 224 ′ pressurizes the sealing plate 260 to open / close the opening side. To close the opening / closing port. At this time, the expansion force of the tube 224 ′ is uniformly transmitted to the sealing plate by the springs 223 disposed at the upper and lower portions of the tube 224 ′. Then, a predetermined process is performed in the vacuum chamber.

一方、前記真空チャンバ(図示せず)で所定の工程を行った後、開閉口を開放してチューブ２２４'に注入された空気を空気注入管によって除去すると、チューブ２２４'は加圧部材側に収縮し、前記シーリング板２６０は前記スプリングにより加圧部材２２０側に移動して密着し、開閉口が開放される。   On the other hand, after a predetermined process is performed in the vacuum chamber (not shown), when the opening / closing port is opened and the air injected into the tube 224 ′ is removed by the air injection tube, the tube 224 ′ is moved to the pressure member side. The sealing plate 260 is moved and brought into close contact with the pressure member 220 by the spring, and the opening / closing port is opened.

このようにチューブ２２４'を用いて開閉口の開閉を制御すると、チューブ２２４'によってシーリング板２６０の全面積に対して均一に加圧できるだけでなく、真空チャンバから発生する真空圧をシーリング板２６０によって均一に分散させることにより工程を簡略化し、且つ構成の簡略化および簡素化が可能となる。   When the opening / closing of the opening / closing port is controlled using the tube 224 ′ as described above, not only the entire area of the sealing plate 260 can be uniformly pressurized by the tube 224 ′, but also the vacuum pressure generated from the vacuum chamber can be generated by the sealing plate 260. By uniformly dispersing, the process can be simplified, and the configuration can be simplified and simplified.

１００ 一実施例のゲートバルブ １１０ ブラケット
１１２ ガイドレール １２０ 加圧部材
１２１、２２１ 固定板 １２２ 軸ピン
１２３ スプリング １２４、２２４ チューブ
１２４ａ、２２４ａ チューブ挿入溝 １２５ 空気注入管
１３０ ガイド部材 １３２ ワイヤー
１３４ａ、１３４ｂ、１３４ｃ 滑車
１４０ シリンダ １４２ ロード
１５０ 引張スプリング １６０ シーリング板
２００ 他の実施例のゲートバルブ ２１０ ブラケット
２１２ ガイドレール ２２０ 加圧部材
２２１' 固定板 ２２２ 軸ピン
２２３ スプリング ２２４' チューブ
２２４ａ チューブ挿入溝 ２２５ 空気注入管
２４０ シリンダ ２４２ ロード
２６０ シーリング板 DESCRIPTION OF SYMBOLS 100 Gate valve of one Example 110 Bracket 112 Guide rail 120 Pressurizing member 121, 221 Fixing plate 122 Shaft pin 123 Spring 124, 224 Tube 124a, 224a Tube insertion groove 125 Air injection pipe 130 Guide member 132 Wires 134a, 134b, 134c Pulley 140 Cylinder 142 Load 150 Tension spring 160 Sealing plate 200 Gate valve of another embodiment 210 Bracket 212 Guide rail 220 Pressure member 221 'Fixing plate 222 Shaft pin 223 Spring 224' Tube 224a Tube insertion groove 225 Air injection tube 240 Cylinder 242 Load 260 Sealing plate

Claims (14)

真空チャンバに備えられ基板の出入りを制御できるゲートバルブにおいて、
真空チャンバの開閉口の周辺に沿って備えられガイドレールが開閉口の両側に垂直に設けられたブラケットと、
前記ガイドレールに沿って昇降する固定板、および前記固定板とシーリング板を互いに連結する少なくとも一つの軸ピン、および前記固定板に内設され、前記軸ピンの間に位置し膨張力によってシーリング板が開閉口を開閉するチューブが備えられた加圧部材と、
前記ブラケットの一側に設けられ前記加圧部材を昇降させるシリンダと、
前記加圧部材の両端部を互いに連結し、前記シリンダによって加圧部材が昇降する時に加圧部材の両端部が互いに同期動作できるようにするガイド部材と、を含んでなることを特徴とするゲートバルブ。 In the gate valve that is provided in the vacuum chamber and can control the entrance and exit of the substrate,
A bracket provided along the periphery of the opening and closing port of the vacuum chamber, and guide rails provided vertically on both sides of the opening and closing port,
A fixing plate that moves up and down along the guide rail, at least one shaft pin that connects the fixing plate and the sealing plate to each other, and a sealing plate that is provided in the fixing plate and is located between the shaft pins by an expansion force. A pressure member provided with a tube for opening and closing the opening and closing;
A cylinder provided on one side of the bracket for raising and lowering the pressure member;
And a guide member that connects both ends of the pressure member to each other, and allows the both ends of the pressure member to operate synchronously when the pressure member moves up and down by the cylinder. valve. 前記軸ピンには、前記固定板とシーリング板との間で弾性力を維持しながら互いに支持するスプリングをさらに備えることを特徴とする請求項１に記載のゲートバルブ。 The gate valve according to claim 1, wherein the shaft pin further includes springs that support each other while maintaining an elastic force between the fixed plate and the sealing plate. 前記軸ピンは、前記チューブを挟んで上下対象に位置することを特徴とする請求項２に記載のゲートバルブ。 The gate valve according to claim 2, wherein the shaft pin is positioned on a vertical object across the tube. 前記チューブは、その断面の形状が多角形、円形または楕円形から選ばれるいずれか一つからなることを特徴とする請求項３に記載のゲートバルブ。 The gate valve according to claim 3, wherein the tube has a cross-sectional shape selected from any one of a polygon, a circle, and an ellipse. 前記チューブは、前記断面の一側が屈曲された形状を有することを特徴とする請求項４に記載のゲートバルブ。 The gate valve according to claim 4, wherein the tube has a shape in which one side of the cross section is bent. 前記チューブは、前記固定板に無限軌道の形態を有し内設されることを特徴とする請求項４または請求項５に記載のゲートバルブ。 The gate valve according to claim 4 or 5, wherein the tube has an endless track shape in the fixed plate. 前記固定板には、前記シリンダと同期動作する引張スプリングをさらに備えることを特徴とする請求項１に記載のゲートバルブ。 The gate valve according to claim 1, wherein the fixing plate further includes a tension spring that operates in synchronization with the cylinder. 前記ガイド部材は、鎖歯車(ｃｈａｉｎ ｓｐｒｏｃｋｅｔ)またはワイヤーから選ばれるいずれか一つによって前記固定板の両端を互いに連結することを特徴とする請求項１に記載のゲートバルブ。 The gate valve of claim 1, wherein the guide member connects both ends of the fixed plate to each other by any one selected from a chain sprocket and a wire. 真空チャンバに備えられ基板の出入りを制御できるゲートバルブにおいて、
真空チャンバの開閉口の周辺に沿って備えられガイドレールが開閉口の両側に垂直に設けられたブラケットと、
前記ガイドレールに沿って昇降する固定板、および前記固定板とシーリング板を互いに連結する少なくとも一つの軸ピン、および前記固定板に内設され、前記軸ピンの間に位置し膨張力によってシーリング板が開閉口を開閉するチューブが備えられた加圧部材と、
前記ブラケットの一側に一つ以上設けられ前記加圧部材を昇降させるシリンダと、を含んでなることを特徴とするゲートバルブ。 In the gate valve that is provided in the vacuum chamber and can control the entrance and exit of the substrate,
A bracket provided along the periphery of the opening and closing port of the vacuum chamber, and guide rails provided vertically on both sides of the opening and closing port,
A fixing plate that moves up and down along the guide rail, at least one shaft pin that connects the fixing plate and the sealing plate to each other, and a sealing plate that is provided in the fixing plate and is located between the shaft pins by an expansion force. A pressure member provided with a tube for opening and closing the opening and closing;
One or more cylinders provided on one side of the bracket and moving up and down the pressurizing member. 前記軸ピンには、前記固定板とシーリング板との間で弾性力を維持しながら互いに支持するスプリングをさらに備えることを特徴とする請求項９に記載のゲートバルブ。 The gate valve according to claim 9, wherein the shaft pin further includes springs that support each other while maintaining an elastic force between the fixed plate and the sealing plate. 前記軸ピンは、前記チューブを挟んで上下対象に位置することを特徴とする請求項１０に記載のゲートバルブ。 The gate valve according to claim 10, wherein the shaft pin is positioned on a vertical object across the tube. 前記チューブは、その断面の形状が多角形、円形または楕円形から選ばれるいずれか一つからなることを特徴とする請求項１１に記載のゲートバルブ。 The gate valve according to claim 11, wherein the tube has one of cross-sectional shapes selected from a polygon, a circle, and an ellipse. 前記チューブは、前記その断面の一側が屈曲された形状を有することを特徴とする請求項１２に記載のゲートバルブ。 The gate valve according to claim 12, wherein the tube has a shape in which one side of the cross section is bent. 前記チューブは、前記固定板に無限軌道の形態を有し内設されることを特徴とする請求項１２または請求項１３に記載のゲートバルブ。 The gate valve according to claim 12 or 13, wherein the tube has an endless track shape in the fixed plate.
JP2009530259A 2006-09-27 2007-09-20 Gate valve Expired - Fee Related JP5292296B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107567558A (en) * 2015-05-04 2018-01-09 布劳恩惰性气体系统有限公司 Switching valve

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100098518A1 (en) * 2008-10-20 2010-04-22 Applied Materials, Inc. In/out door for a vacuum chamber
CN103964699B (en) * 2013-01-29 2016-06-15 上海北玻镀膜技术工业有限公司 A kind of linear locking-valve
KR200481041Y1 (en) * 2015-02-23 2016-08-05 주식회사 테크네스트 Wafer box inserting portion safety bar apparatus for semiconductor manufacturing device
KR20220120613A (en) * 2020-06-10 2022-08-30 엘지전자 주식회사 Gate valve module and hermetic chamber

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110123A (en) * 1974-02-08 1975-08-29
JPS5341735U (en) * 1976-09-14 1978-04-11
JP2002098242A (en) * 2000-09-22 2002-04-05 Hitachi Kokusai Electric Inc Semiconductor manufacturing device
JP2002174349A (en) * 2000-12-09 2002-06-21 Mutsubishi Rubber Co Ltd Flow passage opening and closing device
JP2004225878A (en) * 2003-01-27 2004-08-12 Hitachi Kokusai Electric Inc Board processing unit

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030070373A (en) * 2002-02-25 2003-08-30 삼성전자주식회사 Ashing apparatus having door structure for semiconductor manufacturing
JP3837391B2 (en) * 2003-03-24 2006-10-25 Ｓｍｃ株式会社 Gate valve
KR20060021953A (en) * 2004-09-06 2006-03-09 삼성전자주식회사 Door closing equipment of semiconductor device fabricating equipment
KR100749154B1 (en) * 2005-02-18 2007-08-14 아이시스(주) Gate valve for preventing back pressure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110123A (en) * 1974-02-08 1975-08-29
JPS5341735U (en) * 1976-09-14 1978-04-11
JP2002098242A (en) * 2000-09-22 2002-04-05 Hitachi Kokusai Electric Inc Semiconductor manufacturing device
JP2002174349A (en) * 2000-12-09 2002-06-21 Mutsubishi Rubber Co Ltd Flow passage opening and closing device
JP2004225878A (en) * 2003-01-27 2004-08-12 Hitachi Kokusai Electric Inc Board processing unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107567558A (en) * 2015-05-04 2018-01-09 布劳恩惰性气体系统有限公司 Switching valve
JP2018515727A (en) * 2015-05-04 2018-06-14 エム． ブラウン イナートガース−ズュステーメ ゲゼルシャフト ミット ベシュレンクテル ハフツングＭ． Ｂｒａｕｎ Ｉｎｅｒｔｇａｓ−Ｓｙｓｔｅｍｅ ＧｍｂＨ Switching valve
CN107567558B (en) * 2015-05-04 2019-12-27 布劳恩惰性气体系统有限公司 Change-over valve

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