JPH02186173A - Vacuum gate valve - Google Patents

Abstract

PURPOSE:To obtain the small-sized mechanism by installing a cam which shifts a cover having an O-ring in the direction vertical to the rising direction by the force applied from a driving part, after the body contacts a stopper. CONSTITUTION:When the high pressure air is supplied into an air cylinder 7, and the piston rod 7a of a cylinder 7 and a plate 6 are raised, the body 1 rises, and collides with a stopper 16, and stops, and a cover 10 and a gate part 17 are put into the opposed state. When the rod 7a and the plate 6 rise further, the body 1 is stopped by the stopper 16, and a shaft 2 rises, sliding with a bush 4 against a compression spring 5, and also a cam 8 planted onto the plate 6 rises. Since a roller 9 at the top edge of a shaft 11 which is fixed onto the cover 10 is pressed onto the cam 8 by a compression spring 15, the cover 10 is pressed onto the gate part 17 by the rise of the cam 8, and the gate part 17 is sealed. The cylinder 7 and the cam 8 are installed coaxially, and the dimension between an O-ring 12 and the right edge of the body 1 on the A-A section or B-B section can be reduced.

Description

[Detailed Description of the Invention] [Summary] Regarding the improvement of a vacuum gate valve operated by a single actuator, the present invention aims to reduce the size of the mechanism without damaging the O-ring between the lid and the gate part during operation. The purpose of the vacuum gate valve is to provide a vacuum gate valve that partitions a vacuum chamber and the outside air or between vacuum chambers, the vacuum gate valve having a drive unit that moves the main body of the vacuum gate valve up and down, and a predetermined a stopper that stops the main body from rising at a certain height; and a cam that moves a lid having an O-ring in a direction perpendicular to the rising direction by force from the drive unit after the main body contacts the stopper. The system is configured to have the following.

[Industrial application field]

The present invention relates to vacuum gate valves, and more particularly to improvements in vacuum gate valves operated by a single actuator.

Conventionally used gate valves that partition a vacuum chamber and the outside air or between vacuum chambers are operated by one or more actuators.

In those operated by one actuator,
The O-ring between the lid and the gate will rub and get damaged during operation. Further, in those operated by a plurality of actuators, the mechanism becomes complicated and large, and each has its own drawbacks.

Under the above circumstances, there is a need for a vacuum gate valve that does not damage the O-ring between the lid and the gate part during operation, and that allows the mechanism to be miniaturized.

[Conventional technology]

A conventional vacuum gate valve will be explained in detail with reference to FIGS. 4 and 5.

FIG. 4 shows a vacuum gate valve operated using one actuator, and FIG. 5 shows a vacuum gate valve operated using two actuators.

The vacuum gate valve whose schematic structure is shown in FIG.
1 through a link 22.

The main body 21 is provided with a grooved cam portion 21a, so that the piston rod 27a of the air cylinder 27 rises and the main body 21
4(b), the cam follower 29 enters the groove cam portion 21a of the main body 21, and the main body 21 reaches zero.
The gate portion 37 is sealed by being pressed against the gate portion 37 via the ring 32.

In this case, since the main body 21 is actuated only by the air cylinder 27, when the cam follower 29 enters the inclined part of the grooved cam portion 21a, the main body 21 is attached to the gate portion 37 by the O-ring 32.
It is rising while rubbing against it.

The vacuum gate valve whose schematic structure is shown in FIG. 5(a) consists of a piston rod 47a of an upper and lower air cylinder 47
1 through a link 42.

An O-ring 52 is provided on the surface of the main body 41 on the gate portion 57 side, and as shown in FIG. 4(b), the air cylinder 4
When the piston rod 47a of No. 7 rises and the main body 41 rises, the main body 41 stops at a position facing the gate portion 57.

Next, in this position, press the air cylinder 48 for
is activated, and the main body 41 is connected to the gate portion 5 via the O-ring 52.
7, the gate portion 57 is sealed.

In this case, the main body 41 is raised by the air cylinder 47, and the main body 41 is pressed against the gate part 57 by the air cylinder 48 via the O-ring 52, which has the disadvantage that the mechanism is complicated and large.

[Problem to be solved by the invention]

In the conventional vacuum gate valve operated by one actuator as described above, the lifting operation of the lid and the operation of pressing the lid against the gate part are performed in parallel.
There is a problem that the Q IJ song between the lid and the gate part rubs and gets scratched when it is activated, and in vacuum gate valves that are operated by multiple actuators, the mechanism becomes complicated and large. There was a problem.

In view of the above-mentioned circumstances, the present invention aims to provide a vacuum gate valve that does not damage the O-ring between the lid and the gate part during operation, and can downsize the mechanism. .

[Means to solve the problem]

The vacuum gate valve of the present invention is a vacuum gate valve that partitions a vacuum chamber and the outside air or between vacuum chambers, and includes a drive unit that moves the main body of the vacuum gate valve up and down, and a drive unit that moves the main body of the vacuum gate valve up and down at a predetermined height. A stopper stops the main body from rising, and after this main body contacts the stopper,
The lid is configured to include a cam that moves a lid having an O-ring in a direction perpendicular to the rising direction by the force from the drive unit.

[Effect]

That is, according to the present invention, in a vacuum gate valve that partitions a vacuum chamber and the outside air or between vacuum chambers, the main body of the vacuum gate valve is moved up and down by the vertical drive section, and the main body is raised by the vertical drive section. After the operation is stopped, the subsequent upward movement of the vertical drive section allows the lid to be brought into close contact with the gate section using the cam.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

Figure 1 is a plan view, Figure 2 is a front view, Figure 3 is A of Figure 2.
-A sectional view, and FIG. 4 is a BB sectional view.

In the figure, 1 is the main body, 2 is the shaft, 3 is the stop ring, 4 is the bush, 5 is the compression spring, 6 is the plate, 7 is the air cylinder, 7a is the piston rod, 8 is the cam, 9 is the roller, and 10 is the lid. , 11 is the shaft, 12 is the O-ring, 13
14 is a shaft, 15 is a compression spring, 16 is a stopper, and 17 is a gate portion.

As shown in FIG. 2, the piston rod 7a of the air cylinder 7 is connected to the temporary 6 at the center of the plate 6.

A compression spring 5 is attached to the shaft 2 installed at both ends of the plate 6.
Bushings 4, which are press-fitted into both ends of the main body 1 shown in FIG. A stop ring 3 is fitted to the upper end of the shaft 2, and a compression spring 5 prevents the main body 1 from flying upward.

As shown in FIG. 1, cams 8 are installed on the plate 6 at symmetrical positions with respect to the mounting position of the piston rod 7a of the air cylinder 7.

The A-A cross section of the main body 1 in this part is A-A in FIG. 3(a).
As shown in cross-sectional view A, a cam 8 is installed on the plate 6, and the lid 1
A shaft 11 is fixedly provided at a position corresponding to the position of the cam 8 of 0, and a roller 9 is provided at the end of the shaft 11 that is not fixed to the lid 10.

As shown in FIG. 1, bushes 14 are provided in the main body 1 at symmetrical positions with respect to the position at which the piston rod 7a of the air cylinder 7 is attached to the plate 6.

The B-B cross section of the main body 1 in this part is shown in Figure 3 (B-B in bl).
As shown in sectional view B, a shaft 13 is slidably fitted onto a bush 14, and a lid 10 is fixed to this shirt opening 3. A compression spring 15 is attached to the right side of the bush 14 of the main body 1 to which Mlo of the shaft 13 is not fixed, and a stop ring 13a is fitted to the compression spring 15.
This prevents 5 people from leaving.

The stress of the compression spring 15 causes the roller 9 to move as shown in FIG.
) is pressed against the cam 8 in the AA cross-sectional view.

To operate this gate valve, first supply high pressure air to the air cylinder 7, and when the piston door a and plate 6 of the air cylinder 7 rise, the main body 1 rises and hits the stopper 16 shown in FIG. Then, as shown in FIG. 1, Mlo and the gate portion 17 are in a state facing each other.

Further, when the piston rod 7a and the plate 6 rise, the main body I is stopped at the stopper 16, but the shaft 2 rises while sliding against the bushing 4 against the compression spring 5, and the plate 6
The cam 8, which is set on the cam 8, also rises.

Since the roller 9 at the tip of the shaft 11 fixed to Mlo is pressed against the cam 8 by the compression spring 15, the lid 1o is pressed against the gate part 17 as the cam 8 rises, sealing the gate part 17. It becomes possible to do so.

According to this embodiment, as explained above, the air cylinder 7 serving as the lifting means and the cam 8 for pressing the lid 10 against the gate portion 17 are provided coaxially in FIG. It is possible to make the dimension of the O-ring 12 and the right end of the main body 1 very small in the cross section or the B-B cross section.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, it is possible to prevent damage to the O-ring of the lid of the vacuum gate valve by improving the structure, reducing the size, and improving the operation. It is possible to provide a vacuum gate valve that can be expected to have significant economical and reliability improvements.

[Brief explanation of the drawing]

FIG. 1 is a plan view of an embodiment according to the present invention, FIG. 2 is a front view of an embodiment according to the present invention, FIG. 3 is a cross-sectional view taken along line AA and line B-B in FIG. The figure is a side view of a conventional vacuum gate valve using one actuator, and FIG. 5 is a side view of a conventional vacuum gate valve using two actuators. In the figure, 1 is the main body, 2 is the shaft, 3 is the stop ring, 4 is the bush, 5 is the compression spring, 6 is the temporary, 7 is the air cylinder, 7a is the piston rod, and 8 is the cam. 9 is a roller, 10 is a lid, 11 is a shaft, 12 is a ring, 13 is a shaft, 14 is a bushing, 15 is a compression spring, 16 is a stopper, 17 is a gate part, Plan view 1 of one embodiment according to the present invention Figure (a) A-A sectional view B-B sectional view Front view of one embodiment of the present invention Fig. 2 A-A sectional view and B-B sectional view of Fig. 2 Fig. 3 ial When the gate valve is open ial Side view of a vacuum gate valve using a conventional 1g actuator when the gate valve is closed Side view of a conventional vacuum gate valve using two actuators Figure 5

Claims (1)

[Scope of Claims] A vacuum gate valve that partitions a vacuum chamber and the outside air or between vacuum chambers, comprising a drive unit (6, 7) that moves the main body (1) of the vacuum gate valve up and down; A stopper (16) that stops the rise of the main body (1) at a predetermined height, and after the main body (1) contacts the stopper (16), the force from the drive unit (6, 7) causes the main body (1) to stop rising. A vacuum gate valve comprising: a cam (8) for moving a lid (10) having an O-ring (12) in a direction perpendicular to the rising direction.