KR102235304B1 - Gate valve for vaccume equipment - Google Patents

Abstract

The present invention relates to a gate valve for vacuum equipment, wherein a gate frame having an entrance and a gate space unit in which a gate is disposed is connected to the gate, and the gate is moved so that the entrance is opened and closed by the gate. The gate valve for vacuum equipment comprises: a center frame disposed in the gate; a sealing unit connected and disposed between the gate frame and the center frame, and configured to move the gate on the gate space unit and to seal the entrance with the gate; and a releasing unit disposed on the center frame and configured to separate the gate from the entrance. According to the present invention, a sealing and releasing function of a vacuum chamber can be performed with a simple operation.

Description

Gate valve for vacuum equipment {GATE VALVE FOR VACCUME EQUIPMENT}

The present invention relates to a gate valve of a vacuum facility, and more particularly, to a gate valve of a vacuum facility capable of performing sealing and releasing functions for a vacuum chamber with a simple structure and operation method.

In general, a vacuum facility is a generic term for a device that performs various processes by creating a vacuum state therein. In recent years, it is designed and used in various forms as industrial equipment used in the manufacturing of advanced equipment such as semiconductor wafer manufacturing processes and display manufacturing processes that require a clean process environment, or vacuum deposition of various materials.

These vacuum facilities are equipped with gates that serve as entrances to products or materials to be processed. In vacuum equipment, the sealing force of the gate is an important factor. If the gate is not completely sealed, the vacuum process will not be performed properly. Therefore, generally, the gate is sealed so that the vacuum state of the vacuum facility chamber can be maintained.

In addition, a valve in the form of a gate is arranged to close and open the gate to seal or release the chamber of the vacuum facility. The most important function of the gate valve is to completely position and seal the gate at the entrance of the vacuum facility to prevent various foreign substances from flowing into the interior of the vacuum facility between vacuum processes.

Most of the gate valves that are generally applied in the related art are operated by being dualized into a moving operation of moving the gate in the direction of the entrance of a vacuum facility and a close contacting operation of bringing the gate into close contact with the entrance of the vacuum facility after completing the movement.

Accordingly, most of the conventional gate valves include a driving unit that moves the gate in the direction of the entrance of the vacuum facility and another driving unit that closely contacts the gate to the entrance of the vacuum facility after the movement is completed.

In the case of such a conventional general gate valve structure, the structure becomes complicated, and accordingly, the manufacturing process and manufacturing cost increase. If a breakdown or damage occurs, there is a difficulty due to structural complexity in maintenance/repair, and a considerable amount of time and cost are required accordingly.

Korean Patent Registration Publication No. 10-1454409

The present invention has been conceived to solve the problems in the related art as described above, and an object of the present invention is to provide a gate valve for a vacuum facility capable of performing sealing and releasing functions for a vacuum chamber with a simple structure and operation method. In having to.

The present invention for achieving the above objects relates to a gate valve of a vacuum facility, which is connected between a gate frame in which an entrance and a gate space portion in which the gate is disposed and the gate, and moves the gate and connects the entrance to the gate. A gate valve of a vacuum facility that opens and closes, comprising: a center frame disposed on the gate; A sealing unit connected and disposed between the gate frame and the center frame, moving the gate on the gate space, and sealing the gate at the entrance; And a release unit disposed on the center frame and separating the entrance and the gate.

In an embodiment of the present invention, the sealing unit includes an actuator disposed on the gate frame; A rod hole formed in the center frame and through which the rod of the actuator enters and exits; A unit space part formed inside the center frame; Connected to the rod tip of the actuator and disposed in the unit space, a first inclined surface is formed on the side facing the gate, and a moving support surface in contact with the inner surface of the unit space is formed on the opposite side of the first inclined surface. A first block having a return support surface formed on the side facing the actuator; A second block connected to the gate, disposed in the unit space, and having a second inclined surface corresponding to the first inclined surface of the first block; A linear guide disposed in the gate space portion in the direction of the entrance; A moving block disposed on the center frame and connected to the linear guide; And a stopper disposed adjacent to the entrance in the gate space portion, contacting an outer surface of the center frame, and restricting movement of the gate.

In an embodiment of the present invention, the release unit includes a hollow hole formed in the center frame, a first beam groove disposed on a side facing the gate in the hollow hole and formed to have a larger size than the hollow hole, and the hollow hole A center frame hole disposed on the opposite side of the first beam groove in the hole and including a second beam groove having a size larger than that of the hollow hole; A fitting block including an insertion portion inserted into the hollow hole, a flange portion formed around an outer circumference of one end portion of the insertion portion and disposed in the second beam groove, and a hollow portion formed at the center of the insertion portion; A first beam having one side inserted into the hollow portion to enter and exit the first beam groove, and having a first flange connected to the gate formed on the other side; A second beam having one side fastened to the first beam and a second flange disposed on the other side; And an elastic body disposed between the second flange and the flange portion.

In an embodiment of the present invention, the sealing unit includes an actuator disposed on the gate frame; A rod hole formed in the center frame and through which the rod of the actuator enters and exits; A unit space part formed inside the center frame; A first block connected to the front end of the rod of the actuator and disposed in the unit space, having a first inclined surface formed around an outer circumference, and having a return support surface formed on a side facing the actuator; A block hollow portion formed inside the first block and disposed through the rod tip portion; A block spring connected and disposed between a block groove formed inside the first block and a tip end of the rod; A link plate extending in a radial direction of the rod tip and inserted into a link groove formed inside the first block; A second block connected to the gate, disposed in the unit space, and having a second inclined surface corresponding to the first inclined surface of the first block; A third block disposed inside the unit space part on the opposite side of the second block and having a third inclined surface corresponding to the first inclined surface of the first block; A linear guide disposed in the gate space portion in the direction of the entrance; A moving block disposed on the center frame and connected to the linear guide; And a stopper disposed adjacent to the entrance in the gate space portion, contacting an outer surface of the center frame, and restricting movement of the gate.

In an embodiment of the present invention, the fitting block includes: a plurality of first protrusions formed to protrude into the hollow portion in a radial direction of the hollow portion and supporting an outer surface of the first beam; A plurality of first depressions formed alternately with the first projections along the radial direction of the hollow portion, wherein a radius of curvature R2 of the first projection is greater than a radius of curvature R1 of the first depression Can be configured.

In an embodiment of the present invention, the fitting block includes: a plurality of second protrusions formed to protrude into the hollow portion along a longitudinal direction of the hollow portion and supporting an outer surface of the first beam; And a plurality of second depressions formed alternately with the second protrusions along the length direction of the hollow portion.

In an embodiment of the present invention, a lubricant may be applied to the first recessed portion or the second recessed portion.

According to the present invention, the gate valve is implemented in a simple structure, and the gate is moved in the direction of the entrance of the vacuum facility through one actuator drive, and at the same time, the chamber of the vacuum facility can be sealed by being in close contact with the entrance of the vacuum facility. Even when the chamber of the vacuum facility is released, it can also be performed simply through one actuator operation.

In addition, as the gate valve is implemented with a simple structure, the manufacturing process of the gate valve can be shortened and the manufacturing cost can be reduced, and maintenance/repair costs can be saved in case of damage or parts replacement during use.

1 is a front view showing a state in which a gate valve according to an embodiment of the present invention is mounted on a gate and a gate frame.
2 is a rear view showing a state in which a gate valve according to an embodiment of the present invention is mounted on a gate and a gate frame.
3 is a side view showing a state in which a gate valve according to an embodiment of the present invention is mounted on a gate and a gate frame.
Figure 4a is a cross-sectional view of AA shown in Figure 2 showing a state in which the sealing unit according to the embodiment of the present invention releases the gate from the entrance of the vacuum facility.
Figure 4b is a cross-sectional view showing a state in which the sealing unit according to the embodiment of the present invention has moved the gate to the entrance position of the vacuum facility.
Figure 4c is a cross-sectional view showing a state in which the sealing unit according to the embodiment of the present invention in close contact with the gate to the entrance of the vacuum facility.
Figure 5 is a cross-sectional perspective view showing a sealing unit according to an embodiment of the present invention.
Figure 6 is a cross-sectional view taken along the BB shown in Figure 2 showing the release unit according to an embodiment of the present invention.
7 is a cross-sectional perspective view showing a release unit according to an embodiment of the present invention.
Figure 8a is a cross-sectional view showing a state in which another form of the sealing unit according to the embodiment of the present invention moves the gate to the entrance position of the vacuum facility.
8B is a cross-sectional view showing a state in which a gate is in close contact with an entrance of a vacuum facility in another form of a sealing unit according to an embodiment of the present invention.
Figure 9a is a plan cross-sectional view showing another form of the hollow portion structure of the fitting block constituting the release unit according to the embodiment of the present invention.
Figure 9b is a side cross-sectional view showing another form of the hollow portion structure of the fitting block constituting the release unit according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the gate valve of a vacuum facility according to the present invention will be described in detail with reference to the accompanying drawings.

Although each of the embodiments and respective structures described below are individually described, they may be integrated into one embodiment and applied and designed within a range not in conflict with each other.

1 to 3, a coupling structure between the gate 40, the gate frame 10, and the gate valve 100 according to an embodiment of the present invention applied to a vacuum facility is disclosed.

The gate frame 10 may be provided with an entrance 20 connected to the inner chamber of the vacuum facility. An operator or robot may enter and exit the processed material into the internal chamber of the vacuum facility through the entrance 20. In the embodiment of the present invention, the entrance 20 may be implemented in a rectangular shape, but is not limited thereto, and may have a different shape according to design specifications or process environments.

A gate space part 30 in which the gate 40 is movably disposed may be formed in the gate frame 10. The gate 40 may move toward the entrance 20 from the inside of the gate space 30 and open and close the entrance 20. In the embodiment of the present invention, the gate 40 may be implemented in a rectangular shape corresponding to the shape of the entrance 20, but is not necessarily limited thereto, and different according to the shape of the entrance 20, design specifications, or process environment. It can be a shape.

Referring to FIG. 4A, in the gate frame 10, a frame step portion 31 having a slight step along the periphery of the entrance 20 may be formed. In this case, the gate 40 may be formed with a gate step 41 processed to have a step depth corresponding to the frame step 31.

In addition, a sealing unit 50 may be disposed in the gate step portion 41 to contact the frame step portion 31. The sealing unit 50 is connected to an O-ring-shaped first sealing 51 and the first sealing 51 fixed and disposed in the sealing groove formed in the gate step 41 and the gate step 41 It may include a surface-shaped second sealing 53 disposed on the surface of the. In particular, when the second sealing 53 makes surface contact with the frame step portion 31, a sealing force may be improved.

The gate valve 100 may be disposed on the gate frame 10, connected to the gate 40, and configured to move the gate 40 in the direction of the entrance 20.

4A to 7, the gate valve 100 may include a center frame 200, a sealing unit 300, and a release unit 400.

First, functionally, when the sealing unit 300 completes the operation of moving the gate 40 in the direction of the entrance 20, the gate 40 seals the entrance 20, and the sealing unit 300 ) Starts the operation of moving the gate 40 in a direction opposite to the entrance 20, the release unit 400 separates the gate 40 from the entrance 20.

Structurally, the center frame 200 may be disposed on the gate 40. Referring to FIG. 2, in the embodiment of the present invention, the center frame 200 may be implemented in a long structure shape having a square cross section, and may be disposed in the vertical direction of the gate 40. Of course, it is not limited to such a structure shape.

The sealing unit 300 is connected and disposed between the gate frame 10 and the center frame 200, and moves the gate 40 from the gate space 30 and at the same time to the entrance 20. A function of sealing the gate 40 may be performed.

4A to 4C and 5, the sealing unit 300 includes an actuator 310, a unit space 320, a first block 330, a second block 340, and a linear guide ( 350), the movable block 353, the stopper 360, and may be configured to include a road hole (210, 220).

The actuator 310 may be disposed on the gate frame 10. Referring to FIGS. 1 to 3, it can be seen that the actuator 310 is bolted to the edge of the gate frame 10 to be mounted.

The unit space part 320 may be formed inside the center frame 200. As described above, in the embodiment of the present invention, the center frame 200 is implemented as an elongated structure having a square cross section, and the unit space part 320 may be processed in a part of the inner part of the structure.

The unit space part 320 may include a first space surface 321, a second space surface 322, and a third space surface 323. Rod holes 210 and 220 through which the rod 311 of the actuator 310 passes may be processed on the first and third space surfaces 321 and 323. The second space surface 322 may be a surface corresponding to the opposite side of the gate 40 in the unit space part 320. The third space surface 323 may be a surface corresponding to a side facing the actuator 310 from the unit space part 320.

In the embodiment of the present invention, the unit space part 320 may have a shape cut into a hexahedron, but is not limited thereto.

The first block 330 is connected to the front end 312 of the rod 311 of the actuator 310 and may be disposed in the unit space part 320. In an embodiment of the present invention, the shape of the first block 330 may be a shape including a first inclined surface 331, a moving support surface 332, and a return support surface 333.

The first inclined surface 331 may be formed on a side facing the gate 40, and may be a portion in contact with the second block 340.

The movement support surface 332 may be formed on the opposite side of the first inclined surface 331, and may be a portion of the inner surface of the unit space part 320 in contact with the second space surface 322. When the first block 330 moves, the movement support surface 332 remains in contact with the second space surface 322, and the first inclined surface 331 becomes the second block 340 When pushing, the movement support surface 332 is in contact with the second space surface 322 to function as a support surface.

The return support surface 333 may be formed on a side facing the actuator 310. When the actuator 310 is operated to position the rod 311 of the actuator 310, the return support surface 333 pushes the third space surface 323 to the center frame 200 and the The gate 40 is brought to its original position inside the gate space 30.

In the embodiment of the present invention, the original position is defined as a state in which the gate 40 has opened the entrance 20 and has moved to the inside of the gate space 30.

The second block 340 may be disposed in the unit space part 320 while being connected to the gate 40. A second inclined surface 341 having an inclination corresponding to the first inclined surface 331 of the first block 330 may be formed on the second block 340.

When the rod 311 of the actuator 310 is extended and the first block 330 is moving, the first and second inclined surfaces 331 and 341 remain in contact with each other, so the second block 340 is They move together, and accordingly, the center frame 200 and the gate 40 move in the direction of the entrance 20.

And after the movement is complete, the first block 330 is further advanced, and at this time, since the movement support surface 332 of the first block 330 is in contact with and supported by the second space surface 322, The second block 340 in contact with the first inclined surface 331 is pushed toward the entrance 20, and the gate 40 comes into contact with the entrance 20.

The detailed operation method of the sealing unit 300 will be described later.

Referring to FIG. 2, the linear guide 350 may be disposed in a direction from the gate space 30 to the entrance 20. In the exemplary embodiment of the present invention, the linear guide 350 may be disposed one above and one below the gate space 30, but is not limited thereto.

Referring to FIG. 4A, the moving block 353 may be disposed on the center frame 200 and connected to the linear guide 350. In an embodiment of the present invention, the movable blocks 353 may be mounted on both sides of the center frame 200, respectively, and are connected to the linear guide 350 to form the center along the longitudinal direction of the linear guide 350. Movement of the frame 200 and the gate 40 may be guided.

The stopper 360 may be disposed adjacent to the entrance 20 in the gate space 30. An a-shaped stopper bracket 361 may be disposed in the gate space part 30, and the stopper 360 may be mounted on the stopper bracket 361. However, the shape of the stopper bracket 361 is not limited thereto.

The stopper 360 contacts the outer surface of the center frame 200 and functions to limit movement of the center frame 200 and the gate 40. In an embodiment of the present invention, the contact position between the stopper 360 and the outer surface of the center frame 200 may be a position where the gate 40 and the entrance 20 face each other accurately.

Meanwhile, referring to FIGS. 6 and 7, the release unit 400 may be disposed on the center frame 200 and may perform a function of separating the entrance 20 from the gate 40.

The release unit 400 may include a center frame hole 410, a fitting block 450, a first beam 420, a second beam 440, and an elastic body 430.

The center frame hole 410 may include a hollow hole 412 connected to each other, a first beam groove 411 and a second beam groove 413. The hollow hole 412 may be formed to pass through the center frame 200. The first beam groove 411 communicates from the hollow hole 412 toward the gate 40 and may be formed to have a larger size than the hollow hole 412. The second beam groove 413 communicates with the hollow hole 412 on the opposite side of the first beam groove 411 and may be formed to have a larger size than the hollow hole 412.

The fitting block 450 may include an insertion portion 452, a flange portion 451 and a hollow portion 453. The insertion part 452 may be inserted and disposed in the hollow hole 412 in a force-fitting manner, and the flange part 451 is formed around an outer circumference of one end of the insertion part 452 and the second beam groove Can be placed at 413. The hollow part 453 may be formed to penetrate through the center side of the insertion part 452.

One side of the first beam 420 may be in the shape of a rod having a circular cross section and may be inserted into the hollow part 453. However, the present invention is not limited thereto, and other shapes such as polygons and ovals are possible. In addition, a first flange 421 connected to the gate 40 may be formed on the other side of the first beam 420.

One side of the second beam 440 may be screwed to the first beam 420 and a second flange 441 may be disposed on the other side.

The elastic body 430 may be disposed between the second flange 441 and the flange portion 451. The second flange 441 may be coupled with a washer 440a to the other end of the second beam 440 such as a hexagonal bolt, and the elastic body 430 connects the second flange 441 to the second The position of the second flange 441 may be maintained by pushing in the direction of the other end of the beam 440.

In the embodiment of the present invention, the elastic body 430 may be a coil spring or a plate spring, but is not limited thereto, and may be another structure that exhibits elasticity.

Referring to the release unit 400 disposed on the left in FIG. 6, the actuator 310 is operated to extend the rod 311 of the actuator 310, and the first block 330 is When the inclined surface 331 rises on the second inclined surface 341 of the second block 340, the gate 40 is in close contact with the entrance 20 by the second block 340.

In this case, the first flange 421 of the first beam 420 coupled to the gate 40 moves in the direction of the entrance 20 together with the gate 40. At this time, the second beam 440 connected to the first beam 420 also moves, and the elastic body 430 is in a compressed state.

Next, referring to the release unit 400 disposed on the right in FIG. 6, when the actuator 310 operates and the rod 311 of the actuator 310 returns, the first block 330 The first inclined surface 331 of is descended on the second inclined surface 341 of the second block 340. At this time, the elastic body 430 exerts an elastic force to push the second beam 440, and accordingly, the first beam 420 connected to the second beam 440 moves to the opposite side of the entrance 20 While doing so, the gate 40 and the entrance 20 are separated.

A detailed operation method of the release unit 400 will be described later.

Hereinafter, with reference to FIGS. 4A to 4C and 6, a method of operating the valve of the gate 40 according to an exemplary embodiment of the present invention will be described.

First, referring to FIG. 4A, in a state before the actuator 310 is operated, the gate 40 is disposed in the gate space 30 spaced apart from the entrance 20.

Next, referring to FIG. 4B, the actuator 310 is operated and the rod 311 is elongated. Accordingly, the first block 330 pushes the second block 340 in contact with the first and second inclined surfaces 331 and 341.

When the second block 340 is pushed, the center frame 200 in contact with the second block 340 from the inside of the unit space part 320 and the gate 40 connected to the second block 340 ) Is also moved in the direction of the entrance (20). Here, the center frame 200 moves along the linear guide 350 by the moving block 353 and guides the moving direction of the gate 40.

The movement of the center frame 200 and the gate 40 moves until one end of the center frame 200 contacts the stopper 360. After contacting the stopper 360, the center frame 200 and the gate 40 are no longer moved, and are positioned exactly at a position corresponding to the entrance 20.

Thereafter, referring to FIG. 4C, the first block 330 is further advanced according to the operation of the actuator 310, and the movement support surface 332 of the first block 330 is the second space. Since the surface 322 is in contact with and supported, the second block 340 in contact with the first inclined surface 331 is pushed in the direction of the entrance 20.

Accordingly, the gate 40 comes into contact with the entrance 20. A sealing unit 50 is disposed in the gate 40, so that the sealing unit 50 contacts the frame step 31 formed along the periphery of the entrance 20 and seals the inner space of the vacuum facility. .

When the entrance 20 is sealed with the gate 40, the release unit 400 is in the same state as the release unit 400 disposed on the left in FIG. 6.

That is, the first flange 421 of the first beam 420 fastened to the gate 40 moves along with the gate 40 in the direction of the entrance 20. At this time, the second beam 440 connected to the first beam 420 also moves, and the elastic body 430 is in a compressed state.

Now, when the process in the vacuum state is finished and the entrance 20 is opened, the actuator 310 is operated to return the rod 311. As the rod 311 revolves, the first block 330 revolves, and the regression support surface 333 of the first block 330 becomes a third space surface 323 of the unit space part 320. ) Is pushed.

Accordingly, when the center frame 200 and the gate 40 move together, the center frame 200 is brought to its original position. Of course, also at this time, the center frame 200 moves along the linear guide 350 and guides the moving direction of the gate 40.

Here, the release unit 400 separates the gate 40 from the entrance 20.

Referring to the release unit 400 disposed on the right in FIG. 6, when the actuator 310 operates and the rod 311 of the actuator 310 returns, the elastic body 430 exerts an elastic force. When the second beam 440 is pushed, the first beam 420 connected to the second beam 440 moves to the opposite side of the entrance 20, and thus the gate 40 and the entrance 20 ) Will be separated.

As the gate 40 moves to the opposite side of the entrance 20, the second block 340 moves to the inside of the unit space part 320 again. At this time, since the first block 330 has moved from the inside of the unit space part 320 to the third space surface 323, the second block 340 slowly moves inside the unit space part 320. You can move to.

After the movement is completed, the gate 40 is positioned again in a state as shown in FIG. 4A.

Meanwhile, in FIGS. 8A and 8B, another form of the sealing unit 300 according to an embodiment of the present invention is posted.

8A and 8B, other forms of the sealing unit 300 include an actuator 310, a unit space 320, a first block 330, a second block 340, and a third block ( 370), a block hollow part 336, a block groove 337, a block spring 335, a link groove 339, a link plate 338, a linear guide 350, a moving block 353, a stopper 360, and It may be configured to include the road holes (210, 220).

The actuator 310 may be disposed on the gate frame 10. Referring to FIGS. 1 to 3, it can be seen that the actuator 310 is bolted to the edge of the gate frame 10 to be mounted.

The unit space part 320 may be formed inside the center frame 200. As described above, in the embodiment of the present invention, the center frame 200 is implemented as a long structure having a square cross section, and the unit space part 320 may be processed in a part of this structure.

The unit space part 320 may include a first space surface 321, a second space surface 322, and a third space surface 323. Rod holes 210 and 220 through which the rod 311 of the actuator 310 passes may be processed on the first and third space surfaces 321 and 323. The second space surface 322 may be a surface corresponding to the opposite side of the gate 40 in the unit space part 320. The third space surface 323 may be a surface corresponding to a side facing the actuator 310 from the unit space part 320.

In the embodiment of the present invention, the unit space part 320 may have a shape cut into a hexahedron, but is not limited thereto.

The first block 330 is connected to the front end 312 of the rod 311 of the actuator 310 and may be disposed in the unit space part 320. In an embodiment of the present invention, the shape of the first block 330 may be a shape including a first inclined surface 331 and a return support surface 333.

The first inclined surface 331 may be formed around the outer periphery of the first block 330, and may be a portion in contact with the second block 340 and the third block 370.

The return support surface 333 may be formed on a side facing the actuator 310. When the actuator 310 is operated to position the rod 311 of the actuator 310, the return support surface 333 pushes the third space surface 323 to the center frame 200 and the The gate 40 is brought to its original position inside the gate space 30.

The block hollow portion 336 may be a portion formed inside the first block 330 and through which the rod 311 is disposed.

The block spring 335 may be connected and disposed between a block groove 337 formed inside the first block 330 and a tip end 312 of the rod 311. The front end 312 of the rod 311 may be connected to a cylindrical base ring 335a. The base ring 335a may be inserted or removed in the longitudinal direction of the front end 312 of the rod 311.

The link plate 338 may be disposed extending in a radial direction of the front end 312 of the rod 311 and inserted into a link groove 339 formed inside the first block 330. After the link plate 338 is disposed in the link groove 339, the first block cover 330a may be bolted and fixed.

The second block 340 may be bolted to and connected to the gate 40 and disposed in the unit space part 320. A second inclined surface 341 having an inclination corresponding to the first inclined surface 331 of the first block 330 may be formed on the second block 340.

The third block 370 may be disposed by being bolted to the opposite side of the second block 340 in the unit space part 320. A third inclined surface 371 processed with an inclination corresponding to the first inclined surface 331 of the first block 330 may be formed on the third block 370.

Looking at the operation method of the sealing unit 300, first, referring to FIG. 8A, while the rod 311 of the actuator 310 is extended and the first block 330 is moving, the first, second, 3 Since the inclined surfaces 331, 341, and 371 are in contact with each other, the second and third blocks 340 and 370 move together, and accordingly, the center frame 200 and the gate 40 move toward the entrance 20. Will move.

Next, referring to FIG. 8B, after the movement is completed, the first block 330 is further advanced, and at this time, the first inclined surface 331 of the first block 330 is the third block 370. 3 Since the first block 330 is in contact with and supported by the space surface 323, the first block 330 is pushed in the direction of the second block 340.

At this time, the block spring 335 close to the third block 370 side is compressed, and the block spring 335 close to the second block 340 side is extended.

And the link plate 338 close to the third block 370 side is more inserted into the link groove 339, and the link plate 338 close to the second block 340 side is more than from the link groove 339. It will come out. However, the link plate 338 is not completely separated from the link groove 339. The link plate 338 is intended to maintain a state in which the front end 312 of the rod 311 and the first block 330 are coupled by maintaining at least a state inserted into the link groove 339.

Thereafter, the second block 340 in contact with the first block 330 is pushed toward the entrance 20, and the gate 40 comes into contact with the entrance 20.

When the process in the vacuum state is finished and the gate 40 is opened, when the rod 311 is returned, the block spring 335 generates an elastic force so that the first block 330 It should come to the center of the tip 312.

In addition, the link plate 338 is also positioned in the link groove 339 in a state of being inserted at uniform intervals along the circumferential direction.

At the same time, since the above-described release unit 400 opens the gate 40, the second block 340 also moves in the inner direction of the unit space part 320 and is again positioned in a state as shown in FIG. 8A. do.

Meanwhile, in FIGS. 9A and 9B, another form of the structure of the hollow portion 453 of the fitting block 450 constituting the release unit 400 according to an embodiment of the present invention is disclosed.

First, referring to FIG. 9A, a plurality of first depressions 455 and first protrusions 456 may be alternately disposed in the hollow portion 453 of the fitting block 450 along the circumferential direction. As a result, a wave pattern in which a curved shape is connected along the circumferential direction of the hollow part 453 may be formed. The first depression 455 and the first protrusion 456 may be processed to reduce a contact area with the first beam 420.

In fact, a portion of the hollow portion 453 in contact along the radial direction of the inner surface becomes the first protrusion portion 456.

When the first beam 420 moves along the lengthwise direction of the hollow portion 453, if the contact area is large, wear may occur in a large area. In an embodiment of the present invention, the first beam 420 and the hollow portion 453 of the fitting block 450 have a structure in which radial stress does not occur therebetween, and in the axial direction of the first beam 420 It is a structure in which the bay is being moved.

Therefore, when the contact area between the outer surface of the first beam 420 and the inner surface of the hollow portion 453 is reduced, frictional resistance is reduced, and the degree of wear of the outer surface of the first beam 420 and the inner surface of the hollow portion 453 Can be reduced.

In addition, if a lubricant is applied to the first depression 455, the wear rate of the outer surface of the first beam 420 and the inner surface of the hollow part 453 is further reduced by a lubrication action as well as a reduction in the contact area. do.

Here, the radius of curvature R1 of the first concave portion 455 may be formed relatively smaller than the radius of curvature R2 of the first protrusion 456. As the radius of curvature increases, the degree of curvature becomes smoother.

This is to smoothly the degree of curvature of the first protrusion 456 so that a portion contacting the outer surface of the first beam 420 smoothly contacts the first beam 420.

And, if a lubricant is applied, the degree of curvature of the first depression 455 is narrowed so that more lubricant remains. The curved shape of the second depression 457 may smooth the flow of the lubricant in the circumferential direction.

Next, referring to FIG. 9B, the hollow part 453 of the fitting block 450 may include a second recessed part 457 and a second protruding part 458. The second recessed portions 457 and the second protruding portions 458 may be alternately formed along the length direction of the hollow portion 453, and generally have a curved shape along the length direction of the hollow portion 453 It can form a continuous wave pattern.

Each of the embodiments and structures described in FIGS. 9A and 9B may be integrated into one embodiment and applied and designed within a range that does not conflict with each other. The 1,2 depressions 455 and 457 and the first and second protrusions 456 and 458 may be applied together.

The second depression 457 and the second protrusion 458 may be processed to reduce a contact area with the first beam 420. In fact, a portion of the hollow portion 453 in contact along the longitudinal direction of the inner surface becomes the second protrusion 458.

When the first beam 420 moves along the lengthwise direction of the hollow portion 453, if the contact area is large, wear may occur in a large area. Therefore, when the contact area between the outer surface of the first beam 420 and the inner surface of the hollow portion 453 is reduced, frictional resistance is reduced, and the degree of wear of the outer surface of the first beam 420 and the inner surface of the hollow portion 453 Can be reduced.

In addition, if a lubricant is applied to the second recessed portion 457, the wear rate of the outer surface of the first beam 420 and the inner surface of the hollow portion 453 is further reduced due to a lubricating action as well as a reduction in the contact area. do.

The above is only showing a specific embodiment of the gate valve of a vacuum facility.

Therefore, it is to be clarified that those of ordinary skill in the art can easily grasp that the present invention can be substituted and modified in various forms within the scope of the scope of the invention described in the following claims. do.

10: gate frame 20: entrance
30: gate space portion 31: frame stepped portion
40: gate 41: gate step
50: sealing unit 51: first sealing
53: the second sealing
100: gate valve
200: center frame 210, 220: road hole
300: sealing unit 310: actuator
311: rod 312: tip
320: unit space part 321: first space surface
322: second spatial surface 323: third spatial surface
330: first block 330a: first block cover
331: first slope 332: moving support surface
333: return support ground 335: block spring
336: block hollow part 337: block groove
338: link plate 339: link groove
340: second block 341: second slope
350: linear guide 353: moving block
360: stopper 361: stopper bracket
370: third block 371: third slope
400: release unit 410: center frame hole
411: first beam groove 412: hollow hole
413: second beam groove 420: first beam
421: first flange 430: elastomer
440: second beam 441: second flange
450: fitting block 451: flange portion
452: insertion part 453: hollow part
455: first depression 456: first protrusion
457: second depression 458: second protrusion

Claims (3)

In the gate valve of a vacuum facility connected between the gate frame and the gate in which the entrance and the gate space portion in which the gate is disposed, and moving the gate and opening and closing the entrance with the gate,
A center frame disposed on the gate;
A sealing unit connected and disposed between the gate frame and the center frame, moving the gate on the gate space, and sealing the gate at the entrance; And
Including; a release unit disposed on the center frame and separating the entrance and the gate,
The sealing unit,
An actuator disposed on the gate frame;
A rod hole formed in the center frame and through which the rod of the actuator enters and exits;
A unit space part formed inside the center frame;
Connected to the rod tip of the actuator and disposed in the unit space, a first inclined surface is formed on the side facing the gate, and a moving support surface in contact with the inner surface of the unit space is formed on the opposite side of the first inclined surface. A first block having a return support surface formed on the side facing the actuator;
A second block connected to the gate, disposed in the unit space, and having a second inclined surface corresponding to the first inclined surface of the first block;
A linear guide disposed in the gate space portion in the direction of the entrance;
A moving block disposed on the center frame and connected to the linear guide; And
A stopper disposed adjacent to the entrance in the gate space, contacting the outer surface of the center frame, and restricting movement of the gate;
Gate valve of a vacuum facility including.
delete The method of claim 1,
The release unit,
A hollow hole formed in the center frame, a first beam groove disposed on a side facing the gate in the hollow hole and formed to have a larger size than the hollow hole, and disposed on the opposite side of the first beam groove in the hollow hole, A center frame hole including a second beam groove having a size larger than that of the hollow hole;
A fitting block including an insertion portion inserted into the hollow hole, a flange portion formed around an outer circumference of one end portion of the insertion portion and disposed in the second beam groove, and a hollow portion formed at the center of the insertion portion;
A first beam having one side inserted into the hollow portion to enter and exit the first beam groove, and having a first flange connected to the gate formed on the other side;
A second beam having one side fastened to the first beam and a second flange disposed on the other side; And
An elastic body disposed between the second flange and the flange portion;
Gate valve of a vacuum facility, characterized in that it comprises a.

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