JP2005064474A5 - - Google Patents
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- JP2005064474A5 JP2005064474A5 JP2004200709A JP2004200709A JP2005064474A5 JP 2005064474 A5 JP2005064474 A5 JP 2005064474A5 JP 2004200709 A JP2004200709 A JP 2004200709A JP 2004200709 A JP2004200709 A JP 2004200709A JP 2005064474 A5 JP2005064474 A5 JP 2005064474A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetic force
- wafer
- positioning
- actuator
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004200709A JP4649136B2 (ja) | 2003-07-31 | 2004-07-07 | アクチュエータ、露光装置及びデバイス製造方法 |
| US10/898,444 US7187106B2 (en) | 2003-07-31 | 2004-07-23 | Positioning mechanism, exposure apparatus and device manufacturing method |
| EP04254539A EP1503246A3 (en) | 2003-07-31 | 2004-07-29 | Positioning mechanism, exposure apparatus, and device manufacturing method |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003204675 | 2003-07-31 | ||
| JP2004200709A JP4649136B2 (ja) | 2003-07-31 | 2004-07-07 | アクチュエータ、露光装置及びデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005064474A JP2005064474A (ja) | 2005-03-10 |
| JP2005064474A5 true JP2005064474A5 (enExample) | 2007-08-16 |
| JP4649136B2 JP4649136B2 (ja) | 2011-03-09 |
Family
ID=33543575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004200709A Expired - Fee Related JP4649136B2 (ja) | 2003-07-31 | 2004-07-07 | アクチュエータ、露光装置及びデバイス製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7187106B2 (enExample) |
| EP (1) | EP1503246A3 (enExample) |
| JP (1) | JP4649136B2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5041810B2 (ja) * | 2003-09-12 | 2012-10-03 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学素子操作装置 |
| EP1806610B1 (en) * | 2004-10-26 | 2011-12-21 | Nikon Corporation | Optical system, lens barrel, exposure system, and production method for a device |
| JP2006308363A (ja) * | 2005-04-27 | 2006-11-09 | Olympus Corp | 走査機構 |
| KR101266566B1 (ko) | 2005-05-02 | 2013-05-22 | 가부시키가이샤 니콘 | 광학 요소 구동장치, 투영 광학계, 노광 장치, 및디바이스의 제조 방법 |
| WO2006128713A2 (en) * | 2005-06-02 | 2006-12-07 | Carl Zeiss Smt Ag | Optical imaging arrangement |
| US7755742B2 (en) | 2005-10-11 | 2010-07-13 | Asml Netherlands B.V. | Lithographic apparatus with mounted sensor |
| JP2009534707A (ja) * | 2006-04-19 | 2009-09-24 | レイセオン カンパニー | 調節可能な光学的取付け装置及び取付け方法 |
| DE102006045315A1 (de) * | 2006-09-26 | 2008-04-10 | Siemens Ag | Kapselung eines Piezo-Aktors |
| US7450381B2 (en) * | 2006-12-04 | 2008-11-11 | International Business Machines Corporation | Thermal management apparatus and method for printed circuit boards |
| JP5043468B2 (ja) | 2007-02-23 | 2012-10-10 | キヤノン株式会社 | 保持装置 |
| DE102008041310A1 (de) | 2007-08-31 | 2009-03-05 | Carl Zeiss Smt Ag | Optisches Element |
| CA2711801C (en) | 2008-01-08 | 2016-08-16 | Abb Bomem Inc. | Stiffness compensation in opto-mechanical mechanisms |
| DE102008054581A1 (de) | 2008-02-29 | 2009-09-03 | Carl Zeiss Smt Ag | Projektionssystem für eine Projektionsbelichtungsanlage sowie Komponentenhalterung, Retikel-Halteeinrichtung und Wafer-Halteeinrichtung für ein derartiges Projektionssystem |
| US8467034B2 (en) * | 2008-07-02 | 2013-06-18 | Nikon Corporation | Light shielding unit, variable slit apparatus, and exposure apparatus |
| US7950633B2 (en) * | 2008-08-07 | 2011-05-31 | Drs Rsta, Inc. | Vibration isolator system |
| US8429894B2 (en) * | 2008-09-22 | 2013-04-30 | Pratt & Whitney Rocketdyne, Inc. | Nano-grained aluminum alloy bellows |
| DE102009054549A1 (de) | 2008-12-11 | 2010-06-17 | Carl Zeiss Smt Ag | Gravitationskompensation für optische Elemente in Projektionsbelichtungsanlagen |
| DE102009005954B4 (de) | 2009-01-20 | 2010-10-21 | Carl Zeiss Smt Ag | Dämpfungsvorrichtung |
| DE102011004299A1 (de) * | 2011-02-17 | 2012-08-23 | Carl Zeiss Smt Gmbh | Anordnung zur Halterung eines optischen Elementes, insbesondere in einer EUV-Projektionsbelichtungsanlage |
| JP6091434B2 (ja) * | 2011-02-17 | 2017-03-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学マウント及びｅｕｖ露光装置 |
| DE102011007917A1 (de) | 2011-04-21 | 2012-10-25 | Asml Netherlands B.V. | Anordnung zur Aktuierung eines Elementes in einer mikrolithographischen Projektionsbelichtungsanlage |
| DE102013215091A1 (de) * | 2013-08-01 | 2014-08-07 | Carl Zeiss Smt Gmbh | Optisches modul |
| DE102014202737A1 (de) * | 2014-02-14 | 2015-08-20 | Carl Zeiss Smt Gmbh | Lagerelement und system zum lagern eines optischen elements |
| US9739336B2 (en) * | 2014-08-13 | 2017-08-22 | Northrop Grumman Systems Corporation | Magnetically damped isolator and pointing mount |
| CN105134866B (zh) * | 2015-08-07 | 2017-03-08 | 华中科技大学 | 一种压电主动隔振机构及其降低振动系统固有频率的方法 |
| JP6617199B2 (ja) | 2015-11-10 | 2019-12-11 | エーエスエムエル ネザーランズ ビー．ブイ． | 振動絶縁システム及びリソグラフィ装置 |
| JP6758855B2 (ja) * | 2016-02-24 | 2020-09-23 | キヤノン株式会社 | 光学機器 |
| KR101742920B1 (ko) | 2016-10-24 | 2017-06-01 | 한국기초과학지원연구원 | 전자 현미경용 시료 홀더의 구동기 및 이를 포함하는 스테이지 |
| JP2019121688A (ja) * | 2018-01-05 | 2019-07-22 | 株式会社ニューフレアテクノロジー | 制振システム及び、その制振システムを備える光学装置 |
| DE102018220565A1 (de) * | 2018-11-29 | 2020-06-04 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem semiaktiven Abstandshalter und Verfahren zur Verwendung des semiaktiven Abstandshalters |
| US11156926B2 (en) * | 2019-08-12 | 2021-10-26 | Kla Corporation | Vacuum actuator containment for molecular contaminant and particle mitigation |
| DE102019213349A1 (de) * | 2019-09-03 | 2021-03-04 | Carl Zeiss Smt Gmbh | Spiegelanordnung mit Wasserstoff-Barriere und optische Anordnung |
| DE102024203526A1 (de) * | 2024-04-17 | 2025-10-23 | Carl Zeiss Smt Gmbh | Befestigungsvorrichtung für eine lithographieanlage und lithographieanlage |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55112440A (en) * | 1979-02-21 | 1980-08-30 | Toshiba Corp | Damper |
| JPH0628832B2 (ja) * | 1985-06-07 | 1994-04-20 | キヤノン株式会社 | 微動機構 |
| JPH0257717A (ja) * | 1988-08-23 | 1990-02-27 | Canon Inc | 直動ステージガイドバー減衰機構 |
| JP2753893B2 (ja) * | 1990-10-05 | 1998-05-20 | キヤノン株式会社 | 露光装置 |
| JP2715182B2 (ja) * | 1990-10-05 | 1998-02-18 | キヤノン株式会社 | 露光装置 |
| JPH06104308B2 (ja) * | 1991-10-24 | 1994-12-21 | 工業技術院長 | マイクロマニピュレータ |
| JP3635342B2 (ja) * | 1993-05-11 | 2005-04-06 | 毅 水野 | 磁気浮上装置 |
| JPH0786377A (ja) * | 1993-09-10 | 1995-03-31 | Canon Inc | 位置決め装置 |
| US5438174A (en) * | 1993-11-22 | 1995-08-01 | Eaton Corporation | Vacuum interrupter with a radial magnetic field |
| JP3367003B2 (ja) * | 1994-03-08 | 2003-01-14 | 太平洋セメント株式会社 | 密封式超精密微動装置 |
| DE19527514C2 (de) * | 1995-07-27 | 1999-04-22 | Deutsch Zentr Luft & Raumfahrt | Schnittstelle für die Schwingungsreduktion in strukturdynamischen Systemen |
| US6022005A (en) * | 1996-09-27 | 2000-02-08 | Trw Inc. | Semi-active vibration isolator and fine positioning mount |
| JPH1122845A (ja) * | 1997-07-01 | 1999-01-26 | Hitachi Metals Ltd | 圧電アクチュエータ及びマスフローコントローラ |
| JP3445105B2 (ja) * | 1997-07-25 | 2003-09-08 | キヤノン株式会社 | 光学要素移動装置 |
| US6129185A (en) * | 1997-12-30 | 2000-10-10 | Honeywell International Inc. | Magnetically destiffened viscous fluid damper |
| JPH11233039A (ja) * | 1998-02-12 | 1999-08-27 | Sony Corp | 陰極線管用多重動吸振器及びそれを用いた色選別電極 |
| JPH11274031A (ja) * | 1998-03-20 | 1999-10-08 | Canon Inc | 露光装置およびデバイス製造方法ならびに位置決め装置 |
| US6378672B1 (en) * | 1998-10-13 | 2002-04-30 | Canon Kabushiki Kaisha | Active vibration isolation device and its control method |
| JP2000120766A (ja) * | 1998-10-13 | 2000-04-25 | Canon Inc | ハイブリッド式能動振動絶縁装置 |
| JP2000136844A (ja) * | 1998-10-30 | 2000-05-16 | Canon Inc | 変位発生形アクチュエータ能動振動絶縁装置 |
| JP3726207B2 (ja) * | 1999-07-14 | 2005-12-14 | 株式会社日立製作所 | アクティブ除振装置 |
| DE19962177A1 (de) * | 1999-12-22 | 2001-07-12 | Siemens Ag | Hydraulische Vorrichtung zum Übertragen einer Aktorbewegung |
| JP3720680B2 (ja) * | 2000-06-16 | 2005-11-30 | キヤノン株式会社 | ステージ装置、露光装置およびデバイス製造方法 |
| GB2365945B (en) * | 2000-08-16 | 2004-02-11 | Rolls Royce Plc | A vibration damping system and a method of damping vibrations |
| JP2002075827A (ja) * | 2000-08-29 | 2002-03-15 | Nikon Corp | Ｘ線投影露光装置およびｘ線投影露光方法および半導体デバイス |
| DE10046379A1 (de) * | 2000-09-20 | 2002-03-28 | Zeiss Carl | System zur gezielten Deformation von optischen Elementen |
| US6888620B2 (en) * | 2001-11-29 | 2005-05-03 | Nikon Corporation | System and method for holding a device with minimal deformation |
| EP1369745B1 (en) * | 2002-06-07 | 2013-02-27 | ASML Netherlands B.V. | Lihographic apparatus and device manufaturing method |
| JP2005532516A (ja) * | 2002-07-10 | 2005-10-27 | ターボコー インク． | 永久磁石を用いた、回転子軸受システム用のスラスト荷重緩和装置 |
| DE10361481B4 (de) * | 2003-07-22 | 2006-08-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Modulare Schnittstelle zum Dämpfen mechanischer Schwingungen |
-
2004
- 2004-07-07 JP JP2004200709A patent/JP4649136B2/ja not_active Expired - Fee Related
- 2004-07-23 US US10/898,444 patent/US7187106B2/en not_active Expired - Fee Related
- 2004-07-29 EP EP04254539A patent/EP1503246A3/en not_active Withdrawn
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